JP7386074B2 - Excimer lamp and how to install it inside a pipe - Google Patents

Description

The present invention relates to excimer lamps, and particularly to the configuration of lamp electrodes.

In an excimer lamp, a rare gas is sealed in an arc tube, and a voltage is applied between an outer electrode provided on the outer surface of the arc tube and an inner electrode provided inside the arc tube to generate a discharge, and excimer light is generated. radiated. It can irradiate ultraviolet rays as excimer light, and can be used as a light source to generate ozone by irradiating ultraviolet rays.

For example, the excimer lamp may be surrounded by a light-transmissive container such as a jacket tube or protection tube, and the jacket tube may be placed in the flow path of the fluid to be irradiated with ultraviolet rays (such as cleaning water). A configuration is known in which an excimer lamp is disposed close to the outer surface of a flowing container (see Patent Document 1).

JP2016-39028A

Ultraviolet light (particularly 172 nm) irradiated as excimer light has a shorter reach than light in other wavelength ranges. Therefore, if the gap between the inner surface of the container, such as the jacket tube or irradiation window, and the outer surface of the excimer lamp becomes large, the ultraviolet rays will not sufficiently reach the object to be irradiated, reducing the effectiveness of ultraviolet irradiation. .

On the other hand, an excimer lamp has an outer electrode arranged on the outer surface of the arc tube, and a connecting part is provided around the outer surface of the lamp to connect the outer electrode to a power supply means such as an external power supply line. Space required.

Therefore, there is a need to provide an excimer lamp that can effectively irradiate an object with ultraviolet rays.

The excimer lamp of the present invention includes an arc tube filled with a discharge gas, and an electrode provided on the outer surface of the arc tube and connected to a power supply section. For example, a lamp configuration can be provided in which an outer electrode is provided on the outer surface of the arc tube and is connected to the outer power supply part, and an inner electrode is provided inside the arc tube and connected to the inner power supply part. The cross-sectional shape of the arc tube can be circular, elliptical, rectangular, or the like. In the present invention, the electrical connection between the electrode and the power supply section is provided at a position that does not exceed the outer diameter of the arc tube or the width in the direction between the electrodes. Here, the width in the inter-electrode direction indicates the width in the direction between opposing electrodes in the case of an arc tube with a rectangular cross section. For example, in the case of an arc tube with a circular cross section, the connection portion is provided at a position that does not exceed the outer diameter of the arc tube from the lamp axis in the radial direction. For example, the height of the lamp including the electrodes can be 1.000013 to 1.1 times the height of the arc tube.

The arc tube can be provided with a small diameter portion having a smaller outer diameter than the light emitting portion including the central portion, on at least one end of the lamp. The connecting portion may be provided in a range where the small diameter portion is located along the lamp axis. For example, a connecting portion can be provided on the outer surface of the small diameter portion or at a position opposite to it.

As for the structure of the small diameter part, a reduced diameter part can be provided in which the outer diameter becomes smaller from the light emitting part of the arc tube toward the end side. It is possible to have a configuration in which the diameter decreases to the end of the lamp, or it is also possible to configure it to include a reduced diameter part and a cylindrical part with a constant diameter, and the outer diameter decreases toward the end. It is also possible to configure it to include a large diameter portion that is enlarged again. For example, the small diameter portion can be formed based on an exhaust pipe formed for evacuation and/or gas filling during lamp manufacture.

Various configurations are possible for the electrical connection part. For example, variations in the connection part can be made by providing a conductive film that is electrically connected to the outer electrode and covers at least a part of the outer surface of the small diameter part. Can be expanded. For example, the connection part can be a contact part in a conductive socket into which the small diameter part can be inserted, a contact part when a conductive spring is brought into contact with the conductive membrane, or a contact part where the outer power supply line is wrapped around the small diameter part. It is possible to configure it as a contact part at the time.

The outer electrode can be composed of a conductive wire wound around the outer surface of the arc tube, and the connection section can be configured to connect to the outer feeder line and connect the winding wound around the outer surface of the small diameter section. It can be constructed with a covering conductive band.

The method for installing an excimer lamp in a tube according to the present invention is an excimer lamp in which an outer electrode is provided on the outer surface of the arc tube, and a conductive portion that is electrically connected to the outer electrode is provided in a small diameter portion formed on the end side of the arc tube. is inserted into the jacket tube, and the excimer lamp is pushed in the lamp axial direction or rotated in the circumferential direction to connect the conductive part to the connection part that is electrically connected to the outer power supply part provided in the jacket tube. let

According to the present invention, it is possible to provide an excimer lamp that can effectively irradiate an object with ultraviolet rays.

1 is a diagram showing a schematic internal configuration of an excimer lamp according to the present embodiment. FIG. 2 is a plan view of an excimer lamp showing an example of the configuration of a connecting portion with an external power supply line. FIG. 7 is a plan view of an excimer lamp showing an example of the configuration of another connection part. FIG. 7 is a plan view of an excimer lamp showing an example of the configuration of another connection part. FIG. 7 is a plan view of an excimer lamp showing an example of the configuration of another connection part. FIG. 7 is a plan view of an excimer lamp showing an example of the configuration of another connection part. FIG. 7 is a plan view of an excimer lamp showing an example of the configuration of another connection part.

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a diagram showing a schematic internal configuration of an excimer lamp according to this embodiment.

The excimer lamp 10 emits ultraviolet light as excimer light, for example, 172 nm ultraviolet light. The excimer lamp 10 is installed inside a light-transmitting jacket tube 100, and is placed in a conduit through which a fluid to be irradiated with ultraviolet rays, such as cleaning water, flows.

The excimer lamp 10 includes an arc tube 20 made of a dielectric material such as quartz glass and having a substantially circular cross section.A discharge space S in the arc tube 20 is filled with a rare gas such as xenon gas or a mixed gas as a discharge gas. It is sealed at a sealing pressure (for example, 5 kPa to 50 kPa).

A foil electrode (hereinafter referred to as an inner electrode) 40 is arranged inside the arc tube 20 and extends along the tube axis, that is, the lamp axis E. The inner electrode 40 is disposed coaxially with respect to the arc tube 20 and is covered with a columnar dielectric 30 having a substantially circular cross section. The inner electrode 40 is not exposed to the discharge space S formed between the dielectric 30 and the arc tube 20, but is buried within the dielectric 30. One end 40E of the internal electrode 40 is connected to a power supply section 60 extending from the outside. The power feeding unit 60 is constituted by a power feeding line (hereinafter referred to as an inner power feeding line).

An outer electrode 50 is provided on the outer surface 20S of the arc tube 20. Here, the outer electrode 50 is made of a metal film such as an aluminum film. While the outer electrode 50 covers the entire outer surface on both sides of the arc tube 20, it covers only a portion of the surface of a constant diameter portion (hereinafter referred to as the light emitting portion) 24 including the central portion therebetween so as not to interfere with ultraviolet irradiation. There is. The outer electrode 50 is electrically connected to a power supply unit not shown here. Note that in FIG. 1, the thickness of the outer electrode is exaggerated.

The arc tube 20 has small diameter portions 21 and 22 at both ends thereof. The small diameter portions 21 and 22 are formed during the lamp manufacturing process, and their outer diameters R2 and R3 are smaller than the diameter R0 of the light emitting portion 24 including the central portion. The small diameter portion 21 here includes a reduced diameter portion 28 whose diameter decreases from the end of the light emitting portion 24, and a cylindrical portion 29 having a substantially constant diameter and whose end portion is configured as a sealing portion. The axial length L4 of the cylindrical portion 29 is longer than the axial length L3 of the reduced diameter portion 28. Further, the axial length L1 of the small diameter portion 21 is longer than the axial length L2 of the small diameter portion 22.

Here, to explain the process of manufacturing the excimer lamp 10, first, the inner electrode (foil electrode) connected to the inner power supply line is inserted into the inner tube (cylindrical dielectric material), and heated from the outside to connect the inner tube and the foil. Weld the electrodes. Then, at the end of the inner electrode near the insertion entrance of the inner tube, a so-called abacus-shaped sealing portion is formed, which is a portion having a larger outer diameter than the other axial ranges.

On the other hand, an outer tube is formed with an exhaust pipe provided at one end and an insertion port provided at the other end, and an inner tube (column-shaped dielectric material) with internal electrodes embedded therein is inserted into the outer tube. Then, the outer tube is welded to the abacus-shaped sealing portion at the insertion port, thereby forming an arc tube consisting of the outer tube and the inner tube. A vacuum is drawn through the exhaust pipe while heating the inside of the arc tube, and after filling discharge gas from the exhaust pipe, the exhaust pipe is sealed and an outer electrode is provided on the outer surface of the outer tube.

The small diameter portion 21 of the arc tube 20 manufactured through such a lamp manufacturing process is a portion formed based on the exhaust pipe, and the small diameter portion 22 corresponds to the inner electrode insertion port side. Therefore, the small diameter portions 21 and 22 are formed with a cylindrical portion 29 having a substantially constant diameter up to the end portions (sealing portions) 26 and 27 thereof.

In this embodiment, the outer electrode 50 is provided extending to the small diameter portion 21 on the exhaust pipe side, and is electrically connected to the power supply portion for the outer electrode 50 via the small diameter portion 21 . This will be explained below.

FIG. 2 is a plan view of the excimer lamp 10 showing an example of the configuration of a connecting portion with an external power supply line.

A metal socket 110 is connected to the power supply section 70 and forms an electrical connection section with the outer electrode 50. Here, the power feeding unit 70 is configured as a power feeding line (hereinafter referred to as an outer power feeding line). The metal socket 110 has a shape and size into which the small diameter portion 21 of the arc tube 20 can be inserted, and is placed in the jacket tube 100 in advance. The outer power supply line 70 is connected to the ground side so as to have the same potential as the object to be irradiated.

With this configuration, by inserting the excimer lamp 10 into the jacket tube 100 and turning the screw, the outer electrode 50 and the outer power supply line 70 are electrically connected, and the lamp connection work can be easily and quickly performed. can. In particular, by using the small diameter portion 21 on the exhaust pipe side, the electrical connection between the outer electrode 50 and the outer power supply line 70 can be completed at the same time as the excimer lamp 10 is inserted.

FIG. 3 is a plan view of the excimer lamp 10 showing an example of the configuration of another connection part.

Here, a metal plate spring 120 is configured as a connection part. The outer electrode 50 covers the end of the small diameter portion 21, that is, the sealing portion 26. When the excimer lamp 10 is inserted into the jacket tube 100 and pushed in, the outer electrode 50 is electrically connected to the outer power supply line 70 by contacting the leaf spring 120. The axial length L0 of the light emitting portion 24 is longer than the axial length L1 of the small diameter portion 21.

FIG. 4 is a plan view of the excimer lamp 10 showing an example of the configuration of another connection part.

Here, the coil spring 130 is wound around the small diameter portion 21 and is in contact with the end of the small diameter portion 21 on the light emitting portion 24 side, that is, the reduced diameter portion. By configuring the coil spring 130 as a connection part, the outer electrode 50 is electrically connected to the outer power supply line 70 by inserting and pushing the excimer lamp 10.

FIG. 5 is a plan view of the excimer lamp 10 showing an example of the configuration of another connection part.

2 to 4, here, the outer power supply line 70 and the outer electrode 50 are connected in advance before the excimer lamp 10 is inserted into the jacket tube 100, and then the excimer lamp 10 is inserted into the jacket tube 100. Insert into.

A metal band 140 made of nickel or the like is wound around the small diameter portion 21. The size and shape of the metal band 140 when wound are determined so that the position of the uppermost end 140T of the metal band 140 does not exceed the outer diameter R1 of the arc tube 20 including the outer electrode 50.

FIG. 6 is a plan view of the excimer lamp 10 showing an example of the configuration of another connection part.

Here, unlike in FIGS. 3 to 5, a member for electrically connecting the outer electrode and the outer feeder line is not provided, and the outer feeder line 70 is directly wound around the small diameter portion 21 and connected to the outer electrode 50. . In this way, the contact portion between the outer power supply line 70 and the outer electrode 50 can be configured as a connection portion. The sealing part 126 of the small diameter part 21 is formed to be a large diameter part whose outer diameter increases again toward the end compared to other parts whose diameters are approximately constant. 70 can be prevented from being pulled out from the small diameter portion 21. The outer diameter R5 of the large diameter portion is smaller than the diameter R0 of the light emitting portion 24 including the central portion.

FIG. 7 is a plan view of the excimer lamp 10 showing an example of the configuration of another connection part.

Here, the outer electrode 50 is not made of a metal film such as an aluminum film, but is made of a conductive winding wire made of molybdenum (Mo) or the like, and is wound around the arc tube 20 up to the small diameter portion 21 . On the other hand, a metal band 140 made of nickel (Ni) or the like is wound around the small diameter portion 21 and the small diameter portion 22, and the metal band 140 disposed on the small diameter portion 22 side is used only for fixing the winding wire. An outer power supply line 70 is connected to the outer power supply line 70 . By arranging such an outer power supply line 70 along the inner power supply line 60 only on one small-diameter side of the excimer lamp, the connection work does not become complicated.

As described above, in this embodiment, the excimer lamp 10 includes the inner electrode 40 covered with the dielectric 30 inside the arc tube 20, and the outer electrode 50 on the outer surface 20S of the arc tube 20. Small diameter portions 21 and 22 having a relatively small outer diameter are provided at both ends of the light emitting portion 24 of the arc tube 20, and an outer electrode 50 is provided up to the small diameter portion 21, and a connection to the outer power supply line 70 is provided. A portion is provided in a range that does not exceed the outer diameter R0 of the light emitting portion 24 in the radial direction from the lamp axis E.

As a result, it is sufficient to make the inner diameter R4 of the jacket tube 100 slightly larger than the outer diameter R1 including the outer electrode 50 of the excimer lamp 10, and the distance between the inner surface of the jacket tube 100 and the outer surface 20S of the arc tube 20 is narrowed. . As a result, the ultraviolet light generated within the arc tube 20 sufficiently reaches the object to be irradiated, such as the fluid passing around the jacket tube 100. Note that it is also possible to install the connecting portion away from the arc tube 20 along the lamp axis at a location that does not exceed the outer diameter R1 of the arc tube 20 including the outer electrode 50.

For example, by configuring the outer electrode 50 so that the lamp outer diameter R1 including the outer electrode 50 is in the range of 1.000013 to 1.1 times the outer diameter R0 of the arc tube, ultraviolet rays can be effectively removed. It is possible to irradiate the ultraviolet rays to the irradiated area. In this example, the arc tube has a circular cross section, but it may also have an elliptical cross section, and in that case, the connecting portion may be provided within a range that does not exceed the outer diameter along the long axis of the cross section. Further, in the case of an arc tube with a rectangular cross section, the width of the arc tube along the direction between opposing electrodes may be within the above range. In this case, the small diameter portion may have a rectangular cross section, or may have a circular or elliptical cross section. The connection part of the arc tube with a rectangular cross section should be placed on the outer surface of the small diameter part or in a position facing it, and in a space that does not exceed the outer diameter (or width in the direction between the electrodes) in the radial direction from the lamp axis E. good.

Further, by forming the small diameter portion 21 based on the exhaust pipe during lamp manufacture, connection with the outside power supply portion is facilitated. When the outer electrode 50 is formed of a conductive film, the formation of the reduced diameter portion 28 facilitates the continuous extension of the outer electrode 50 from the light emitting portion 24 toward the small diameter portion 21 . Furthermore, by providing the cylindrical portion closer to the end than the reduced diameter portion, it is possible to realize various connection methods such as a socket type, wire winding method, and band fixing method. In particular, since the small diameter portion can be formed based on the exhaust pipe, there is no need to add a new manufacturing process.

Since the outer electrode 50 is provided over the small diameter portion 21, it is possible to connect to the outer power supply line 70 at the same time as attaching it to the jacket tube 100. The coil spring 130 can easily be configured as a connection part. Note that instead of integrally providing the outer electrode across both the light emitting portion 24 and the small diameter portion 21, the light emitting portion 24 may be configured with an outer electrode such as a wound wire, and a conductive film such as a metal film may be formed on the small diameter portion 21. Alternatively, the wire may be connected to the winding wire.

On the other hand, even in the configuration in which the outer electrode 50 and the outer power supply line 70 are connected by a conductive band, by wrapping the conductive band around the small diameter portion 21, the outer diameter R1 of the arc tube 20 including the end of the band up to the outer electrode 50 It can be ensured that it does not exceed.

Although the configuration in which the excimer lamp 10 is disposed inside the jacket tube 100 has been described above, it is also possible to effectively emit ultraviolet rays to the irradiated object even when the excimer lamp 10 is disposed close to the outer surface of a container equipped with a protection tube or an irradiation window, or other containers. can be irradiated to

10 excimer lamp 20 arc tube 24 light emitting part 30 dielectric 40 inner electrode 50 outer electrode 60 inner power supply line (inner power supply part)
70 Outside power supply line (outside power supply part)

Claims (6)

an arc tube filled with discharge gas;
an electrode provided on the outer surface of the arc tube and connected to a power supply part,
An electrical connection between the electrode and the power supply section is provided at a position that does not exceed the outer diameter of the arc tube or the width of the arc tube in the interelectrode direction,
The arc tube has a small diameter portion on at least one lamp end side, the outer diameter of which is smaller than that of the light emitting portion including the central portion;
The electrical connection part is provided in a range where the small diameter part is located along the lamp axis,
An excimer lamp characterized in that the small diameter portion is formed based on an exhaust pipe formed for evacuation and/or gas filling during lamp manufacture. an arc tube filled with discharge gas;
an electrode provided on the outer surface of the arc tube and connected to a power supply part,
An electrical connection between the electrode and the power supply section is provided at a position that does not exceed the outer diameter of the arc tube or the width of the arc tube in the interelectrode direction,
The arc tube has a small diameter portion on at least one lamp end side, the outer diameter of which is smaller than that of the light emitting portion including the central portion;
The electrical connection part is provided in a range where the small diameter part is located along the lamp axis,
An excimer lamp characterized in that an electrically conductive film is provided that is electrically connected to the electrode and covers an outer surface of at least a portion of the small diameter portion. The electrical connection portion covers a contact portion in a conductive socket into which the small diameter portion can be inserted, a contact portion when a conductive spring connected to the conductive film is brought into contact, and an outer surface of the small diameter portion. 3. The excimer lamp according to claim 2 , wherein the excimer lamp is configured as a contact portion when a conductive band is wound around the small diameter portion or a contact portion when an outer power supply line is wound around the small diameter portion. an arc tube filled with discharge gas;
an electrode provided on the outer surface of the arc tube and connected to a power supply part,
An electrical connection between the electrode and the power supply section is provided at a position that does not exceed the outer diameter of the arc tube or the width of the arc tube in the interelectrode direction,
The arc tube has a small diameter portion on at least one lamp end side, the outer diameter of which is smaller than that of the light emitting portion including the central portion ;
The electrical connection part is provided in a range where the small diameter part is located along the lamp axis,
the electrode is comprised of a conductive winding wound around the outer surface of the arc tube;
The excimer lamp is characterized in that the electrical connection part is configured with a conductive band that connects to an outer power supply line and covers the winding wire wound on the outer surface of the small diameter part. an arc tube filled with discharge gas;
an electrode provided on the outer surface of the arc tube and connected to a power supply part,
An electrical connection between the electrode and the power supply section is provided at a position that does not exceed the outer diameter of the arc tube or the width of the arc tube in the interelectrode direction,
An excimer lamp characterized in that an outer diameter of the lamp including the electrode is 1.000013 to 1.1 times the outer diameter of the arc tube . An excimer lamp having an outer electrode provided on the outer surface of the arc tube and a conductive portion electrically connected to the outer electrode provided in a small diameter portion formed on the end side of the arc tube is inserted into the jacket tube,
The conductive portion is connected to a connecting portion that is electrically connected to an outer power feeding portion provided in the jacket tube by pushing the excimer lamp in the lamp axial direction or rotating the excimer lamp in the circumferential direction. How to install an excimer lamp inside a pipe.

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