CN216818274U

CN216818274U - Excimer lamp and light source device thereof

Info

Publication number: CN216818274U
Application number: CN202121691635.2U
Authority: CN
Inventors: 王国征
Original assignee: SHANGHAI GUODA UV EQUIPMENT CO Ltd
Current assignee: SHANGHAI GUODA UV EQUIPMENT CO Ltd
Priority date: 2021-07-24
Filing date: 2021-07-24
Publication date: 2022-06-24
Anticipated expiration: 2031-07-24

Abstract

The utility model discloses an excimer lamp and a light source device thereof, comprising an excimer lamp, an excimer discharge tube and a light source device, wherein the excimer discharge tube consists of an excimer discharge inner tube, an excimer discharge outer tube and a discharge space; the excimer lamp consists of an excimer discharge tube, a metal excimer lamp base strip, a metal flexible mesh enclosure, an anode metal electrode bar and a hoop head.

Description

Excimer lamp and light source device thereof

Technical Field

The utility model relates to the technical field of light sources, in particular to an excimer lamp and a light source device thereof.

Background

The UV excimer discharge lamp is a discharge lamp based on the barrier discharge principle, which emits light by discharging a discharge space formed between the outside and the inside of a tube filled with an inert gas by using a high-frequency high-voltage power supply applied between the outside and the inside of the tube. The short wavelength excimer lamp is used for ultra-precise cleaning in the production of micro-electronics, liquid crystal, semiconductors and ultra-precise devices, and is popularized in the modification and modification of the surface of special engineering materials. At present, two types of excimer products for surface treatment are available on the market, one type is circular, the irradiation area irradiated on an irradiated object is quite limited, the uniformity is poor, and electric energy is wasted; the second generation flat structure needs to draw the round tube for multiple times, and has high production cost, limited negative pressure bearing and short service life. Therefore, the present invention provides an excimer lamp and a light source device thereof to solve the problems in the background art.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to an excimer lamp and a light source device thereof, so as to solve the problems of the background art mentioned above.

In order to achieve the purpose, the utility model provides the following technical scheme: an excimer lamp and a light source device thereof comprise an excimer lamp, an excimer discharge tube and a light source device, wherein the excimer discharge tube consists of an excimer discharge inner tube, an excimer discharge outer tube and a discharge space;

the excimer lamp consists of an excimer discharge tube, a metal excimer lamp base strip, a metal flexible mesh enclosure, an anode metal electrode bar and a hoop head, wherein the metal flexible mesh enclosure is sleeved outside the excimer discharge tube and the metal excimer lamp base strip;

the light source device is one or more excimer lamps fixed on a cooling plate which can be cooled by water.

The metal excimer lamp base strip is in an invagination semi-arc shape, a reflective oxide film is plated on the invagination semi-arc surface of the metal excimer lamp base strip, a cathode mesh hoop groove is formed in the invagination semi-arc surface of the metal excimer lamp base strip, and a hoop head is arranged in the cathode mesh hoop groove.

The outer side of the metal flexible net cover is provided with light meshes.

The water-permeable cooling plate is provided with a plurality of fixing screws and a cathode leading-out terminal.

Compared with the prior art, the utility model has the beneficial effects that:

1. excimer lamp has the base strip in this application, do benefit to and fix on the cooling plate, do benefit to the excimer lamp cooling, do benefit to long and thin excimer lamp mechanical strength, do benefit to the array and become the area source, do benefit to the setting of netted negative pole, do benefit to the implementation of the reflecting material of putting the tube contact surface, the glass that does benefit to and avoids the partial structure lamp of high price takes shape, do benefit to the sintering of the reflecting material who avoids flat structure lamp inside, do benefit to and avoid the deformation in the time that the interior upper reflection layer ultraviolet ray of flat structure lamp did not transmit and cause, do benefit to and avoid the no irradiation district between flat structure lamp and the lamp.

2. This application is long and thin structure, and the homogeneity that the face shines when doing benefit to arranging into the area source does benefit to and arranges into large tracts of land area source, does benefit to the luminous efficacy of lamp under the high-efficient cooling, does benefit to the light-emitting loss who avoids the most angle of thick shape lamp to utilize, is favorable to utilizing the energy of shining of whole fluorescent tube.

3. Compare thick pipe excimer lamp, this application pipe diameter is thin homogeneity stronger more, and luminous light energy make full use of more, but thin mechanical strength is poor more, consequently the base strip can act as cooling, electrode circular telegram in this application, can also keep the mechanical strength of discharge tube, and thin pipe more, many excimer lamp closely arrange make after the area source, the homogeneity of the area source of constituteing than thick excimer lamp is good, and application range is wider, and energy efficiency is higher.

4. The excimer lamp base strip in the application can not only increase the mechanical strength, but also can transfer heat to the cooling plate of the device through the base strip.

5. Excimer discharge tube adds the base strip structure of taking the semicircle recess in this application, can not only realize the effect of mechanical stability, negative pole circular telegram, heat transfer, can also satisfy simultaneously and make things convenient for advantages such as electrode circular telegram, efficient heat cooling, luminous make full use of, surface light source homogeneity is good, jumbo size demand.

Drawings

FIG. 1 is a schematic structural diagram of an excimer lamp and a light source device thereof;

FIG. 2 is a schematic diagram of the right side view of the structure of FIG. 1;

FIG. 3 is a schematic diagram of an excimer lamp and a light source device thereof;

FIG. 4 is a schematic diagram of the right side view of FIG. 3;

FIG. 5 is a schematic diagram of an excimer lamp and a structure of an excimer lamp base bar in the light source device;

FIG. 6 is a schematic diagram of the right side view of FIG. 5;

FIG. 7 is a schematic diagram of an excimer lamp and an excimer discharge tube in a light source apparatus thereof.

In the figure: 1. a water cooling plate can be introduced; 2. fixing screws; 3. a cathode lead-out terminal; 4. a metal flexible mesh enclosure; 5. a cathode mesh hoop groove; 6. a hoop head; 7. an excimer lamp base strip; 8. fixing screw holes; 9. an excimer discharge outer tube; 10. an excimer discharge inner tube; 11. an anode metal electrode bar; 13. an anode lead-out terminal; 14. a discharge space.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1 to 7, in an embodiment of the present invention, an excimer lamp and a light source device thereof include an excimer lamp, an excimer discharge tube and a light source device, where the excimer discharge tube is composed of an excimer discharge inner tube 10, an excimer discharge outer tube 9 and a discharge space 14, the discharge space 14 is arranged in the excimer discharge outer tube 9, the excimer discharge inner tube 10 is arranged in the discharge space 14, and the excimer discharge inner tube 10 penetrates through left and right surfaces of the excimer discharge outer tube 9 to form a hermetically sealed double-layer glass tube;

the excimer lamp consists of an excimer discharge tube, a metal excimer lamp base strip 7, a metal flexible mesh enclosure 4, an anode metal electrode bar 11 and a hoop head 6, wherein the metal flexible mesh enclosure 4 is sleeved outside the excimer discharge tube and the metal excimer lamp base strip 7, the center of the excimer discharge tube is provided with the anode metal electrode bar 11, the right end of the anode metal electrode bar 11 is sleeved with an anode leading-out terminal 13, the upper surface of the metal excimer lamp base strip 7 is provided with a plurality of fixing screw holes 8, and the fixing screw holes 8 are in threaded connection with fixing screws 2;

the light source device is one or more excimer lamps fixed on a cooling plate 1 which can be cooled by water.

The metal excimer lamp base strip 7 is an invaginated semicircular arc, a reflective oxide film is plated on the invaginated semicircular arc surface of the metal excimer lamp base strip 7, a cathode mesh hoop groove 5 is formed in the invaginated semicircular arc surface of the metal excimer lamp base strip 7, and a hoop head 6 is arranged in the cathode mesh hoop groove 5.

The outer side of the metal flexible mesh enclosure 4 is provided with light meshes.

In the excimer lamp and the light source device thereof of the embodiment, a plurality of fixing screws 2 and a cathode leading-out terminal 3 are arranged on a water-permeable cooling plate 1, and the fixing screws 2 and the cathode leading-out terminal 3 penetrate through the water-permeable cooling plate 1.

The working principle of the utility model is as follows: through high frequency high-tension electricity to positive pole metal electrode bar 11 electrically conductive, discharge outer tube 9 through the excimer through inner tube 10 and the excimer and produce the light effect, the heat that produces among the luminescent process is through can leading to water cooling plate 1 cooling down, and the effect of fixed excimer lamp of enhancement can be played simultaneously to flexible screen panel 4 of metal, negative pole net hoop groove 5, negative pole net hoop strip 6.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered as the technical solutions and the utility model concepts of the present invention in the scope of the present invention.

Claims

1. An excimer lamp and a light source device thereof comprise an excimer lamp, an excimer discharge tube and a light source device, and are characterized in that the excimer discharge tube consists of an excimer discharge inner tube (10), an excimer discharge outer tube (9) and a discharge space (14), the discharge space (14) is arranged in the excimer discharge outer tube (9), the excimer discharge inner tube (10) is arranged in the discharge space (14), and the excimer discharge inner tube (10) penetrates through the left surface and the right surface of the excimer discharge outer tube (9) to form a gas-tight double-layer glass tube.

2. The excimer lamp and the light source device thereof as claimed in claim 1, wherein the excimer lamp is composed of an excimer discharge tube, a metal excimer lamp base bar (7), a metal flexible mesh (4), an anode metal electrode bar (11) and a hoop head (6), the metal flexible mesh (4) is sleeved outside the excimer discharge tube and the metal excimer lamp base bar (7), the center of the excimer discharge tube is provided with the anode metal electrode bar (11), the right end of the anode metal electrode bar (11) is sleeved with an anode leading-out terminal (13), the upper surface of the metal excimer lamp base bar (7) is provided with a plurality of fixing screw holes (8), and the fixing screw holes (8) are in threaded connection with the fixing screws (2).

3. An excimer lamp and a light source device thereof as claimed in claim 1, wherein the light source device is one or more excimer lamps fixed on the water-coolable plate (1).

4. The excimer lamp and the light source device thereof as claimed in claim 2, wherein the metal excimer lamp base strip (7) is a sunken semi-circular arc, the sunken semi-circular surface of the metal excimer lamp base strip (7) is coated with a reflective oxide film, the sunken semi-circular surface of the metal excimer lamp base strip (7) is provided with a cathode mesh hoop groove (5), and the cathode mesh hoop groove (5) is internally provided with a hoop head (6).

5. The excimer lamp and the light source device thereof as claimed in claim 2, wherein the metal flexible mesh (4) is provided with light meshes outside.

6. An excimer lamp and a light source device thereof as claimed in claim 3, wherein a plurality of fixing screws (2) and a cathode lead-out terminal (3) are installed on said water-coolable plate (1).