CN1549300A - Microwave ultra violet light source - Google Patents

Microwave ultra violet light source Download PDF

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Publication number
CN1549300A
CN1549300A CNA031178820A CN03117882A CN1549300A CN 1549300 A CN1549300 A CN 1549300A CN A031178820 A CNA031178820 A CN A031178820A CN 03117882 A CN03117882 A CN 03117882A CN 1549300 A CN1549300 A CN 1549300A
Authority
CN
China
Prior art keywords
microwave
cavity
lamp
uviol lamp
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA031178820A
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Chinese (zh)
Inventor
谢扩军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Electronic Science and Technology of China
Original Assignee
University of Electronic Science and Technology of China
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Electronic Science and Technology of China filed Critical University of Electronic Science and Technology of China
Priority to CNA031178820A priority Critical patent/CN1549300A/en
Publication of CN1549300A publication Critical patent/CN1549300A/en
Pending legal-status Critical Current

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  • Discharge Lamps And Accessories Thereof (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)

Abstract

The present invention discloses a microwave UV light source. It is composed of magnetron, microwave waveguide, microwave energy-feeding hole, microwave resonant cavity, UV lamp, microwave screening net, lamp stand, fan and base. It is characterized by that after the UV lamp is evacuated, its interior can be filled with inert gas, mercury vapour or metal halide vapour and mixture of the above-mentioned gases. Said light source can be used for implementing disinfection and sterilization of gas, liquid and solid, photochemical synthesis of chemical substance and UV etching and UV information erasion of electronic material and device.

Description

A kind of microwave ultraviolet source
Affiliated technical field
The invention belongs to electronic technology field, it is particularly related to ultraviolet light source.
Background technology
Traditional ultra-violet lamp is made up of power supply, electrode, ballast and fluorescent tube (bubble) etc.Traditional ultra-violet lamp, general power is little, and efficient is not high, and ballast and starter are fragile, and the electrode in the uviol lamp be along with phenomenons such as electrode degradation, electrode sparking and export license can appear in the prolongation of time, thereby the easy blackening of fluorescent tube starter not, and the life-span is not long.
Summary of the invention
The purpose of this invention is to provide a kind of microwave ultraviolet source, it has the electrode of need not, need not ballast and starter, power big (tens watts to tens kilowatts), starter is rapid, the life-span is long (electrodeless deterioration, electrodeless loss), energy consumption is low, efficient is high characteristics such as (light efficiency are greater than 100lm/w).
The present invention realizes (as shown in Figure 1) like this, it is made up of magnetron 1, microwave waveguide 2, microwave energy-feeding mouth 3, microwave cavity 4, uviol lamp 5, micro-wave screening net 6, lamp socket 7, fan 8, pedestal 9 etc., uviol lamp 5 places on the lamp socket 7 in the microwave cavity 4, can fill inert gas after it is characterized in that vacuumizing in the uviol lamp 5, can fill mercury vapour, also the metal halide steam can be filled, the mixture of above-mentioned inert gas, mercury vapour, metal halide steam can also be filled.
Need to prove that uviol lamp 5 shells of the present invention are resistant to elevated temperatures glass such as quartz glass or boron glass, electrodeless uviol lamp 5 is placed on the lamp socket 7 in the microwave cavity 4, produce plasma by the gas ionization in the microwave-excitation lamp and send ultraviolet light; Uviol lamp 5 is electrodeless, and it can make different shape, as arbitrary shapes such as tubulose, spherical, ring-type, cone, tabulars;
Microwave cavity 4 can be made rectangular cavity, cylindrical cavity, spherical cavity, shape such as tubaeform, plate shaped according to the shape of uviol lamp 5; Microwave frequency is 300~3000MHz; The cavity part of microwave cavity 4 is except staying the microwave energy-feeding mouth 3 with waveguide mouth junction, other chamber wall can all be made metal net shaped chamber wall, also can partly make metal net shaped chamber wall 6 (as shown in Figure 1), mesh aperture is less than 3 millimeters, make microwave radiation meet national standard, cooling fan 8 is installed in waveguide 2 appearances, 8 pairs of magnetrons 1 of fan and uviol lamp 5 and lowering the temperature, and above-mentioned each parts are placed on the pedestal 9.
The course of work of the present invention: produce microwave by magnetron 1 (by the control of microwave generator power supply), microwave transfers to microwave cavity 4 through waveguide 2, uviol lamp 5 is placed on the lamp socket 7 in the microwave cavity 4, the glass shell of the microwave penetrating uviol lamp 5 in the microwave cavity 4 acts on the gas in the lamp, makes gas ionization produce plasma and sends ultraviolet light.
Essence of the present invention: use the specific gas ionization generation plasma in the microwave-excitation uviol lamp 5 to send ultraviolet light.
The present invention is the device in a kind of microwave ultraviolet source, the present invention combines advanced person's microwave technology and plasma technique, produce plasma by the gas ionization in the microwave-excitation lamp and send ultraviolet, be applicable to sterilization to gas, liquid, solid (as air, water, food, clothing etc.), sterilization and implement synthetic and electronic material and device carried out that ultraviolet etching, UV information are wiped etc. by ultraviolet ray the photochemistry of chemical substance.This device is made up of magnetron 1, microwave waveguide 2, microwave energy-feeding mouth 3, microwave cavity 4, uviol lamp 5, micro-wave screening net 6, lamp socket 7, fan 8, pedestal 9 etc., produce microwave by magnetron 1, microwave transfers to microwave cavity 4 through waveguide 2, uviol lamp 5 is placed on the lamp socket 7 in the microwave cavity 4, the glass shell of the microwave penetrating uviol lamp 5 in the microwave cavity 4 acts on the gas in the lamp, make gas ionization produce luminescence of plasma, fan 8 can be lowered the temperature to magnetron 1 and uviol lamp 5.Microwave cavity 4 can be made rectangular cavity, cylindrical cavity, spherical cavity, shape such as tubaeform, plate shaped according to the shape of uviol lamp 5, the cavity part of microwave cavity 4 is except staying the microwave energy-feeding mouth 3 with waveguide mouth junction, other chamber wall can all be made metal net shaped chamber wall, also can partly make metal net shaped chamber wall 6, mesh aperture is less than 3 millimeters, make microwave radiation meet national standard, above-mentioned each parts are placed on the pedestal 9.
This use new type of microwave ultraviolet source uses the gas ionization in the microwave-excitation uviol lamp 5 to produce plasma and sends ultraviolet, it has the electrode of need not, need not ballast, power big (tens watts to tens kilowatts), starter is rapid, the life-span is long (electrodeless deterioration, electrodeless loss), energy consumption is low, efficient is high characteristics such as (light efficiency are greater than 100lm/w).Can implement sterilization, sterilization and implement synthetic and electronic material and device carried out that ultraviolet etching, UV information are wiped etc. by ultraviolet ray the photochemistry of chemical substance to gas, liquid, solid (as air, water, food, clothing etc.).
Accompanying drawing and description of drawings:
Fig. 1 is a generalized section of the present invention
Wherein: 1 magnetron, 2 waveguides, 3 microwave energy-feeding mouths, 4 microwave cavities, 5 uviol lamps, 6 micro-wave screening nets, 7 lamp sockets, 8 fans and 9 pedestals.
Embodiment
Electrodeless microwave ultra-violet lamp
The microwave magnetron 1 of 1kw/2450MHz (50~1000w is adjustable) produces the microwave power of 50~1000w, microwave transfers to microwave cavity 4 through waveguide 2, uviol lamp 5 is placed on the lamp socket 7 in the microwave cavity 4, the outer casing shell of the microwave penetrating uviol lamp 5 in the microwave cavity 4 acts on the gas in the lamp, make gas ionization produce plasma and send ultraviolet light, uviol lamp 5 shells are made by quartz glass, and uviol lamp 5 is of a size of the globular bulb about φ 50mm, in be evacuated to 10 -3Charge into mercury and argon gas behind the Pa, the amount of charging into of mercury is 1~10 gram, and the amount of charging into of argon gas satisfies the about 50~200Pa of operating air pressure in the lamp.

Claims (4)

1, a kind of microwave ultraviolet source, it is made up of magnetron 1, microwave waveguide 2, microwave energy-feeding mouth 3, microwave cavity 4, uviol lamp 5, micro-wave screening net 6, lamp socket 7, fan 8, pedestal 9, uviol lamp 5 is placed on the lamp socket 7 in the microwave cavity 4, can fill inert gas after it is characterized in that vacuumizing in the uviol lamp 5, can fill mercury vapour, also the metal halide steam can be filled, the mixture of above-mentioned inert gas, mercury vapour, metal halide steam can also be filled.
2, a kind of microwave ultraviolet according to claim 1 source is characterized in that described uviol lamp 5 shells are resistant to elevated temperatures glass such as quartz glass or boron glass, can tubulose, spherical, ring-type, cone, tabular.
3, a kind of microwave ultraviolet according to claim 1 source is characterized in that described microwave cavity 4 can make rectangular cavity, cylindrical cavity, spherical cavity, tubaeform chamber according to the shape of uviol lamp 5.
4, a kind of microwave ultraviolet according to claim 1 source, the microwave frequency that it is characterized in that described magnetron 1 is 300~3000MHz.
CNA031178820A 2003-05-19 2003-05-19 Microwave ultra violet light source Pending CN1549300A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNA031178820A CN1549300A (en) 2003-05-19 2003-05-19 Microwave ultra violet light source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNA031178820A CN1549300A (en) 2003-05-19 2003-05-19 Microwave ultra violet light source

Publications (1)

Publication Number Publication Date
CN1549300A true CN1549300A (en) 2004-11-24

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Family Applications (1)

Application Number Title Priority Date Filing Date
CNA031178820A Pending CN1549300A (en) 2003-05-19 2003-05-19 Microwave ultra violet light source

Country Status (1)

Country Link
CN (1) CN1549300A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100373527C (en) * 2005-07-21 2008-03-05 复旦大学 Electrodes microwave discharging light with 190nm and 207nm quasi-molecule and use thereof
CN101334317B (en) * 2007-06-29 2011-11-23 诺信公司 Detector for an ultraviolet lamp system and a corresponding method for monitoring microwave energy
CN102347205A (en) * 2011-07-14 2012-02-08 复旦大学 Surface wave plasma light source guided by quartz tube
CN105311932A (en) * 2015-11-16 2016-02-10 昆山格瑞雅环保设备工程有限公司 Peculiar odor treatment device, equipment and method for microwave equipment
CN105554995A (en) * 2015-12-18 2016-05-04 中国科学院西安光学精密机械研究所 High-density plasma generator
CN108106332A (en) * 2016-11-24 2018-06-01 广州昊然微波设备有限公司 Sterilizing-drying all-in-one machine
CN108376639A (en) * 2018-02-10 2018-08-07 中国科学院合肥物质科学研究院 A kind of microwave light source

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100373527C (en) * 2005-07-21 2008-03-05 复旦大学 Electrodes microwave discharging light with 190nm and 207nm quasi-molecule and use thereof
CN101334317B (en) * 2007-06-29 2011-11-23 诺信公司 Detector for an ultraviolet lamp system and a corresponding method for monitoring microwave energy
CN102347205A (en) * 2011-07-14 2012-02-08 复旦大学 Surface wave plasma light source guided by quartz tube
CN105311932A (en) * 2015-11-16 2016-02-10 昆山格瑞雅环保设备工程有限公司 Peculiar odor treatment device, equipment and method for microwave equipment
CN105554995A (en) * 2015-12-18 2016-05-04 中国科学院西安光学精密机械研究所 High-density plasma generator
CN108106332A (en) * 2016-11-24 2018-06-01 广州昊然微波设备有限公司 Sterilizing-drying all-in-one machine
CN108376639A (en) * 2018-02-10 2018-08-07 中国科学院合肥物质科学研究院 A kind of microwave light source

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