JP5713081B2 - 塗布、現像装置 - Google Patents
塗布、現像装置 Download PDFInfo
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- JP5713081B2 JP5713081B2 JP2013219228A JP2013219228A JP5713081B2 JP 5713081 B2 JP5713081 B2 JP 5713081B2 JP 2013219228 A JP2013219228 A JP 2013219228A JP 2013219228 A JP2013219228 A JP 2013219228A JP 5713081 B2 JP5713081 B2 JP 5713081B2
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013219228A JP5713081B2 (ja) | 2010-07-09 | 2013-10-22 | 塗布、現像装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010156563 | 2010-07-09 | ||
| JP2010156563 | 2010-07-09 | ||
| JP2013219228A JP5713081B2 (ja) | 2010-07-09 | 2013-10-22 | 塗布、現像装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011053370A Division JP5397399B2 (ja) | 2010-07-09 | 2011-03-10 | 塗布、現像装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014099659A Division JP5861738B2 (ja) | 2010-07-09 | 2014-05-13 | 塗布、現像装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014033226A JP2014033226A (ja) | 2014-02-20 |
| JP2014033226A5 JP2014033226A5 (enrdf_load_stackoverflow) | 2014-05-08 |
| JP5713081B2 true JP5713081B2 (ja) | 2015-05-07 |
Family
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Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013219228A Active JP5713081B2 (ja) | 2010-07-09 | 2013-10-22 | 塗布、現像装置 |
| JP2014099659A Active JP5861738B2 (ja) | 2010-07-09 | 2014-05-13 | 塗布、現像装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014099659A Active JP5861738B2 (ja) | 2010-07-09 | 2014-05-13 | 塗布、現像装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (2) | JP5713081B2 (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6209546B2 (ja) * | 2015-02-06 | 2017-10-04 | 東京エレクトロン株式会社 | 基板処理システム、欠陥検査方法、プログラム及びコンピュータ記憶媒体 |
| JP6311639B2 (ja) * | 2015-04-13 | 2018-04-18 | 東京エレクトロン株式会社 | 基板処理装置、基板処理装置の運転方法及び記憶媒体 |
| JP6863114B2 (ja) * | 2017-06-16 | 2021-04-21 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及び記憶媒体 |
| JP6458292B2 (ja) * | 2018-03-19 | 2019-01-30 | 東京エレクトロン株式会社 | 基板処理装置、基板処理装置の運転方法及び記憶媒体 |
| JP6994489B2 (ja) * | 2019-10-02 | 2022-01-14 | 東京エレクトロン株式会社 | 塗布、現像装置及び塗布、現像方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3943828B2 (ja) * | 2000-12-08 | 2007-07-11 | 東京エレクトロン株式会社 | 塗布、現像装置及びパターン形成方法 |
| JP2004342654A (ja) * | 2003-05-13 | 2004-12-02 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
| JP4376072B2 (ja) * | 2004-01-16 | 2009-12-02 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
| JP5008268B2 (ja) * | 2004-12-06 | 2012-08-22 | 株式会社Ｓｏｋｕｄｏ | 基板処理装置および基板処理方法 |
| JP4955976B2 (ja) * | 2005-01-21 | 2012-06-20 | 東京エレクトロン株式会社 | 塗布、現像装置及びその方法 |
| JP4566035B2 (ja) * | 2005-03-11 | 2010-10-20 | 東京エレクトロン株式会社 | 塗布、現像装置及びその方法 |
| JP4414921B2 (ja) * | 2005-03-23 | 2010-02-17 | 東京エレクトロン株式会社 | 塗布、現像装置及び塗布、現像方法 |
| JP4444154B2 (ja) * | 2005-05-02 | 2010-03-31 | 大日本スクリーン製造株式会社 | 基板処理装置 |
| JP4716362B2 (ja) * | 2005-06-07 | 2011-07-06 | 東京エレクトロン株式会社 | 基板処理システム及び基板処理方法 |
| JP4450784B2 (ja) * | 2005-10-19 | 2010-04-14 | 東京エレクトロン株式会社 | 塗布、現像装置及びその方法 |
| JP2008288447A (ja) * | 2007-05-18 | 2008-11-27 | Sokudo:Kk | 基板処理装置 |
| JP5183993B2 (ja) * | 2007-07-26 | 2013-04-17 | 株式会社Ｓｏｋｕｄｏ | 基板処理装置 |
-
2013
- 2013-10-22 JP JP2013219228A patent/JP5713081B2/ja active Active
-
2014
- 2014-05-13 JP JP2014099659A patent/JP5861738B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP5861738B2 (ja) | 2016-02-16 |
| JP2014033226A (ja) | 2014-02-20 |
| JP2014160869A (ja) | 2014-09-04 |
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