WO2014148325A1

WO2014148325A1 - Fluorescent excimer lamp and fluid treatment apparatus

Info

Publication number: WO2014148325A1
Application number: PCT/JP2014/056417
Authority: WO
Inventors: 賢二谷野; 典弘千石; 淳哉朝山; 菱沼　宣是
Original assignee: ウシオ電機株式会社
Priority date: 2013-03-19
Filing date: 2014-03-12
Publication date: 2014-09-25
Also published as: JP2014182916A

Abstract

The present invention provides a fluorescent excimer lamp and a fluid treatment apparatus, the fluorescent excimer lamp radiating ultraviolet light at a high efficiency and suppressing the deterioration of a fluorescent body. A fluorescent excimer lamp (10) has a vacuum ultraviolet light source (11) and an outside tube (14). The vacuum ultraviolet light source (11) includes a discharge tube (12) and a pair of electrodes (13A, 13B). The discharge tube (12) is made of a dielectric body enclosing a light-emitting gas. The electrodes (13A, 13B) are disposed opposite each other across the light-emitting gas and the dielectric body forming the discharge tube (12). The outside tube (14) has a fluorescent body layer (15) formed on an inner surface, is disposed on the outer circumference of the vacuum ultraviolet light source (11) across a void, and houses the vacuum ultraviolet light source (11). The fluorescent excimer lamp (10) is characterized in that both ends of the outside tube (14) are hermetically sealed, and an inert gas is enclosed in the void (D) in the outside tube (14).

Description

Fluorescent excimer lamp and fluid processing apparatus

The present invention relates to a fluorescent excimer lamp and a fluid treatment apparatus including the fluorescent excimer lamp.

For example, ultraviolet light is suitably used for decomposing organic substances contained in water or sterilizing water. As an ultraviolet light source that emits such ultraviolet light, a low-pressure mercury lamp has been used, but in recent years, a lamp using dielectric barrier discharge has been proposed.

For example, Patent Document 1 discloses a fluid processing apparatus using a discharge lamp using dielectric barrier discharge as an ultraviolet light source. In this processing apparatus, a phosphor that converts vacuum ultraviolet light (for example, light having a wavelength of 172 nm) from the discharge lamp into ultraviolet light on the long wavelength side is provided on the outer periphery of the discharge lamp via a gap. A flow path for circulating the fluid to be processed is provided so as to surround the body. In this processing apparatus, the discharge lamp and the phosphor are separated from each other, and at least a part of the arrangement space of the discharge lamp is opened so that the phosphor can be exchanged.

In such a processing apparatus, since the atmosphere exists between the discharge lamp and the phosphor, vacuum ultraviolet light from the discharge lamp is absorbed by oxygen in the atmosphere. As a result, there is a problem that the illuminance of vacuum ultraviolet light applied to the phosphor is lowered, and ultraviolet light cannot be emitted from the phosphor with high efficiency.

On the other hand, there is also known a discharge lamp in which a phosphor is coated on the inner surface of a discharge tube forming a discharge lamp in order to suppress absorption of oxygen by vacuum ultraviolet light applied to the phosphor (for example, Patent Document 2). reference). However, this type of lamp has a problem that the phosphor is easily deteriorated because the phosphor is exposed to the discharge plasma.

Special table 2011-522697 gazette JP 2011-175823 A

The present invention has been made based on the above circumstances, and an object of the present invention is to provide a fluorescent excimer lamp and a fluid processing apparatus in which ultraviolet light is radiated with high efficiency and phosphor deterioration is suppressed. There is.

A fluorescent excimer lamp according to the present invention includes a discharge tube made of a dielectric material in which a luminescent gas is sealed, and a pair of electrodes disposed so as to face each other through the luminescent gas and a dielectric material forming the discharge tube. A vacuum ultraviolet light source,
In a fluorescent excimer lamp having a phosphor layer formed on the inner surface and disposed on the outer periphery of the vacuum ultraviolet light source via a gap, and an outer tube containing the vacuum ultraviolet light source,
Both ends of the outer tube are hermetically sealed, and an inert gas is sealed in the gap in the outer tube.

In the fluorescent excimer lamp of the present invention, the gas pressure of the inert gas is preferably higher than the gas pressure of the luminescent gas.

In the fluorescent excimer lamp of the present invention, the discharge tube is cylindrical.
The pair of electrodes includes an internal electrode disposed inside the discharge tube so as to extend in a tube axis direction of the discharge tube, and a net-like or coil-shaped external electrode disposed so as to cover an outer surface of the discharge tube. It is preferable to consist of.

In the fluorescent excimer lamp of the present invention, an internal lead electrically connected to the internal electrode is held at one end of the outer tube,
The other end of the outer tube holds an internal lead electrically connected to the external electrode,
It is preferable that the external electrode is made of a metal wire and is in contact with the outer surface of the discharge tube.

The fluid treatment apparatus of the present invention is characterized in that the fluorescent excimer lamp is arranged along the flow path in a flow path tube that forms a flow path through which a fluid to be treated flows.

In the fluorescent excimer lamp of the present invention, since an inert gas exists between the phosphor layer formed on the inner surface of the outer tube and the outer periphery of the vacuum ultraviolet light source, the vacuum ultraviolet light applied to the phosphor is oxygen. Therefore, a decrease in illuminance of vacuum ultraviolet light applied to the phosphor can be suppressed. Therefore, according to the fluorescent excimer lamp of the present invention, ultraviolet light can be emitted with high efficiency. Further, according to the fluorescent excimer lamp of the present invention, the phosphor layer is formed on the inner surface of the outer tube disposed on the outer periphery of the vacuum ultraviolet light source with a gap, so that the discharge plasma generated inside the vacuum ultraviolet light source is generated. Since the phosphor is not exposed, deterioration of the phosphor can be suppressed. In addition, in the fluorescent excimer lamp of the present invention, since the outer tube and the vacuum ultraviolet light source are separated from each other through a gap, the phosphor is separated from the discharge tube even when the discharge tube is heated by discharge. Therefore, deterioration due to heat can also be suppressed.

Further, according to the fluorescent excimer lamp of the present invention, the inert gas is discharged when the gas pressure of the inert gas sealed in the outer tube is higher than the gas pressure of the luminescent gas sealed in the discharge tube. It can suppress that it is provided to.

Furthermore, in the fluorescent excimer lamp of the present invention, the discharge tube is cylindrical, the internal electrode is disposed inside the discharge tube so as to extend in the tube axis direction of the discharge tube, and the external electrode covers the outer surface of the discharge tube. In the case of a net-like or coil-like configuration arranged in this way, the light distribution in the radial cross section of the discharge tube becomes uniform, and the vacuum ultraviolet light applied to the phosphor becomes uniform.

Furthermore, in the fluorescent excimer lamp having the above structure, an internal lead electrically connected to the internal electrode is held at one end of the outer tube, and an internal electrode electrically connected to the external electrode is held at the other end of the outer tube. When the lead is held and the external electrode made of a metal wire is in contact with the outer surface of the discharge tube, even if the internal lead expands when the lamp is lit, the external electrode is not formed on the outer surface of the discharge tube. Since the expansion can be allowed only by sliding contact, a change in the positional relationship between the phosphor layer and the discharge tube can be suppressed.

According to the fluid treatment apparatus of the present invention, since the fluorescent excimer lamp is provided, the fluorescent excimer lamp can emit ultraviolet light with high efficiency, and the phosphor is deteriorated. Since it is suppressed, an ultraviolet light irradiation process can be performed with high efficiency with respect to a to-be-processed fluid.

It is the schematic which shows an example of a structure of the fluorescence excimer lamp of this invention. FIG. 2 is a cross-sectional view of the fluorescent excimer lamp shown in FIG. 1 taken along line AA. It is sectional drawing for description which shows an example of a structure of the fluid processing apparatus of this invention.

Hereinafter, the present invention will be described in detail.

[Fluorescent excimer lamp]
The fluorescent excimer lamp of the present invention uses a dielectric barrier discharge. Specifically, a dielectric is interposed between a pair of electrodes to generate a discharge, whereby a luminescent gas is excited and a vacuum ultraviolet ray is excited. Light is emitted and the vacuum ultraviolet light is irradiated onto the phosphor, thereby exciting the phosphor and emitting ultraviolet light in a predetermined wavelength region.

FIG. 1 is a schematic view showing an example of the configuration of the fluorescent excimer lamp of the present invention, and FIG. 2 is a cross-sectional view taken along line AA of the fluorescent excimer lamp shown in FIG.
This fluorescent excimer lamp 10 includes a vacuum ultraviolet light source 11 including a cylindrical discharge tube 12 and a pair of

electrodes

13A and 13B, and a discharge tube 12 disposed on the outer periphery of the vacuum ultraviolet light source 11 with a gap D interposed therebetween. And a cylindrical outer tube 14 having an inner diameter larger than the outer diameter. Inside the discharge tube 12, a discharge space S in which a luminescent gas is enclosed is formed.

In the discharge tube 12, an airtight structure is formed. A sealing portion 12A is formed at one end (left end in FIG. 1) of the discharge tube 12, and the other end (right end in FIG. 1) of the discharge tube 12 is closed. The sealing portion 12A has a foil seal structure in which, for example, a metal foil 17 made of molybdenum is embedded in an airtight manner.

The discharge tube 12 is made of a dielectric material that is transparent to vacuum ultraviolet light generated in the discharge tube 12. As such a dielectric, for example, synthetic quartz glass can be used.

Inside the discharge tube 12, one coiled electrode (hereinafter referred to as “a metal electrode” formed by spirally winding a metal wire so as to extend along the tube axis (center axis) of the discharge tube 12. Also referred to as “internal electrode.”) 13A is arranged.
Ring-shaped supporters 20 are attached to both ends of the internal electrode 13A. The supporter 20 has a function of holding and fixing the internal electrode 13 A at a predetermined position in the discharge tube 12.
As the metal strand of the internal electrode 13A, for example, a metal material having electrical conductivity and heat resistance such as tungsten is used.

In the discharge tube 12, one end is embedded in the sealing portion 12A of the discharge tube 12 and is electrically connected to the metal foil 17, and the other end is electrically connected to the internal electrode 13A, for example, made of tungsten. An internal lead 16A is provided so as to protrude from the sealing portion 12A of the discharge tube 12 and extend inward in the tube axis direction.

On the outer surface of the discharge tube 12, the other net-like electrode (hereinafter also referred to as "external electrode") formed by knitting metal strands in a lattice shape so as to cover the outer peripheral surface of the discharge tube 12. 13B is arranged. The metal strand of the external electrode 13B is in contact with the outer surface of the discharge tube 12, that is, the metal strand is not fixed in close contact with the outer surface of the discharge tube 12 and is in sliding contact. Is retained.
As the metal strand of the external electrode 13B, a metal material having electrical conductivity and heat resistance such as a nickel alloy is used.

In the vacuum ultraviolet light source 11, the external electrode 13B is provided so as to cover the entire region from the other end (tip; right end in FIG. 1) to the center of the discharge tube 12, and the internal electrode 13A is the external electrode 13B. It is provided so as to overlap with the position of the arranged area. Thus, the internal electrode 13A and the external electrode 13B are arranged so as to face each other through the dielectric (discharge tube 12) and the luminescent gas.
A portion where the internal electrode 13A and the external electrode 13B are arranged to be opposed to each other is a light emitting unit 10X that emits vacuum ultraviolet light when a light emission gas is excited by discharge.

As the luminescent gas sealed in the discharge space S of the discharge tube 12, a rare gas having an action as a discharge medium for forming an excimer by dielectric barrier discharge is used. For example, xenon gas (Xe), argon gas (Ar) And krypton gas (Kr). Further, as the luminescent gas, a halogen gas such as a fluorine gas (F), a chlorine gas (Cl), an iodine gas (I), or a bromine gas (Br) can be used as necessary together with a rare gas.
For example, when xenon gas is used as the luminescent gas, vacuum ultraviolet light with a wavelength of 172 nm is obtained, and when a mixed gas of argon gas and chlorine gas is used as the luminescent gas, vacuum ultraviolet light with a wavelength of 175 nm is obtained. When a mixed gas of krypton gas and iodine gas is used as the luminescent gas, vacuum ultraviolet light with a wavelength of 191 nm is obtained, and when a mixed gas of argon gas and fluorine gas is used as the luminescent gas, a wavelength of 193 nm is obtained. When vacuum ultraviolet light is obtained and a mixed gas of krypton gas and bromine gas is used as the luminescent gas, vacuum ultraviolet light having a wavelength of 207 nm is obtained, and a mixed gas of krypton gas and chlorine gas is used as the luminescent gas. In this case, vacuum ultraviolet light having a wavelength of 222 nm is obtained.

The gas pressure of the luminescent gas sealed in the discharge space S of the discharge tube 12 is preferably lower than the gas pressure of an inert gas described later, for example, 10 kPa to 45 kPa.

The outer tube 14 is hermetically sealed at both ends to form an airtight structure. Specifically, sealing

portions

14A and 14B are formed at both ends of the outer tube 14, and the sealing

portions

14A and 14B are foils in which, for example, metal foils 18A and 18B made of molybdenum are embedded in an airtight manner. It has a seal structure.

The outer tube 14 is not particularly limited as long as it has transparency to ultraviolet light emitted from the phosphor, and is formed of, for example, synthetic quartz glass.

An inner lead 16C made of, for example, molybdenum, which is electrically connected to the inner electrode 13A, is held at one end of the outer tube 14 (left end in FIG. 1). Specifically, one end is embedded in the sealing portion 14A of the outer tube 14 and is electrically connected to the metal foil 18A, and the other end is embedded in the sealing portion 12A of the discharge tube 12 and the metal foil 17 is connected. An electrically connected internal lead 16C is provided so as to protrude from the sealing portion 14A of the outer tube 14 and extend inward in the tube axis direction. The internal lead 16C is electrically connected to the internal electrode 13A via the metal foil 17 in the sealing portion 12A of the discharge tube 12 and the internal lead 16A in the discharge tube 12.
The other end (the right end in FIG. 1) of the outer tube 14 holds an internal lead 16B made of, for example, tungsten, which is electrically connected to the external electrode 13B. Specifically, an internal lead 16B having one end embedded in the sealing portion 14B of the outer tube 14 and electrically connected to the metal foil 18B and the other end electrically connected to the external electrode 13B is provided on the outer tube. 14 is provided so as to protrude and extend inward in the tube axis direction from the 14 sealing portions 14B.

At the outer ends of both ends of the outer tube 14, one end is embedded in the sealing portions 14 A and 14 B of the outer tube 14 and electrically connected to the metal foils 18 A and 18 B, and the other end is sealed with the outer tube 14. External leads 19A and 19B made of, for example, molybdenum are provided so as to protrude from 14A and 14B and extend outward in the tube axis direction. The external leads 19A and 19B are electrically connected to a power supply device (not shown).
In this embodiment, the internal electrode 13A is a high voltage side electrode, and the external electrode 13B is a low voltage side electrode.

The discharge tube 12 includes an internal lead 16C that connects the sealing portion 12A of the discharge tube 12 and one sealing portion 14A of the outer tube 14, an external electrode 13B that is disposed on the outer surface of the discharge tube 12, and an outer tube. 14 is supported with respect to the outer tube 14 by an internal lead 16B connecting the other sealing portion 14B.

On the inner surface of the outer tube 14, a phosphor layer 15 containing a phosphor is formed over the entire region covering at least the light emitting portion 10X in which the internal electrode 13A and the external electrode 13B are arranged to face each other.

The phosphor layer 15 can be formed by applying a phosphor to the inner surface of the outer tube 14.
The phosphor is not particularly limited as long as it emits ultraviolet light in a predetermined wavelength region by receiving vacuum ultraviolet light as excitation light. For example, praseodymium-activated lanthanum phosphate, neodymium-activated lanthanum phosphate, Neodymium activated yttrium phosphate, praseodymium activated yttrium aluminum borate and the like are used.
Here, praseodymium-activated lanthanum phosphate emits ultraviolet light in the region near the wavelength of 230 nm by excitation, and neodymium activated lanthanum phosphate emits ultraviolet light in the region near the wavelength of 184 nm by excitation. The neodymium-activated yttrium phosphate emits ultraviolet light with a wavelength of around 190 nm upon excitation, and the praseodymium-activated yttrium aluminum borate emits ultraviolet light with a wavelength of around 250 nm upon excitation. .

When the phosphor has a low adhesiveness with, for example, synthetic quartz glass constituting the outer tube 14, the phosphor layer 15 is formed with the phosphor layer 15 in order to obtain a high adhesion to the outer tube 14. A binder may be interposed between the outer tube 14 and the outer tube 14.
Examples of the binder include soft glass powder and hard glass powder.

The layer thickness of the phosphor layer 15 is, for example, 10 to 40 μm.

The gap D in the outer tube 14 is formed by the space between the inner surface of the outer tube 14 or the phosphor layer 15 and the outer periphery of the vacuum ultraviolet light source 11, and the gap D is filled with an inert gas.
The size of the gap D, for example, the distance in the tube radial direction between the phosphor layer 15 of the outer tube 14 and the outer periphery of the vacuum ultraviolet light source 11 is preferably, for example, 0 to 2 mm.

Examples of the inert gas sealed in the gap D include nitrogen gas (N ₂ ) and argon gas (Ar).
The gas pressure of the inert gas sealed in the gap D in the outer tube 14 is preferably higher than the gas pressure of the luminescent gas sealed in the discharge space S of the discharge tube 12, specifically 50 kPa. -100 kPa.

1 and 2, reference numeral 22 denotes an exhaust pipe remaining portion formed in the outer pipe 14.

An example of the specifications of the fluorescent excimer lamp 10 as described above is shown below.
The discharge tube 12 has a total length of 170 mm, an outer diameter of 16 mm, and an inner diameter of 14 mm. The internal electrode 13A has a total length of 100 mm, a metal wire diameter of 0.5 mm, an outer diameter (coil diameter) of 2 mm, and a coil pitch. The external electrode 13B has a total length of 100 mm and a metal strand diameter of 0.2 mm. The outer tube 14 has a total length of 300 mm, an outer diameter of 20 mm, and an inner diameter of 18 mm. The total length is 200 mm and the layer thickness is 0.02 mm.
The discharge space S of the discharge tube 12 is filled with xenon gas having a gas pressure of 15 kPa, and the gap D in the outer tube 14 is filled with nitrogen gas having a gas pressure of 80 kPa.
A high frequency high voltage is applied between the internal electrode 13A and the external electrode 13B under the conditions of a rated frequency of 70 kHz and a rated voltage of 3000 kVp-p.

In such a fluorescent excimer lamp 10, when a high frequency high voltage is applied to the internal electrode 13A and the external electrode 13B by a power supply device (not shown), the discharge tube 12 functions as a dielectric and discharge occurs. By this discharge, the luminescent gas in the discharge space S is excited, and when the luminescent gas is, for example, xenon gas, vacuum ultraviolet light having a wavelength of 172 nm is emitted. When this vacuum ultraviolet light is irradiated onto the phosphor layer 15, the phosphor constituting the phosphor layer 15 is excited and converted into light according to the characteristics of the phosphor, and ultraviolet light in a predetermined wavelength region is converted into the outer tube. 14 is emitted to the outside.

In the fluorescent excimer lamp 10 having the above configuration, the phosphor layer 15 is formed on the inner surface of the outer tube 14 disposed on the outer periphery of the vacuum ultraviolet light source 11 via the gap D, and both ends of the outer tube 14 are arranged. Are hermetically sealed by the sealing portions 14 A and 14 B, and an inert gas is sealed in the gap D in the outer tube 14. Therefore, since an inert gas exists between the phosphor layer 15 formed on the inner surface of the outer tube 14 and the outer periphery of the vacuum ultraviolet light source 11, the vacuum ultraviolet light applied to the phosphor is absorbed by oxygen. Therefore, it is possible to suppress a decrease in illuminance of the vacuum ultraviolet light applied to the phosphor. As a result, the fluorescent excimer lamp 10 can emit ultraviolet light with high efficiency. Further, since the phosphor layer 15 is formed on the inner surface of the outer tube 14 disposed on the outer periphery of the vacuum ultraviolet light source 11 via the gap D, the phosphor is exposed to the discharge plasma generated inside the vacuum ultraviolet light source 11. Therefore, deterioration of the phosphor can be suppressed. In addition, since the outer tube 14 and the vacuum ultraviolet light source 11 are separated from each other through the gap D, the phosphor is separated from the discharge tube 12 even when the discharge tube 12 is heated by the discharge. Deterioration can also be suppressed.

Further, according to the fluorescent excimer lamp 10 having the above-described configuration, the inert gas sealed in the outer tube 14 has a higher gas pressure than the luminescent gas sealed in the discharge tube 12. Can be suppressed from being discharged. The reason why this effect is obtained is considered as follows.
That is, in the fluorescent excimer lamp 10, the external electrode 13 B is heated when the lamp is lit, and the metal strand expands in the radial direction of the discharge tube 12, and a gap is formed between the external electrode 13 B and the outer surface of the discharge tube 12. It is conceivable that an inert gas enters the gap. In this case, since the excimer discharge is easier to discharge when the gas pressure is lower, there is a problem that the inert gas is discharged when the gas pressure of the inert gas is lower than the gas pressure of the luminescent gas. According to the fluorescent excimer lamp 10 configured as described above, since the gas pressure of the inert gas is higher than the gas pressure of the luminescent gas, the luminescent gas is reliably supplied to the discharge, and the inert gas is supplied to the discharge. This can be suppressed.

Furthermore, according to the fluorescent excimer lamp 10 configured as described above, the discharge tube 12 is cylindrical, the internal electrode 13A is disposed inside the discharge tube 12 so as to extend in the tube axis direction of the discharge tube 12, and the external electrode 13B is discharged. By being a net-like material disposed so as to cover the outer surface of the tube 12, the light distribution in the radial cross section of the discharge tube 12 becomes uniform, and the vacuum ultraviolet light irradiated to the phosphor becomes uniform. .

Furthermore, in the fluorescent excimer lamp 10 having the above-described configuration, the internal electrode 13A is connected to the internal lead 16C, one end of which is embedded in the sealing portion 14A of the outer tube 14, and the metal foil 17 in the sealing portion 12A of the discharge tube 12. And an internal lead 16 A in the discharge tube 12. One end of the external electrode 13B is connected to an internal lead 16B embedded in the sealing portion 14B of the outer tube 14. When the lamp is turned on, the internal lead may expand when heated, and the internal lead 16C expands toward the other sealing portion 14B with the one sealing portion 14A of the outer tube 14 as a base point. Since the other end of the internal lead 16C is embedded in the sealing portion 12A of the discharge tube 12, the entire discharge tube 12 is moved toward the other sealing portion 14B. On the other hand, the internal lead 16B expands toward the one sealing portion 14A with the other sealing portion 14B of the outer tube 14 as a base point. At this time, if the external electrode 13B is fixed to the outer surface of the discharge tube 12, the internal leads 16C and 16B are pressed by expansion. For this reason, the discharge tube 12 is inclined to contact the outer tube 14, or the internal lead is deformed. When the lamp is repeatedly lit, there may be a problem that the positional relationship between the phosphor layer 15 and the discharge tube 12 changes. However, in the fluorescent excimer lamp 10 configured as described above, the external electrode 13B is in contact with the outer surface of the discharge tube 12, so that even if the internal lead expands when the lamp is lit, for example, on the outer surface of the discharge tube 12. The external electrode 13B can be allowed to expand only by sliding contact, and the change in the positional relationship between the phosphor layer 15 and the discharge tube 12 can be suppressed.

The fluorescent excimer lamp of the present invention is, for example, an ultraviolet light source of a water treatment device for performing a decomposition treatment of organic matter contained in water or a water sterilization treatment, an air treatment device for performing an air sterilization treatment, for example, It can be suitably used as an ultraviolet light source for various devices such as a liquid crystal substrate light cleaning device and a photocuring device.

As mentioned above, although embodiment of this invention was described, this invention is not limited to said embodiment, A various change can be added.
For example, the external electrode is not limited to a net-like shape, and may be a coil-like shape in which a metal wire is formed by spirally winding the outer surface of a discharge tube.

[Fluid treatment equipment]
The case where the fluorescent excimer lamp of the present invention is used as an ultraviolet light source of a fluid treatment apparatus such as a water treatment apparatus will be specifically described below.
FIG. 3 is an explanatory cross-sectional view showing an example of the configuration of the fluid treatment apparatus of the present invention.
A fluorescent excimer lamp 10 used as an ultraviolet light source of the fluid processing apparatus 100 has the same configuration as the fluorescent excimer lamp 10 shown in FIG.
In addition, the wavelength of ultraviolet light that is required to be radiated in the fluorescent excimer lamp 10 varies depending on the use application of the fluid treatment apparatus 100, but for example, the fluid treatment apparatus 100 is used to decompose organic substances contained in water. When used in the above, the fluorescent excimer lamp 10 preferably emits ultraviolet light having a wavelength of 180 to 200 nm having a central wavelength at 190 nm. Further, when used for water sterilization, it is preferable to emit ultraviolet light having a wavelength of 240 to 280 nm having a central wavelength at a wavelength of 250 nm.

Here, in order to use the fluorescent excimer lamp 10 as a light source suitable for decomposing organic substances contained in water, xenon gas is enclosed as a luminescent gas, and neodymium is attached as a phosphor constituting the phosphor layer 15. It is preferable to use activated lanthanum phosphate or neodymium activated yttrium phosphate. In addition, in order to use the fluorescent excimer lamp 10 as a light source for sterilizing water, xenon gas is enclosed as a luminescent gas, and as the phosphor constituting the phosphor layer 15, an active yttrium aluminum borate or praseodymium is added. It is preferable to use activated lanthanum phosphate.

The fluid processing apparatus 100 is a substantially cylindrical channel tube 101 that forms a channel R through which a fluid to be processed such as ultrapure water flows, and an approximately provided portion that closes the openings at both ends of the channel tube 101. An

annular lid member

102, 102 is provided, and the overall shape thereof is a substantially cylindrical shape. In the internal space of the channel tube 101, an ultraviolet light source composed of the fluorescent excimer lamp 10 flows along the channel R, specifically, the tube axis (center axis) of the discharge tube 12 and the outer tube 14. It arrange | positions in the state in which the pipe axis (center axis) of the path pipe 101 corresponded.

The channel tube 101 is made of, for example, stainless steel.
On the outer peripheral surface of the flow channel tube 101, an inflow port 101A for allowing the fluid to be processed to flow into the flow channel R, and a fluid to be processed that has been irradiated with ultraviolet light in the flow channel R are allowed to flow out from the flow channel tube 101. A flow pipe (not shown) for flowing the fluid to be processed through the flow path R is connected to the flow inlet 101A and the flow outlet 101B.
In the illustrated example, the inflow port 101A is provided above the outflow port 101B.

The lid member 102 is made of, for example, polytetrafluoroethylene.
The lid member 102 has a through hole 102H having a hole diameter that matches the outer diameter of the fluorescent excimer lamp 10 at the center.
The lid member 102 includes a flange portion 102a that protrudes radially outward, an inner step portion 102b that is formed on the inner peripheral edge of the through hole 102H, and an outer step portion 102c that is formed on the outer peripheral edge of the cover member 102. Is formed.

The fluorescent excimer lamp 10 has two O-rings 103 provided at both ends between the outer peripheral surfaces of both ends of the fluorescent excimer lamp 10 and the flat surfaces of the

inner step portions

102b, 102b of the

lid members

102, 102. It is inserted into the through

holes

102H and 102H through 103, and is held and fixed to the

lid members

102 and 102 in a liquid-tight manner. The

lid members

102, 102 have the

flange portions

102 a, 102 a of the

lid members

102, 102 locked to the end faces at both ends of the flow channel tube 101, respectively, and the

outer step portions

102 c, 102 c of the

lid members

102, 102 are flat. It is fixed and fixed to the flow channel tube 101 in a liquid-tight manner via two O-

rings

104 and 104 provided between the surface and the inner peripheral surface of the flow channel tube 101. With the configuration as described above, the internal space (flow path R) of the flow path pipe 101 has a liquid-tight structure.

In the fluid processing apparatus 100, the flow rate of the fluid to be processed flowing through the flow path R varies depending on the use application of the fluid processing apparatus 100, but is 1 to 5 l / min, for example, and the temperature of the fluid to be processed is, for example, 0 to 30 ° C.

An example of the specifications of the fluid processing apparatus 100 as described above is shown below.
The channel tube 101 has an overall length of 250 mm, an outer diameter of 75 mm, and an inner diameter of 65 mm. The lid member 102 has an outer diameter of the flange portion 102a of 90 mm and a hole diameter of the through hole 102H of 20 mm. The fluorescent excimer lamp 10 has a total length of 300 mm and an outer diameter of 20 mm.

In the fluid processing apparatus 100 having the above-described configuration, the fluorescent excimer lamp 10 is turned on and water to be processed is supplied to the flow path R of the flow path pipe 101 from the inflow port 101A. In the flow path R of the flow path pipe 101, ultraviolet light in a predetermined wavelength region from the fluorescent excimer lamp 10 is irradiated from the light emitting unit 10 X to the fluid to be processed, and ultraviolet light irradiation processing is performed. The fluid to be processed is discharged from the outlet 101B to the outside of the channel tube 101.

According to the fluid processing apparatus 100 having the above-described configuration, the fluorescent excimer lamp 10 of the present invention is provided so that the fluorescent excimer lamp 10 can emit ultraviolet light with high efficiency. Since the deterioration of the phosphor is suppressed, the ultraviolet light irradiation process can be executed with high efficiency on the fluid to be processed.

Hereinafter, experimental examples performed for confirming the effects of the present invention will be described.
<Experimental example 1>
According to the configuration shown in FIGS. 1 and 2, a fluorescent excimer lamp (A) having the following specifications was produced.
・ Vacuum ultraviolet light source (11)
Discharge tube (12); material: synthetic quartz glass, dimensions: total length = 170 mm, outer diameter = 16 mm, inner diameter = 14 mm
Internal electrode (13A); Material: Tungsten, Shape: Coiled, Dimensions: Total length = 100mm, Metal wire diameter = 0.5mm, Outer diameter (coil diameter) = 2mm, Coil pitch = 2mm
External electrode (13B); material = nickel alloy, shape: mesh, dimension: overall length = 100 mm, metal wire diameter = 0.2 mm
Metal foil (17); Material: Molybdenum internal lead (16A, 16B); Material: Tungsten luminescent gas; Type: Xenon gas, Gas pressure: 15kPa
Outer tube (14); Material: Synthetic quartz glass, Dimensions: Overall length = 300mm, Outer diameter = 20mm, Inner diameter = 18mm
Metal foil (18A, 18B) material: molybdenum phosphor layer (15); phosphor: praseodymium activated lanthanum phosphate, dimensions: total length = 200 mm, layer thickness = 20 μm
Internal lead (16C); Material: Molybdenum external lead (19A, 19B); Material: Molybdenum inert gas; Type: Nitrogen gas, Gas pressure: 80kPa
・ Rated frequency: 70 kHz
・ Rated voltage: 3000kVp-p

The ultraviolet light was irradiated by the fluorescent excimer lamp (A), and the radiation intensity of the ultraviolet light having a wavelength of 230 nm was measured by an ultraviolet light measuring device disposed at a position facing the light emitting portion (10X). Further, the state of the phosphor layer (15) after 1000 hours of lighting was observed.

<Comparative Experimental Example 1>
In the fluorescent excimer lamp of Experimental Example 1, the fluorescent excimer lamp (except that the airtight structure formed by both ends of the outer tube (14) is not formed and the fluorescent layer (15) is exposed to the atmosphere). B) was prepared, and the radiation intensity of ultraviolet light was measured as in Experimental Example 1.

<Comparative Experiment Example 2>
In the fluorescent excimer lamp of Experimental Example 1, the fluorescent excimer lamp (C) was similarly formed except that the fluorescent layer (15) formed on the inner surface of the outer tube (14) was formed on the inner surface of the discharge tube (12). The phosphor layer was fabricated and the phosphor layer was observed in the same manner as in Experimental Example 1.

The radiant intensity of the ultraviolet light irradiated from the fluorescent excimer lamp (A) of Experimental Example 1 was 1.5 times the radiant intensity of the ultraviolet light irradiated from the fluorescent excimer lamp (B) of Comparative Experimental Example 1. It was.
Further, the phosphor layer in the fluorescent excimer lamp (A) of Experimental Example 1 was less deteriorated than the fluorescent material layer of the fluorescent excimer lamp (C) of Comparative Experimental Example 2.

From the above results, in the fluorescent excimer lamp (A) according to the present invention, there is no gap between the phosphor layer (15) disposed on the inner surface of the outer tube (14) and the outer periphery of the vacuum ultraviolet light source (11). Since nitrogen gas, which is an active gas, is present, the vacuum ultraviolet light emitted from the vacuum ultraviolet light source (11) does not absorb oxygen in the atmosphere, and therefore the illuminance reduction of the vacuum ultraviolet light applied to the phosphor is reduced. As a result, it was confirmed that ultraviolet light can be emitted with high efficiency. It was also confirmed that the phosphor could be prevented from being deteriorated because the phosphor was not exposed to the discharge plasma generated inside the vacuum ultraviolet light source (11).

DESCRIPTION OF SYMBOLS 10 Fluorescent excimer lamp 10X Light emission part 11 Vacuum ultraviolet light source 12 Discharge tube

12A Sealing part

13A Internal electrode

13B External electrode 14

Outer tube

14A, 14B Sealing part 15

Phosphor layer

16A, 16B, 16C Internal lead 17

Metal foil

18A,

18B Metal foil

19A, 19B External lead 20 Supporter 22 Exhaust pipe remaining part 100 Fluid treatment device 101 Channel pipe 101A Inlet 101B Outlet 102 Cover member 102a Flange part 102b Inner step part 102c Outer step part 102H Through hole 103, 104 O-ring D Gap S Discharge space R Flow path

Claims

A vacuum ultraviolet light source comprising a discharge tube made of a dielectric material in which a luminescent gas is sealed, and a pair of electrodes arranged to face each other through the luminescent gas and a dielectric material forming the discharge tube;
In a fluorescent excimer lamp having a phosphor layer formed on the inner surface and disposed on the outer periphery of the vacuum ultraviolet light source via a gap, and an outer tube containing the vacuum ultraviolet light source,
A fluorescent excimer lamp, wherein both ends of the outer tube are hermetically sealed, and an inert gas is sealed in the gap in the outer tube.
The fluorescent excimer lamp according to claim 1, wherein a gas pressure of the inert gas is higher than a gas pressure of the luminescent gas.
The discharge tube is cylindrical;
The pair of electrodes includes an internal electrode disposed inside the discharge tube so as to extend in a tube axis direction of the discharge tube, and a net-like or coil-shaped external electrode disposed so as to cover an outer surface of the discharge tube. The fluorescent excimer lamp according to claim 1 or 2, characterized by comprising:
One end of the outer tube holds an internal lead electrically connected to the internal electrode,
The other end of the outer tube holds an internal lead electrically connected to the external electrode,
The fluorescent excimer lamp according to claim 3, wherein the external electrode is made of a metal wire and is in contact with an outer surface of the discharge tube.
5. A fluid treatment characterized in that the fluorescent excimer lamp according to claim 1 is disposed along the flow path in a flow path tube forming a flow path through which a fluid to be treated flows. apparatus.