JP5705599B2 - エキシマランプ - Google Patents
エキシマランプ Download PDFInfo
- Publication number
- JP5705599B2 JP5705599B2 JP2011056427A JP2011056427A JP5705599B2 JP 5705599 B2 JP5705599 B2 JP 5705599B2 JP 2011056427 A JP2011056427 A JP 2011056427A JP 2011056427 A JP2011056427 A JP 2011056427A JP 5705599 B2 JP5705599 B2 JP 5705599B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- excimer lamp
- discharge tube
- lamp according
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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- 239000011941 photocatalyst Substances 0.000 claims description 64
- 230000002093 peripheral effect Effects 0.000 claims description 56
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 26
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 19
- 229910052719 titanium Inorganic materials 0.000 claims description 19
- 239000010936 titanium Substances 0.000 claims description 19
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 19
- 238000005530 etching Methods 0.000 claims description 12
- 230000004888 barrier function Effects 0.000 claims description 7
- 238000005452 bending Methods 0.000 claims description 5
- 230000000737 periodic effect Effects 0.000 claims description 5
- 239000011148 porous material Substances 0.000 claims description 5
- 238000004804 winding Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims description 2
- 230000005684 electric field Effects 0.000 description 13
- 238000000746 purification Methods 0.000 description 8
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 6
- 239000012530 fluid Substances 0.000 description 6
- 230000001699 photocatalysis Effects 0.000 description 6
- 229910052724 xenon Inorganic materials 0.000 description 6
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 6
- 238000007743 anodising Methods 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000004332 deodorization Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- HGCGQDMQKGRJNO-UHFFFAOYSA-N xenon monochloride Chemical compound [Xe]Cl HGCGQDMQKGRJNO-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J35/00—Catalysts, in general, characterised by their form or physical properties
- B01J35/30—Catalysts, in general, characterised by their form or physical properties characterised by their physical properties
- B01J35/39—Photocatalytic properties
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
- A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
- A61L2/08—Radiation
- A61L2/088—Radiation using a photocatalyst or photosensitiser
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
- A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
- A61L2/08—Radiation
- A61L2/10—Ultraviolet radiation
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L9/00—Disinfection, sterilisation or deodorisation of air
- A61L9/16—Disinfection, sterilisation or deodorisation of air using physical phenomena
- A61L9/18—Radiation
- A61L9/20—Ultraviolet radiation
- A61L9/205—Ultraviolet radiation using a photocatalyst or photosensitiser
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
- B01J21/06—Silicon, titanium, zirconium or hafnium; Oxides or hydroxides thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
- B01J21/06—Silicon, titanium, zirconium or hafnium; Oxides or hydroxides thereof
- B01J21/063—Titanium; Oxides or hydroxides thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J35/00—Catalysts, in general, characterised by their form or physical properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
- B01J37/02—Impregnation, coating or precipitation
- B01J37/0215—Coating
- B01J37/0225—Coating of metal substrates
- B01J37/0226—Oxidation of the substrate, e.g. anodisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
- H01J61/16—Selection of substances for gas fillings; Specified operating pressure or temperature having helium, argon, neon, krypton, or xenon as the principle constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- General Health & Medical Sciences (AREA)
- Plasma & Fusion (AREA)
- Animal Behavior & Ethology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Epidemiology (AREA)
- Electromagnetism (AREA)
- Catalysts (AREA)
- Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011056427A JP5705599B2 (ja) | 2011-03-15 | 2011-03-15 | エキシマランプ |
PCT/JP2012/055337 WO2012124505A1 (ja) | 2011-03-15 | 2012-03-02 | エキシマランプ |
CN201280003877.5A CN103229273B (zh) | 2011-03-15 | 2012-03-02 | 受激准分子灯 |
KR1020137014079A KR20130139301A (ko) | 2011-03-15 | 2012-03-02 | 엑시머 램프 |
TW101108596A TW201248678A (en) | 2011-03-15 | 2012-03-14 | Excimer lamp |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011056427A JP5705599B2 (ja) | 2011-03-15 | 2011-03-15 | エキシマランプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012195071A JP2012195071A (ja) | 2012-10-11 |
JP5705599B2 true JP5705599B2 (ja) | 2015-04-22 |
Family
ID=46830580
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011056427A Active JP5705599B2 (ja) | 2011-03-15 | 2011-03-15 | エキシマランプ |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5705599B2 (zh) |
KR (1) | KR20130139301A (zh) |
CN (1) | CN103229273B (zh) |
TW (1) | TW201248678A (zh) |
WO (1) | WO2012124505A1 (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104623714A (zh) * | 2015-02-13 | 2015-05-20 | 常州大恒环保科技有限公司 | 一种空气净化装置 |
CN106540527A (zh) * | 2015-09-17 | 2017-03-29 | 天津市广泽特种光源有限公司 | 废气净化准分子光电一体化设备 |
CN108421412A (zh) * | 2017-02-13 | 2018-08-21 | 优维科斯株式会社 | 光催化剂担载网状片及其制造方法、空气净化器 |
KR101999486B1 (ko) | 2018-07-26 | 2019-07-11 | 유니램 주식회사 | 엑시머 램프의 베이스 구조 |
JP2020074870A (ja) * | 2018-11-06 | 2020-05-21 | ウシオ電機株式会社 | 気体処理装置 |
JP7462524B2 (ja) * | 2020-09-17 | 2024-04-05 | 株式会社オーク製作所 | エキシマランプ、紫外線照射装置およびオゾン発生装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11265689A (ja) * | 1998-03-18 | 1999-09-28 | Toshiba Lighting & Technology Corp | 誘電体バリヤ放電ランプ、誘電体バリヤ放電ランプ装置および紫外線照射装置 |
JP2001084966A (ja) * | 1999-09-14 | 2001-03-30 | Toshiba Lighting & Technology Corp | 誘電体バリヤ放電ランプ,誘電体バリヤ放電ランプ点灯装置および紫外線照射装置 |
JP2002100324A (ja) * | 2000-09-25 | 2002-04-05 | Toshiba Lighting & Technology Corp | 誘電体バリヤ放電ランプおよび誘電体バリヤ放電ランプ装置 |
JP2002150997A (ja) * | 2000-11-10 | 2002-05-24 | Nippon Sheet Glass Co Ltd | 平板型紫外線ランプ |
CN1356716A (zh) * | 2000-11-10 | 2002-07-03 | 日本板硝子株式会社 | 平板型紫外线灯和冷冻冷藏陈列柜用平板型照明体 |
JP2002153364A (ja) * | 2000-11-20 | 2002-05-28 | Nippon Sheet Glass Co Ltd | 冷凍・冷蔵ショーケース用平板型照明体 |
JP4811135B2 (ja) * | 2006-06-01 | 2011-11-09 | ウシオ電機株式会社 | 紫外光放射装置 |
JP2010163295A (ja) * | 2009-01-13 | 2010-07-29 | Sumitomo Electric Ind Ltd | 紫外光用耐フッ素性ガラス、ランプ用ガラス管、およびエキシマランプ |
-
2011
- 2011-03-15 JP JP2011056427A patent/JP5705599B2/ja active Active
-
2012
- 2012-03-02 KR KR1020137014079A patent/KR20130139301A/ko not_active Application Discontinuation
- 2012-03-02 WO PCT/JP2012/055337 patent/WO2012124505A1/ja active Application Filing
- 2012-03-02 CN CN201280003877.5A patent/CN103229273B/zh not_active Expired - Fee Related
- 2012-03-14 TW TW101108596A patent/TW201248678A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
CN103229273A (zh) | 2013-07-31 |
TW201248678A (en) | 2012-12-01 |
WO2012124505A1 (ja) | 2012-09-20 |
KR20130139301A (ko) | 2013-12-20 |
CN103229273B (zh) | 2016-01-20 |
JP2012195071A (ja) | 2012-10-11 |
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