CN106783526A - A kind of large scale Excimer lamp - Google Patents
A kind of large scale Excimer lamp Download PDFInfo
- Publication number
- CN106783526A CN106783526A CN201611215497.4A CN201611215497A CN106783526A CN 106783526 A CN106783526 A CN 106783526A CN 201611215497 A CN201611215497 A CN 201611215497A CN 106783526 A CN106783526 A CN 106783526A
- Authority
- CN
- China
- Prior art keywords
- sealing
- excimer lamp
- illuminating part
- luminous tube
- large scale
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims abstract description 44
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 25
- 239000010453 quartz Substances 0.000 claims abstract description 19
- 239000003708 ampul Substances 0.000 claims abstract description 13
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 10
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000011888 foil Substances 0.000 claims abstract description 8
- 229910052751 metal Inorganic materials 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims abstract description 8
- 238000007747 plating Methods 0.000 claims abstract description 6
- 239000011521 glass Substances 0.000 claims abstract description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 4
- 239000011733 molybdenum Substances 0.000 claims abstract description 4
- 238000004020 luminiscence type Methods 0.000 claims description 3
- 229910052724 xenon Inorganic materials 0.000 claims description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 3
- 230000006835 compression Effects 0.000 claims description 2
- 238000007906 compression Methods 0.000 claims description 2
- 238000004804 winding Methods 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims 1
- 238000013461 design Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000005611 electricity Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
- H01J61/547—Igniting arrangements, e.g. promoting ionisation for starting using an auxiliary electrode outside the vessel
Abstract
The invention discloses a kind of large scale Excimer lamp, including Excimer lamp body, the one end on the Excimer lamp body with sealing discharge vessel is provided with sealing, and the other end of Excimer lamp body is provided with end head, the sealing and illuminating part constitute luminous tube, the outer electrode of the outer surface configuration plating goldleaf of the illuminating part, and the inside configuration mesh internal electrode of illuminating part, the outer electrode is used to be electroplated goldleaf and is covered in around luminous tube and axially extends on ultraviolet elegant quartz high, the internal electrode winds molybdenum net along the shaft-like quartz ampoule support of pipe axle center configuration and on quartz ampoule by the inside of luminous tube, the two ends of the internal electrode are connected and by the glass support of sealing with the metal foil being embedded in inside sealing, the other end connection outside lead of the metal foil.The present invention can realize the design and producing of high-power excimer light source, and length dimension can be designed according to concrete application and adjusted.
Description
Technical field
The present invention relates to Excimer lamp technical field, specially a kind of large scale Excimer lamp.
Background technology
With the development of science and technology, the development of the industry such as particularly semiconductor, liquid crystal, photovoltaic, generates new industrial requirement,
Liquid crystal panel, semiconductor wafer, photovoltaic silicon wafer gradually maximizes, and mass production in PROCESS FOR TREATMENT, it is necessary to use ultraviolet
Cleaned, the treatment such as etching, and need to realize the long lifetime of lamp.Therefore, Excimer lamp is liquid crystal panel as one kind
Substrate, semiconductor wafer, photovoltaic silicon wafer etc. are cleaned, etching etc. the advanced technology means of processing substrate and attract attention.It is accurate
Molecule lamp as the vacuum-ultraviolet light of below major radiation wavelength 200nm light source, in having been used for multiple use.
At present, Excimer lamp of the prior art, typically by illuminating part, outer electrode, internal electrode is constituted.Luminous tube by
The sealing for being internally sealed with the illuminating part of luminous gas and being formed at the both ends of the illuminating part is constituted, and outer electrode is matched somebody with somebody
Put on the outer surface of the illuminating part, internal electrode is configured in the inside of the illuminating part.But, existing accurate point on the market
Sub- lamp is small size in terms of design and producing, all, and lamp design is complicated, and power supply mode is dumb, is unfavorable for industry spot
Use.
The content of the invention
It is an object of the invention to provide a kind of large scale Excimer lamp, it is possible to achieve the design of high-power excimer light source
And production, the power of maximum 500W can be realized through sample test, in 172nm, light source surface intensity of illumination is up to 40mW/ for crest
cm2, length dimension can be designed according to concrete application and adjusted, and solve institute in above-mentioned background technology more than 3000 hours the life-span
The problem of proposition.
To achieve the above object, the present invention provides following technical scheme：A kind of large scale Excimer lamp, including Excimer lamp
Body, one end on the Excimer lamp body with sealing discharge vessel is provided with sealing, and Excimer lamp body is another
End is formed with the end head as exhaust termination remaining part, and the sealing and illuminating part constitute luminous tube, and the luminous tube is used
Quartz glass is made, the outer electrode of the outer surface of illuminating part configuration plating goldleaf, and illuminating part inside configuration mesh
Internal electrode, the outer electrode use electroplate goldleaf on ultraviolet quartz high elegant and be covered in around luminous tube and vertically
Extend, the internal electrode is twined by the inside of luminous tube along the shaft-like quartz ampoule support of pipe axle center configuration and on quartz ampoule
Around molybdenum net, the two ends of the internal electrode are connected and by the glass support of sealing with the metal foil being embedded in inside sealing,
The other end connection outside lead of the metal foil, the outside lead is drawn to outside from the end of sealing and is connected with interface
Connect.
Preferably, the sealing is by will constitute the end heat of the quartz glass tube of luminous tube and flatten and the pressure that is formed
Tightening seal portion is constituted.
Preferably, envelope has xenon as stimulated luminescence gas in the illuminating part.
Preferably, the root of sealed part side of the end of the outer electrode from illuminating part extension and wound on illuminating part
On, and the end of outer electrode at least extends to the presence of the necking part that external diameter is tapered into from illuminating part towards sealing.
Preferably, the internal electrode realizes sealing press seal by using sealing-in molybdenum sheet.
Compared with prior art, beneficial effects of the present invention are as follows：
1st, the present invention is by setting the outside plating good and not oxidizable using electric conductivity of Excimer lamp body
Gold foil outer electrode, can be according to different application demand along fluorescent tube axial direction, by technological requirement with a plurality of 1-8 millimeters different arc
Width is axially coated in quartz outer tube layer thoroughly high, can widen or fill at two ends and external electrical contact.Additionally, outer electrode weight
Amount is light and uniform, and whole coating layer thickness is less than 0.08 millimeter, hardly increases tube diameter, and installation chi is controlled to greatest extent
It is very little, construction costs and safety coefficient are reduced, and many residue stresses will not be caused to quartz ampoule；It is firm, conduct electricity very well, it is ensured that
Ultraviolet light is uniformly utilized.
2nd, the present invention supports internal electrode, stone by by the inside of luminous tube along the shaft-like quartz ampoule of pipe axle center configuration
The existing good insulating properties of English pipe has good translucency again, it is ensured that the axial line in Excimer lamp body of internal electrode,
Ensure the uniform normal direction transmitting of ultraviolet light.Additionally, internal electrode realizes sealing press seal by sealing-in molybdenum sheet structure, it is ensured that lamp
The air-tightness of tube chamber, is also connected by outside lead with interface, using standard interface mode, facilitates onsite application.
Brief description of the drawings
Fig. 1 is structural representation of the invention.
In figure：1- discharge vessels, 2- sealings, 3- end heads, 4- illuminating parts, 5- outer electrodes, 6- internal electrodes, outside 7-
Portion's lead, 8- interfaces.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
Fig. 1 is referred to, the present invention provides a kind of large scale Excimer lamp technical scheme：A kind of large scale Excimer lamp, bag
Excimer lamp body is included, the one end on the Excimer lamp body with sealing discharge vessel 1 is provided with sealing 2, and quasi-molecule
The other end of lamp body is formed with the end head 3 as exhaust termination remaining part, and the sealing 2 and illuminating part 4 constitute luminous tube,
The luminous tube is made of quartz glass, the sealing 2 by will constitute luminous tube quartz glass tube end heat simultaneously
The compression sealing 2 for flattening and being formed is constituted, and envelope has xenon as stimulated luminescence gas in the illuminating part 4, the illuminating part 4
Outer surface configuration plating goldleaf outer electrode 5, and illuminating part 4 inside configuration mesh internal electrode 6, the outer electrode
5 are axially extended using on ultraviolet quartz high elegant electroplating goldleaf and being covered in around luminous tube, the outer electrode 5
End extends and on the root of the side of sealing 2 of illuminating part 4 from illuminating part 4, and the end of outer electrode 5 at least extends to
The presence of the necking part that external diameter is tapered into from illuminating part 4 towards sealing 2, the internal electrode 6 is by the inside of luminous tube
Along the shaft-like quartz ampoule support of pipe axle center configuration and the winding molybdenum net on quartz ampoule, the internal electrode 6 is by using sealing-in
Molybdenum sheet realizes sealing press seal, and the two ends of the internal electrode 6 are connected and by sealing with the metal foil being embedded in inside sealing 2
2 glass support, the other end connection outside lead 7 of the metal foil, the outside lead 7 is outside from the end of sealing 2
Draw and be connected with interface 8 in portion.
By forming such structure, in above-mentioned reducing diameter part, the distance between outer electrode 5 and internal electrode 6 are than it
It is partly approached, and the part suitable with the minim gap being internally formed in the reducing diameter part is dielectric close to internal electrode
6 position, the potential difference between outer electrode 5 and internal electrode 6 becomes minimum, so easily discharged via dielectric,
Excimer lamp is set to start well.
In addition, form sealing 2 and with the Excimer lamp of outside lead 7 at the both ends of luminous tube, only portion at one end
Sealing 2 is formed, in this case, as long as forming the structure for making outside lead 7 be protruded from the sealing 2 of the one end.
Operation principle：By setting the outside plating good and not oxidizable using electric conductivity of Excimer lamp body
Gold foil outer electrode 5, can be different with a plurality of 1-8 millimeters by technological requirement according to different application demand along fluorescent tube axial direction
Arc is wide to be axially coated in quartz outer tube layer thoroughly high, can widen or fill at two ends and external electrical contact.Additionally, outer electrode
5 is lightweight and uniform, and whole coating layer thickness is less than 0.08 millimeter, hardly increases tube diameter, and peace is controlled to greatest extent
Dress size, reduces construction costs and safety coefficient, and many residue stresses will not be caused to quartz ampoule；It is firm, conduct electricity very well,
Ensure that ultraviolet light is uniformly utilized, internal electrode is supported along the shaft-like quartz ampoule of pipe axle center configuration by by the inside of luminous tube
6, the existing good insulating properties of quartz ampoule has good translucency again, it is ensured that the axle in Excimer lamp body of internal electrode 6
Heart line, it is ensured that the uniform normal direction transmitting of ultraviolet light.Additionally, internal electrode 6 realizes sealing press seal by sealing-in molybdenum sheet structure, protect
The air-tightness of fluorescent tube cavity is demonstrate,proved, has also been connected with interface 8 by outside lead 7, using the mode of standard interface 8, facilitated scene to make
With in crystal round etching, the field application value such as ultra-violet curing, material deposition, film preparation, material surface modifying and Environmental capacity
It is huge.
It is as discussed above, due to the end of the outer electrode 5 that the outer surface of the illuminating part 4 in luminous tube configures
Extend and on the root of the side of sealing 2 of the illuminating part 4, so gradually becoming from illuminating part 4 to the external diameter of sealing 2
There is outer electrode 5 on the surface of small reducing diameter part, the outer electrode 5 physically connects with the internal electrode 6 in illuminating part 4
Closely, current potential becomes close to, so being susceptible to put via dielectric (luminous tube) between the internal electrode 6 and outer electrode 5
Electricity, thus the startability of lamp is greatly improved, even if modulating voltage is suppressed relatively low can also obtain good startability.
Although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
Understanding can carry out various changes, modification, replacement to these embodiments without departing from the principles and spirit of the present invention
And modification, the scope of the present invention be defined by the appended.
Claims (5)
1. a kind of large scale Excimer lamp, including Excimer lamp body, it is characterised in that：Have on the Excimer lamp body close
One end of envelope discharge vessel (1) is provided with sealing (2), and the other end of Excimer lamp body is formed with as exhaust termination remaining part
End head (3), the sealing (2) and illuminating part (4) constitute luminous tube, and the luminous tube is made of quartz glass, institute
The outer electrode (5) of the outer surface configuration plating goldleaf of illuminating part (4) is stated, and the inside configuration mesh inside of illuminating part (4) is electric
Pole (6), the outer electrode (5) using on ultraviolet elegant quartz high electroplate goldleaf and be covered in around luminous tube and vertically
Extend, the internal electrode (6) is supported and in quartz ampoule by the inside of luminous tube along the shaft-like quartz ampoule of pipe axle center configuration
Upper winding molybdenum net, the two ends of the internal electrode (6) metal foil internal with sealing (2) is embedded in is connected and by sealing
(2) glass support, the other end of the metal foil connects outside lead (7), and the outside lead (7) is from sealing (2)
Drawn to outside and be connected with interface (8) in end.
2. a kind of large scale Excimer lamp according to claim 1, it is characterised in that：The sealing (2) will be by that will constitute
The end heat of the quartz glass tube of luminous tube and compression sealing (2) composition flattened and formed.
3. a kind of large scale Excimer lamp according to claim 1, it is characterised in that：Envelope has xenon in the illuminating part (4)
Gas is used as stimulated luminescence gas.
4. a kind of large scale Excimer lamp according to claim 1, it is characterised in that：The end of the outer electrode (5)
From illuminating part (4) extend and on the root of sealing (2) side of illuminating part (4), and outer electrode (5) end at least
Extend to the presence of the necking part that external diameter is tapered into from illuminating part (4) towards sealing (2).
5. a kind of large scale Excimer lamp according to claim 1, it is characterised in that：The internal electrode (6) is by adopting
Sealing press seal is realized with sealing-in molybdenum sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611215497.4A CN106783526A (en) | 2016-12-26 | 2016-12-26 | A kind of large scale Excimer lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611215497.4A CN106783526A (en) | 2016-12-26 | 2016-12-26 | A kind of large scale Excimer lamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106783526A true CN106783526A (en) | 2017-05-31 |
Family
ID=58927324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611215497.4A Pending CN106783526A (en) | 2016-12-26 | 2016-12-26 | A kind of large scale Excimer lamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106783526A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112190726A (en) * | 2020-09-02 | 2021-01-08 | 德州立威生物科技有限公司 | Novel UV ultraviolet gilding fluorescent tube |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4235743A1 (en) * | 1992-10-23 | 1994-04-28 | Heraeus Noblelight Gmbh | High power emitter esp. UV excimer laser with coated internal electrode - in transparent dielectric tube and external electrode grid, which has long life and can be made easily and economically |
| JP2002110103A (en) * | 2000-09-28 | 2002-04-12 | Toshiba Lighting & Technology Corp | Dielectric barrier discharge lamp, its device and ultraviolet ray cleaning apparatus |
| US20020130280A1 (en) * | 2001-03-15 | 2002-09-19 | Silke Reber | Excimer radiator, especially UV radiator |
| JP2003168394A (en) * | 2001-11-30 | 2003-06-13 | Ｈｏｙａ−Ｓｃｈｏｔｔ株式会社 | Dielectric barrier excimer lamp |
| JP2003323868A (en) * | 2002-04-30 | 2003-11-14 | Hamamatsu Photonics Kk | Dielectric barrier discharge lamp |
| JP2014032910A (en) * | 2012-08-06 | 2014-02-20 | Ushio Inc | Excimer lamp |
| JP2014078460A (en) * | 2012-10-12 | 2014-05-01 | Ushio Inc | Excimer lamp |
| CN103959431A (en) * | 2011-12-02 | 2014-07-30 | 优志旺电机株式会社 | Excimer lamp |
| CN103972040A (en) * | 2013-02-06 | 2014-08-06 | 优志旺电机株式会社 | Excimer Lamp |
| CN104205288A (en) * | 2012-04-04 | 2014-12-10 | 优志旺电机株式会社 | Ultraviolet-light-emitting fluorescent lamp |
| CN104303261A (en) * | 2012-06-12 | 2015-01-21 | 优志旺电机株式会社 | Excimer lamp |
| JP2016062678A (en) * | 2014-09-16 | 2016-04-25 | ウシオ電機株式会社 | Rare gas fluorescent lamp |
| CN206340514U (en) * | 2016-12-26 | 2017-07-18 | 上海开若纳科技有限公司 | A kind of large scale Excimer lamp |
-
2016
- 2016-12-26 CN CN201611215497.4A patent/CN106783526A/en active Pending
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4235743A1 (en) * | 1992-10-23 | 1994-04-28 | Heraeus Noblelight Gmbh | High power emitter esp. UV excimer laser with coated internal electrode - in transparent dielectric tube and external electrode grid, which has long life and can be made easily and economically |
| JP2002110103A (en) * | 2000-09-28 | 2002-04-12 | Toshiba Lighting & Technology Corp | Dielectric barrier discharge lamp, its device and ultraviolet ray cleaning apparatus |
| US20020130280A1 (en) * | 2001-03-15 | 2002-09-19 | Silke Reber | Excimer radiator, especially UV radiator |
| JP2003168394A (en) * | 2001-11-30 | 2003-06-13 | Ｈｏｙａ−Ｓｃｈｏｔｔ株式会社 | Dielectric barrier excimer lamp |
| JP2003323868A (en) * | 2002-04-30 | 2003-11-14 | Hamamatsu Photonics Kk | Dielectric barrier discharge lamp |
| CN103959431A (en) * | 2011-12-02 | 2014-07-30 | 优志旺电机株式会社 | Excimer lamp |
| CN104205288A (en) * | 2012-04-04 | 2014-12-10 | 优志旺电机株式会社 | Ultraviolet-light-emitting fluorescent lamp |
| CN104303261A (en) * | 2012-06-12 | 2015-01-21 | 优志旺电机株式会社 | Excimer lamp |
| JP2014032910A (en) * | 2012-08-06 | 2014-02-20 | Ushio Inc | Excimer lamp |
| JP2014078460A (en) * | 2012-10-12 | 2014-05-01 | Ushio Inc | Excimer lamp |
| CN103972040A (en) * | 2013-02-06 | 2014-08-06 | 优志旺电机株式会社 | Excimer Lamp |
| JP2016062678A (en) * | 2014-09-16 | 2016-04-25 | ウシオ電機株式会社 | Rare gas fluorescent lamp |
| CN206340514U (en) * | 2016-12-26 | 2017-07-18 | 上海开若纳科技有限公司 | A kind of large scale Excimer lamp |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112190726A (en) * | 2020-09-02 | 2021-01-08 | 德州立威生物科技有限公司 | Novel UV ultraviolet gilding fluorescent tube |
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