JP5714804B2 - イメージセンサ - Google Patents

イメージセンサ Download PDF

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Publication number
JP5714804B2
JP5714804B2 JP2009030236A JP2009030236A JP5714804B2 JP 5714804 B2 JP5714804 B2 JP 5714804B2 JP 2009030236 A JP2009030236 A JP 2009030236A JP 2009030236 A JP2009030236 A JP 2009030236A JP 5714804 B2 JP5714804 B2 JP 5714804B2
Authority
JP
Japan
Prior art keywords
insulating film
interlayer insulating
sensor array
isotropic etching
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2009030236A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009194387A5 (enExample
JP2009194387A (ja
Inventor
弘 基 金
弘 基 金
徳 炯 李
徳 炯 李
鉉 弼 盧
鉉 弼 盧
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of JP2009194387A publication Critical patent/JP2009194387A/ja
Publication of JP2009194387A5 publication Critical patent/JP2009194387A5/ja
Application granted granted Critical
Publication of JP5714804B2 publication Critical patent/JP5714804B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/026—Wafer-level processing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/024—Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/811—Interconnections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP2009030236A 2008-02-15 2009-02-12 イメージセンサ Expired - Fee Related JP5714804B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2008-0014038 2008-02-15
KR1020080014038A KR101463609B1 (ko) 2008-02-15 2008-02-15 이미지 센서 및 그 제조 방법

Publications (3)

Publication Number Publication Date
JP2009194387A JP2009194387A (ja) 2009-08-27
JP2009194387A5 JP2009194387A5 (enExample) 2012-02-02
JP5714804B2 true JP5714804B2 (ja) 2015-05-07

Family

ID=40954316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009030236A Expired - Fee Related JP5714804B2 (ja) 2008-02-15 2009-02-12 イメージセンサ

Country Status (4)

Country Link
US (1) US8154097B2 (enExample)
JP (1) JP5714804B2 (enExample)
KR (1) KR101463609B1 (enExample)
CN (1) CN101510553B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5347999B2 (ja) * 2009-03-12 2013-11-20 ソニー株式会社 固体撮像素子及びその製造方法、撮像装置
KR20100108109A (ko) * 2009-03-27 2010-10-06 삼성전자주식회사 이미지 센서 및 그 제조 방법
KR101647779B1 (ko) * 2009-09-09 2016-08-11 삼성전자 주식회사 이미지 센서, 그 제조 방법, 및 상기 이미지 센서를 포함하는 장치
KR101621241B1 (ko) * 2009-10-07 2016-05-16 삼성전자 주식회사 이미지 센서 및 그 제조 방법
US8749007B1 (en) * 2011-01-26 2014-06-10 Maxim Integrated Products, Inc. Light sensor having transparent substrate and diffuser formed therein
JP2013084744A (ja) * 2011-10-07 2013-05-09 Sony Corp 固体撮像素子および電子機器
US8816462B2 (en) 2012-10-25 2014-08-26 Omnivision Technologies, Inc. Negatively charged layer to reduce image memory effect
US10840282B2 (en) 2015-10-21 2020-11-17 Ams Sensors Singapore Pte. Ltd. Demodulation pixel devices, arrays of pixel devices and optoelectronic devices incorporating the same
US11437418B2 (en) * 2016-02-29 2022-09-06 Sony Corporation Solid-state image pickup device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000150846A (ja) * 1998-11-12 2000-05-30 Olympus Optical Co Ltd 固体撮像装置及びその製造方法
KR100653691B1 (ko) * 2004-07-16 2006-12-04 삼성전자주식회사 적어도 메인 화소 어레이 영역의 전면을 노출시키는패시베이션막을 갖는 이미지 센서들 및 그 제조방법들
KR100717277B1 (ko) 2005-03-07 2007-05-15 삼성전자주식회사 이미지 센서 및 그 형성 방법
KR100687102B1 (ko) * 2005-03-30 2007-02-26 삼성전자주식회사 이미지 센서 및 그 제조 방법.
KR100672690B1 (ko) 2005-08-03 2007-01-22 동부일렉트로닉스 주식회사 씨모스 이미지 센서의 제조방법
KR100731128B1 (ko) * 2005-12-28 2007-06-22 동부일렉트로닉스 주식회사 씨모스 이미지 센서의 제조방법
KR100660329B1 (ko) 2005-12-28 2006-12-22 동부일렉트로닉스 주식회사 씨모스 이미지 센서 및 그 제조방법

Also Published As

Publication number Publication date
CN101510553B (zh) 2013-02-13
CN101510553A (zh) 2009-08-19
US8154097B2 (en) 2012-04-10
US20090206432A1 (en) 2009-08-20
KR101463609B1 (ko) 2014-11-21
JP2009194387A (ja) 2009-08-27
KR20090088635A (ko) 2009-08-20

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