JP5672562B2 - Excimer lamp - Google Patents

Excimer lamp Download PDF

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JP5672562B2
JP5672562B2 JP2012132499A JP2012132499A JP5672562B2 JP 5672562 B2 JP5672562 B2 JP 5672562B2 JP 2012132499 A JP2012132499 A JP 2012132499A JP 2012132499 A JP2012132499 A JP 2012132499A JP 5672562 B2 JP5672562 B2 JP 5672562B2
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light emitting
emitting portion
sealing
external electrode
excimer lamp
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JP2013257999A (en
JP2013257999A5 (en
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幸治 田川
幸治 田川
菱沼　宣是
宣是 菱沼
淳哉 朝山
淳哉 朝山
小川　義正
義正 小川
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Ushio Denki KK
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Ushio Denki KK
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Priority to JP2012132499A priority Critical patent/JP5672562B2/en
Priority to CN201380025232.6A priority patent/CN104303261B/en
Priority to PCT/JP2013/064208 priority patent/WO2013187198A1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)

Description

この発明は、エキシマランプに関するものであり、特に、発光管の外表面に外部電極が配置され、発光管内に内部電極が配置されてなるエキシマランプに係わるものである。   The present invention relates to an excimer lamp, and particularly to an excimer lamp in which an external electrode is disposed on the outer surface of an arc tube and an internal electrode is disposed in the arc tube.

発光管の外表面に外側電極が配置され、発光管の内部に内側電極が配置された誘電体バリア放電を利用したエキシマランプは、例えば、特開２００６−０２４３８２号公報（特許文献１）に開示されている。
図４にその構造が示されていて、紫外線透過性の石英ガラス管よりなる発光管１は、内部に発光ガスが封入された発光部２と、その両端部でガラス管が圧潰されて形成された封止部３、３とからなる。
前記発光管１の発光部２の外面には、これを取り囲むようにメッシュ状の外部電極４が設けられており、内部には内部電極５が管軸方向に配置されていて、該内部電極５は封止部３内に気密に埋設された金属箔６の一端に接続されている。そして、金属箔６の他端には外部リード７が接続されており、この外部リード７は封止部３の端部から外部に突出している。
このような態様のエキシマランプは、ランプ始動時に内外電極間に高周波高電圧が印加され、外部電極４と内部電極５とが、誘電体からなる発光管１の管壁と、発光ガスの層を挟むようにして放電を生起し、発光ガスがエキシマ発光する。 An excimer lamp using dielectric barrier discharge in which an outer electrode is arranged on the outer surface of the arc tube and an inner electrode is arranged inside the arc tube is disclosed in, for example, Japanese Patent Application Laid-Open No. 2006-024382 (Patent Document 1). Has been.
FIG. 4 shows the structure of an arc tube 1 made of an ultraviolet light transmissive quartz glass tube. The arc tube 1 is formed of a light emitting portion 2 in which a luminescent gas is sealed, and the glass tube is crushed at both ends thereof. And sealing portions 3 and 3.
A mesh-like external electrode 4 is provided on the outer surface of the light-emitting portion 2 of the arc tube 1 so as to surround it, and an internal electrode 5 is disposed in the tube axis direction inside the internal electrode 5. Is connected to one end of a metal foil 6 hermetically embedded in the sealing portion 3. An external lead 7 is connected to the other end of the metal foil 6, and the external lead 7 protrudes from the end of the sealing portion 3 to the outside.
In such an excimer lamp, a high frequency high voltage is applied between the inner and outer electrodes at the time of starting the lamp, and the outer electrode 4 and the inner electrode 5 form a tube wall of the arc tube 1 made of a dielectric material and a layer of luminous gas. A discharge occurs as if sandwiched, and the luminescent gas emits excimer light.

このような発光部内に一方の電極を備えたエキシマランプにおいては、比較的高い電圧を印加しなければ良好に点灯開始ができないという問題を抱えており、例えば、特許文献２においては、ランプ始動時に印加するパルス電圧の波形を工夫した例が開示されている。
しかしながら、始動性を改善し、ランプ電圧を全般に低く抑えることができたとしても、ランプの個々の特性により始動特性が安定しない場合がある。このようなものにおいては、始動電圧を通常印加する電圧よりも高い電圧に設定し、始動特性を維持させることが必要になるが、近時、電源装置の小型化が進み、始動時に印加できる電圧の最大値も制限され、ランプが点灯するのに十分大きな電圧を印加できない場合もある。 In such an excimer lamp having one electrode in the light emitting section, there is a problem that the lighting cannot be started well unless a relatively high voltage is applied. An example in which the waveform of the pulse voltage to be applied is devised is disclosed.
However, even if the startability can be improved and the lamp voltage can be generally kept low, the start characteristics may not be stable due to the individual characteristics of the lamp. In such cases, it is necessary to set the starting voltage higher than the voltage that is normally applied to maintain the starting characteristics. Recently, however, the power supply device has been downsized and can be applied at the time of starting. The maximum value is also limited, and there is a case where a voltage large enough to light the lamp cannot be applied.

特開２００６−０２４３８２号公報JP 2006-024382 A 特開２００４−１８６０６８号公報JP 2004-186068 A

この発明が解決しようとする課題は、内部に発光ガスが封入された発光部と、その両端部に形成された封止部とよりなる発光管と、前記発光部の外表面に配置された外部電極と、該発光部の内部に配置された内部電極とよりなるエキシマランプにおいて、始動性を大幅に改善して、ランプ電圧を全般に低く抑えても、確実にランプを始動することができる構造を提供することである。   The problem to be solved by the present invention is an arc tube comprising a light emitting portion in which a luminescent gas is sealed, sealing portions formed at both ends thereof, and an external portion disposed on the outer surface of the light emitting portion. In an excimer lamp comprising an electrode and an internal electrode disposed inside the light-emitting portion, the startability can be reliably improved even if the starting voltage is greatly reduced and the lamp voltage is generally kept low. Is to provide.

上記課題を解決するために、この発明に係るエキシマランプにおいては、前記発光管は、発光部から封止部に向けて徐々に外径が小さくなる縮径部を備え、該縮径部にはその内部に微小な間隙が形成され、前記外部電極は、前記縮径部を含んで前記発光部の根元部にまで延在し、該外部電極の端部が前記発光管の根元部に巻き付けられていることを特徴とする。
また、前記封止部は、金属箔が埋設されたピンチシール構造であることを特徴とする。
In order to solve the above-described problem, in the excimer lamp according to the present invention, the arc tube includes a reduced diameter portion whose outer diameter gradually decreases from the light emitting portion toward the sealing portion, and the reduced diameter portion includes the reduced diameter portion. A minute gap is formed therein, and the external electrode extends to the base portion of the light emitting portion including the reduced diameter portion, and an end portion of the external electrode is wound around the base portion of the arc tube. It is characterized by.
The sealing portion may have a pinch seal structure in which a metal foil is embedded.

本発明のエキシマランプによれば、発光管の発光部の外表面に配置された外部電極の端部が延在して該発光部の封止部側の根元部に巻き付けられているので、発光部から封止部に至る外径が徐々に小さくなる縮径部の表面に外部電極が存在することになり、該外部電極と発光部内の内部電極が物理的に近づいて、電位的に接近することになるので、該内部電極と外部電極との間で誘電体（発光管）を介して放電が生じやすくなり、これによってランプの始動性が大幅に改善されて、ランプ電圧を低く抑えても良好な始動性が得られるものである。   According to the excimer lamp of the present invention, the end portion of the external electrode disposed on the outer surface of the light emitting portion of the arc tube extends and is wound around the root portion on the sealing portion side of the light emitting portion. The external electrode exists on the surface of the reduced diameter portion where the outer diameter from the portion to the sealing portion gradually decreases, and the external electrode and the internal electrode in the light emitting portion are physically close to each other and approach the potential. As a result, electric discharge is likely to occur between the internal electrode and the external electrode via a dielectric (a luminous tube), which greatly improves the startability of the lamp and reduces the lamp voltage. Good startability can be obtained.

本発明のエキシマランプの側面図。The side view of the excimer lamp of this invention. 本発明のエキシマランプの側断面図。The side sectional view of the excimer lamp of the present invention. 図２の端部の拡大断面図。The expanded sectional view of the edge part of FIG. 従来技術の断面図。Sectional drawing of a prior art.

図１、図２に本発明のエキシマランプにおける外部電極の態様が示されている。
石英ガラス製の発光管１は、発光部２と封止部３、３とからなり、発光部２内にはエキシマ発光ガスとして、例えば、キセノン（Ｘｅ）が２０ｋＰａから２００ｋＰａ封入されている。そして、封止部３は、発光管１を構成する石英ガラス管の端部を加熱して圧潰して形成したピンチシール部により構成される。
前記発光部２の外表面にはメッシュ状の外部電極４が配置され、内部には内部電極５が配置されている。
この内部電極５は、発光管１の内部において、管軸中心に沿うに配置されたロッド状の金属棒よりなり、その両端が封止部３の内部に埋設された金属箔６に接続されると共に、封止部３のガラスによって支持されている。金属箔６の他端には外部リード７が接続され、封止部３の端部から外部に突出している。 FIG. 1 and FIG. 2 show aspects of the external electrode in the excimer lamp of the present invention.
The light emitting tube 1 made of quartz glass includes a light emitting portion 2 and sealing portions 3 and 3, and, for example, xenon (Xe) is sealed in the light emitting portion 2 as an excimer light emission gas from 20 kPa to 200 kPa. And the sealing part 3 is comprised by the pinch seal part formed by heating and crushing the edge part of the quartz glass tube which comprises the arc_tube | light_emitting_tube 1. FIG.
A mesh-like external electrode 4 is disposed on the outer surface of the light emitting unit 2, and an internal electrode 5 is disposed inside.
The internal electrode 5 is made of a rod-shaped metal rod disposed along the tube axis center inside the arc tube 1, and both ends thereof are connected to a metal foil 6 embedded in the sealing portion 3. At the same time, it is supported by the glass of the sealing portion 3. An external lead 7 is connected to the other end of the metal foil 6 and protrudes from the end of the sealing portion 3 to the outside.

前記外部電極４は、金属細線からなり、発光管１の周囲に被せられて周方向及び軸方向に沿って伸びている。図１に示す態様では、この外部電極４は、金属線を筒状に編んで形成されたシームレス電極であって、発光管１からの光は金属線の間を透過可能である。
そして、この外部電極４の端部４ａは、発光部２から延在して該発光部２の封止部３側の根元部に巻き付けられている。
この構成により、図２の端部拡大図である図３に示されるように、外部電極４の端部４ａは、少なくとも、発光部２から封止部３に向けて徐々に外径が小さくなる縮径部８に及んで存在している。 The external electrode 4 is made of a fine metal wire, is covered around the arc tube 1 and extends along the circumferential direction and the axial direction. In the embodiment shown in FIG. 1, the external electrode 4 is a seamless electrode formed by knitting a metal wire into a cylindrical shape, and light from the arc tube 1 can be transmitted between the metal wires.
The end portion 4 a of the external electrode 4 extends from the light emitting portion 2 and is wound around the root portion of the light emitting portion 2 on the sealing portion 3 side.
With this configuration, as shown in FIG. 3 which is an enlarged view of the end of FIG. 2, the outer diameter of the end 4 a of the external electrode 4 gradually decreases at least from the light emitting unit 2 toward the sealing unit 3. It exists over the reduced diameter portion 8.

かかる構成とすることにより、前記縮径部８においては、外部電極４と内部電極５との間の距離が他の部分よりも近接すると共に、該縮径部８の内部に形成される微小な間隙Ｓに相当する部分は、内部電極５に誘電体が接近する部位であり、外部電極４と内部電極５との間において電位勾配が極めて大きくなるため、誘電体を介在させた放電を生起しやすく、エキシマランプが良好に始動される。
With this configuration, in the reduced diameter portion 8, the distance between the external electrode 4 and the internal electrode 5 is closer than the other portions, and the minute diameter formed in the reduced diameter portion 8. The portion corresponding to the gap S is a portion where the dielectric approaches the internal electrode 5, and the potential gradient between the external electrode 4 and the internal electrode 5 becomes extremely large, so that a discharge with the dielectric interposed is caused. Easy to start excimer lamps well.

なお、図１、図２で示した実施例においては、発光管１の両端部に封止部３、３を形成し、外部リード７、７を備えたものを説明したが、必ずしも両端に封止部３を備えている必要はなく、一方の端部にのみ封止部３を形成するものであってもよく、その場合、該一方の端部の封止部３から外部リード７を突出させる構造とすればよい。
また、両端部に封止部３、３を設ける構造においても、外部電極４の端部４ａを根元部に巻きつけるのは、どちらか一方の封止部３のみであってもよい。
さらに、封止部３の構造はピンチシール構造として説明したが、これに限られず、発光管１の外周の全周方向から径を縮径して封止するシュリンクシール構造を採用することも可能である。この場合も、縮径部において内部電極５と発光部３の内面との間に微小な間隙が形成されるので、同様の効果が得られるようになる。 In the embodiment shown in FIG. 1 and FIG. 2, the description has been given of the case where the sealing portions 3 and 3 are formed at both ends of the arc tube 1 and the external leads 7 and 7 are provided. It is not necessary to provide the stop portion 3, and the sealing portion 3 may be formed only at one end portion. In this case, the external lead 7 protrudes from the sealing portion 3 at the one end portion. What is necessary is just to make it the structure to make.
Also, in the structure in which the sealing portions 3 and 3 are provided at both ends, only one of the sealing portions 3 may wrap the end portion 4a of the external electrode 4 around the root portion.
Furthermore, the structure of the sealing portion 3 has been described as a pinch seal structure, but is not limited to this, and a shrink seal structure in which the diameter is reduced from the entire circumference of the outer periphery of the arc tube 1 can be employed. It is. Also in this case, since a minute gap is formed between the internal electrode 5 and the inner surface of the light emitting portion 3 in the reduced diameter portion, the same effect can be obtained.

以上説明したように、本発明のエキシマランプは、発光管の発光部の外表面に配置された外部電極の端部が延在して該発光部の封止部側の根元部に巻き付けられているので、発光部から封止部に至る外径が徐々に小さくなる縮径部の表面に外部電極が存在することになり、該外部電極と発光部内の内部電極が物理的に近づいて、電位的に接近することになるので、該内部電極と外部電極との間で誘電体（発光管）を介して放電が生じやすくなり、これによってランプの始動性が大幅に改善されて、ランプ電圧を低く抑えても良好な始動性が得られるものである。   As described above, the excimer lamp according to the present invention has the end of the external electrode disposed on the outer surface of the light emitting portion of the arc tube extending and wound around the root portion on the sealing portion side of the light emitting portion. Therefore, the external electrode exists on the surface of the reduced diameter portion where the outer diameter from the light emitting portion to the sealing portion gradually decreases, and the external electrode and the internal electrode in the light emitting portion are physically close to each other, and the potential is reduced. As a result, the discharge is likely to occur between the internal electrode and the external electrode via a dielectric (a light emitting tube), thereby greatly improving the startability of the lamp and reducing the lamp voltage. Even if kept low, good startability can be obtained.

１ 発光管
２ 発光部
３ 封止部
４ 外部電極
４ａ 外部電極の端部
５ 内部電極
６ 金属箔
７ 外部リード
８ 縮径部
Ｓ 微小間隙


DESCRIPTION OF SYMBOLS 1 Light emission tube 2 Light emission part 3 Sealing part 4 External electrode 4a End part of external electrode 5 Internal electrode 6 Metal foil 7 External lead 8 Reduced diameter part S Minute gap


Claims (2)

内部に発光ガスが封入された発光部と、その両端部に形成された封止部とよりなる発光管と、前記発光部の外表面に配置された外部電極と、該発光部の内部に配置された内部電極とよりなるエキシマランプにおいて、
前記発光部は前記封止部に向けて徐々に外径が小さくなる縮径部を備え、該縮径部には前記内部電極と前記発光部の内面との間に、前記封止部に向けて徐々に小さくなり、前記発光部の前記縮径部以外の部分よりも小さい微小な間隙が形成され、
前記外部電極は、前記縮径部を含んで前記発光部の根元部にまで延在し、該外部電極の端部が前記発光管の根元部に巻き付けられていることを特徴とするエキシマランプ。
An arc tube composed of a light emitting portion in which a luminescent gas is sealed, sealing portions formed at both ends thereof, an external electrode disposed on the outer surface of the light emitting portion, and an inside of the light emitting portion In an excimer lamp comprising an internal electrode formed,
The light emitting portion includes a reduced diameter portion that gradually decreases in outer diameter toward the sealing portion, and the reduced diameter portion is disposed between the internal electrode and the inner surface of the light emitting portion and directed toward the sealing portion. A small gap is formed which is smaller than the portion other than the reduced diameter portion of the light emitting portion ,
The excimer lamp, wherein the external electrode includes the reduced diameter portion and extends to a base portion of the light emitting portion, and an end portion of the external electrode is wound around the base portion of the arc tube.
前記封止部は、金属箔が埋設されたピンチシール構造であることを特徴とする請求項１に記載のエキシマランプ。


The excimer lamp according to claim 1, wherein the sealing portion has a pinch seal structure in which a metal foil is embedded.


JP2012132499A 2012-06-12 2012-06-12 Excimer lamp Expired - Fee Related JP5672562B2 (en)

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CN201380025232.6A CN104303261B (en) 2012-06-12 2013-05-22 Excimer lamp
PCT/JP2013/064208 WO2013187198A1 (en) 2012-06-12 2013-05-22 Excimer lamp

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WO2013187198A1 (en) 2013-12-19
CN104303261A (en) 2015-01-21

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