201248678 六、發明說明： 【發明所屬之技術領域】 本發明係有關於一種利用電介質阻障放電來照射紫 外線之準分子燈’特別是適合使用於利用光觸媒作用來進 行淨化處理之空氣清淨機和淨水器。 【先前技術】 作為光觸媒而具有優良的功能之銳鈦型 化鈦，係被期待應用在空氣清淨機和淨水器等，藉由照射 紫外線來顯現光觸媒活性，特別是在波長32〇nm以下的 UVB(280至315nm)區域異有光觸媒活性之峰值。 因此，藉由紫外線燈等照射紫外線來進行，但是因為 一般的紫外線燈係使用水銀，故環境負荷大。 又，近年來，雖然亦已開發紫外線LED，但是不僅昂 貴而且有無法得到充分的光強度之問題。 因此’不使用水銀而能夠進行紫外線發光之準分子燈 係受到注目，且亦提案一種脫臭、殺菌用的準分子燈，二 係在準分子燈的放電管的外侧所設置之透明電極的表面積 層形成有光觸媒層而成者（參照專利文獻丨）。 藉此，被照射的紫外線係穿透透明電極而照射在光觸 媒層’因此光觸媒被活性化而能夠將與其接觸的空氣脫 臭、殺菌。 但是，透明電極係一般相對於紫外光其透射率低，特 別是屬於代表除的透明電極之錫添加氧化姻膜（⑽）係雖 然相對於可見光為透明，但因為相對於使光觸媒活性化之 323682 , 201248678 UVB(280至315nm)區域的紫外光為不透明，所以即便在透 明電極的表面形成光觸媒，亦絕對無法得到如專利文獻1 所記載之效果。 因此，紫外線照射用的準分子燈係如專利文獻2所 示，必須在放電管的兩側對向位置設置一對電極，且從電 極的間隙照射紫外線（專利文獻2 :第2圖），或使用將金 屬絲（wire)等製成網狀之網狀物電極，且從金屬絲的間隙 照射紫外線（專利文獻2:第3圖），因為不管如何電極的 不透明部分皆會遮蔽紫外線，而有光線的利用效率降低之 問題。 (先前技術文獻） 專利文獻 [專利文獻1]日本特開2002-150997號公報 [專利文獻2]日本特開2010-163295號公報 【發明内容】 (發明所欲解決之課題） 因此，本發明之技術性課題係提供一種不僅有效地利 用所照射的紫外線而能夠使光觸媒的處理效率提升，並且 即便使用氙氣作為放電氣體時點亮性亦良好之準分子燈。 (解決課題之手段） 為了解決該課題，本發明係以夾住在氣密地封入有放 電氣體之放電管所形成的放電空間的方式在其外側配置一 對電極，且藉由對該電極之間施加高頻電壓來使前述放電 空間内產生電介質阻障放電而照射紫外線之準分子燈，其 323682 5 201248678 特徵在於：前述放電空間的至少一部分係形成在圓筒空 間，同時前述一對電極係由配置在圓筒空間的中心側之中 心電極及配置在外周侧之周面電極所構.成，且該周面電極 係捲繞有多孔質光觸媒薄片而設置在前述放電管的外表 面，其中該多孔質光觸媒薄片係使形成有多數個微細透孔 之導電性網狀物擔持光觸媒而成者。 (發明之效果） 依照本發明，對中心電極與周面電極之間施加高頻電 壓而在放電空間產生電介質阻障放電，且能夠對在放電管 的外周面所設置之周面電極照射紫外線。 由於周面電極係由使導電性網狀物擔持當作光觸媒 之銳敛型氧化鈦而成之多孔質光觸媒薄片所構成’因此在 其内側所擔持的光觸媒係藉由從放電管所照射之紫外線所 激發’同時在網狀物的微細透孔的周邊所擔持之光觸媒係 藉由該穿透該透孔之紫外線所激發，而且因為穿透微細流 路之紫外線係在其外侧開口部產生繞射現象，所以在多孔 質光觸媒薄片的外側所擔持之光觸媒亦被激發。 因此’從放電管所照射的紫外線係由於能夠將被周面 電極所遮蔽者、穿透微細流路者、其大部分由周面電極所 擔持的光觸媒激發’所以光的利用效率非常高而且能夠將 由周面電極所擔持的大部分之光觸媒激發。 因此’藉由將本發明之準分子燈配置在水和空氣等的 被處理流體的流路中，在被處理流體接觸於周面電極的表 面時’接觸被紫外線激發之光觸媒而被淨化處理。 323682 6 201248678 又，周面電極為沿著一方向形成連續的波狀起伏時， 因為其起伏係以線接觸於放電管的外表面的方式設置，所 以在接觸放電管的部分與未接觸的部分之間形成有間隙。 此時，因為藉由被處理流體流通於該間隙亦被淨化處 理，所以淨化處理效率會提升。 而且，使周面電極線接觸於放電管的外周面時，因為 在周面電極與中心電極之間所形成的電場係集中在線接觸 於放電管之部分，而容易發生絕緣崩潰，因此，即便使用 不容易點党的亂氣作為放電氣體時’亦無須施加大電力而 能夠點免。 【實施方式】 為了達成不僅有效地利用所照射的紫外線而能夠使 光觸媒的處理效率提升，並且即便使用氙氣作為放電氣體 時點亮性亦良好之目的，本發明之準分子燈係以夾住在氣 密地封入有放電氣體之放電管所形成的放電空間的方式在 其外側配置一對電極，且藉由對該電極之間施加高頻電壓 而使前述放電空間内產生電介質阻障放電而照射紫外線 者，前述放電空間的至少一部分係形成在圓筒空間，同時 前述一對電極係由配置在圆筒空間的中心側之中心電極及 配置在外周側之周面電極所構成，且該周面電極係捲繞多 孔質光觸媒薄片而設置在前述放電管的外表面，其中該多 孔質光觸媒薄片係使形成有多數個微細透孔之導電性網狀 物擔持光觸媒而成者。 [實施例1] 323682 7 201248678 如第i至3圖所示之本例的準分子燈1，係以央住在 氣密地封入有放電氣體之由石英玻螭所構成之放電管2所 形成的放電空間3的方式在其外侧配置—對電極4A及 4B ’且藉由對該電極4A及4B之間施加來自電源5之高頻 電壓而使前述放電空間3内產生電介質阻障放電。 放電空間3係至少一部分形成於圓筒空間，同時前述 一對電極4A及4B係由配置在圓筒空間的中心側之中心電 極4A及配置在外周側之周面電極4B所構成。 中心電極4A係形成為帶板狀，該帶板狀係以其兩端 緣6a、6b為刀緣的方式头銳地形成’而且由屬於電介質之 石英玻璃7所覆蓋且配置在放電管2的中心而成者。 又，周面電極4B係由沿著一方向形成連續的波狀起 伏之多孔質光觸媒薄片11所形成，且以其起伏線接觸於放 電管2的外表面之方式捲繞而設置，在放電管2的周面， 係在與周面電極4B之間形成有沿著其管轴方向而延伸之 隧道狀的間隙8…。 多孔質光觸媒薄片11係如第4圖及第5圖所示，在 具有非周期性海綿結構之鈦網狀物（導電性網狀物）14的 表面形成陽極氧化賴之氧化欽基底15，並且在該氧化欽 基底15燒結當作觸媒之銳鈦型（anatase type)氧化鈦16 而成者/其中’非周期性海綿結構係從欽薄片12的單面或 雙面施行藉由非周期性圖案之蝕刻處理而形成貫穿表背之 多數個微細流路13。 $ 5圖係顯不此種多孔質光觸媒薄片11的製造方法 323682 8 201248678 之說明圖。 首先’在鈦薄片12進行形成微細流路13之蝕刻處理。 蝕刻處理係由以下步驟所構成：塗布步驟（第1圖 (a))，係在將純鈦輥軋而形成的鈦薄片12絲背兩面 光阻劑17·’曝光步驟（第5圖（b))，係從光阻劑17之上重 疊形成有非周期性圖案之遮罩薄膜18、18而進行曝光；洗 淨步驟（第5圖（c))，係在進行曝光後，洗淨光阻劑之未感 光的部分，且將已感光的部分留存在鈦薄片12的表面；及 浸潰步驟（第5圖（d))，係將藉由光阻劑17將非周期網狀 物圖案遮罩後之鈦薄片12浸潰於餘刻液，且藉由從表背兩 面使其次蝕至鈦薄片12的厚度的一半來形成貫穿表背之 多數個微細流路13…。 如此，若從鈦薄片12的雙面施行蝕刻處理時，因為 在其遮罩薄膜18 &圖案不是周期性，所以能夠從鈦薄片 12的表側與背側形成不同的圖案之孔。 結果，如第4圖所示，在鈦薄片12的厚度方向係形 成複雜的迷宮（laybrinth)狀之微細流路，且相較於單純的 網狀物結構，比表面積係顯著地變大。 而且，鈦網狀物14的空隙率（蝕刻處理後的重量/蝕 刻處理前的重量）為20%左右。 又，將其表面放大觀察時，該時間點係如第5圖（^ 所示’成為大致平坦的狀態。 接著，在其表面進行形成氧化鈦基底15之陽極氧化 處理。 323682 201248678 陽極氧化處理係在碟酸浴（例如填酸3%水溶液）中，對 當作陽極之鈦薄片12與陰極之間施加預定電壓而進行，結 果，如第5圖（f)所示，鈦薄片12的表面係被氧化而形成 陽極氧化皮膜。 此時’氧化皮膜係不僅形成在鈦薄片12的表背兩面， 而且形成在微細流路13的内壁面等被暴露在磷酸浴之全 表面。 隨後，將該鈦薄片12於大氣中施行55CTC、3小時加 熱之加熱處理，來形成將陽極氧化皮膜加熱後之氧化鈦基 底 15。 & 將其表面放大觀察時，在蝕刻處理後的時間點為平坦 的表面，出現多數因陽極氧化處理及加熱處理所產生之裂 紋 19。 < 而且將欽進行陽極氧化處理後時，已知按照其氧化 皮膜的厚度而因光線的干擾會發出不同的顏色，在厚度為 7〇mn左右呈現紫色，在15〇nm左右呈現綠色，在2〇〇⑽左 右呈現粉紅色。 在本例係形成厚度為70至150nm的皮膜。 又，本例係為了將光觸媒薄片11形成為波板狀，在 施行陽極氧化處理之後，且在施行加熱處理之前，係藉由 加壓加工施行形成為波板狀之成形處理而沿著鈦網狀物 14的長度方向折曲形成連續的起伏。 °亥成形加工係在触刻處理後’且在氧化鈦基底燒结銳 鈦型氧化鈦粒子之燒結處理之前進行即可，例如亦可在蝕 323682 10 201248678 刻處理後且陽極氧化處理之前進行加壓加工。 而且在最後，進行使其擔持銳鈦型氧化鈦16之燒結 處理。 燒結處理係藉由將在表面形成有氧化欽基底15之欽 薄片12，浸潰在分散有銳鈦型氧化鈦16之聚體中之後， 將其於55(TC下燒結來進行，結果，如第5圖⑷所示，係 在鈦薄片12的表背兩面及微細流路13之内壁面形成光觸 媒層20。 又’氧化鈦基底15及光觸媒層2〇係氧化欽彼此結合 而成’其結合性變為非常強，結果，光觸媒層2〇係變為不 容易剝離。 而且’藉由㈣處理來形成微細流路13，表面係成為 複雜的凹凸形狀，由陽極氧化皮膜所形成之氧化鈦基底Η 係產生微料級的微細裂紋19,因此在其上不僅穩固地結 合有光觸媒層20,而且表面積會增加且處理效率顯著地提 升。 又，在照射UV光線時，在光觸媒層20的表面及氧化 鈦基底15之界面產生漫反射/光散射，而能夠效率良好地 利用UV光。 而且’藉由使用鈦羯，因為能夠輕量地形成光觸媒薄 片本身’所以設計的自由度變大且耐熱性 '耐藥品亦優良， 即便在嚴酷的使用條件下，亦能夠耐用。 然後，藉由將如此形成之多孔質光觸媒薄片丨1沿著 其起伏的形成方向捲繞而外裝在放電管2,即能夠形成其 323682 11 201248678 起伏石著放電管2的管軸方向而線接觸於其外表面而成之 周面電極4B。 周面電極4B係如第3圖所表示，相對於放電管2以 預定的間距（在本例係中心角22.5。）形成起伏且以〇。至 22. 5°間距線接觸。 此時，在直徑方向的相對位置、亦即〇。及18〇。的 位置線接觸於放電管2，同時中心電極^的兩端緣6心此 係位於其直徑方向上。 藉此，因為當作周面電極4B之多孔質光觸媒薄片n 線接觸於放電管的部分Ua、lib，係與中心電極4A的兩 端緣6a、6b在直徑方向相對向設置，而且，電極4A、4B 的最接近部分係形成為線狀，所以在點亮時容易發生 山、电个 朋潰。 以上係本發明之準分子燈丨的一個例子之構成，接著 說明其作用。 第3圖⑹係顯示對準分子燈1將來自電源5之例如 20kHz的高頻電壓施加在電極4A、4B之間時所形成之電場 E及e之說明®，在電極4A、4B之間的最接近部分、亦即 在中〜電極4A的兩端緣6a、此、與線接觸於和該兩端緣 6a、6b相對向之周面電極4B的放電管2的部分lla、Ub 之間’係形成電場E。 而且，因為雙方的電極4A、4B的相對向部分皆係形 成為線狀，所以電場E係相對於雙方的電極4A、4B局部地 集中而形成。 323682 12 201248678 為了照射光觸媒激發用的紫外線（發光波長： 3〇8nm)，以往係在放電管2封入氙氣（氯化氙：XeC1)作為 放電氣體’但是使用氣氣之準分子燈，因為不容易點亮而 在點亮起動時必須投入大電力，所以必須在電源裝置組裝 起動用的電路，而有電路變為複雜、或起動時產生不需要 的發熱之問題。 如本例，藉由將周面電極4B形成為波狀，則具有即 便在點亮時不施加大電力亦容易發生絕緣崩潰而使得點亮 性提升之優點。 又’因為在中心電極4A的兩端緣6a、6b、與周面電 極4B之線接觸於放電管2的其他部分Uc之間亦形成電場 e，所以藉由電場E而絕緣崩潰且開始點亮時，在放電管2 内整體產生電介質阻障放電，而從放電管2往其外部照射 紫外線。 ' s亥紫外線係穿透放電管2的管壁，首先，照射於周面 電極4B的内周面且穿透形成周面電極4β之多孔質光觸媒 薄片11的微細流路13。 因此，在多孔質光觸媒薄片11的内周面所形成之光 觸媒層20、在微細流路13的内侧所形成之光觸媒層, 而且在多孔質光觸媒薄片11的外側供紫外線穿透之微細 流路13的外側開口部附近所形成之光觸媒層2〇，係被紫 外線直接照射而被激發。 又，穿透微細流路13的紫外線，因為在其外側開口 部會產生繞射現象，所以在多孔質光觸媒薄片u的外側所 323682 13 201248678 形成之光觸媒層20亦相當地受到激發。 如此，藉由將準分子燈1點亮，因為從放電管2所照 射之紫外線係能夠將由周面電極4B所遮蔽者、穿透周面電 極4B之微細流路13者、其大部分形成在周面電極4B之光 觸媒層20予以激發之緣故，所以光的利用效率非常高而且 能夠將被周面電極4B所擔持的大部分光觸媒激發。 而且，如第6圖所示，將該準分子燈1設置在例如供 作為被處理流體之污染空氣流通的流路F中且使其點亮 時，係形成有污染空氣沿著周面電極4B的外周面的流動 fl，在周面電極4B與放電管2之間所形成之隧道狀的間隙 8···内的流動f2、f3，及通過在周面電極4B所形成的微細 流路13之流動f4、f5等，藉由該等流動fl至f5，污染 空氣係接觸於光觸媒層20而被淨化。 此時，在準分子燈1的放電管2的直徑方向所照射的 全部紫外線，因為有助於光觸媒的激發，所以光的利用效 率非常高，利用低輸出功率的紫外線而能夠得到充分的淨 化作用。 又，因為被在周面電極4B所形成之光觸媒層20所擔 持之大部分的光觸媒係被紫外線激發，所以若被處理流體 接觸於周面電極4B時，藉由其光觸媒作用而被淨化，而具 有淨化效率非常高之優點。 [實施例2] 第7圖係顯示本發明的準分子燈之另外的實施例。 又，與第1至3圖共通之部分係附加相同符號而省略詳細 323682 14 201248678 說明。 如第7圖所示之準分子燈21，其中心電極4A係形成 為棒狀且在其表面形成有多數個突條22···，周面電極4B 係使用與實施例1相同者。 在本例中，16個突條22…係以中心角為22. 5°的間 距在其長度方向延設，而使中心電極4A的剖面成為星型。 再者，在捲繞於放電管2之周面電極4B亦同樣地， 係以預定的間距（在本例係中心角為22.5° )形成起伏而 能夠在圓周方向形成16個波，且線接觸於放電管2之部分 23與在中心電極4A所形成之各突條22係以在直徑方向相 對向的方式設置。 藉此，因為電極4A、4B之最接近部分形成為線狀而 相對向，所以在點亮時容易發生絕緣崩潰。 亦即，在該準分子燈21，對電極4A、4B之間施加來 自電源5之例如20kHz的高頻電壓時，如第7圖（b)所示， 在電極4A、4B彼此之最接近部分、亦即在中心電極4A的 各突條22…與線接觸於和各突緣22相對向之周面電極4B 之放電管2的部分23…之間，係形成電場E。 並且，因為雙方的電極4A、4B的相對向部分皆係形 成為線狀，所以電場E係相對於雙方的電極4A、4B局部地 集中而形成，因此，即便點亮時未施加大電力，亦容易發 生絕緣崩潰而使得點亮性提升。 而且，因為此種集中電場E係從中心電極4A放射狀 地朝向16方位形成，所以點亮性非常優良。 323682 15 201248678 又’從準分子燈21所照射的紫外線的利用效率優良 之方面、及藉由在周面電極4B所形成之光觸媒層20所進 行之淨化處理效率高的方面，係與實施例1同樣。 而且，不限定於在中心電極4A的表面形成突條之情 況’形成多數個突起時亦同。 [實施例3] 第8及第9圖係顯示又一其他實施例。 在本例的準分子燈25所使用之周面電極4B，係將多 孔質光觸媒薄片11進行彎曲加工而形成起伏，同時在與其 起伏的形成方向正交的方向形成捲繞之蛇腹狀，且沿著放 電管2的圓周方向線接觸。 本例的中心電極4A係使用通常的棒狀電極，但亦可 為形成如第1圖及第3圖所示之刀緣的帶板狀電極，亦可 為如第7圖所示在表面形成突條22…者，而且亦可為形成 突起者。 # 在本例中，亦因為周面電極4B係線接觸於放電管2， 所以在與中心電極4A之間所形成之電場E係至少在周面電 極4B側集中，因此容易發生絕緣崩潰而能夠使點亮性提 升0 又，從準分子燈25所照射的紫外線的利用效率優良 之方面、及藉由在周面電極4B所形成之光觸媒層2〇所進 行之淨化處理效率高的方面，係與實施例丨及2同樣。 [實施例4] ’ 而且，本發明之準分子燈26係如第10圖所示，作為 323682 16 201248678 周面電極4B，將平坦的多孔質光觸媒薄片11捲繞成為大 略橢圓而使其短軸方向部分線接觸於放電管2的管軸方 向，且亦可在長軸方向形成二個隧道狀的間隙8。 此時，因為在中心電極4A的兩端緣6a、6b、與線接 觸於和該兩端緣6a、6b相對向之周面電極4B的放電管2 的部分11a、lib之間係形成集中電場E，所以與實施例1 同樣地，點亮性優良。 紫外線的利用效率、光觸媒層20之淨化處理效率高， 亦與實施例1同樣。 而且，在任一實施例中，中心電極4係不限定為形成 有刀緣之帶板狀者，亦可形成兩端緣不尖的單純板狀，或 是形成圓柱狀、圓筒狀。 又，在周面電極4B所形成之波狀的起伏，係不限定 為間距一定的情形，亦可依照被處理流體的狀態而改變起 伏的大小和長度且改變隧道狀的間隙8之大小。 而且，亦可使用更容易點亮的放電氣體等來取代氙氣 等，在無須使電場局部性集中之情況下，亦可將周面電極 4B作成為沿著放電管2的外周部之圓筒狀且面接觸於放電 管2的外表面，而使隧道狀的間隙消失。 此時，藉由設置有多數個微細透孔之周面電極4B的 非周期性海綿結構，電場會產生集中而容易發生絕緣崩潰。 (產業上之可利用性） 因為本發明之準分子燈係使周面電極擔持光觸媒，所 以能夠直接作為附有激發光源之光觸媒單元而組裝於空氣 323682 17 201248678 清淨機和淨水器來使用。 【圖式簡單說明】 第1圖係顯示本發明之準分子燈之管轴方向剖面圖。 第2圖係其外觀圖。 第3圖（a)及（b)係其管軸正交剖面圖。 第4圖係多孔質光觸媒薄片的外觀圖。 第5圖（a)至（g)係顯示多孔質光觸媒薄片的製造方法 之說明圖。. 第6圖係顯示使用狀態之說明圖。 第7圖（a)及（b)係顯示其他的實施形態之管軸正交剖 面圖。 第8圖係顯示又一其他實施形態之管轴方向剖面圖。 第9圖係其外觀圖。 第10 ffl係顯示又-其他實施形態之管轴正交剖面圖。 【主要元件符號說明】 1、21、25、26 準分子燈 2 放電管 3 放電空間 4A、4B 電極 5 電源 6a、6b 端緣 7 石英玻璃 8 間隙 11 多孔質光觸媒薄片 323682 18 201248678 lla、 lib、23 放電管的部分 11c 放電管的其他部分 12 鈦薄片 13 微細流路 14 鈦網狀物（導電性網狀物） 15 氧化鈦基底 16 銳鈦型氧化鈦 17 光阻劑 18 遮罩薄膜 19 裂紋 20 光觸媒層 22 突條 E、e 電場 fl至 f5 流動 F 流路 323682 19201248678 VI. Description of the Invention: [Technical Field] The present invention relates to an excimer lamp that uses a dielectric barrier discharge to illuminate ultraviolet rays, particularly an air cleaner and a net suitable for use in photocatalytic treatment for purification treatment. Water. [Prior Art] Anatase titanium which has an excellent function as a photocatalyst is expected to be applied to an air cleaner, a water purifier, etc., and exhibits photocatalytic activity by irradiation of ultraviolet rays, particularly at a wavelength of 32 〇 nm or less. The UVB (280 to 315 nm) region has a peak photocatalytic activity. Therefore, it is carried out by irradiating ultraviolet rays with an ultraviolet lamp or the like. However, since a general ultraviolet lamp uses mercury, the environmental load is large. Further, in recent years, although ultraviolet LEDs have been developed, they are not only expensive but also have a problem that sufficient light intensity cannot be obtained. Therefore, the excimer lamp system capable of performing ultraviolet light emission without using mercury has attracted attention, and an excimer lamp for deodorization and sterilization has been proposed, and the surface of the transparent electrode provided on the outer side of the discharge tube of the excimer lamp has been proposed. A photocatalyst layer is formed by lamination (see Patent Document 丨). Thereby, the irradiated ultraviolet light penetrates the transparent electrode and is irradiated onto the photocatalyst layer. Therefore, the photocatalyst is activated, and the air in contact with it can be deodorized and sterilized. However, the transparent electrode system generally has a low transmittance with respect to ultraviolet light, and particularly the tin-added oxidized film ((10)) which is a transparent electrode representing the removal is transparent to visible light, but is 323682 relative to the activation of the photocatalyst. In 201248678, the ultraviolet light in the UVB (280 to 315 nm) region is opaque. Therefore, even if a photocatalyst is formed on the surface of the transparent electrode, the effect as described in Patent Document 1 cannot be obtained. Therefore, as disclosed in Patent Document 2, the excimer lamp for ultraviolet irradiation is required to provide a pair of electrodes at opposite positions on both sides of the discharge tube, and to irradiate ultraviolet rays from the gap of the electrode (Patent Document 2: FIG. 2), or A mesh electrode made of a wire or the like is used, and ultraviolet rays are irradiated from the gap of the wire (Patent Document 2: FIG. 3) because the opaque portion of the electrode shields the ultraviolet rays regardless of how The problem of reduced efficiency of light utilization. (PRIOR ART DOCUMENT) [Patent Document 1] Japanese Laid-Open Patent Publication No. JP-A-2002-163295 (Patent Document 2) JP-A-2010-163295 (Summary of the Invention) A technical problem is to provide an excimer lamp which can improve the processing efficiency of a photocatalyst by using not only the ultraviolet rays to be irradiated, but also excellent in light-emitting property even when helium gas is used as a discharge gas. (Means for Solving the Problem) In order to solve the problem, the present invention provides a pair of electrodes on the outside thereof by sandwiching a discharge space formed by a discharge tube in which a discharge gas is hermetically sealed, and by the electrode An excimer lamp that applies a high-frequency voltage to cause a dielectric barrier discharge to emit ultraviolet rays in the discharge space, and 323682 5 201248678 is characterized in that at least a part of the discharge space is formed in a cylindrical space while the pair of electrode systems are The central electrode disposed on the center side of the cylindrical space and the peripheral electrode disposed on the outer peripheral side are formed, and the peripheral surface electrode is wound around the outer surface of the discharge tube, and the porous photocatalyst sheet is wound around the outer surface of the discharge tube. The porous photocatalyst sheet is obtained by supporting a photocatalyst with a conductive mesh formed with a plurality of fine through holes. (Effect of the Invention) According to the present invention, a high-frequency voltage is applied between the center electrode and the peripheral electrode to generate a dielectric barrier discharge in the discharge space, and the peripheral electrode provided on the outer peripheral surface of the discharge tube can be irradiated with ultraviolet rays. Since the peripheral electrode is composed of a porous photocatalyst sheet in which a conductive mesh is used as a photocatalyst-type sharp-converging titanium oxide, the photocatalyst carried on the inside thereof is irradiated from the discharge tube. The ultraviolet light is excited. At the same time, the photocatalyst carried around the fine through hole of the mesh is excited by the ultraviolet light penetrating the through hole, and the ultraviolet light penetrating the fine flow path is in the outer opening portion. Since the diffraction phenomenon occurs, the photocatalyst carried on the outside of the porous photocatalyst sheet is also excited. Therefore, the ultraviolet ray that is irradiated from the discharge tube can be excited by the photocatalyst that is shielded by the peripheral electrode and that is mostly penetrated by the peripheral electrode, so that the light utilization efficiency is very high. Most of the photocatalyst carried by the peripheral electrode can be excited. Therefore, by disposing the excimer lamp of the present invention in a flow path of a fluid to be treated such as water or air, when the fluid to be treated contacts the surface of the circumferential electrode, the photocatalyst which is excited by the ultraviolet ray is contacted and purified. 323682 6 201248678 Further, when the circumferential surface electrode forms a continuous undulation in one direction, since the undulation is disposed in such a manner that the line is in contact with the outer surface of the discharge tube, the portion contacting the discharge tube and the uncontacted portion There is a gap formed between them. At this time, since the fluid to be treated flows through the gap and is also cleaned, the purification treatment efficiency is improved. Further, when the circumferential surface electrode line is brought into contact with the outer peripheral surface of the discharge tube, since the electric field formed between the peripheral surface electrode and the center electrode is concentrated in contact with the portion of the discharge tube, insulation breakdown is likely to occur, and therefore, even if used It is not easy to point out the party's anger as a discharge gas, and it is not necessary to apply large power. [Embodiment] The excimer lamp of the present invention is clamped in the purpose of improving the processing efficiency of the photocatalyst not only by effectively utilizing the ultraviolet ray to be irradiated, but also for improving the illuminance even when xenon is used as the discharge gas. A pair of electrodes are disposed on the outside of the discharge space formed by the discharge tube in which the discharge gas is sealed, and a dielectric barrier discharge is generated in the discharge space by applying a high-frequency voltage between the electrodes. In the ultraviolet ray, at least a part of the discharge space is formed in a cylindrical space, and the pair of electrodes are composed of a center electrode disposed on the center side of the cylindrical space and a peripheral electrode disposed on the outer peripheral side, and the circumferential surface The electrode is wound around a porous photocatalyst sheet which is provided on the outer surface of the discharge tube, wherein the porous photocatalyst sheet is formed by supporting a photocatalyst with a conductive mesh having a plurality of fine through holes. [Embodiment 1] 323682 7 201248678 The excimer lamp 1 of this example as shown in the first to third figures is formed by a discharge tube 2 composed of a quartz glass bulb which is hermetically sealed with a discharge gas. The discharge space 3 is disposed on the outer side of the counter electrode 4A and 4B', and a dielectric barrier discharge is generated in the discharge space 3 by applying a high frequency voltage from the power source 5 between the electrodes 4A and 4B. At least a part of the discharge space 3 is formed in the cylindrical space, and the pair of electrodes 4A and 4B are composed of a center electrode 4A disposed on the center side of the cylindrical space and a peripheral electrode 4B disposed on the outer peripheral side. The center electrode 4A is formed in a strip shape which is formed sharply by the both end edges 6a, 6b as the edge of the blade and is covered by the quartz glass 7 belonging to the dielectric and disposed in the discharge tube 2. The center is the one. Further, the peripheral electrode 4B is formed by a porous photocatalyst sheet 11 which forms a continuous undulation in one direction, and is wound so that its undulating line is in contact with the outer surface of the discharge tube 2, in the discharge tube. The circumferential surface of 2 is formed with a tunnel-shaped gap 8 extending along the tube axis direction between the circumferential surface electrode 4B. The porous photocatalyst sheet 11 is an anodized oxidized substrate 15 formed on the surface of a titanium mesh (conductive mesh) 14 having a non-periodic sponge structure as shown in FIGS. 4 and 5, and The oxidized substrate 15 is sintered as an anatase type titanium oxide 16 as a catalyst / wherein the 'non-periodic sponge structure is applied from one side or both sides of the sheet 12 by aperiodicity The etching process of the pattern forms a plurality of fine flow paths 13 penetrating the front and back. The $5 figure shows a method of manufacturing such a porous photocatalyst sheet 11 323682 8 201248678. First, an etching process for forming the fine flow path 13 is performed on the titanium sheet 12. The etching treatment is composed of the following steps: a coating step (Fig. 1 (a)), which is a titanium foil 12 formed by rolling pure titanium, and a two-side photoresist 17' exposure step (Fig. 5 (b) )), exposing the mask films 18 and 18 having a non-periodic pattern formed thereon by superimposing the photoresist 17; the cleaning step (Fig. 5(c)), after the exposure, the light is washed The unsensitized portion of the resist, and leaving the photosensitive portion on the surface of the titanium foil 12; and the impregnation step (Fig. 5(d)), the non-periodic mesh pattern will be patterned by the photoresist 17 The masked titanium flakes 12 are immersed in the residual liquid, and a plurality of fine flow paths 13 are formed through the front and back sides by secondary etching from the front and back sides to half the thickness of the titanium flakes 12. As described above, when the etching treatment is performed from both surfaces of the titanium foil 12, since the mask film 18 & pattern is not periodic, it is possible to form holes of different patterns from the front side and the back side of the titanium foil 12. As a result, as shown in Fig. 4, a complicated labyrinth-like fine flow path is formed in the thickness direction of the titanium sheet 12, and the specific surface area is remarkably large compared to the simple mesh structure. Further, the porosity (the weight after the etching treatment/the weight before the etching treatment) of the titanium mesh 14 is about 20%. Further, when the surface is enlarged and observed, the time point is as shown in Fig. 5 (where 'the body is substantially flat. Next, anodization treatment for forming the titanium oxide substrate 15 is performed on the surface thereof. 323682 201248678 Anodizing treatment system In a dish acid bath (for example, an aqueous 3% acid solution), a predetermined voltage is applied between the titanium sheet 12 as an anode and the cathode, and as a result, as shown in Fig. 5 (f), the surface of the titanium sheet 12 is The oxidized film is oxidized to form an anodic oxide film. At this time, the oxide film system is formed not only on the front and back surfaces of the titanium foil 12 but also on the inner surface of the fine flow path 13 and the like, and is exposed to the entire surface of the phosphoric acid bath. The sheet 12 is subjected to heat treatment of 55 CTC and heating for 3 hours in the atmosphere to form a titanium oxide substrate 15 which is heated by heating the anodized film. When the surface is enlarged, the surface is flat after the etching treatment. There are many cracks 19 caused by anodizing treatment and heat treatment. · Moreover, when anodizing is performed, it is known that the thickness of the oxide film is light. The interference will emit different colors, appear purple at a thickness of about 7〇mn, green at around 15〇nm, and pink at around 2〇〇(10). In this case, a film with a thickness of 70 to 150nm is formed. In this example, in order to form the photocatalyst sheet 11 into a corrugated plate shape, after the anodizing treatment, and before the heat treatment, the forming process in the form of a corrugated plate is performed by press working along the titanium mesh shape. The longitudinal direction of the object 14 is bent to form a continuous undulation. The grading process is performed after the etch processing and is performed before the sintering treatment of the titanium oxide base sintered anatase titanium oxide particles, for example, etch 323682 10 201248678 After the engraving process and before the anodizing treatment, the press working is performed. Finally, the sintering treatment of the anatase titanium oxide 16 is carried out. The sintering treatment is performed by forming a oxidized chin substrate 15 on the surface. The sheet 12 was immersed in a polymer in which an anatase-type titanium oxide 16 was dispersed, and then baked at 55 (TC). As a result, as shown in Fig. 5 (4), it was attached to the front and back of the titanium sheet 12. The photocatalyst layer 20 is formed on the inner wall surface of the fine flow path 13. The 'titania base 15 and the photocatalyst layer 2 are combined with each other to form a bond, and the bonding property becomes very strong. As a result, the photocatalyst layer 2 becomes Further, it is easy to peel off. Further, the fine flow path 13 is formed by the (four) treatment, and the surface becomes a complex uneven shape, and the titanium oxide base film formed by the anodized film produces micro-scale fine cracks 19, so that not only the micro-cracks 19 of the micro-scale are formed thereon. The photocatalyst layer 20 is firmly bonded, and the surface area is increased and the processing efficiency is remarkably improved. Further, when UV light is irradiated, diffuse reflection/light scattering occurs at the interface between the surface of the photocatalyst layer 20 and the titanium oxide substrate 15, and efficiency can be achieved. Good use of UV light. Further, by using titanium ruthenium, the photocatalyst sheet itself can be formed lightly, so that the degree of freedom in design is increased and the heat resistance is excellent in chemical resistance, and it can be made durable even under severe use conditions. Then, by winding the thus formed porous photocatalyst sheet bundle 1 in the direction in which the undulation is formed and externally mounted on the discharge tube 2, it is possible to form the line direction of the discharge tube 2 of the 323682 11 201248678 undulating stone. The peripheral electrode 4B is formed by contacting the outer surface thereof. The circumferential electrode 4B is undulated with respect to the discharge tube 2 at a predetermined pitch (22.5 in the center angle of this example) as shown in Fig. 3. To 22. 5° pitch line contact. At this time, the relative position in the diameter direction, that is, 〇. And 18 years old. The position line is in contact with the discharge tube 2, while the both end edges 6 of the center electrode ^ are located in the diameter direction thereof. Thereby, the portion Ua, lib of the porous photocatalyst sheet n-line serving as the peripheral electrode 4B is in contact with the both end edges 6a, 6b of the center electrode 4A in the diametrical direction, and the electrode 4A is provided. The closest part of 4B is formed in a line shape, so it is easy to cause mountain and electric breakage when lighting. The above is a configuration of an example of the excimer lamp cartridge of the present invention, and its action will be described next. Fig. 3 (6) shows an explanation of the electric fields E and e formed when the high-frequency voltage of, for example, 20 kHz from the power source 5 is applied between the electrodes 4A, 4B, between the electrodes 4A, 4B. The closest portion, that is, between the end edges 6a of the middle-electrode 4A, and between the portions 11a, Ub of the discharge tube 2 where the wire is in contact with the peripheral electrode 4B opposite to the both end edges 6a, 6b' An electric field E is formed. Further, since the opposing portions of the electrodes 4A and 4B are linear in shape, the electric field E is locally concentrated with respect to the electrodes 4A and 4B. 323682 12 201248678 In order to illuminate the ultraviolet light (light-emitting wavelength: 3〇8nm) for photocatalyst excitation, it is conventionally used in the discharge tube 2 to enclose helium gas (yttrium chloride: XeC1) as a discharge gas, but the use of gas-phase excimer lamps is not easy. Since it is necessary to input a large electric power at the time of lighting start, it is necessary to assemble a circuit for starting the power supply device, and there is a problem that the circuit becomes complicated or unnecessary heat is generated at the time of starting. In this case, by forming the circumferential surface electrode 4B into a wave shape, it is advantageous in that the insulation is easily broken and the lighting property is improved without applying a large electric power even when lighting. Further, since the electric field e is also formed between the both end edges 6a and 6b of the center electrode 4A and the other portion Uc of the discharge tube 2 in contact with the line of the circumferential surface electrode 4B, the insulation is collapsed by the electric field E and the lighting starts. At this time, a dielectric barrier discharge is generated as a whole in the discharge tube 2, and ultraviolet rays are radiated from the discharge tube 2 to the outside thereof. The wall of the ultraviolet ray-dissipating discharge tube 2 is first irradiated onto the inner peripheral surface of the peripheral electrode 4B and penetrates the fine flow path 13 of the porous photocatalyst sheet 11 on which the peripheral electrode 4β is formed. Therefore, the photocatalyst layer 20 formed on the inner peripheral surface of the porous photocatalyst sheet 11, the photocatalyst layer formed on the inner side of the fine flow path 13, and the fine flow path 13 through which ultraviolet rays are transmitted outside the porous photocatalyst sheet 11 The photocatalyst layer 2〇 formed in the vicinity of the outer opening portion is excited by direct irradiation with ultraviolet rays. Further, since the ultraviolet rays penetrating the fine flow path 13 are diffracted in the outer opening portion, the photocatalyst layer 20 formed on the outer side of the porous photocatalyst sheet u is 323682 13 201248678. By illuminating the excimer lamp 1 in this manner, the ultraviolet ray irradiated from the discharge tube 2 can form the majority of the fine flow path 13 that is shielded by the circumferential surface electrode 4B and penetrates the peripheral surface electrode 4B. Since the photocatalyst layer 20 of the peripheral electrode 4B is excited, the light utilization efficiency is extremely high and most of the photocatalyst carried by the peripheral electrode 4B can be excited. Further, as shown in Fig. 6, when the excimer lamp 1 is placed in, for example, a flow path F through which the contaminated air as a fluid to be treated flows, the contaminated air is formed along the peripheral electrode 4B. The flow f1 on the outer peripheral surface, the flow f2 in the tunnel-like gap 8 formed between the circumferential surface electrode 4B and the discharge tube 2, f3, and the fine flow path 13 formed in the peripheral electrode 4B. The flows f4, f5, etc., by the flows f1 to f5, the contaminated air is cleaned by contact with the photocatalyst layer 20. In this case, all of the ultraviolet rays irradiated in the radial direction of the discharge tube 2 of the excimer lamp 1 contribute to the excitation of the photocatalyst, so that the light utilization efficiency is extremely high, and the ultraviolet rays with low output can be sufficiently purified. . Further, since most of the photocatalyst carried by the photocatalyst layer 20 formed on the peripheral electrode 4B is excited by ultraviolet rays, when the fluid to be treated contacts the peripheral electrode 4B, it is purified by the photocatalytic action. It has the advantage of very high purification efficiency. [Embodiment 2] Fig. 7 shows another embodiment of the excimer lamp of the present invention. In addition, the parts common to the first to third figures are denoted by the same reference numerals and the detailed description is omitted 323682 14 201248678. As the excimer lamp 21 shown in Fig. 7, the center electrode 4A is formed in a rod shape, and a plurality of ridges 22 are formed on the surface thereof, and the circumferential electrode 4B is the same as that of the first embodiment. In this example, the 16 ribs 22 are extended in the longitudinal direction with a central angle of 22.5°, and the cross section of the center electrode 4A is star-shaped. In the same manner, in the circumferential surface electrode 4B wound around the discharge tube 2, undulations are formed at a predetermined pitch (the center angle of the system is 22.5°), and 16 waves can be formed in the circumferential direction, and the line contact is performed. The portion 23 of the discharge tube 2 and the ridges 22 formed at the center electrode 4A are disposed to face each other in the diametrical direction. Thereby, since the closest portions of the electrodes 4A, 4B are formed in a line shape and opposed to each other, insulation breakdown easily occurs at the time of lighting. In other words, when the excimer lamp 21 applies a high-frequency voltage of, for example, 20 kHz from the power source 5 between the counter electrodes 4A and 4B, as shown in Fig. 7(b), the electrode 4A, 4B is closest to each other. That is, an electric field E is formed between the ridges 22 of the center electrode 4A and the portion 23 of the discharge tube 2 where the line contacts the peripheral electrode 4B of each of the flanges 22. Further, since the opposing portions of the electrodes 4A and 4B are formed in a line shape, the electric field E is locally concentrated with respect to the electrodes 4A and 4B. Therefore, even if large electric power is not applied at the time of lighting, It is easy to cause insulation breakdown and improve lighting performance. Further, since such a concentrated electric field E is formed radially from the center electrode 4A toward the 16 directions, the lighting property is extremely excellent. 323682 15 201248678 In addition, the efficiency of the ultraviolet light irradiated from the excimer lamp 21 is excellent, and the purification efficiency by the photocatalyst layer 20 formed on the circumferential surface electrode 4B is high. same. Further, the case where the ridges are formed on the surface of the center electrode 4A is not limited to the case where a plurality of protrusions are formed. [Embodiment 3] Figs. 8 and 9 show still another embodiment. In the peripheral electrode 4B used in the excimer lamp 25 of the present embodiment, the porous photocatalyst sheet 11 is bent to form an undulation, and a corrugated shape is formed in a direction orthogonal to the direction in which the undulation is formed, and along the The circumferential direction of the discharge tube 2 is in line contact. The center electrode 4A of this example uses a normal rod electrode, but may be a strip electrode formed as a blade edge as shown in Figs. 1 and 3, or may be formed on the surface as shown in Fig. 7. The ridges 22... can also be formed as protrusions. In this example, since the circumferential surface electrode 4B is in contact with the discharge tube 2, the electric field E formed between the surface electrode 4B and the center electrode 4A is concentrated at least on the side of the circumferential surface electrode 4B, so that insulation breakdown is likely to occur. When the light-emitting property is improved by 0, the utilization efficiency of the ultraviolet light irradiated from the excimer lamp 25 is excellent, and the purification efficiency of the photocatalyst layer 2 formed by the peripheral electrode 4B is high. The same as in the examples 2 and 2. [Embodiment 4] Further, as shown in Fig. 10, the excimer lamp 26 of the present invention is a 323682 16 201248678 peripheral electrode 4B, and the flat porous photocatalyst sheet 11 is wound into a substantially elliptical shape to have a short axis. The direction portion line is in contact with the tube axis direction of the discharge tube 2, and two tunnel-like gaps 8 may be formed in the long axis direction. At this time, a concentrated electric field is formed between the both end edges 6a, 6b of the center electrode 4A and the portions 11a, lib of the discharge tube 2 which are in contact with the circumferential surface electrode 4B which is in contact with the both end edges 6a, 6b. E, in the same manner as in the first embodiment, the lighting property is excellent. The use efficiency of ultraviolet rays and the purification treatment efficiency of the photocatalyst layer 20 were also the same as in the first embodiment. Further, in any of the embodiments, the center electrode 4 is not limited to a strip shape in which a blade edge is formed, and a simple plate shape in which both end edges are not pointed may be formed, or a columnar shape or a cylindrical shape may be formed. Further, the undulating undulation formed by the circumferential surface electrode 4B is not limited to a case where the pitch is constant, and the size and length of the undulation may be changed in accordance with the state of the fluid to be treated, and the size of the tunnel-shaped gap 8 may be changed. Further, instead of the helium gas or the like, a discharge gas or the like which is more easily lit can be used, and the circumferential surface electrode 4B can be formed as a cylindrical shape along the outer peripheral portion of the discharge tube 2 without locally focusing the electric field. The surface is in contact with the outer surface of the discharge tube 2, and the tunnel-like gap disappears. At this time, by the non-periodic sponge structure in which the peripheral electrode 4B of the plurality of fine through holes is provided, the electric field is concentrated and the insulation collapse is likely to occur. (Industrial Applicability) Since the excimer lamp of the present invention allows the peripheral electrode to hold the photocatalyst, it can be directly used as a photocatalyst unit with an excitation light source and assembled in the air 323682 17 201248678 cleaner and water purifier. . BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing the direction of the tube axis of the excimer lamp of the present invention. Figure 2 is an external view. Fig. 3 (a) and (b) are orthogonal cross-sectional views of the tube axis. Fig. 4 is an external view of a porous photocatalyst sheet. Fig. 5 (a) to (g) are explanatory views showing a method of producing a porous photocatalyst sheet. Fig. 6 is an explanatory diagram showing the state of use. Fig. 7 (a) and (b) are orthogonal cross-sectional views showing tube axes of other embodiments. Fig. 8 is a cross-sectional view showing the tube axis direction of still another embodiment. Figure 9 is an external view. The 10th ffl shows an orthogonal cross-sectional view of the tube axis of still another embodiment. [Main component symbol description] 1, 21, 25, 26 excimer lamp 2 discharge tube 3 discharge space 4A, 4B electrode 5 power supply 6a, 6b end edge 7 quartz glass 8 gap 11 porous photocatalyst sheet 323682 18 201248678 lla, lib, 23 Part of the discharge tube 11c Other parts of the discharge tube 12 Titanium flakes 13 Fine flow path 14 Titanium mesh (conductive mesh) 15 Titanium oxide substrate 16 Anatase titanium oxide 17 Photoresist 18 Mask film 19 Crack 20 photocatalyst layer 22 ridges E, e electric field fl to f5 flow F flow path 323682 19