CN104303261A - Excimer lamp - Google Patents
Excimer lamp Download PDFInfo
- Publication number
- CN104303261A CN104303261A CN201380025232.6A CN201380025232A CN104303261A CN 104303261 A CN104303261 A CN 104303261A CN 201380025232 A CN201380025232 A CN 201380025232A CN 104303261 A CN104303261 A CN 104303261A
- Authority
- CN
- China
- Prior art keywords
- illuminating part
- excimer lamp
- lamp
- sealing
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Abstract
The present invention provides an excimer lamp comprising a light emission tube (1) formed from a light emitting section (2) in the interior of which light emitting gas is sealed and seal sections (3) formed at both ends of the tube, external electrodes (4) disposed on the outer surface of the light emitting section, and an internal electrode (5) disposed inside of the light emitting section, wherein the excimer lamp is characterized in that the ends of the external electrodes extend to and are wrapped around a root part on the seal member side of the light emitting section. This configuration enables lamp startability to be greatly improved and the lamp to be reliably started even in a case where the lamp voltage is low.
Description
Technical field
The present invention relates to a kind of Excimer lamp, particularly relate to a kind of outer surface configuring external electrode at luminous tube and in luminous tube, configure the Excimer lamp of internal electrode.
Background technology
Such as disclose in Japanese Unexamined Patent Publication 2006-024382 publication (patent documentation 1) a kind of outer surface at luminous tube configuration lateral electrode and luminous tube internal configurations medial electrode, make use of dielectric barrier electric discharge Excimer lamp.
Its structure has been shown in Fig. 4, and the luminous tube 1 be made up of the quartz glass tube of ultraviolet permeability is by being sealed with the illuminating part 2 of luminous gas in inside and being flattened by glass tube at the both ends of this illuminating part 2 and the sealing 3,3 that formed is formed.
Be provided with netted outer electrode 4 at the outer surface of the illuminating part 2 of above-mentioned luminous tube 1 in the mode of surrounding this illuminating part 2, arrange internal electrode 5 in inside on tube axial direction, this internal electrode 5 is connected with the one end of the metal forming 6 be embedded in airtightly in sealing 3.Further, connect outside lead 7 at the other end of metal forming 6, this outside lead 7 is externally given prominence to from the end of sealing 3.
The Excimer lamp of such form is applied in high-frequency high-voltage when lamp starts between internal and external electrode, and outer electrode 4 and internal electrode 5 discharge in the mode clamping luminous gas layer with the tube wall of the luminous tube 1 be made up of dielectric, luminous gas stimulated luminescence.
Have in the Excimer lamp of an electrode in illuminating part this, there is the problem that must apply higher voltage and could start well to light, such as, Patent Document 2 discloses the example of the waveform of the pulse voltage that design applies when lamp starts.
But, namely allow to improve startability and all sidedly modulating voltage suppressed low, also there is the situation making starting characteristic instability due to the respective characteristic of lamp.In such lamp, need starting resistor to be set as the voltage higher than the voltage usually applied is to maintain starting characteristic, but, in recent years along with the miniaturization of supply unit, the maximum of the voltage that can apply during startup is also restricted, and exists and cannot apply situation lamp will being lighted required enough large voltage.
Patent documentation 1: Japanese Unexamined Patent Publication 2006-024382 publication
Patent documentation 2: Japanese Unexamined Patent Publication 2004-186068 publication
Summary of the invention
The problem to be solved in the present invention is to provide a kind of structure of Excimer lamp, this Excimer lamp is made up of luminous tube, outer electrode and internal electrode, above-mentioned luminous tube is made up of the illuminating part being sealed with luminous gas in inside and the sealing that formed at the both ends of above-mentioned illuminating part, outer electrode is configured in the outer surface of above-mentioned illuminating part, internal electrode is configured in the inside of this illuminating part, significantly startability can be improved, even if suppress low by modulating voltage all sidedly, also reliably lamp can be started.
In order to solve the problem, in Excimer lamp of the present invention, it is characterized in that, the end of said external electrode extends and is wound on the root of the sealed part side of the illuminating part of above-mentioned luminous tube.
In addition, it is characterized in that, above-mentioned sealing is the pressing sealing structure being embedded with metal forming.
Invention effect
According to Excimer lamp of the present invention, end due to the outer electrode being configured in the outer surface of the illuminating part of luminous tube extends and is wound on the root of the sealed part side of this illuminating part, so there is outer electrode in the surface of the reducing diameter part diminished gradually at the external diameter from illuminating part to sealing, internal electrode in this outer electrode and illuminating part is physically close, current potential becomes close, therefore easily discharge via dielectric (luminous tube) between this internal electrode and outer electrode, the startability of lamp is significantly improved thus, even if modulating voltage is suppressed lowly also can obtain good startability.
Accompanying drawing explanation
Fig. 1 is the end view of Excimer lamp of the present invention.
Fig. 2 is the side sectional view of Excimer lamp of the present invention.
Fig. 3 is the amplification view of the end of Fig. 2.
Fig. 4 is the cutaway view of prior art.
Embodiment
Fig. 1, Fig. 2 show the form of the outer electrode in Excimer lamp of the present invention.
The luminous tube 1 of quartz glass is made up of illuminating part 2 and sealing 3,3, is sealed with the xenon (Xe) of such as 20kPa to 200kPa as stimulated luminescence gas in illuminating part 2.Further, sealing 3 by the quartz glass tube by forming luminous tube 1 end heat and to flatten and the press seal portion that formed is formed.
At the outer electrode 4 of the outer surface configuration mesh of above-mentioned illuminating part 2, at internal configurations internal electrode 5.
This internal electrode 5 is made up of the shaft-like metal bar in the inside of luminous tube 1 along tubular axis center configuration, and the two ends of this internal electrode 5 are connected with the metal forming 6 being embedded in sealing 3 inside, and by the glass support of sealing 3.Connect outside lead 7 at the other end of metal forming 6, externally give prominence to from the end of sealing 3.
Said external electrode 4 is made up of metal fine, cover luminous tube 1 surrounding and circumferentially with axial extension.In the form shown in Fig. 1, this outer electrode 4 is seamless electrodes metal wire being woven into tubular and being formed, and the light sent from luminous tube 1 can through between metal wire.
Further, the end 4a of this outer electrode 4 extends from illuminating part 2 and is wound on the root of sealing 3 side of this illuminating part 2.
By this structure, as shown in Fig. 3 of the end enlarged drawing as Fig. 2, reducing diameter part 8 ground that the end 4a of outer electrode 4 at least prolongs and external diameter diminishes gradually from illuminating part 2 towards sealing 3 exists.
By forming such structure, in above-mentioned reducing diameter part 8, distance between outer electrode 4 and internal electrode 5 is more close than other parts, and the part worked as with the minim gap S-phase formed in the inside of this reducing diameter part 8 is the position of dielectric close to internal electrode 5, potential difference between outer electrode 4 and internal electrode 5 becomes minimum, so easily discharge via dielectric, Excimer lamp is started well.
In addition, in the embodiment shown in Fig. 1, Fig. 2, describe and form sealing 3,3 at the both ends of luminous tube 1 and there is the Excimer lamp of outside lead 7,7, but there is no need one to fix on two ends and arrange sealing 3, also can only at one end portion formed sealing 3, in this case, as long as form the structure making outside lead 7 give prominence to from the sealing 3 of this end.
In addition, even if arrange in the structure of sealing 3,3 at both ends, the end 4a of the outer electrode 4 that also can only reel on the root of arbitrary sealing 3.
Further, although the structure of sealing 3 be illustrated as pressing sealing structure, be not limited to this, also can adopt and reduce from the whole circumferencial direction of the periphery of luminous tube 1 the collapsed seal structure that diameter carries out sealing.Owing to forming small gap between internal electrode 5 and illuminating part 3 inner surface in this case in reducing diameter part, therefore also same effect can be obtained.
As discussed above, in Excimer lamp of the present invention, the end of the outer electrode configured due to the outer surface of the illuminating part at luminous tube extends and is wound on the root of the sealed part side of this illuminating part, so there is outer electrode in the surface of the reducing diameter part diminished gradually at the external diameter from illuminating part to sealing, internal electrode in this outer electrode and illuminating part is physically close, current potential becomes close, so easily discharge via dielectric (luminous tube) between this internal electrode and outer electrode, the startability of lamp is significantly improved thus, even if modulating voltage is suppressed lowlyer also can obtain good startability.
Description of reference numerals
1 luminous tube
2 illuminating parts
3 sealings
4 outer electrodes
The end of 4a outer electrode
5 internal electrodes
6 metal formings
7 outside leads
8 reducing diameter parts
S minim gap
Claims (2)
1. an Excimer lamp, be made up of luminous tube, outer electrode and internal electrode, described luminous tube is made up of the illuminating part being sealed with luminous gas in inside and the sealing that formed at the both ends of described illuminating part, described outer electrode is configured on the outer surface of described illuminating part, described internal electrode is configured in the inside of described illuminating part, the feature of described Excimer lamp is
The end of described outer electrode extends and is wound on the root of the sealed part side of described illuminating part.
2. Excimer lamp according to claim 1, is characterized in that,
Described sealing is the pressing sealing structure being embedded with metal forming.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-132499 | 2012-06-12 | ||
| JP2012132499A JP5672562B2 (en) | 2012-06-12 | 2012-06-12 | Excimer lamp |
| PCT/JP2013/064208 WO2013187198A1 (en) | 2012-06-12 | 2013-05-22 | Excimer lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104303261A true CN104303261A (en) | 2015-01-21 |
| CN104303261B CN104303261B (en) | 2016-10-05 |
Family
ID=49758028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380025232.6A Expired - Fee Related CN104303261B (en) | 2012-06-12 | 2013-05-22 | Excimer lamp |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5672562B2 (en) |
| CN (1) | CN104303261B (en) |
| WO (1) | WO2013187198A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106783526A (en) * | 2016-12-26 | 2017-05-31 | 上海开若纳科技有限公司 | A kind of large scale Excimer lamp |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6428196B2 (en) | 2014-11-25 | 2018-11-28 | ウシオ電機株式会社 | Excimer discharge lamp device |
| JP7132540B2 (en) * | 2018-06-13 | 2022-09-07 | ウシオ電機株式会社 | excimer lamp |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09283092A (en) * | 1996-04-19 | 1997-10-31 | Stanley Electric Co Ltd | Fluorescent lamp |
| JP2002110103A (en) * | 2000-09-28 | 2002-04-12 | Toshiba Lighting & Technology Corp | Dielectric barrier discharge lamp, its device and ultraviolet ray cleaning apparatus |
| CN2886800Y (en) * | 2006-01-25 | 2007-04-04 | 上海国达特殊光源有限公司 | Quasi-molecule discharging tube |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3346190B2 (en) * | 1996-10-08 | 2002-11-18 | ウシオ電機株式会社 | Rare gas discharge lamp |
| JP3858813B2 (en) * | 2002-12-05 | 2006-12-20 | ウシオ電機株式会社 | Excimer lamp light emitting device |
| JP2006024382A (en) * | 2004-07-06 | 2006-01-26 | Ushio Inc | Excimer lamp |
| JP5051401B2 (en) * | 2010-03-30 | 2012-10-17 | ウシオ電機株式会社 | High pressure discharge lamp |
-
2012
- 2012-06-12 JP JP2012132499A patent/JP5672562B2/en not_active Expired - Fee Related
-
2013
- 2013-05-22 CN CN201380025232.6A patent/CN104303261B/en not_active Expired - Fee Related
- 2013-05-22 WO PCT/JP2013/064208 patent/WO2013187198A1/en active Application Filing
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09283092A (en) * | 1996-04-19 | 1997-10-31 | Stanley Electric Co Ltd | Fluorescent lamp |
| JP2002110103A (en) * | 2000-09-28 | 2002-04-12 | Toshiba Lighting & Technology Corp | Dielectric barrier discharge lamp, its device and ultraviolet ray cleaning apparatus |
| CN2886800Y (en) * | 2006-01-25 | 2007-04-04 | 上海国达特殊光源有限公司 | Quasi-molecule discharging tube |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106783526A (en) * | 2016-12-26 | 2017-05-31 | 上海开若纳科技有限公司 | A kind of large scale Excimer lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5672562B2 (en) | 2015-02-18 |
| WO2013187198A1 (en) | 2013-12-19 |
| JP2013257999A (en) | 2013-12-26 |
| CN104303261B (en) | 2016-10-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5578526B2 (en) | High pressure sodium discharge lamp with hybrid antenna | |
| JP5360033B2 (en) | Short arc flash lamp | |
| CN104303261A (en) | Excimer lamp | |
| JP5167955B2 (en) | Xenon lamp | |
| JP4305298B2 (en) | Excimer lamp | |
| CN105845541A (en) | Excimer discharge lamp | |
| JP6303946B2 (en) | Noble gas fluorescent lamp | |
| JP2015162404A (en) | Short-arc flash lamp and light source device | |
| JP5051401B2 (en) | High pressure discharge lamp | |
| EP1659618A2 (en) | Lamp header with start-up conductor | |
| US20080224614A1 (en) | Looped Frame Arc Tube Mounting Assembly for Metal Halide Lamp | |
| KR100973119B1 (en) | Lamp unit | |
| JP4840589B2 (en) | High pressure discharge lamp device | |
| CA2613730A1 (en) | Starting aid for low wattage metal halide lamps | |
| US20220415642A1 (en) | High-pressure discharge lamp, in particular high-pressure sodium-vapor lamp, with improved ignitability | |
| JP6007656B2 (en) | Excimer lamp | |
| JP2009099338A (en) | Ultra-high pressure discharge lamp | |
| DE102010038403A1 (en) | High pressure discharge lamp with ignition aid | |
| JP2006269081A (en) | Short arc discharge lamp | |
| US20110121710A1 (en) | Lamp and illuminating device | |
| JP6562298B2 (en) | Discharge lamp | |
| JP2016035863A (en) | Electrode for discharge lamp and flash lamp | |
| KR20130058606A (en) | Ceramic metal halide lamp | |
| US20110291556A1 (en) | Gas discharge lamp | |
| JP2016066444A (en) | Discharge lamp |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161005 Termination date: 20210522 |