JP2013257999A5 - - Google Patents
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- JP2013257999A5 JP2013257999A5 JP2012132499A JP2012132499A JP2013257999A5 JP 2013257999 A5 JP2013257999 A5 JP 2013257999A5 JP 2012132499 A JP2012132499 A JP 2012132499A JP 2012132499 A JP2012132499 A JP 2012132499A JP 2013257999 A5 JP2013257999 A5 JP 2013257999A5
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- JP
- Japan
- Prior art keywords
- light emitting
- reduced diameter
- external electrode
- emitting portion
- arc tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
上記課題を解決するために、この発明に係るエキシマランプにおいては、前記発光管は、発光部から封止部に向けて徐々に外径が小さくなる縮径部を備え、該縮径部にはその内部に微小な間隙が形成され、前記外部電極は、前記縮径部を含んで前記発光部の根元部にまで延在し、該外部電極の端部が前記発光管の根元部に巻き付けられていることを特徴とする。
また、前記封止部は、金属箔が埋設されたピンチシール構造であることを特徴とする。
In order to solve the above-described problem, in the excimer lamp according to the present invention, the arc tube includes a reduced diameter portion whose outer diameter gradually decreases from the light emitting portion toward the sealing portion, and the reduced diameter portion includes the reduced diameter portion. A minute gap is formed therein, and the external electrode extends to the base portion of the light emitting portion including the reduced diameter portion, and an end portion of the external electrode is wound around the base portion of the arc tube. It is characterized by.
The sealing portion may have a pinch seal structure in which a metal foil is embedded.
かかる構成とすることにより、前記縮径部８においては、外部電極４と内部電極５との間の距離が他の部分よりも近接すると共に、該縮径部８の内部に形成される微小な間隙Ｓに相当する部分は、内部電極５に誘電体が接近する部位であり、外部電極４と内部電極５との間において電位勾配が極めて大きくなるため、誘電体を介在させた放電を生起しやすく、エキシマランプが良好に始動される。
With this configuration, in the reduced diameter portion 8, the distance between the external electrode 4 and the internal electrode 5 is closer than the other portions, and the minute diameter formed in the reduced diameter portion 8. The portion corresponding to the gap S is a portion where the dielectric approaches the internal electrode 5, and the potential gradient between the external electrode 4 and the internal electrode 5 becomes extremely large, so that a discharge with the dielectric interposed is caused. Easy to start excimer lamps well.
Claims (1)
前記発光管は、前記発光部から前記封止部に向けて徐々に外径が小さくなる縮径部を備え、該縮径部にはその内部に微小な間隙が形成され、
前記外部電極は、前記縮径部を含んで前記発光部の根元部にまで延在し、該外部電極の端部が前記発光管の根元部に巻き付けられていることを特徴とするエキシマランプ。
An arc tube composed of a light emitting portion in which a luminescent gas is sealed, sealing portions formed at both ends thereof, an external electrode disposed on the outer surface of the light emitting portion, and an inside of the light emitting portion In an excimer lamp comprising an internal electrode formed,
The arc tube includes a reduced diameter portion that gradually decreases in outer diameter from the light emitting portion toward the sealing portion, and the reduced diameter portion has a minute gap formed therein,
The excimer lamp , wherein the external electrode includes the reduced diameter portion and extends to a base portion of the light emitting portion, and an end portion of the external electrode is wound around the base portion of the arc tube .
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012132499A JP5672562B2 (en) | 2012-06-12 | 2012-06-12 | Excimer lamp |
| CN201380025232.6A CN104303261B (en) | 2012-06-12 | 2013-05-22 | Excimer lamp |
| PCT/JP2013/064208 WO2013187198A1 (en) | 2012-06-12 | 2013-05-22 | Excimer lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012132499A JP5672562B2 (en) | 2012-06-12 | 2012-06-12 | Excimer lamp |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013257999A JP2013257999A (en) | 2013-12-26 |
| JP2013257999A5 true JP2013257999A5 (en) | 2014-09-04 |
| JP5672562B2 JP5672562B2 (en) | 2015-02-18 |
Family
ID=49758028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012132499A Expired - Fee Related JP5672562B2 (en) | 2012-06-12 | 2012-06-12 | Excimer lamp |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5672562B2 (en) |
| CN (1) | CN104303261B (en) |
| WO (1) | WO2013187198A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6428196B2 (en) | 2014-11-25 | 2018-11-28 | ウシオ電機株式会社 | Excimer discharge lamp device |
| CN106783526A (en) * | 2016-12-26 | 2017-05-31 | 上海开若纳科技有限公司 | A kind of large scale Excimer lamp |
| JP7132540B2 (en) * | 2018-06-13 | 2022-09-07 | ウシオ電機株式会社 | excimer lamp |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09283092A (en) * | 1996-04-19 | 1997-10-31 | Stanley Electric Co Ltd | Fluorescent lamp |
| JP3346190B2 (en) * | 1996-10-08 | 2002-11-18 | ウシオ電機株式会社 | Rare gas discharge lamp |
| JP2002110103A (en) * | 2000-09-28 | 2002-04-12 | Toshiba Lighting & Technology Corp | Dielectric barrier discharge lamp, its device and ultraviolet ray cleaning apparatus |
| JP3858813B2 (en) * | 2002-12-05 | 2006-12-20 | ウシオ電機株式会社 | Excimer lamp light emitting device |
| JP2006024382A (en) * | 2004-07-06 | 2006-01-26 | Ushio Inc | Excimer lamp |
| CN2886800Y (en) * | 2006-01-25 | 2007-04-04 | 上海国达特殊光源有限公司 | Quasi-molecule discharging tube |
| JP5051401B2 (en) * | 2010-03-30 | 2012-10-17 | ウシオ電機株式会社 | High pressure discharge lamp |
-
2012
- 2012-06-12 JP JP2012132499A patent/JP5672562B2/en not_active Expired - Fee Related
-
2013
- 2013-05-22 CN CN201380025232.6A patent/CN104303261B/en not_active Expired - Fee Related
- 2013-05-22 WO PCT/JP2013/064208 patent/WO2013187198A1/en active Application Filing
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