TW202247246A - Excimer lamp, lighting method of excimer lamp, and method for producing excimer lamp capable of performing lamp lighting by efficient main discharge - Google Patents

Abstract

The present invention provides an excimer lamp capable of performing lamp lighting by efficient main discharge by improving the starting capability of lamp lighting. The excimer lamp (10) has an outer tube (20) and an inner tube (50) coaxially arranged in the outer tube (20). The inner tube (50) covers the inner electrode (30). A main discharge space (S1) is formed between the outer tube (20) and the inner tube (50). In addition, a discharge space (auxiliary discharge space) S2 for lighting and starting assistance is formed between the inner electrode (30) and the inner tube (50).

Description

Excimer lamp, illumination method of excimer lamp, and manufacturing method of excimer lamp

The present invention relates to an excimer lamp, especially relates to the composition of a discharge space.

As an excimer lamp, a double tube structure lamp is known (refer patent document 1). Here, a dielectric covering a foil-shaped inner electrode is arranged in the discharge tube, and a voltage is applied between the outer electrode and the inner electrode provided on the outer surface of the discharge tube. Accordingly, excimer light such as ultraviolet rays is emitted from the discharge space formed between the dielectric and the discharge tube.

In addition, an excimer lamp is known that has a starting assist function of discharging at a voltage lower than a discharge start voltage in order to reliably illuminate a high-output excimer lamp (see Patent Document 2). Here, in the inner tube of the double-tube structure lamp, a discharge space for start-up assistance in which gas with low start-up voltage is enclosed is formed along the lamp axis direction. Discharge occurs in the main discharge space by irradiating the gas in the main discharge space with ultraviolet light emitted from the discharge space for start-up assistance. [Prior patent documents] [Patent Document]

[Patent Document 1] JP-A-2012-38658 [Patent Document 2] JP-A-2017-4702

[Problem to be solved by the invention]

It is desired to provide an excimer lamp which can be illuminated by an effective main discharge in a state where the lighting startability of the lamp is improved. [means used to solve a problem]

The excimer lamp of the present invention comprises: a dielectric covering the foil-shaped electrode disposed along the lamp axis; and a discharge vessel welded to the dielectric to form a main discharge space. Moreover, in the range of the lamp axis direction of the main discharge space, the foil-shaped electrode is partially sealed with the dielectric material, and partially sealed to form an auxiliary discharge space inside the dielectric. Here, "sealed" means that the foil-shaped electrode and the dielectric are fused so as to be sealed (airtight).

When an excimer lamp that uniformly irradiates ultraviolet rays to the entire main discharge space forms a start-up auxiliary discharge space in the inner tube, the input voltage in the normal (rated) lighting state is determined taking into account the main discharge space and the start-up. The voltage value of both sides of the auxiliary discharge space. Therefore, the voltage (electric power) required for lighting the lamp increases, affecting lamp durability, lamp life, and the like. In the excimer lamp of the present invention, in the lighting of the lamp by the main discharge, the electric power can be suppressed and the lighting can be performed efficiently.

The foil-shaped electrode is welded to the dielectric at the end of at least one of the foil-shaped electrodes in the longitudinal direction; the auxiliary discharge space is in a manner that the electric field intensity is different in at least one direction along the lamp axis direction and the lamp circumferential direction , may be formed between the surface of the foil electrode and the inner surface of the dielectric.

For example, the foil-shaped electrode is sealed with the dielectric in the area of low electric field intensity along at least one direction of the lamp axis direction of the foil-shaped electrode and the circumferential direction of the lamp, and the auxiliary discharge space can be formed in the area of high electric field intensity . The edge of the foil-shaped electrode may be formed in the auxiliary discharge space and separated from the inner surface of the dielectric.

Alternatively, the foil-shaped electrode is sealed with the dielectric in the area of high electric field intensity along at least one direction of the lamp axis direction of the foil-shaped electrode and the circumferential direction of the lamp, and the auxiliary discharge space can be formed in the area of low electric field intensity . The edge of the foil-shaped electrode is formed in the auxiliary discharge space and welded to the dielectric.

As the composition of the discharge vessel, it can be configured such that the head end position of the dielectric body enters the small diameter portion provided at the head end of the discharge vessel; the head end position of the foil electrode along the lamp axis is located at a lower position than the The small diameter part is close to the rear end side. Here, "into the small-diameter part" means that the head end position of the head end part is located closer to the bottom surface side of the small-diameter part than the end part of the small-diameter part on the lamp center side along the container axis direction.

The auxiliary discharge space can be formed such that the distance between the dielectric and the foil electrode along the width direction of the foil electrode is shorter at the edge side than at the center. In addition, the auxiliary discharge space can be formed such that the distance between the dielectric and the foil electrode along the longitudinal direction of the foil electrode is shorter at the ends than at the center.

According to an illumination method of an excimer lamp according to an aspect of the present invention, the excimer lamp includes an inner tube and an outer tube, the inner tube covers the inner electrode arranged along the direction of the lamp axis, the outer tube and the inner tube The enlarged diameter part is welded to form a main discharge space with the inner tube. The illumination method of the excimer lamp is: an auxiliary discharge space is formed between the surface of the inner electrode and the inner surface of the inner tube; Part of the light emitted from the auxiliary discharge space toward the lamp axis is irradiated to the main discharge space through the head end portion of the inner tube opposite to each diameter portion and the enlarged diameter portion.

A method of manufacturing an excimer lamp according to an aspect of the present invention includes: an inserting step of inserting a foil-shaped inner electrode into a glass tube that becomes an inner tube; and a sealing or sealing step of making the inside of the inner tube in a reduced pressure state and sealing, or enclosing a rare gas into the inner tube under atmospheric pressure; and the sealing step is to heat and shrink the inner tube in order to form an auxiliary discharge space in at least a part of the inner tube along the direction of the tube axis. diameter, and partially sealed with the inner electrode. For example, the main discharge space is formed by integrally heating and welding the outer pipe and the enlarged diameter portion of the inner pipe.

On the other hand, the following excimer lamps can be provided as other forms of excimer lamps that can realize lamp illumination by an efficient main discharge while improving lamp lighting startability. That is, the excimer lamp of the present invention includes: a first dielectric covering the foil-shaped electrodes disposed along the lamp axis; a second dielectric covering the first dielectric; and a discharge vessel welded to the second dielectric. , and form the main discharge space. Furthermore, in the lamp axis direction range of the main discharge space, the first dielectric and the second dielectric are partially welded to form an auxiliary discharge space between the first dielectric and the second dielectric.

An excimer lamp in which a start-up auxiliary discharge space is formed in the entire inner tube, irradiates ultraviolet rays with uniform intensity from the main discharge space to the outside of the lamp. However, in ultraviolet irradiation devices equipped with excimer lamps, ozone generators, etc., it is also required to generate a partial discharge state in the main discharge to suppress the intensity of ultraviolet light (illumination) or the concentration of ozone generation. In the present invention, a desired discharge state is generated in the main discharge space in order to improve the lighting startability of the lamp.

The first dielectric can be welded to the second dielectric at least at both ends of the first dielectric in the longitudinal direction, and the auxiliary discharge space is in such a way that the electric field intensity is different in at least one direction along the lamp axis direction and the lamp circumferential direction , may be formed between the outer surface of the first dielectric and the inner surface of the second dielectric.

For example, the foil-shaped electrode is along at least one direction of the lamp axis direction of the foil-shaped electrode and the circumferential direction of the lamp, the first dielectric and the second dielectric are fused in the area of low electric field intensity, and auxiliary discharge can be formed in the area of high electric field intensity space. In this case, an auxiliary discharge space may be formed between the outer surface of the first dielectric material corresponding to the portion covering the edge of the foil electrode and the inner surface of the second dielectric material.

Alternatively, the first dielectric is welded to the second dielectric in a region of high electric field intensity along at least one of the lamp axis direction of the foil electrode and the lamp circumferential direction, and an auxiliary discharge space can be formed in a region of low electric field intensity. In this case, the auxiliary discharge space may be formed between the outer surface of the first dielectric and the inner surface of the second dielectric corresponding to the portion covering the edge of the foil-shaped electrode.

It can be configured such that the head end position of the head end portion of the first dielectric and/or the second dielectric body enters the small diameter portion provided at the head end of the discharge vessel; the head end position of the foil electrode along the lamp axis is located at a smaller diameter than near the rear end side. Here, "into the small-diameter part" means that the head end position of the head end is located closer to the bottom surface side of the small-diameter part than the end part of the small-diameter part on the lamp center side along the container axis direction.

The auxiliary discharge space can be formed such that the distance between the first dielectric and the second dielectric along the width direction of the foil electrode is shorter on the edge side than on the center. In addition, the auxiliary discharge space can be formed such that the distance between the first dielectric and the second dielectric along the longitudinal direction of the foil-shaped electrode is shorter at the ends than at the center.

Another aspect of the present invention is an illumination method for an excimer lamp. The excimer lamp includes: an inner tube comprising a first dielectric covering an inner electrode arranged along the lamp axis; and a first dielectric covering the first dielectric. The second dielectric is formed; and the outer tube is welded with the enlarged diameter part of the inner tube to form the main discharge space; in the range of the lamp axis direction of the main discharge space, the outer surface of the first dielectric and the second dielectric An auxiliary discharge space is formed between the inner surfaces; part of the light emitted from the auxiliary discharge space toward the lamp axis is irradiated to the main discharge space through the head end and the enlarged diameter portion of the inner tube on the side of the main discharge space.

The method for manufacturing an excimer lamp according to another aspect of the present invention includes: an inserting or coating step, inserting an inner electrode into a glass tube to become a coated tube, or coating the inner electrode with a dielectric to become a coated tube; the inserting step, is The coating tube is inserted into the glass tube that becomes the inner tube; the sealing or sealing step is to make the inner tube into a reduced pressure state and seal it, or seal the rare gas into the inner tube under atmospheric pressure; and the welding step is to seal the inner tube. An auxiliary discharge space is formed between the inner tube and the inner tube along the tube axis direction, and the inner tube is heated and reduced in diameter, so that the inner tube and the coated tube are partially welded. For example, the main discharge space is formed by integrally heating and welding the outer tube and the enlarged diameter portion of the inner tube.

On the other hand, the following excimer lamp is provided as another form of an excimer lamp capable of realizing lamp illumination by an efficient main discharge while improving lamp lighting startability. That is, the excimer lamp of the present invention comprises: a dielectric, which covers the foil-shaped electrodes arranged along the lamp axis; and a discharge vessel, which is welded with the dielectric to form a main discharge space; The extended extension. Furthermore, in the extended portion, the foil electrode and the dielectric are partially sealed to form an auxiliary discharge space inside the dielectric. Here, "sealed" means that the foil-shaped electrode and the dielectric are fused so as to be sealed (airtight).

In the excimer lamp in which the discharge space for starting support is formed in the whole inner tube, since the main discharge space and the discharge space for starting support are formed concentrically, there are restrictions on the size of the discharge tube. As a result, for example, it may be difficult to arrange the excimer lamp in the tube with a small gap interval. In the present invention, it is possible to adapt to various usage environments by improving the lighting startability of the lamp.

The auxiliary discharge space can be formed between the surface of the inner electrode and the inner surface of the dielectric so that the electric field intensity differs in at least one of the lamp axis direction and the lamp circumferential direction. For example, the electric field strength can be varied according to the cross-sectional shape of the foil electrode, the method of changing the space region near the boundary between the sealed portion of the foil electrode and the dielectric and the auxiliary discharge space, and the like.

For example, the foil-shaped electrode system may be formed so that the width of the edge portion is narrower than the width of the center portion in the width direction (knife-edge shape, etc.). In this case, the edge of the foil-shaped electrode can be formed to be separated from the inner surface of the dielectric in the auxiliary discharge space, and the electric field intensity can be varied along the circumferential direction of the lamp. Alternatively, the edge of the foil-shaped electrode may be sealed with the dielectric in the auxiliary discharge space, and the electric field intensity along the lamp axis direction may be different near the boundary.

The foil-shaped electrode system may also be composed of a single body, or may be composed of a plurality of foil-shaped electrodes. For example, the foil-shaped electrode system can be composed of a first electrode part and a second electrode part, and the first electrode part is arranged inside the discharge vessel, and the second electrode part is connected to the first foil-shaped electrode by a power supply line or the like. The parts are electrically connected and arranged inside the extension part.

As the configuration of the discharge vessel, for example, it can be configured such that the head end position of the head end of the dielectric enters the small diameter portion provided at the head end of the discharge vessel, and the head end position of the foil-shaped electrode along the lamp axis is located at a position smaller than the diameter. near the rear end side.

The auxiliary discharge space can be formed such that the distance between the dielectric and the foil electrode along the width direction of the foil electrode is shorter on the edge side than on the center. In addition, the auxiliary discharge space can be formed such that the distance between the dielectric and the foil electrode along the longitudinal direction of the foil electrode is shorter at the ends than at the center.

An illumination method for an excimer lamp according to another aspect of the present invention is to form an auxiliary discharge between the surface of the inner electrode and the inner surface of the inner tube at the extended portion extending from the enlarged diameter portion of the inner tube to the outside of the outer tube. Space: Part of the light radiated from the auxiliary discharge space toward the lamp axis is irradiated to the main discharge space through the head end and diameter-enlarged portion of the inner tube on the side of the main discharge space.

The method for manufacturing an excimer lamp according to another aspect of the present invention includes: an inserting step of inserting a foil-shaped inner electrode into the glass tube that becomes the inner tube; state and seal, or enclose rare gas into the inner tube under atmospheric pressure; the partial welding step is to form an auxiliary discharge space in at least a part of the inner tube along the direction of the tube axis, heat and shrink the inner tube, And the inner tube and the inner electrode are partially welded; and the welding step is to insert the inner tube into the glass tube that becomes the discharge tube, and weld the outer tube and the inner tube to form a part of the inner tube extending from the discharge tube. [Efficacy of the invention]

According to the present invention, it is possible to provide an excimer lamp which can be illuminated by an effective main discharge in a state where the lighting startability of the lamp is improved.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

Fig. 1 is a schematic cross-sectional view of an excimer lamp according to a first embodiment seen from a side. Fig. 2 is a schematic cross-sectional view of the excimer lamp according to the first embodiment viewed from the axial side. Fig. 2 is a sectional view corresponding to line BB in Fig. 1 . The sectional view in FIG. 1 corresponds to a sectional view along the central axis of the lamp in FIG. 2 .

The excimer lamp 10 has a discharge vessel 10T formed by an outer tube 20 and an inner tube 50 having a substantially cylindrical cross section, and the discharge vessel 10T is made of a dielectric material such as quartz glass. A strip-shaped foil-shaped electrode (hereinafter, referred to as an inner electrode) 30 extending along the tube diameter direction (hereinafter, also referred to as the lamp diameter direction) is formed along the tube axis (hereinafter, also referred to as the lamp axis). C is covered with a columnar dielectric (hereinafter referred to as inner tube) 50 . The inner electrode 30 is not exposed in an annular discharge space (hereinafter referred to as a main discharge space) S1 formed between the outer tube 20 and the inner tube 50 . The inner tube 50 is formed here in a substantially circular cross-section. In addition, the inner electrode 30 may be embedded in the inner tube 50 .

The inner tube 50 is arranged coaxially to the outer tube 20 . The inner electrode 30 is arranged coaxially with respect to the outer tube 20 so that the central position in the width direction and the thickness direction thereof is aligned with the lamp axis C. As shown in FIG. The inner electrodes 30 are arranged symmetrically with respect to the tube axis C. As shown in FIG. The outer tube 20 is heated and welded integrally with the enlarged diameter portion 51 of the inner tube 50 at one end portion 20T2, thereby forming a discharge space (main discharge space) S1.

In the main discharge space S1, a rare gas such as xenon gas or a mixed gas of a rare gas and a halogen gas is sealed as a discharge gas. The sealing pressure of the discharge gas is determined to be, for example, 5kPa to 150kPa.

Discharge vessel 10T is provided with protruding protruding portions (hereinafter referred to as small diameter portion) 22 and 52 at both ends of fixed diameter portion (hereinafter referred to as cylindrical portion) 20T0 surrounding main discharge space S1. The small-diameter part 52 refers to a part with a small outer diameter, which is a part of the rear end side of the inner tube 50 extending along the lamp axis C beyond the end 20T2 of the outer tube 20, and is not covered by the outer tube 20, through which the power supply line 70 penetrates. inside of the small-diameter portion 52 .

The small-diameter portion 22 is formed during the lamp manufacturing process, and protrudes from the discharge vessel 10T (outer tube 20 ) along the lamp axis C toward the head end of the lamp. Here, the tip end side of the outer tube 20 is heated and deformed to reduce the diameter, and a tip tube having a smaller diameter than the outer tube 20 is welded, whereby the small-diameter portion 22 is integrally formed. Here, the range of the discharge vessel 10T in the lamp axis direction includes the small diameter portion 22 whose outer diameter and inner diameter are smaller than the range (axial arrangement range) L along the lamp axis direction where the outer electrode 40 is arranged. part of the interval.

The end portion 50T1 of the inner tube 50 is located in the space region of the small-diameter portion 22 at its head end portion, and the end portion 50T1 of the inner tube 50 is in contact with the small-diameter portion 22 . Thereby, the inner tube 50 is stably held coaxially within the outer tube 20 . Also, the outer surface of the end portion 50T1 of the inner tube 50 has a tapered convex shape, and the inner surface of the small-diameter portion 22 has a tapered concave shape. Thereby, the dimensional error caused by thermoforming each of the inner tube 50 and the outer tube 20 will not be damaged, and the inner tube 50 can be held stably in a coaxial shape. Forming such a fitting state, on the other hand, the position of the head end portion 30T1 of the inner electrode 30 along the lamp axis C does not enter the inner space of the small diameter portion 22, but is located closer to the rear end than the small diameter portion 22. (the center of the discharge vessel) side.

On the outer surface 20S of the outer tube 20, an electrode (hereinafter referred to as an outer electrode) 40 is arranged. The outer electrodes 40 are provided here, and linear electrode portions made of conductive metal are arranged so as to overlap along the surface of the outer tube 20, and are arranged at predetermined intervals along the tube axis C. coiled in a helical shape.

The axial arrangement range L of the outer electrode 40 is determined as a cylindrical portion 20T0 which is a portion with a fixed inner diameter between the thinner end portions 20T1 and 20T2 of the outer tube 20 . The axial length of the inner electrode 30 here corresponds to the axial arrangement range L of the outer electrode 40 . The power supply line 70 connected to the end of the inner electrode 30 is connected to a power supply unit (not shown) arranged outside, and power is supplied to the excimer lamp 10 through the power supply line 70 .

Excimer light is radiated from the discharge space S1 by applying a high frequency (for example, a range of several kHz to several tens of MHz) and a high voltage (for example, a range of several kV to tens of kV) to the inner electrode and the outer electrode. Here, ultraviolet light (for example, wavelength 172nm) is emitted outside the discharge vessel. Therefore, the excimer lamp 10 can be applied to an ozone generating device that performs sterilization and deodorization by ozone generation, and can also be applied to an ultraviolet irradiation device that directly irradiates an object with ultraviolet rays.

Between the inner electrode 30 and the inner tube 50, a discharge space (hereinafter, referred to as an auxiliary discharge space) S2 for assisting lighting startup is formed. As shown in FIG. 1, both ends 30T1, 30T2 of the inner electrode 30 in the axial direction are welded (sealed) to the inner tube 50 over the entire circumference thereof. On the other hand, between the two end portions 30T1, 30T2 of the inner electrode 30 and including the central portion of the discharge vessel 10T in the direction of the lamp axis, only the two edge portions 30T3, 30T3, The 30T4 is welded to the inner tube 50 . Thereby, the auxiliary discharge space S2 is formed.

Here, the range (auxiliary discharge space range) M of the auxiliary discharge space S2 along the lamp axis C is determined to be a section shorter than the axial arrangement range of the inner electrode 30. The axis of the inner electrode 30 The direction arrangement range corresponds to the axial arrangement range L of the outer electrode 40 .

The auxiliary discharge space S2 is composed of two discharge space regions S2A, S2B. The discharge space regions S2A, S2B are respectively connected to the inner tube 50 facing the two side surfaces 30S1, 30S2 (refer to FIG. 2 ) of the foil-shaped inner electrode 30. surrounded by the inner surface. The cross-sectional shapes of the discharge space regions S2A and S2B are symmetrical with respect to the inner electrode 30 and the lamp axis C. As shown in FIG.

Also, both edge portions 30T3 and 30T4 of the foil-shaped inner electrode 30 are blade-shaped, and the inner electrode 30 becomes sharper from the center in the width direction toward the edge (end). The thickness of the part is thin, and the two edge parts 30T3 and 30T4 are sharp.

Therefore, in the cross-sectional shape of the discharge space regions S2A, S2B in the direction of the lamp diameter, the length of the separation distance means that the length T1 of the separation distance near the center (lamp central axis) is larger than that of the two edge portions 30T3, 30T4 of the inner electrode 30. The length T2 of the adjacent separation distance is longer, and the separation distance is the separation distance between the inner surface of the inner tube 50 and the surface of the inner electrode 30 along the thickness direction of the inner electrode 30, and the discharge space regions S2A, S2B are towards the outer tube. Both edge parts 30T3 and 30T4 of 20 are tapered.

In addition, in the vicinity of both ends (both ends of the auxiliary discharge space range M) ST1 and ST2 of the inner surface of the inner tube 50 exposed in the auxiliary discharge space S2, the distance between the inner electrode 30 and the inner tube 50 gradually changes. The discharge space area becomes shorter and narrower, and becomes sharper toward both ends 30T1 and 30T2 of the inner electrode 30 . Furthermore, the distance between the side surfaces 30S1 and 30S2 of the inner electrode 30 and the two edges 30T3 and 30T4 of the inner electrode 30 gradually decreases, and the inner tube 50 and the inner electrode 30 are sealed together.

That is, the auxiliary discharge space S2 (discharge space regions S2A, S2B) is oriented toward the ends 30T1, 30T2 in the longitudinal direction (lamp axis direction) and in the width direction (lamp radial direction) along the surface of the foil-shaped inner electrode 30 . The edge portion 30T3, 30T4 of the edge portion 30T3, the space area narrows and becomes sharp.

Both ends 30T1 and 30T2 of the inner electrode 30 are in contact with each other while embedded in the inner tube 50, and are not exposed in the auxiliary discharge space S2. Both edges 30T3 and 30T4 of the inner electrode 30 are in contact with the inner tube 50 in the range M of the auxiliary discharge space along the lamp axis, and are not exposed in the auxiliary discharge space S2. Therefore, the two discharge space regions S2A and S2B constituting the auxiliary discharge space S2 are spatially blocked by the inner electrode 30 .

As described above, since the edge portions 30T3 and 30T4 of the inner electrode 30 have a blade shape, electric field concentration occurs in the vicinity thereof. Similarly, electric field concentration occurs near the end portions 30T1 and 30T2 of the inner electrode 30 as well. However, since the edge portions 30T3, 30T4 and the end portions 30T1, 30T2 of the inner electrode 30 are not exposed in the auxiliary discharge space S2, consumption due to the discharge of the inner electrode 30 can be suppressed.

In addition, the auxiliary discharge space S2 is in a reduced pressure state lower than the atmospheric pressure as will be described later. In addition, a rare gas (below atmospheric pressure) that lowers the voltage at the time of lighting activation may be enclosed in the auxiliary discharge space S2.

When a high-frequency high voltage is applied between the inner electrode 30 and the outer electrode 40, since the auxiliary discharge space S2 is in a reduced voltage state, discharge occurs first in the auxiliary discharge space S2 with a lower lighting start voltage than the main discharge space S1. Then, part of the light (ultraviolet rays here) radiated from the auxiliary discharge space S2 toward the lamp radial direction is irradiated to the main discharge space S1 via the inner tube 50 .

Also, part of the light radiated from the discharge generated in the auxiliary discharge space S2 toward the lamp axis is transmitted toward the ends 50T1 and 50T2 by using the optical fiber effect (an effect based on the same principle as the optical fiber used in the communication circuit), The fiber effect is generated by repeated reflections inside the tube wall of the inner tube 50 (the boundary surface of the tube wall).

Here, a part of the end portion 50T1 of the inner tube 50 enters and contacts the small diameter portion 22 , and an enlarged diameter portion 51 is formed on the side of the end portion 50T2 of the inner tube 50 . Therefore, the ultraviolet rays guided to the end portions 50T1 and 50T2 by the fiber effect are irradiated to the main discharge space S1 from the both end portions 20T1 and 20T2 of the outer tube 20 via the end portion 50T1 and the enlarged diameter portion 51 of the inner tube 50 . Thereby, discharge occurs in main discharge space S1.

In this manner, the auxiliary discharge space S2 locally formed in the inner tube 50 improves the lighting startability. On the other hand, since the auxiliary discharge space S2 is sufficient as long as the radiated light reaches the main discharge space S1, it does not secure most of the space inside the inner tube 50, but is formed as a localized discharge space. area. Therefore, the voltage applied between the inner electrode 30 and the outer electrode 40 is suppressed during the time when the main discharge occurs and the lamp is illuminated. By suppressing the required power, the lamp durability and lamp life can be improved.

The illuminance distribution (light distribution) along the outer peripheral surface of the discharge vessel differs depending on the shape of the discharge vessel and the position of the discharge generated inside it. Furthermore, the discharge state is affected by the electric field intensity distribution, which is determined by the positional relationship of the electrodes (anode and cathode), or the shape of the covered tube, the inner tube, and the auxiliary discharge space. However, the above-mentioned excimer lamp 10 does not change the shape or discharge state of the excimer lamp with the conventional double-tube structure, so in the ultraviolet irradiation device or the ozone generating device, the lamp characteristics such as discharge maintenance voltage and illuminance distribution, The suitable power supply characteristics will not be affected, but the lighting startability can be improved.

Illumination startability is the application of voltage to the excimer lamp, which can be controlled by the certainty (probability [%]) of the stable illumination state from the discharge in the discharge vessel to the desired emission spectrum. Excimer lamps require certainty (100% reliability) of lighting start-up even after a low-temperature state, dark state, or long-term rest state. However, in this embodiment, a large-scale lighting power supply or lighting is not used. By starting the auxiliary light source, a stable lighting state can be reliably achieved. That is, it is possible to have substantially 100% certainty of lighting activation.

The two discharge space regions S2A and S2B that are spatially blocked from each other in the auxiliary discharge space S2 are formed by embedding a region with a large electric field strength near the edges 30T3 and 30T4 or the ends 30T1 and 30T2 of the inner electrode 30. An inner tube 50 is formed. Therefore, when a high-frequency high voltage is applied between the inner electrode 30 and the outer electrode 40, a discharge space is formed in a region where the electric field intensity in the circumferential direction of the lamp and in the direction of the lamp axis is small.

However, because the auxiliary discharge space S2 is in a voltage-down state, discharge is likely to occur with a lower lighting starting voltage, and discharge occurs in the space area where the electric field intensity of the main discharge space S1 is high, and it is easy to move to stable (rated) lighting. In this way, the auxiliary discharge is generated in the auxiliary discharge space with a small electric field strength, and transferred to the main discharge in the main discharge space with a high electric field strength, whereby a stable lighting state can be achieved.

On the other hand, the cross-sectional shape of the auxiliary discharge space S2 in the direction of the lamp diameter is substantially uniform along the lamp axis C, and the electric field intensity is not biased along the lamp axis C. Therefore, the ultraviolet rays irradiated from the discharge vessel 10T to the outside of the lamp can have a uniform illuminance distribution along the lamp axis direction C.

The aforementioned excimer lamp 10 can be manufactured, for example, according to the following process.

A cross-sectional cylindrical glass tube (inner tube) serving as a coating material of the foil-shaped electrode (inner electrode) is formed by a dielectric material transparent to light emitted from the discharge formed in the auxiliary discharge space. After the inner tube is formed, the power supply line and the foil-shaped electrode are connected by resistance welding or the like, and the foil-shaped electrode is inserted into the bottomed cylindrical glass tube. After the foil electrode was inserted, the inside of the glass tube was brought into a reduced pressure state (vacuum) and sealed. At this time, a rare gas may be sealed in the glass tube under atmospheric pressure.

When the glass tube is heated while being turned, the glass tube is softened and deformed to shrink (diameter reduction). At this time, only the inner peripheral surface of the glass tube was brought into close contact with the edge portion along the width direction (tube diameter direction) of the foil-shaped electrode. In addition, the heating (shrinkage) is stopped in the state where the edge of the foil electrode is embedded in the glass tube, and a space where the edge of the foil electrode is not exposed and the glass tube and the foil electrode is not in contact is formed as an auxiliary discharge space. .

Also, at the same time as forming the auxiliary discharge space, an edge-shaped (so-called bead-shaped) enlarged diameter portion is formed on one end of the glass tube. In addition, only the portion of the glass tube facing the edge of the foil-shaped electrode may be heated in the axial direction and adhered in a state where the glass tube is not rotated. The end of the foil electrode along the longitudinal direction (tube axis direction) is sealed in the circumferential direction as a whole, so that the end of the foil electrode is buried in the glass tube and is not exposed in the auxiliary discharge space.

As for the outer tube, one end of the quartz tube that is transparent to the wavelength of ultraviolet rays radiated from the main discharge space is reduced in diameter, and an introduction tube (tip tube) with an opening is provided. The end side of the sealing portion of the enlarged diameter portion is opened, whereby an outer tube is formed.

Next, the inner tube is inserted into the outer tube to be arranged coaxially, and the sealing portion is heated and welded to form a discharge tube. Then, vacuumize through the introduction tube to remove impurities, seal the discharge gas in the luminous tube, and then melt it by heating to hermetically seal the introduction tube. Next, the outer electrode is disposed on the outer surface of the outer tube.

Next, an excimer lamp according to a second embodiment will be described using FIG. 3 and FIG. 4 . In the second embodiment, the auxiliary discharge space is provided in the center of the lamp.

Fig. 3 is a schematic cross-sectional view of an excimer lamp according to a second embodiment seen from the side. Fig. 4 is a schematic cross-sectional view of an excimer lamp according to a second embodiment viewed from the axial side.

In the second embodiment, the auxiliary discharge space S2 is formed in the auxiliary discharge space range M of the middle portion of the discharge vessel 10T, that is, the middle portion included in the center in the lamp axis direction. Therefore, a part of the edge portions 30T3 and 30T4 of the inner electrode 30 is exposed in the auxiliary discharge space S2, and a space region with a high electric field intensity is formed in the vicinity thereof.

Also, near the center in the lamp axis direction, the entire circumferential periphery of the inner electrode 30 is exposed, and the auxiliary discharge space S2 is formed so as to surround the entire circumferential periphery of the inner electrode 30 . On the other hand, the axial end portions 30T1 and 30T2 of the inner electrode 30 are sealed to the inner tube 50 over the entire circumference. Here, the range (auxiliary discharge space range) M of the auxiliary discharge space S2 along the lamp axis C is determined to be a part of the range in which the inner electrode 30 is arranged in the axial direction. A part of the range corresponds to the axial arrangement range L of the outer electrode 40 . Also, in the auxiliary discharge space range M, the outer diameter of the inner tube 50 is larger than in other ranges, and the distance between the outer surface of the inner tube 50 and the inner surface of the outer tube 20 is small.

In the vicinity of both ends ST1 and ST2 of the inner surface of the inner tube 50 where the auxiliary discharge space S2 is exposed, the distance between the inner electrode 30 and the inner tube 50 gradually becomes shorter and the space area narrows, and the discharge space area faces the inner tube 50. The sides of both ends 50T1 and 50T2 become sharp. Furthermore, the distance between the side surfaces 30S1 and 30S2 of the inner electrode 30 and the edges 30T3 and 30T4 of the inner electrode 30 gradually decreases, and the inner tube 50 and the inner electrode 30 are sealed together. The outer diameter of the inner tube 50 also decreases gradually, and the outer surface forms a smooth curved surface.

Therefore, in the vicinity of both ends ST1 and ST2 of the inner surface of the inner tube 50 exposed in the auxiliary discharge space S2, similar to the first embodiment, the inner electrode 30 is used to spatially block the circumferential direction. The two discharge space regions are formed, but near the center of the auxiliary discharge space S2 (auxiliary discharge space range M), a discharge space region is formed to surround the entire inner electrode 30 in the circumferential direction.

As shown in FIG. 3 , the spatial shape of the auxiliary discharge space S2 is closer to the central portion of the lamp (the auxiliary discharge space range M), the wider the cross-sectional area in the radial direction, and the closer to the small diameter portions 22 and 22 at both ends of the discharge vessel 10T. On the 52nd side, the space area is narrower. Therefore, in the central portion of the auxiliary discharge space S2 along the lamp axis C, the distance L1 between the two edge portions 30T3, 30T4 of the inner electrode 30 and the inner peripheral surface of the inner tube 50 along the lamp radial direction is on the inner side. The distance L2 between the two edge portions 30T3, 30T4 of the inner electrode 30 and the inner peripheral surface of the inner tube 50 near both ends ST1, ST2 of the inner surface of the tube 50 exposed in the auxiliary discharge space S2 along the lamp radial direction longer.

Also, as shown in FIG. 4, the closer the auxiliary discharge space S2 is to the central portion of the inner electrode 30 in the width direction (lamp radial direction), the wider the cross-sectional area in the radial direction becomes. The length of the separation distance is the length T1 of the separation distance along the thickness direction near the central portion (lamp central axis) to the length T2 ( L1) in FIG. 3 is longer, and the separation distance is the separation distance between the inner surface of the inner tube 50 and the surface of the inner electrode 30 along the lamp radial direction.

That is, the auxiliary discharge space S2 faces the end portions 30T1, 30T2 in the longitudinal direction (lamp axis direction) and the edge portions 30T3, 30T4 in the width direction (lamp radial direction) of the foil-shaped inner electrode 30, and the space area becomes narrow composition.

Most of both ends 30T1 and 30T2 of the inner electrode 30 are in contact with the inner tube 50, and part of both edges 30T3 and 30T4 of the inner electrode 30 are exposed in the auxiliary discharge space S2. The auxiliary discharge space S2 forms a space region with a large electric field intensity. Thereby, the discharge in the auxiliary discharge space S2 can be generated first with a lower lighting starting voltage than that of the main discharge space S1. In addition, the electric power required for lighting the lamp can be suppressed, and the consumption due to the discharge of the inner electrode 30 (especially the edge portion) can be suppressed.

On the other hand, the central portion of the auxiliary discharge space S2 is constituted as a discharge space area surrounded by the inner surface of the inner tube 50 which covers the exposed surface of the inner electrode 30 on both sides 30S1, 30S2. In the entire circumferential direction of the range in the axial direction, and in the vicinity of both ends ST1 and ST2 of the inner surface of the inner tube 50 exposed in the auxiliary discharge space S2, as shown in the first embodiment, the inner electrode 30 is formed to face each other. In the state of the discharge space region, the distance between the inner tube 50 and the inner electrode 30 is narrowed, and the entire circumferential direction is finally sealed.

According to such a configuration, ultraviolet rays can be radiated toward the entire discharge space S1, and a stable main discharge can be realized in the discharge space S1. On the other hand, the auxiliary discharge space S2 is determined in a part of the axial arrangement range of the inner electrode 30 so that the electric field intensity becomes substantially uniform along the lamp axis C. Therefore, the ultraviolet rays irradiated from the discharge vessel 10T to the outside of the lamp can have a uniform illuminance distribution in the direction C of the lamp axis.

Also, the change of the spatial area of the auxiliary discharge space S2 becomes gradual, that is, the change of the shape of the inner surface of the inner tube 50 becomes smooth, and the stability of the lamp intensity affected by the stress concentration on the curved surface portion is improved. Therefore, when the inner tube 50 is degraded (brittle) by the high-energy ultraviolet rays generated by the main discharge in the discharge space S1, damage to the discharge vessel 10T starting from the portion covering the auxiliary discharge space S2 can be prevented. In addition, as in the first embodiment, the inner surface of the inner tube 50 and the edge portion of the inner surface of the inner electrode 30 may be in contact with each other.

The excimer lamp 10 described above can be manufactured according to the same process as that of the first embodiment. However, in the second embodiment, in order to form the above-mentioned auxiliary discharge space S2 in the central part of the inner tube, the inner tube inserted and covered with the inner electrode is heated and reduced in diameter, and the heating is stopped at a predetermined timing. For example, the auxiliary discharge space is formed by not heating (weakening) the range in the lamp axis direction corresponding to the range M of the auxiliary discharge space, and suppressing (stopping) shrinkage of the glass tube due to softening. The inner surface of the inner tube 50 may be in contact with the surface (especially the edge) of the inner electrode 30 .

Next, an excimer lamp according to a third embodiment will be described using FIG. 5 and FIG. 6 . In the third embodiment, an auxiliary discharge space is formed at the end of the discharge vessel (inner tube).

Fig. 5 is a schematic cross-sectional view of an excimer lamp according to a third embodiment seen from the side. Fig. 6 is a schematic cross-sectional view of an excimer lamp according to a third embodiment seen from the axial side.

In the third embodiment, the auxiliary discharge space S2 is formed in the auxiliary discharge space range M at the head end of the discharge vessel 10T, that is, near one end 50T1 of the inner tube 50 along the lamp axis C. Therefore, the end portion 30T1 of one side (head end side) of the inner electrode 30 and a portion of both edge portions 30T3 and 30T4 (that is, the inner side including the corner where the two edge portions 30T3 and 30T4 of the inner electrode 30 intersect with the end portion 30T1 The vicinity of the electrode portion) is exposed in the auxiliary discharge space S2, and forms a space region with a large electric field intensity in its vicinity.

Also, the end surface 30E of the inner electrode 30 corresponds to the position at which the distance from the inner surface of the end portion 50T1 of the inner tube 50 in the auxiliary discharge space S2 becomes the largest, and the same position as that of the outer electrode is arranged near the end portion 50T1 of the inner tube 50. In the case of a potential (grounded) conductive member, a space region with a high electric field intensity is formed on the end 50T1 side of the inner tube 50, thereby preventing abnormal discharge near the end 20T1 of the outer tube 20.

For example, the distance between the tip (corner) of the end surface 30E of the inner electrode 30 along the lamp axis C and the bottom of the inner surface of the inner tube 50 may be the largest. On the other hand, the other end (rear end side) of the inner electrode 30 including the center in the lamp axis direction is sealed to the inner tube 50 over its entire circumference.

Here, the range (auxiliary discharge space range) M of the auxiliary discharge space S2 along the lamp axis C includes a part of the axial arrangement range of the inner electrode 30 corresponding to the axial arrangement range L of the outer electrode 40 . On the other hand, the auxiliary discharge space range M extends toward the head end side of the lamp, and part of it is determined to be a section protruding from the end portion 30T1 of the inner electrode 30 . Abnormal discharge in the vicinity of the end portion 20T2 of the outer tube 20 can be suppressed by constituting that no spatial region with a large electric field intensity is formed on the end portion 50T2 side of the inner tube 50 . Also, in the auxiliary discharge space range M, the outer diameter of the inner tube 50 is larger than in other ranges, and the distance between the outer surface of the inner tube 50 and the inner surface of the outer tube 20 is small.

The auxiliary discharge space S2 is provided so as to protrude toward the small-diameter portion 22 from a space region where the outer electrode 40 and the inner electrode 30 face each other along the lamp radial direction to a space region where they do not face each other. The inner surface of the end portion 50T1 of the inner tube 50 forming the auxiliary discharge space S2 has a tapered convex curved shape, and is fitted with the inner surface of the small-diameter portion 22. On the other hand, the tip of the inner electrode 30 The position of the portion 30T1 along the lamp axis C does not enter the inner space of the small-diameter portion 22 , but is located closer to the rear end (the center of the discharge vessel) than the small-diameter portion 22 .

As shown in Figure 5, the spatial shape of the auxiliary discharge space S2 is closer to the central part of the auxiliary discharge space S2, the wider the discharge space area in the radial section, and the closer to the small diameter parts 22, 52 at both ends of the discharge vessel 10T. side, the narrower the space area. Therefore, the distance L1 between the two edges 30T3, 30T4 of the end surface 30E of the inner electrode 30 and the inner surface of the inner tube 50 along the lamp radial direction of the inner electrode 30 is larger than that exposed in the auxiliary discharge space S2 of the inner tube 50. The distance between the two edge portions 30T3 and 30T4 of the end portion ST2 on the inner surface and the inner surface of the inner tube 50 along the lamp radial direction of the inner electrode 30 is longer than the distance L2. The outer diameter of the inner tube 50 also decreases gradually, and the outer surface forms a smooth curved surface.

Also, as shown in FIG. 6, the closer the auxiliary discharge space S2 is to the central portion of the inner electrode 30 in the width direction (lamp radial direction), the wider the cross-sectional area in the radial direction becomes. Therefore, the length of the separation distance is the length T1 of the separation distance along the thickness direction near the central portion (lamp central axis) of the two side surfaces 30S1, 30S2 of the inner electrode 30 than the length T1 of the separation distance near the two edge portions 30T3, 30T4 of the inner electrode 30. The length T2 of the separation distance along the width direction is longer, and the separation distance is the separation distance between the inner surface of the inner tube 50 and the surface of the inner electrode 30 along the lamp radial direction. Therefore, the auxiliary discharge space S2 narrows toward the edge portions 30T3 and 30T4 of the inner electrode 30 .

That is, the auxiliary discharge space S2 is directed along the end portions 30T1, 30T2 in the longitudinal direction (lamp axis direction) and the edge portions 30T3, 30T4 in the width direction (lamp radial direction) along the surface of the foil-shaped inner electrode 30, The spatial region narrows.

Most of the end portion 30T2 of the inner electrode 30 including the central rear end side in the lamp axis direction is in contact with the inner tube 50 . Furthermore, the tip side end 30T1 of the inner electrode 30 and a portion of the tip side of the both edge portions 30T3, 30T4, that is, include the corner where the both edge portions 30T3, 30T4 of the inner electrode 30 intersect with the end portion 30T1. The vicinity of the tip portion of the inner electrode is exposed in the auxiliary discharge space S2.

In the auxiliary discharge space S2 in the reduced voltage state, since a space region with a large electric field intensity is formed near the end portion 20T1 of the discharge vessel 20T on the head end side, discharge occurs in the auxiliary discharge space S2 earlier than in the main discharge space S1. By setting a low lighting starting voltage, abnormal discharge at the end 20T1 side can be suppressed.

In addition, since the auxiliary discharge space S2 is formed near the boundary of the axial arrangement range L of the outer electrode 40, power consumption is also suppressed during lighting of the lamp, and the discharge caused by the inner electrode 30 (especially the corner portion of the head end) can be suppressed. caused consumption. In addition, as shown in the first embodiment, the inner surface of the inner tube 50 may be in contact with the surface (especially the edge) of the inner electrode 30 .

On the other hand, as described above, most of the end portion ST1 including the head end side in the center of the auxiliary discharge space S2 in the lamp axis direction is constituted as a discharge space region, and the discharge space region is the both sides of the inner electrode 30. 30S1 and 30S2 are exposed, cover the entire circumferential direction of the inner electrode 30 in the range of the lamp axis direction, and are surrounded by the inner surface of the inner tube 50 . Moreover, in the vicinity of the end portion ST2 on the rear end side of the auxiliary discharge space S2, as shown in the first embodiment, the distance between the inner tube 50 and the inner electrode 30 is adjusted in a state where the discharge space region facing the inner electrode 30 is formed. The gap is narrowed, and the entire circumferential direction is finally sealed.

According to such a configuration, ultraviolet rays can be radiated toward the entire discharge space S1, and a stable main discharge can be realized in the discharge space S1. On the other hand, the auxiliary discharge space S2 is defined as a part of the axial arrangement range of the inner electrode 30 so that the electric field intensity becomes substantially uniform along the lamp axis C. Therefore, the ultraviolet rays irradiated from the discharge vessel 10T to the outside of the lamp can have a uniform illuminance distribution in the direction C of the lamp axis.

In addition, the change of the spatial area of the auxiliary discharge space S2 is gradual, that is, the change of the shape of the inner surface of the inner tube 50 is smooth, and the stability of the curved lamp intensity and the like is improved. Therefore, when the inner tube 50 is degraded (brittle) by the high-energy ultraviolet rays generated by the main discharge in the discharge space S1, damage to the discharge vessel 10T starting from the portion covering the auxiliary discharge space S2 can be prevented.

Such an excimer lamp 10 can be manufactured by the same process as that of the first and second embodiments. However, in the third embodiment, in order to form the above-mentioned auxiliary discharge space S2 near the end portion 20T1 of the inner tube 20, the inner tube covered with the inner electrode is heated, the diameter is reduced, and the heating is stopped at a predetermined timing. For example, by not heating (weakening the heating) in the range in the lamp axis direction corresponding to the range M of the auxiliary discharge space, the reduction in diameter due to softening of the glass tube is suppressed (stopped), and the auxiliary discharge space is formed. The inner surface of the inner tube 50 may be in contact with the surface (especially the edge) of the inner electrode 30 .

In the second and third embodiments, the auxiliary discharge space S2 is partially formed along the direction of the lamp axis C, but it is also possible to form an auxiliary discharge space S2 that surrounds the inner electrode 30 as a whole in the circumferential direction in accordance with the axial arrangement range L of the outer electrode 40 . Discharge space S2.

An excimer lamp according to a fourth embodiment will be described using FIG. 7 and FIG. 8 . In the fourth embodiment, the auxiliary discharge space S2 surrounding the inner electrode 30 as a whole in the circumferential direction is formed in accordance with the axial arrangement range L of the outer electrode 40 .

Fig. 7 is a schematic cross-sectional view of an excimer lamp according to a fourth embodiment seen from the side. Fig. 8 is a schematic cross-sectional view of an excimer lamp according to a fourth embodiment seen from the axial side.

In the fourth embodiment, the auxiliary discharge space range M of the auxiliary discharge space S2 along the lamp axis is slightly shorter than the axial arrangement range L of the outer electrode 40 . Therefore, as in the second embodiment, the vicinity of both end portions 30T1 and 30T2 of the inner electrode 30 is sealed in the entire circumferential direction and buried in the inner tube 50 . On the other hand, the auxiliary discharge space S2 is formed in the middle part of the inner electrode 30 including the center in the lamp axis direction so that the entire circumference of the inner electrode 30 is exposed and surrounds the entire circumference of the inner electrode 30 .

The formation range of the auxiliary discharge space S2 can be appropriately corrected according to the specification of the lamp and the like. For example, the axial range M of the auxiliary discharge space S2 may also be determined to be asymmetrical to the central portion of the lamp. The inner surface of the inner tube 50 may also be in contact with the surface (especially the edge) of the inner electrode 30 .

The above-mentioned excimer lamp 10 can be manufactured according to the same process as that of the second embodiment. For example, only the vicinity of both ends 30T1, 30T2 of the inner electrode 30 is heated, and the range in the lamp axis direction corresponding to the range M of the auxiliary discharge space is not heated (the heating is weakened), thereby suppressing (stopping) the gap between the glass tubes. Soften the shrinkage caused by it and form an auxiliary discharge space. The inner surface of the inner tube 50 and the surface (especially the edge) of the inner electrode 30 may also be in a contact state. The inner tube may be heated after the inner electrode is inserted so that the inner electrode does not move.

The outer electrodes may be embedded in the inner wall of the discharge tube so as to face each other, or one of them may be embedded and the other may be arranged on the outer surface of the discharge tube. In addition, the light emitted from the auxiliary discharge space is not limited to ultraviolet light, and may be visible light.

Next, an excimer lamp according to a fifth embodiment will be described using FIGS. 9 and 10 .

Fig. 9 is a schematic cross-sectional view of an excimer lamp according to a fifth embodiment seen from the side. Fig. 10 is a schematic cross-sectional view of an excimer lamp according to a fifth embodiment viewed from the axial side. Fig. 10 is a sectional view corresponding to line BB in Fig. 9 . In addition, the cross-sectional view of FIG. 9 corresponds to a cross-sectional view along a line passing through the central axis of the lamp in FIG. 10 .

The excimer lamp 1000 has an outer tube 1020 made of a dielectric material such as quartz glass and having a substantially cylindrical cross section. In the outer tube 1020, a columnar (film-like) first dielectric (hereinafter, referred to as a coating tube) 1050 is arranged coaxially, and a cylindrical second dielectric (hereinafter, referred to as a coating tube) 1050 covering the coating tube 50 is arranged coaxially. called the inner tube) 1060 are arranged coaxially. The covering tube 1050 is covered with a foil-shaped electrode (hereinafter, referred to as an inner electrode) 1030 having a width along the radial direction (hereinafter, also referred to as the lamp radial direction) C and extending in a strip shape. The inner tube 1060 of the coating tube 1050 is welded to the coating tube 1050 at a part in the axial direction, and extends along the lamp axis C.

The covering tube 1050 and the inner tube 1060 are arranged coaxially with respect to the outer tube 1020, and the inner electrode 1030 is arranged coaxially with respect to the outer tube 1020 so that the center position thereof in the width direction and the thickness direction is aligned with the lamp axis \C. The inner electrodes 1030 are arranged symmetrically with respect to the tube axis C. As shown in FIG. The outer tube 1020 is connected to one end 1020T2, and is heated and welded integrally with the enlarged diameter portion 1061 of the inner tube 1060 . Thereby, a discharge space (main discharge space) S1 is formed.

In the main discharge space S1, a rare gas such as xenon gas or a mixed gas of a rare gas and a halogen gas is sealed as a discharge gas. The sealing pressure of the discharge gas is determined to be, for example, 5kPa to 150kPa.

In the discharge vessel 1000T, projecting portions (hereinafter referred to as small diameter portions) 1022 and 1062 are provided at both ends of an inner diameter portion (hereinafter referred to as a cylindrical portion) 1020T0 surrounding the main discharge space S1. The small-diameter portion 1062, which is a part of the rear end side of the inner tube 1060, is not covered by the outer tube 1020, but protrudes toward the rear end of the lamp and along the lamp axis C, and the covering tube 1050 covering the power supply line 1070 penetrates the inside thereof. The small-diameter portion 1052 of the covering tube 1050 protrudes. In addition, the power supply line 1070 may be covered with the small-diameter portion 1062 of the inner tube 1060 so that the covered tube 1050 is not exposed on the end side.

The small-diameter portion 1022 of the discharge tube 1000T is formed during the lamp manufacturing process, and protrudes from the discharge vessel 1000T (outer tube 1020 ) along the lamp axis C toward the head end of the lamp. Here, the tip end side of the outer tube 1020 is heated and deformed, the diameter is reduced, and the tip tube having a smaller diameter than the outer tube 1020 is welded. Thereby, the small-diameter portion 22 is integrally formed. The small-diameter portion 1022 is an interval of a part of the range of the lamp axis direction of the discharge vessel 1000T, and has a diameter ratio of the range along the lamp axis direction of the outer electrode 1040 (axis To the configuration range) L is smaller. In addition, it is also possible to install the tip used for lamp manufacture at a position different from that of the small-diameter part.

The end portion 1050T1 of the covering tube 1050 enters the small diameter portion 1022 , and the end portion 1050T1 of the covering pipe 1050 is in contact with the small diameter portion 1022 . Therefore, the covering tube 1050 is stably held coaxially within the outer tube 1020 . In particular, the outer surface of the end portion 1050T1 of the covering tube 1050 is formed into a tapered convex curved surface, while the inner surface of the small diameter portion 1022 of the discharge vessel 1000T is formed into a tapered concave curved surface. Thereby, the inner tube 50 can stably hold the coated tube 1050 coaxially, and the dimensional error caused by each thermoforming will not be damaged.

In addition, a configuration may be adopted in which the end portion 1060T1 on the tip end side of the inner tube 1060 enters the small-diameter portion 1022 . In this case, the bottomed cylindrical inner tube 1060 may be formed so as to cover the end portion 1050T1 of the covering tube 1050 from the head end side. In the case where such a fitting state has been formed, the position of the head end portion 1030T1 of the inner electrode 1030 along the lamp axis C does not enter the inner space of the small diameter portion 1022, but is located behind the small diameter portion 1022. The end (center of the discharge vessel) side is sufficient.

On the outer surface 1020S of the outer tube 1020, an electrode (hereinafter referred to as an outer electrode) 1040 is arranged. The outer electrode 1040 here is a configuration in which linear electrode portions made of conductive metal are arranged so as to overlap along the surface of the outer tube 1020, and are arranged at predetermined intervals along the tube axis C. Coil into a spiral.

The axial arrangement range L of the outer electrode 1040 is determined as a cylindrical portion 1020T0 which is a portion with a fixed inner diameter between the thinner end portions 1020T1 and 1020T2 of the outer tube 1020 . The axial length of the inner electrode 1030 corresponds to the axial arrangement range L of the outer electrode 1040 here. The power supply line 1070 connected to the end of the inner electrode 1030 is connected to a power supply unit (not shown) disposed outside, and power is supplied to the excimer lamp 1000 through the power supply line 1070 .

Excimer light is emitted from the discharge space S1 by applying a high frequency (for example, a range of several kHz to several tens of MHz) and a high voltage (for example, a range of several kV to tens of kV) to the inner electrode and the outer electrode. Here, ultraviolet light (for example, wavelength 172nm) is emitted outside the discharge vessel. Therefore, the excimer lamp 1000 can be applied to an ozone generating device that performs sterilization and deodorization by ozone generation, and can also be applied to an ultraviolet irradiation device that directly irradiates an object with ultraviolet rays.

Between the covering tube 1050 and the inner tube 1060, a discharge space (hereinafter, referred to as an auxiliary discharge space) S2 for assisting lighting activation is formed. As shown in FIG. 9 and FIG. 10 , the inner electrode 1030 is integral in the direction of the lamp axis C and the entire periphery of the inner electrode 1030 , and is sealed (tightly connected) with the inner tube 1060 . Also, the cross-sectional shape of the covering pipe 1050 is substantially elliptical, while the cross-sectional shape of the inner pipe 60 is substantially circular. An annular main discharge space S1 is formed between the inner tube 1060 and the outer tube 1020 , and an auxiliary discharge space S2 is formed between the outer surface of the inner tube 1060 and the inner surface of the inner tube 1060 .

The auxiliary discharge space range (auxiliary discharge range) M of the auxiliary discharge space S2 along the lamp axis direction is slightly shorter than the axial arrangement range L of the outer electrode 40 . Therefore, in the vicinity of both end portions 1030T1 and 1030T2 of the inner electrode 1030 , the outer peripheral surface of the coating tube 1050 and the inner peripheral surface of the inner tube 1060 are completely sealed in the circumferential direction. On the other hand, in the middle part of the inner electrode 1030 including the center in the direction of the lamp axis, the entire outer peripheral surface of the inner tube 1060 is exposed, and the auxiliary discharge space S2 is formed so as to surround the inner tube 1060 . Also, in the auxiliary discharge space range M, the outer diameter of the inner tube 1060 is larger than in other ranges, and the distance between the outer surface of the inner tube 1060 and the inner surface of the outer tube 1020 is small.

At both ends of the inner surface of the inner tube 60 exposed in the auxiliary discharge space S2 (both ends of the auxiliary discharge space range M) ST1, ST2, the distance between the covering tube 1050 and the inner tube 1060 gradually becomes shorter, and The discharge space area gradually narrows toward both ends 1050T1 and 1050T2 of the inner tube 1060 . Furthermore, in a state where the distance between the inner surface of the inner tube 1060 and the outer surface of the covered tube 1050 gradually decreases, the inner tube 1060 and the covered tube 1050 are welded. The outer diameter of the inner tube 1060 also decreases gradually, and the outer surface forms a smooth curved surface.

As shown in Figure 9, the spatial shape of the auxiliary discharge space S2 is closer to the central part of the lamp (auxiliary discharge space range M), the wider the cross-sectional area in the radial direction, and the closer to the small diameter parts 1022 and 1022 at both ends of the discharge vessel 1000T On the 1052 side, the space area is narrower. Therefore, the distance L1 between the outer peripheral surface of the inner tube 1060 and the inner peripheral surface of the inner tube 1060 along the lamp radial direction in the central portion of the auxiliary discharge space S2 along the lamp axis C is larger than that of the inner tube 1060 in the auxiliary discharge space S2. The distance L2 along the lamp radial direction between the outer peripheral surface of the covering tube 1050 and the inner peripheral surface of the inner tube 1060 at both ends ST1 and ST2 of the inner surface exposed in the space S2 is longer.

In addition, both edge portions 1030T3 and 1030T4 of the foil-shaped inner electrode 1030 are blade-shaped, and the inner electrode 30 becomes sharper from the center in the width direction toward the edge (end), and the thickness of the end portion is smaller than that of the center portion in the width direction. The thickness is thin, and the two edge portions 1030T3 and 1030T4 are sharp. The radial cross-section of the inner tube covering the foil-like inner electrode 1030 is shorter in the thickness direction of the foil-like inner electrode 1030 (short axis direction), and the longer axis direction is along the width direction.

Therefore, as shown in FIG. 9 , the closer the auxiliary discharge space S2 is to the central portion of the inner electrode 1030 in the width direction (lamp radial direction), the wider the cross-sectional area in the radial direction is. Therefore, the length of the separation distance is the length T1 of the separation distance along the thickness direction near the central portion (lamp central axis) compared to the length of the separation distance along the width direction near the two edge portions 1030T3 and 1030T4 of the inner electrode 1030 T2 (equivalent to L1 in FIG. 9 ) is longer and narrows toward the two edges 1030T3 and 1030T4 of the inner electrode 1030. The separation distance is the inner surface of the inner tube 1060 and the outer surface of the inner tube 1060 along the lamp radial direction. separation distance.

The auxiliary discharge space S2 refers to any one of the end portions 1030T1, 1030T2 in the longitudinal direction (lamp axis direction) and the edge portions 1030T3, 1030T4 in the width direction (lamp radial direction) of the foil-shaped inner electrode 1030 along the surface, The discharge space area gradually narrows and becomes thinner.

In this manner, the excimer lamp 1000 of this embodiment has a discharge vessel 1000T with a triple structure. The discharge vessel 1000T forms a main discharge in a state where the covering tube 1050 and the inner tube 1060 are arranged coaxially with the outer tube 1020. Space S1 and auxiliary discharge space S2. Accordingly, the auxiliary discharge space S2 can be formed without greatly changing the shape of the conventional excimer lamp with a double-tube structure. Also, by making the film-like coating tube, it is possible to make the same appearance as the conventional double tube structure excimer lamp.

As described above, since the edge portions 1030T3 and 1030T4 of the inner electrode 1030 are in the shape of a knife edge, electric field concentration occurs in the vicinity thereof. On the other hand, since the covered tube 1050 has an elliptical cross-sectional shape, in the auxiliary discharge space S2, the electric field strength differs in the circumferential direction during discharge, and a large electric field strength is formed near the two edges 1030T3 and 1030T4 of the inner electrode 1030. space area.

However, the edge portions 1030T3 and 1030T4 of the inner electrode 1030 are embedded in the covering tube 1050 and are not exposed in the auxiliary discharge space S2. Therefore, consumption due to discharge of the inner electrode 1030 can be suppressed. In addition, the position of the inner electrode 1030 of the inner tube 1060 can be adjusted during the manufacturing process, that is, in the radial cross-sectional length direction. In addition, the cross-sectional shape of the covering tube 1050 may be circular, and the cross-sectional shape of the inner tube 1060 may be elliptical.

The auxiliary discharge space S2 is in a reduced pressure state lower than atmospheric pressure, or a rare gas (below atmospheric pressure) that lowers the voltage at the time of lighting startup is enclosed in the auxiliary discharge space S2. When a high-frequency high voltage is applied between the inner electrode 1030 and the outer electrode 1040, since the auxiliary discharge space S2 is in a reduced voltage state, discharge occurs first in the auxiliary discharge space S2 with a lower lighting starting voltage than the main discharge space S1. Then, part of the light (ultraviolet rays here) radiated from the auxiliary discharge space S2 toward the lamp radial direction is irradiated to the main discharge space S1 through the inner tube 1060 .

In addition, part of the light radiated from the auxiliary discharge space S2 toward the direction of the lamp axis utilizes the optical fiber effect generated by repeated reflections in the tube wall (the boundary surface of the tube wall) of the coated tube 1050 or the inner tube 1060 (according to and in The effect of the same principle as the optical fiber used in the communication loop) is conveyed towards the ends 1050T1, 1050T2, 1060T1, 1060T2.

Here, a part of the end 1050T1 of the covering tube 1050 (the end 1060T1 of the inner tube 1060) enters the small-diameter part 1022 and contacts it, and on the side of the end 1060T2 of the inner tube 1060 (the end 1050T2 of the covering tube 1050 ) side, is An enlarged diameter portion 1061 is provided. Therefore, the ultraviolet rays guided by the optical fiber effect are irradiated to the main discharge space from the both ends 1020T1 and 1020T2 of the outer tube 1020 through the end 1060T1 of the inner tube 1060 (the end 1050T1 of the covered tube 1050) and the enlarged diameter part 1061. S1. Thereby, discharge occurs in main discharge space S1.

In this manner, the auxiliary discharge space S2 locally formed in the inner tube 1060 improves lighting startability. On the other hand, since the auxiliary discharge space S2 is only formed by a small space region of the degree to which the emitted light reaches the main discharge space S1, a minute discharge is generated, so the space occupying most of the inside of the inner tube 1060 is not ensured, and Formed as a localized discharge space area. Therefore, the voltage applied between the inner electrode 1030 and the outer electrode 1040 is suppressed during lighting of the lamp, and by suppressing the required electric power, lamp durability and lamp life can be improved.

The illuminance distribution (light distribution) along the outer peripheral surface of the discharge vessel differs depending on the shape of the discharge vessel or the position of the discharge generated in the discharge vessel. Furthermore, the discharge state is affected by the electric field intensity distribution depending on the positional relationship of the electrodes (anode and cathode), or the shape of the covered tube, the inner tube, and the auxiliary discharge space. However, the above-mentioned excimer lamp 1000 does not need to change the shape or discharge state of the conventional double-tube structure excimer lamp, so in the ultraviolet irradiation device or the ozone generator, the lamp characteristics such as the discharge maintenance voltage and the illuminance distribution, etc. Appropriate power supply characteristics will not be affected, but lighting startability can be improved.

Illumination startability is the application of voltage to the excimer lamp, which can be controlled by the certainty (probability [%]) of the stable illumination state from the discharge in the discharge vessel to the desired emission spectrum. Excimer lamps require certainty (100% reliability) of lighting start-up even after a low-temperature state, dark state, or long-term rest state. However, in this embodiment, a large-scale lighting power supply or lighting is not used. By starting the auxiliary light source, a stable lighting state can be reliably achieved. That is, it is possible to have substantially 100% certainty of lighting activation.

According to this configuration, ultraviolet rays can be radiated toward the entire discharge space S1, and a stable main discharge can be realized in the discharge space S1. On the other hand, the auxiliary discharge space S2 is determined in a part of the axial arrangement range of the inner electrode 1030 so that the electric field intensity becomes substantially uniform along the lamp axis C. Therefore, the ultraviolet light irradiated from the discharge vessel 1000T to the outside of the lamp can have a uniform illuminance distribution in the direction C of the lamp axis.

Also, the change of the spatial area of the auxiliary discharge space S2 is asymptotic, that is, the change of the shape of the inner surface of the inner tube 1060 is smooth, and the inner surface of the inner surface exposed by the inner tube 60 in the auxiliary discharge space S2 is smooth. The stability of the lamp intensity and the like due to stress concentration at both ends ST1, ST2) is improved. Therefore, when the inner tube 60 is deteriorated (brittle) by the high-energy ultraviolet rays generated by the main discharge in the discharge space S1, damage to the discharge vessel 10T starting from the portion covering the auxiliary discharge space S2 can be prevented.

The excimer lamp 10 of the fifth embodiment can be manufactured as follows, for example.

First, a cross-sectional cylindrical glass tube (inner tube) serving as a coating material for the foil-shaped inner electrode is formed. After the inner tube is formed, the power supply line is connected to the inner electrode by resistance welding or the like, and the inner electrode is inserted into the bottomed cylindrical inner tube. After the inner electrode is inserted, the inside of the tube is brought into a reduced pressure state (vacuum) and sealed.

When the inner tube is heated while being turned, the glass tube is softened and deformed to shrink (diameter reduction). At this time, the inner electrode is in close contact with the glass tube in the entire circumferential direction and the entire axial direction. Also, the diameter is reduced so as to have an elliptical cross-sectional shape. In addition, as a coated tube, a dielectric may be coated at least on the surface of the inner electrode in the range M of the auxiliary discharge space.

Then, the forming of the covered tube covering the inner electrode, and further, the forming of the glass tube (inner tube) covering the covered tube is carried out from the dielectric material which is transparent to the light emitted by the discharge formed in the auxiliary discharge space. sex. After forming the coated tube and the inner tube, insert the coated tube into the inner tube, heat and reduce the diameter.

At this time, in order to form the auxiliary discharge space, the inner tube is heated to be locally welded along the lamp axis direction. In addition, at the same time as forming the auxiliary discharge space, an edge-shaped (so-called bead-shaped) sealing portion is formed on one end of the inner tube. In addition, only the inner peripheral surface and the edge of the foil electrode may be heated and adhered to each other without rotating the inner tube.

As for the outer tube, one end of the quartz tube is reduced in diameter, and an introduction tube (tip tube) with an opening is provided, and the quartz tube is transparent to the wavelength of ultraviolet rays radiated from the discharge formed in the main discharge space. On the one hand, the outer tube is formed in which the sealing portion with the inner tube is opened. Next, the inner tube is inserted into the outer tube to be arranged coaxially, and the sealing portion is heated and welded to form a discharge tube. Then, vacuumize through the introduction tube to remove impurities, seal the discharge gas in the luminous tube, and then melt it by heating to hermetically seal the introduction tube. Next, the outer electrode is disposed on the outer surface of the outer tube.

Next, an excimer lamp according to a sixth embodiment will be described using FIGS. 11 to 13 . In the sixth embodiment, by partially welding the covered tube and the inner tube so as to cover the side surface of the foil-shaped electrode along the circumferential direction, an auxiliary discharge space is formed in a range facing the edge of the foil-shaped electrode, and An auxiliary discharge space is formed between the covered tube and the inner tube along the lamp axis direction.

Fig. 11 is a schematic cross-sectional view of an excimer lamp according to a sixth embodiment seen from a side surface along the width direction of a foil-shaped electrode. Fig. 12 is a schematic cross-sectional view of an excimer lamp according to a sixth embodiment seen from a side surface along the thickness direction of a foil-shaped electrode. Fig. 13 is a sectional view corresponding to line BB in Fig. 12 . In addition, the sectional view of FIG. 13 corresponds to a sectional view taken along a line passing through the center axis of the lamp in FIG. 12 .

As shown in Fig. 13, the coated tube 1050' is in a state of being sealed with the foil-shaped inner electrode 1030, and its cross-section in the lamp radial direction is formed into a circle. On the other hand, the inner tube 1060' is welded to the covering tube 1050', and its cross-section in the lamp radial direction is formed into an ellipse. In the section in the lamp radial direction, the inner surface portion 1060'K2 of the inner tube 1060' along the minor axis direction (thickness direction of the inner electrode 30) is welded to the outer part of the covered tube 1050', and the covered tube 1050' is Covers the side surfaces 1030S1 and 1030S2 of the inner electrode 1030 .

As a result, between the inner surface part 1060'K1 of the inner tube 1060' along the long axis direction (the width direction of the inner electrode 1030) and the outer part of the coating tube 1050' covering the edge parts 1030T3 and 1030T4 of the inner electrode 1030 An auxiliary discharge space S2 is formed. The auxiliary discharge space S2 is formed of discharge space regions S2A and S2B blocked by two spaces.

In the inner tube 1060', the two discharge space regions S2A, S2B are spatially blocked by the covering tube 1050'. In addition, in the sixth embodiment, unlike the fifth embodiment, the cross-sectional shape of the inner pipe 1060' is elliptical, while the cross-sectional shape of the covering pipe 1050' is circular.

The discharge space regions S2A and S2B are located in a positional relationship facing each other in the width direction of the inner electrode 30, and are symmetrical with respect to the cross-section in the radial direction. The axial section (auxiliary discharge section) M of the auxiliary discharge space S2 along the lamp axis C has a length slightly shorter than the axial arrangement section of the outer electrode 1040 . Therefore, in the vicinity of both end portions 1030T1 and 1030T2 of the inner electrode 1030, the outer peripheral surface of the coating tube 1050' and the inner peripheral surface of the inner tube 1060' are completely sealed in the circumferential direction. Also, in the auxiliary discharge space range M, the outer diameter of the inner tube 1060' is larger than in other ranges, and the distance between the outer surface of the inner tube 1060' and the inner surface of the outer tube 20 is small.

In contrast, between the two ends 1030T1 and 1030T2 of the inner electrode 1030, and the middle part of the inner electrode 1030 including the center in the direction of the lamp axis, only the outer surface part of the inner tube 1060' is in contact with the coating tube along the circumferential direction. 1050 ′ is partially welded, and the outer surface portion of the inner tube 1060 ′ corresponds to the portion covering the two sides 1030S1 and 1030S2 of the inner electrode 1030 . Accordingly, auxiliary discharge spaces S2 ( S2A, S2B) are formed in the space portion in the direction in which both edge portions 1030T3 and 1030T4 of the inner electrode 1030 face.

The discharge space regions SAT1, SAT2, SBT1, and SBT2 at both ends of the auxiliary discharge space S2 are the same as the fifth embodiment, and the distance between the covering tube 1050' and the inner tube 1060' gradually becomes shorter, and the discharge space The area becomes narrower toward both ends 1050T1 and 1050T2 of the covered pipe 1050'. Furthermore, in a state where the distance between the inner surface of the inner tube 1060' and the outer surface of the covered tube 1050' gradually decreases, the inner tube 1060' and the covered tube 1050' are sealed. The outer diameter of the inner tube 1060' also decreases gradually, and the outer surface forms a smooth curved surface.

As shown in Figure 12, the spatial shape of the auxiliary discharge space S2 is closer to the central part of the lamp (the auxiliary discharge space range M), the wider the cross-sectional area in the radial direction, and the closer to the discharge spaces at the two ends of the auxiliary discharge space S2. Areas SAT1, SAT2, SBT1, SBT2, the narrower the space area. Therefore, the distance L1 between the outer peripheral surface of the covering tube 1050' and the inner peripheral surface of the inner tube 1060' along the lamp radial direction in the central portion of the auxiliary discharge space S2 along the lamp axis C is larger than that in the auxiliary discharge space S2. The distance L2 between the outer peripheral surface of the covering tube 1050' and the inner peripheral surface of the inner tube 1060' in the discharge space regions SAT1 (SBT1) and SAT2 (SBT2) at both ends of the lamp along the lamp radial direction is longer.

Therefore, in the cross-sectional shape of the discharge space regions S2A, S2B in the lamp radial direction, the length of the separation distance is that the length T1 of the separation distance on the side of the thickness direction (side surfaces 1030S1, 1030S2) of the inner electrode 1030 is larger than that along the inner electrode 1030. The length T2 of the separation distance in the width direction (edges 1030T3, 1030T4) is shorter and becomes thinner along the circumferential direction of the lamp. The separation distance is the inner surface of the inner tube 1060' along the lamp radial direction and the covering tube 1050 'The separation distance of the outer surfaces.

With the auxiliary discharge space S2 (discharge space regions S2A, S2B) facing both the radial direction of the lamp and the circumferential direction of the lamp, the discharge space region gradually becomes smaller and thinner, and the inner electrode 1030 and the outer electrode 1040 are applied. At high frequency and high voltage, in auxiliary discharge space S2 in a reduced voltage state, a spatial region with high electric field intensity is formed on the side of inner electrode 1030 in the width direction (near both edge portions 1030T3 and 1030T4 ). As a result, discharge occurs first in auxiliary discharge space S2 with a lower lighting starting voltage than main discharge space S1, and discharge occurs later in the space region where the electric field intensity of main discharge space S1 is higher, and it is easy to shift to stable (rated) illumination.

In addition, the electric field strength in the main discharge space S1 is different in the circumferential direction of the lamp, but approximately equal in the axial direction of the lamp. As a result, partial discharge tends to occur also in the main discharge space S1, and the ultraviolet light intensity (illuminance distribution) is biased along the circumferential direction of the lamp, and the ultraviolet light is emitted uniformly with respect to the lamp axis direction C. Therefore, ultraviolet irradiation and ozone generation can be performed according to the usage environment of the ultraviolet irradiation device and the ozone generator.

A part of the covering tube 1050 in the circumferential direction is welded to the inner tube 1060 to form the auxiliary discharge space S2, whereby the change of the spatial area of the auxiliary discharge space S2 becomes asymptotic, that is, the change of the shape of the inner surface of the covering tube 1050 becomes smooth , and the stability of lamp intensity etc. caused by the stress concentration on the curved surface portion is improved. Therefore, when the covering tube 1050' and the inner tube 1060' are degraded (brittle) by the high-energy ultraviolet rays generated by the main discharge in the discharge space S1, the discharge starting from the part covering the auxiliary discharge space S2 can also be prevented. Damage to container 1000T.

The excimer lamp of the sixth embodiment can be manufactured as follows. First, as in the fifth embodiment, the inner electrode is inserted into the glass tube serving as the coating tube, and heated to reduce the diameter of the glass tube. At this time, the inner electrode is in close contact with the glass tube in the entire circumferential direction and the entire axial direction. Also, the diameter is reduced so as to have a circular cross section. In addition, a dielectric may be coated on the surface of the inner electrode. Then, the coated tube covering the inner electrode is inserted into the inner tube which is a glass tube, and heated to reduce the diameter. At this time, in order to form the two discharge space regions S1 and S2, the coated tube is heated and diameter-reduced by welding a part of the inner tube in the circumferential direction along the lamp axis C direction. About the structure other than this, it is the same as the procedure of 1st Embodiment.

Next, an excimer lamp according to a seventh embodiment will be described using FIGS. 14 to 16 . In the seventh embodiment, by partially welding the covered tube and the inner tube so as to cover the edge of the foil-shaped electrode along the circumferential direction, an auxiliary discharge space is formed in the range facing the side surface of the foil-shaped electrode, and An auxiliary discharge space is formed between the covered tube and the inner tube along the lamp axis direction.

Fig. 14 is a schematic cross-sectional view of an excimer lamp according to a seventh embodiment seen from a side surface along the width direction of a foil-shaped electrode. Fig. 15 is a schematic cross-sectional view of an excimer lamp according to a seventh embodiment seen from a side surface along the thickness direction of a foil-shaped electrode. Fig. 16 is a schematic cross-sectional view of an excimer lamp according to a seventh embodiment viewed from the axial side.

As shown in FIG. 16, in the excimer lamp 1000 of the seventh embodiment, the cross section of the coating tube 1050" in the lamp radial direction is formed into an ellipse. On the other hand, the cross section of the inner tube 1060" in the lamp radial direction is is formed into a circle. Furthermore, in the cross-section in the direction of the lamp diameter, the inner surface of the inner tube 1060" covering the edges 1030T3 and 1030T4 of the inner electrode 1030 is aligned with the direction of the long axis (the width direction of the inner electrode 1030) of the covering tube 1050". Outer part 1050" K1 welded.

A space is formed between the inner surface portion of the inner tube 1060" covering the side surface of the inner electrode 1030 and the outer surface portion 1050"K1 of the covered tube 1050" along the minor axis direction (thickness direction of the inner electrode). The two space regions separated above.The auxiliary discharge space S2 is composed of the two auxiliary discharge spaces S2A, S2B.

As in the sixth embodiment, the two discharge space regions S2A and S2B are spatially blocked by the covering tube 1050", but in the seventh embodiment, the cross-sectional shape of the inner tube 1060" is formed into a circle, and the other On the one hand, the cross-sectional shape of the covered tube 1050" is elliptical. The discharge space regions S2A and S2B are located opposite to each other in the thickness direction of the inner electrode 1030, and are symmetrical to the cross-section in the radial direction.

In the cross-sectional shape of the discharge space regions S2A, S2B in the lamp radial direction, the length of the separation distance is the length T1 of the separation distance on the side of the thickness direction (side surfaces 1030S1, 1030S2) of the inner electrode 1030 than along the width direction of the inner electrode 1030. The length T2 of the separation distance (edges 1030T3, 1030T4) is longer, and the discharge space regions S2A, S2B become thinner along the circumferential direction of the lamp. The separation distance is the inner surface of the inner tube 1060" along the lamp radial direction. The separation distance from the outer surface of the coated pipe 1050".

According to this configuration, when a high-frequency high voltage is applied between the inner electrode 1030 and the outer electrode 1040, the auxiliary discharge space S2 in the voltage-down state is discharged earlier at a lighting start voltage lower than that of the main discharge space S1. Accordingly, discharge occurs in the space region with high electric field intensity in the main discharge space S1, and it is easy to move to stable (rated) lighting.

In this way, according to the seventh embodiment, regardless of the longitudinal direction (extension direction) of the section of the foil-shaped inner electrode 30, by adjusting the shape of the coated tube and the inner tube, and the welded portion along the circumferential direction, it is possible to Desired positions are formed in the two discharge space regions S2A, S2B inside the inner tube 1060".

The excimer lamp 1000 mentioned above can be manufactured according to the same process as that of the sixth embodiment.

The axial section M of the auxiliary discharge space S2 is formed in conjunction with the axial arrangement section L of the outer electrode 1040, but it can also be formed between the covered tube 1050 and the covered tube along the lamp axis C direction at the center or end of the lamp, etc. Between 1050, an auxiliary discharge space S2 is partially formed.

The outer electrodes may be embedded in the inner wall of the discharge tube so as to face each other, or one of them may be embedded and the other may be arranged on the outer surface of the discharge tube. In addition, the light emitted from the auxiliary discharge space is not limited to ultraviolet light, and may be visible light.

Next, an excimer lamp according to an eighth embodiment will be described with reference to FIGS. 17 and 18 .

Fig. 17 is a schematic cross-sectional view of an excimer lamp according to an eighth embodiment seen from the side. Fig. 18 is a schematic sectional view of an excimer lamp according to an eighth embodiment viewed from the axial side. Fig. 18 corresponds to a sectional view taken along line BB in Fig. 17 . In addition, the sectional view of FIG. 17 corresponds to a sectional view taken along a line passing through the center axis of the lamp in FIG. 18 .

The excimer lamp 2000 has a discharge vessel 2000T formed of an outer tube 2020 and an inner tube 2050 having a substantially cylindrical cross section, and the discharge vessel 2000T is made of a dielectric material such as quartz glass. A strip-shaped foil-shaped electrode (hereinafter, referred to as inner electrode) 2030 extending along the tube diameter direction (hereinafter, also referred to as the lamp diameter direction) is formed along the tube axis (hereinafter, also referred to as the lamp axis). C is covered with a columnar dielectric (hereinafter referred to as an inner tube) 2050 . The inner electrode 2030 is not exposed in the ring-shaped discharge space (hereinafter referred to as main discharge space) S1. The discharge space is formed between the outer tube 2020 and the inner tube 2050, where the inner tube 2050 has a substantially circular cross section.

The excimer lamp 2000 has a portion not covered by the outer tube 2020 (hereinafter referred to as an extension) 2052 extending along the lamp axis C beyond the end 2020T2 of the discharge vessel 2000T (outer tube 20 ), The parallel power supply line 2070 passes through the inside of the end portion 2050T2 of the extension portion 2052 . However, the extension part 2052 may also be formed by welding a different member from the inner tube 50. The small-diameter portion 2022 formed in the lamp manufacturing process protrudes from the discharge vessel 2000T (outer tube 2020 ) toward the head end side of the lamp along the lamp axis C.

The diameter of the small-diameter portion 2022 is larger than the diameter of the discharge vessel 2000T, that is, it is a part of the range in the lamp axis direction, and the range along the lamp axis direction of the outer electrode 2040 is arranged (herein referred to as axial arrangement). range) is smaller in diameter. Here, the tip end side of the outer tube 2020 is heated and deformed to reduce its diameter, and a tip tube having a smaller diameter than the outer tube 2020 is welded, whereby the small diameter portion 2022 is integrally formed with the discharge vessel 2000T. In addition, it is also possible to install the tip used for lamp manufacture at a position different from that of the small-diameter part.

In this embodiment, the end portion 2050T1 of the inner tube 2050 enters the small diameter portion 2022 , and the end portion 2050T1 of the inner tube 2050 contacts the small diameter portion 2022 . Therefore, the inner tube 2050 is stably held coaxially within the outer tube 2020 . Also, the outer surface of the end 2050T1 of the inner tube 2050 has a thinner convex curved surface, and the inner surface of the outer tube 2020 has a thinner concave curved surface.

Thereby, it can be stably held in a coaxial shape, and the dimensional error caused by each thermoforming will not cause damage. Forming such a fitting state, on the other hand, the position of the head end portion 2030T1 of the inner electrode 2030 along the lamp axis C does not enter the inner space of the small-diameter portion 2022, but is located behind the small-diameter portion 2022. End (center of the discharge vessel) side.

On the outer surface 2020S of the outer tube 2020, an electrode (hereinafter referred to as an outer electrode) 2040 is arranged. The outer electrode 2040 here is a configuration in which a linear electrode portion made of conductive metal is arranged along the surface of the outer tube 2020, and is arranged at predetermined intervals along the tube axis C. Coil into a spiral.

The axial arrangement range L of the outer electrode 2040 is determined to be the range of a fixed inner diameter portion (hereinafter referred to as a cylindrical portion) 2020T0 between the thinner end portions 2020T1 and 2020T2 of the outer tube 1020 . The axial length of the inner electrode 30 corresponds to the axial arrangement range L of the outer electrode 2040 here. The power supply line 2070 connected to the end of the inner electrode 2030 is connected to an externally provided power supply unit (not shown), and power is supplied to the excimer lamp 2000 through the power supply line 2070 .

Excimer light is radiated from the discharge space S1 by applying a high frequency (for example, a range of several kHz to several tens of MHz) and a high voltage (for example, a range of several kV to tens of kV) to the inner electrode and the outer electrode. Here, ultraviolet light (for example, wavelength 172nm) is emitted outside the discharge vessel. Therefore, the excimer lamp 2000 can be applied to an ozone generating device that performs sterilization and deodorization by ozone generation, and can also be applied to an ultraviolet irradiation device that directly irradiates an object with ultraviolet rays.

In the extension portion 2052, a discharge space (hereinafter, referred to as an auxiliary discharge space) S2 for assisting lighting activation is formed. As shown in FIG. 17 , a part of the extension portion 2052 of the inner tube 2050 along the lamp axis C is not partially welded (sealed) as a whole around the circumferential direction of the inner electrode 2030 . On the other hand, the axial end portions 2030T1 and 2030T2 of the inner electrode 2030 are sealed to the inner tube 2050 over the entire circumference. Thereby, the auxiliary discharge space S2 is formed.

Here, the range (auxiliary discharge space range) M of the auxiliary discharge space S2 along the lamp axis C is determined to be a section outside the axial arrangement range of the inner electrode 2030, and the axial arrangement range of the inner electrode 2030 It corresponds to the axial arrangement range L of the outer electrode 2040 . That is, the axial arrangement range L of the outer electrode 2040 is at both end portions 2030T1 and 2030T2 of the inner electrode 2030 , and the inner electrode 2030 is completely sealed to the periphery in the circumferential direction by the inner tube 2050 . In contrast, in the middle part of the extension part 2052 of the inner tube 2050 , the entire outer peripheral surface of the inner electrode 2030 is exposed, and the auxiliary discharge space S2 is formed so as to surround the entire outer peripheral surface of the inner electrode 2030 . Also, in the auxiliary discharge space range M, the outer diameter of the inner tube 2050 is larger than in other ranges.

At both ends of the inner surface of the inner electrode 2030 exposed in the auxiliary discharge space S2 (the two ends of the auxiliary discharge space range M) ST1, ST2, the distance between the inner electrode 2030 and the inner tube 2050 is gradually shortened, and the discharge The space area becomes narrower toward both ends 2050T1 and 2050T2 of the inner tube 2050 . Furthermore, in a state where the distance between the inner surface of the inner tube 2050 and the outer surface of the inner electrode 2030 gradually decreases, the inner electrode 2030 and the inner tube 2050 are sealed. The outer diameter of the inner tube 2050 also decreases gradually, and the outer surface forms a smooth curved surface.

The spatial shape of the auxiliary discharge space S2 is closer to the central part of the lamp (auxiliary discharge space range M), the wider the cross-sectional area in the radial direction, and the closer to the small diameter part 22 and the extension part 52 sides of the two ends of the discharge vessel 10T, the space The area is narrower. Therefore, the distance L1 between the outer peripheral surface of the inner tube 50 and the inner peripheral surface of the inner tube 50 along the lamp radial direction in the central portion of the auxiliary discharge space S2 along the lamp axis C is greater than that of the inner tube 2050 in the auxiliary discharge space S2. The distance L2 between the outer peripheral surface of the inner electrode 2030 and the inner peripheral surface of the inner tube 2050 at both ends ST1 and ST2 of the exposed inner surface of the discharge space S2 along the lamp radial direction is longer.

Also, both edge portions 2030T3 and 2030T4 of the foil-shaped inner electrode 2030 are blade-shaped, and the inner electrode 2030 becomes sharper from the center toward the edge (end) in the width direction, and the thickness of the end portion is larger than that of the center portion in the width direction. The thickness is thin, and the two edges are sharp.

Therefore, the closer the auxiliary discharge space S2 is to the central portion of the inner electrode 2030 in the width direction (lamp radial direction), the wider the cross-sectional area in the radial direction is (refer to FIG. 18 ). Therefore, the length of the separation distance is the length T1 of the separation distance along the thickness direction near the central portion (lamp central axis) compared to the length of the separation distance along the width direction near the two edge portions 2030T3 and 2030T4 of the inner electrode 2030 T2 (equivalent to L1 in FIG. 17 ) is longer and narrows towards the two edge portions 2030T3 and 2030T4 of the inner electrode 2030. The separation distance is the inner surface of the inner electrode 2030 and the outside of the inner tube 2050 along the lamp radial direction. Surface separation distance.

That is, the auxiliary discharge space S2 (discharge space regions S2A, S2B) is directed toward the ends 2030T1, 2030T2 in the longitudinal direction (lamp axis direction) of the foil-shaped inner electrode 2030 along the surface and in the width direction (lamp radial direction). The edge portion 2030T3, 2030T4 of the edge, the space area is narrowed.

The auxiliary discharge space S2 is in a reduced pressure state lower than the atmospheric pressure, or a rare gas (below atmospheric pressure) that lowers the voltage at the time of lighting startup is enclosed in the auxiliary discharge space S2. When a high-frequency high voltage is applied between the inner electrode 2030 and the outer electrode 2040, since the auxiliary discharge space S2 is in a reduced voltage state, discharge occurs first in the auxiliary discharge space S2 with a lower lighting starting voltage than the main discharge space S1. Then, part of the light (ultraviolet rays here) radiated from the auxiliary discharge space S2 toward the lamp axis direction is irradiated to the main discharge space S1 through the inner tube 2050 .

Also, most of the inner electrode 2030 is in contact with both ends 2030T1, 2030T2 of the inner tube 2050, and a part of both edges 2030T3, 2030T4 of the inner electrode 2030 is exposed in the auxiliary discharge space S2. , in the auxiliary discharge space S2 in the reduced voltage state, a space region with a large electric field intensity is formed. Thereby, a discharge can be reliably generated in the auxiliary discharge space S2 with a lighting starting voltage lower than that of the main discharge space S1. In addition, the electric power required for lighting the lamp can be suppressed, and the consumption due to the discharge of the inner electrode 2030 (especially the edge portion) can be suppressed.

Part of the light radiated from the discharge generated in the auxiliary discharge space S2 toward the lamp axis is directed toward the inner tube 2050 by utilizing the so-called optical fiber effect of repeated reflections inside the tube wall (the boundary surface of the tube wall) of the inner tube 2050. End 2050T1 side conveys. Part of the ultraviolet rays transmitted by the fiber effect is irradiated to the main discharge space S1 from the end 2020T2 side of the outer tube 2020 through the enlarged diameter portion 2051 of the inner tube 2050 .

In addition, part of the light radiated toward the lamp axis is because the end 2050T1 of the inner tube 2050 partially enters the small-diameter portion 2022 and contacts it, so the end 2020T2 of the outer tube 2020 passes through the end 2050T1 of the inner tube 2050. side is irradiated to the main discharge space S1. These ultraviolet rays transmitted by the optical fiber effect are irradiated to the main discharge space S1, whereby discharge occurs in the main discharge space S1. In this manner, by forming the auxiliary discharge space S2 in a part of the extension portion 2052 of the inner tube 2050, the lighting starting performance is improved.

Here, the auxiliary discharge space S2 is formed as a minute space to the extent that radiated light reaches the main discharge space S1, and is not formed as a discharge space region that occupies most of the space of the extension portion 2052 of the inner tube 2050. However, since the auxiliary discharge space S2 is formed at a position adjacent to the lamp axis direction outside the discharge vessel 2000T, the applied voltage between the inner electrode 2030 and the outer electrode 2040 is system is suppressed. By suppressing the required power, lamp durability and lamp life can be improved.

Also, since the auxiliary discharge space S2 is formed coaxially with respect to the inner tube 2050, light is irradiated from both sides of the ends 2050T1, 2050T2 of the inner tube 2050 in the direction from the auxiliary discharge space S2 toward the main discharge space S1. Thereby, the main discharge is stably generated in the main discharge space S1.

The illuminance distribution (light distribution) along the outer peripheral surface of the discharge vessel differs depending on the shape of the discharge vessel or the position of the discharge generated in the discharge vessel. Furthermore, the discharge state is affected by the electric field intensity distribution depending on the positional relationship of the electrodes (anode and cathode), or the shape of the inner tube or auxiliary discharge space. However, the above-mentioned excimer lamp 2000 does not change the shape or discharge state of the conventional excimer lamp with double-tube structure. Or the suitable power supply characteristics will not be affected, but the lighting startability can be improved.

Illumination startability is the application of voltage to the excimer lamp, which can be controlled by the certainty (probability [%]) of the stable illumination state from the discharge in the discharge vessel to the desired emission spectrum. Excimer lamps require certainty (100% reliability) of lighting start-up even after a low-temperature state, dark state, or long-term rest state. However, in this embodiment, a large-scale lighting power supply or lighting is not used. By starting the auxiliary light source, a stable lighting state can be reliably achieved. That is, it is possible to have substantially 100% certainty of lighting activation.

In the formation space area of the auxiliary discharge space S2 of the extension part 2052, the formation section M along the lamp axis C can be adjusted appropriately. For example, by welding only the two edge portions 2030T3 and 2030T4 of the inner electrode 2030 to the inner tube 2050 so as not to be exposed, the two discharge space regions S2A and S2B spatially separated by the foil-shaped inner electrode 2030 can be separated. An auxiliary discharge space S2 is formed. In addition, both edges 2030T3 and 2030T4 of the inner electrode 2030 may not be exposed in the auxiliary discharge space S2 by coating (covering) a dielectric on the surface of the inner electrode within the determined auxiliary discharge space range M.

Such an excimer lamp 2000 can be manufactured, for example, by the manufacturing method shown below.

A cross-sectional cylindrical glass tube (inner tube) serving as a coating material of the foil-shaped electrode (inner electrode) is formed by a dielectric material transparent to light emitted from the discharge formed in the auxiliary discharge space. After the inner tube is formed, the power supply line and the foil-shaped electrode are connected by resistance welding or the like, and the foil-shaped electrode is inserted into the bottomed cylindrical glass tube.

After inserting the foil-shaped electrode serving as the inner electrode into the glass tube serving as the inner tube, the inside of the glass tube is brought into a reduced pressure state (vacuum) and sealed. At this time, a rare gas may be sealed in the glass tube under atmospheric pressure. Then, while rotating the glass tube, it is heated to locally form an auxiliary discharge space on the end side of the glass tube. The glass tube is softened and deformed to shrink (diameter reduction), and the glass tube and the inner electrode are partially fused.

At this time, only the inner peripheral surface of the glass tube can be brought into close contact with the edge of the foil-shaped electrode along the width direction (diameter direction), so that the edge of the foil-shaped electrode is not exposed, and the glass tube can be closed. A space not in contact with the foil electrode is formed as an auxiliary discharge space.

Also, one end of the glass tube serving as the inner tube is heated to form an enlarged diameter portion in an edge shape (so-called bead shape). In addition, only the portion of the glass tube facing the inner peripheral surface and the edge of the foil-shaped electrode may be heated and adhered in the axial direction without the glass tube being rotated. The end of the foil electrode along the longitudinal direction (tube axis direction) is sealed in the circumferential direction as a whole, and the end of the foil electrode is buried in the glass tube, and the foil electrode is not exposed in the auxiliary discharge space.

As for the outer tube, one end of the quartz tube that is transparent to the wavelength of ultraviolet rays emitted from the discharge formed in the main discharge space is reduced in diameter and an introduction tube (tip tube) with an opening is formed. The outer tube with the sealing part open to the enlarged diameter part of the inner tube.

Next, the inner tube is inserted into the outer tube and arranged coaxially, and the diameter-enlarged portion of the discharge tube and the inner tube is heated and welded to form a discharge vessel. Then, vacuum is drawn through the introduction tube to remove impurities, a discharge gas is enclosed in the discharge vessel, and the introduction tube is heated and melted to perform airtight sealing. Then, the outer electrode is disposed on the outer surface of the outer tube.

In this embodiment, the inner electrode 2030 is configured to extend into the discharge vessel 2000T and the extension portion 2052 , but different inner electrodes may be arranged on the discharge vessel 2000T and the extension portion 2052 .

Fig. 19 is a schematic cross-sectional view of an excimer lamp according to a modified example of the eighth embodiment seen from the side. Here, the two foil-shaped inner electrodes 2030A and 2030B are connected by an internal power supply line 2071 . Also, the inner electrode 2030B is provided in the extension portion 2052 of the inner tube 50 located outside the outer tube 2020 . The inner electrodes 2030A, 2030B face each other. The position (extension direction) of the section in the radial direction is consistent.

As in the eighth embodiment, the auxiliary discharge space S2 is formed in the extension portion 2052 of the inner tube 2050 . Even when the two inner electrodes 2030A and 2030B are provided in this manner, similarly to the eighth embodiment, the lighting performance can be improved. In addition, by using the internal power supply line 2071, the electric power in the lighting of the lamp can be further suppressed.

The enlarged diameter part 2051 has a larger outer diameter (thickness) than other parts of the inner tube 2050, and it is difficult to reduce the diameter by heating. Therefore, by arranging the internal power supply wire 2071 in the enlarged diameter portion 2051, the diameter reduction of the internal power supply wire 2071 in the enlarged diameter portion 2051 and the welding to the end 2020T2 of the outer tube 2020 can be achieved at the same time. Manufacturing made easy.

In addition, the portions where the electric fields of the inner electrodes 2030A, 2030B are concentrated, especially, both edge portions 2030T3, 2030T4) of the blade shape are separated from the enlarged diameter portion 2051 . In this manner, the distance between the inner electrodes 2030A and 2030B and the enlarged diameter portion 2051 can reliably prevent abnormal discharge (creepage discharge) near the end portion 2020T2 of the outer tube.

The outer tubes may be embedded in the inner wall of the discharge tube so as to face each other, or one of them may be embedded and the other may be arranged on the outer surface of the discharge tube. In addition, the light emitted from the auxiliary discharge space is not limited to ultraviolet light, and may be visible light.

10: excimer lamp 20: Outer tube 30: inner electrode 30S1, 30S2: side 30T3, 30T4: edge 40: Outer electrode 50: inner tube (dielectric) S2A, S2B: discharge space area S1: main discharge space S2: auxiliary discharge space T1, T2: the length of the separation distance

Fig. 1 is a schematic cross-sectional view of an excimer lamp according to a first embodiment seen from a side. Fig. 2 is a schematic cross-sectional view of the excimer lamp according to the first embodiment viewed from the axial side. Fig. 3 is a schematic cross-sectional view of an excimer lamp according to a second embodiment seen from the side. Fig. 4 is a schematic cross-sectional view of an excimer lamp according to a second embodiment viewed from the axial side. Fig. 5 is a schematic cross-sectional view of an excimer lamp according to a third embodiment seen from the side. Fig. 6 is a schematic cross-sectional view of an excimer lamp according to a third embodiment seen from the axial side. Fig. 7 is a schematic cross-sectional view of an excimer lamp according to a fourth embodiment seen from the side. Fig. 8 is a schematic cross-sectional view of an excimer lamp according to a fourth embodiment seen from the axial side. Fig. 9 is a schematic cross-sectional view of an excimer lamp according to a fifth embodiment seen from the side. Fig. 10 is a schematic cross-sectional view of an excimer lamp according to a fifth embodiment viewed from the axial side. Fig. 11 is a schematic cross-sectional view of an excimer lamp according to a sixth embodiment seen from a side surface along the width direction of a foil-shaped electrode. Fig. 12 is a schematic cross-sectional view of an excimer lamp according to a sixth embodiment seen from a side surface along the thickness direction of a foil-shaped electrode. Fig. 13 is a schematic cross-sectional view of an excimer lamp according to a sixth embodiment seen from the side. Fig. 14 is a schematic cross-sectional view of an excimer lamp according to a seventh embodiment seen from a side surface along the width direction of a foil-shaped electrode. Fig. 15 is a schematic cross-sectional view of an excimer lamp according to a seventh embodiment seen from a side surface along the thickness direction of a foil-shaped electrode. Fig. 16 is a schematic cross-sectional view of an excimer lamp according to a seventh embodiment viewed from the axial side. Fig. 17 is a schematic cross-sectional view of an excimer lamp according to an eighth embodiment seen from the side. Fig. 18 is a schematic sectional view of an excimer lamp according to an eighth embodiment viewed from the axial side. Fig. 19 is a schematic cross-sectional view of an excimer lamp according to a modified example of the eighth embodiment seen from the side.

10: excimer lamp

20: Outer tube

30: inner electrode

30S1, 30S2: side

30T3, 30T4: edge

40: Outer electrode

50: inner tube (dielectric)

S2A, S2B: discharge space area

S1: main discharge space

S2: auxiliary discharge space

T1, T2: the length of the separation distance

Claims (12)

An excimer lamp is characterized by: include: a dielectric covering the foil electrodes arranged along the lamp axis; and The discharge vessel is welded with the dielectric to form the main discharge space; In the lamp axis direction range of the main discharge space, the foil electrode is partially sealed with the dielectric to form an auxiliary discharge space inside the dielectric. Such as the excimer lamp of claim 1, wherein the foil-shaped electrode is welded to the dielectric at at least one end of the foil-shaped electrode in the longitudinal direction; The auxiliary discharge space is formed between the surface of the foil-shaped electrode and the inner surface of the dielectric so that the electric field intensity is different in at least one direction along the lamp axis direction and the lamp circumferential direction. The excimer lamp according to claim 2, wherein the foil-shaped electrode is sealed with the dielectric in a region where the electric field intensity is small along at least one direction of the lamp axis direction of the foil-shaped electrode and the circumferential direction of the lamp. A large area forms the auxiliary discharge space. The excimer lamp according to claim 2, wherein the foil-shaped electrode is sealed with the dielectric in a region of high electric field strength along at least one of the lamp axis direction of the foil-shaped electrode and the circumferential direction of the lamp, and the electric field strength is increased A small area forms the auxiliary discharge space. The excimer lamp according to claim 3, wherein the edge of the foil electrode is in the auxiliary discharge space and separated from the inner surface of the dielectric. The excimer lamp according to claim 4, wherein the edge of the foil electrode is welded to the dielectric in the auxiliary discharge space. The excimer lamp according to any one of claims 1 to 6, wherein The head end position of the head end of the dielectric enters the small diameter portion provided at the head end of the discharge vessel; The head end of the foil-shaped electrode along the lamp axis is located closer to the rear end than the small diameter portion. The excimer lamp according to any one of claims 1 to 7, wherein the distance between the dielectric and the foil electrode along the width direction of the foil electrode is formed to be shorter on the edge side than on the central portion The auxiliary discharge space. The excimer lamp according to any one of claims 1 to 8, wherein the distance between the dielectric and the foil electrode along the length direction of the foil electrode is formed in such a way that the distance between the end portion side is shorter than that at the central portion The auxiliary discharge space. An illumination method for an excimer lamp. The excimer lamp includes an inner tube and an outer tube. The inner tube covers an inner electrode arranged along the lamp axis. The outer tube is welded to the enlarged diameter portion of the inner tube. , and form the main discharge space with the inner tube, the lighting method of the excimer lamp is characterized by: forming an auxiliary discharge space between the surface of the inner electrode and the inner surface of the inner tube; Part of the light radiated from the auxiliary discharge space toward the lamp axis is irradiated to the main discharge space through the head end portion of the inner tube on the main discharge space side and the diameter-enlarged portion. A method of manufacturing an excimer lamp, characterized by comprising: The insertion step is to insert a foil-shaped inner electrode into the glass tube that becomes the inner tube; The sealing or enclosing step is to bring the inside of the inner tube into a depressurized state and seal it, or to seal a rare gas in the inner tube under atmospheric pressure; and In the sealing step, in order to form an auxiliary discharge space in at least a part of the inner tube along the tube axis direction, the inner tube is heated, diameter-reduced, and partially sealed with the inner electrode. The method for manufacturing an excimer lamp according to claim 11, wherein the main discharge space is formed by integrally heating and welding the outer tube and the enlarged diameter portion of the inner tube.

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