JP5705222B2 - 電気的にポンピングされるオプトエレクトロニクス半導体チップ - Google Patents
電気的にポンピングされるオプトエレクトロニクス半導体チップ Download PDFInfo
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- JP5705222B2 JP5705222B2 JP2012524169A JP2012524169A JP5705222B2 JP 5705222 B2 JP5705222 B2 JP 5705222B2 JP 2012524169 A JP2012524169 A JP 2012524169A JP 2012524169 A JP2012524169 A JP 2012524169A JP 5705222 B2 JP5705222 B2 JP 5705222B2
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- 239000004065 semiconductor Substances 0.000 title claims description 98
- 230000005693 optoelectronics Effects 0.000 title claims description 51
- 239000010410 layer Substances 0.000 claims description 118
- 239000002356 single layer Substances 0.000 claims description 25
- 229910002704 AlGaN Inorganic materials 0.000 claims description 16
- 230000004888 barrier function Effects 0.000 claims description 11
- 230000007704 transition Effects 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 8
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 5
- 229910052738 indium Inorganic materials 0.000 claims description 4
- 230000001419 dependent effect Effects 0.000 claims 1
- 125000004429 atom Chemical group 0.000 description 11
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 125000005842 heteroatom Chemical group 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000005428 wave function Effects 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000013139 quantization Methods 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 238000006862 quantum yield reaction Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12041—LED
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
- Semiconductor Lasers (AREA)
Description
Claims (12)
- 電気的にポンピングされるオプトエレクトロニクス半導体チップ(1)において、
InGaNを含有しているか、又は、InGaNから構成されている、少なくとも二つのビーム活性量子井戸(2)と、
AlGaNを含有しているか、又は、AlGaNから構成されている、少なくとも二つのカバー層(4)とを有しており、
前記カバー層(4)はそれぞれ、前記ビーム活性量子井戸(2)のうちの一つに対応付けられており、
前記カバー層(4)は前記ビーム活性量子井戸(2)のp側にそれぞれ設けられており、
前記ビーム活性量子井戸(2)と、対応付けられている前記カバー層(4)との間隔は最大で1.5nmであり、
一連の層群(8)が3回から20回繰り返されて設けられており、
隣接する一連の層群(8)は直接的に重なって設けられており、
前記一連の層群(8)は、
−ビーム活性量子井戸(2)、
−GaNを含有しているか、又は、GaNから構成されている中間層(3)、
−カバー層(4)、
−GaNを含有しているか、又は、GaNから構成されているバリア層(5)、
の順序で直接的に相互に重なって設けられている複数の層から構成されており、
更に、前記カバー層(4)の平均厚さは0.3nm以上1.5nm以下であり、前記中間層(3)の厚さは0.3nm以上1.2nm以下であり、成長方向における連続する二つのカバー層(4)の間隔は3nm以上8nm以下であり、
前記カバー層(4)は、Al x Ga 1−x Nからなり、但し、0.2≦x≦0.7である、
ことを特徴とする、オプトエレクトロニクス半導体チップ(1)。 - 前記中間層(3)の厚さは0.4nm以上0.8nm以下であり、成長方向における連続する二つのカバー層(4)の間隔は4nm以上6nm以下である、請求項1に記載のオプトエレクトロニクス半導体チップ(1)。
- 前記カバー層(4)の厚さ又は平均厚さは0.5nm以上1.0nm以下である、請求項1または2に記載のオプトエレクトロニクス半導体チップ(1)。
- 前記ビーム活性量子井戸(2)の厚さ(Q)は1.5nm以上4.5nm以下であり、
In y Ga 1−y Nから構成されている前記ビーム活性量子井戸(2)のインジウム含有率yは0.15≦y≦0.35である、請求項1乃至3のいずれか一項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記カバー層(4)のAl含有率xは0.4≦x≦0.7である、請求項4に記載のオプトエレクトロニクス半導体チップ(1)。
- 前記ビーム活性量子井戸(2)とそれぞれ対応付けられている前記カバー層(4)との間隔は最大で単層二つ分の厚さであり、
前記カバー層(4)のAl含有率xは0.2≦x≦0.5である、請求項1乃至5のいずれか一項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記ビーム活性量子井戸(2)、及び/又は、前記カバー層(4)、及び/又は、前記中間層(3)の間の移行領域(23,24,34)は単層一つ分以上単層三つ分以下の厚さを有している、請求項1乃至6のいずれか一項に記載のオプトエレクトロニクス半導体チップ(1)。
- 5個以上15個以下のビーム活性量子井戸(2)を有している、請求項1乃至7のいずれか一項に記載のオプトエレクトロニクス半導体チップ(1)。
- 前記ビーム活性量子井戸(2)はInGaNしか含有しておらず、
該ビーム活性量子井戸(2)の単層と、AlGaNしか含有していない前記カバー層(4)の単層との間には、InGaN及び/又はGaN及び/又はAlGaNから成る混合物を含有する、最大で二つの単層が存在する、請求項6記載のオプトエレクトロニクス半導体チップ(1)。 - 前記ビーム活性量子井戸(2)のバンドギャップはそれぞれ2.55eV以上3.0eV以下である、請求項1乃至9のいずれか一項に記載のオプトエレクトロニクス半導体チップ(1)。
- 前記中間層(4)の平均バンドギャップはそれぞれ、対応付けられているビーム活性量子井戸(2)の平均バンドギャップの少なくとも120%である、請求項1乃至10のいずれか一項に記載のオプトエレクトロニクス半導体チップ(1)。
- 隣り合う少なくとも二つのビーム活性量子井戸(2)は相互に偏差する平均バンドギャップを示し、
前記偏差は0.03eV以上0.20eV以下である、請求項1乃至11のいずれか一項に記載のオプトエレクトロニクス半導体チップ(1)。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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DE102009037416.7A DE102009037416B4 (de) | 2009-08-13 | 2009-08-13 | Elektrisch gepumpter optoelektronischer Halbleiterchip |
DE102009037416.7 | 2009-08-13 | ||
PCT/EP2010/059291 WO2011018273A1 (de) | 2009-08-13 | 2010-06-30 | Elektrisch gepumpter optoelektronischer halbleiterchip |
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JP2013502058A JP2013502058A (ja) | 2013-01-17 |
JP2013502058A5 JP2013502058A5 (ja) | 2013-04-04 |
JP5705222B2 true JP5705222B2 (ja) | 2015-04-22 |
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US (1) | US8581236B2 (ja) |
EP (1) | EP2465148B1 (ja) |
JP (1) | JP5705222B2 (ja) |
KR (2) | KR101682345B1 (ja) |
CN (1) | CN102576785B (ja) |
DE (1) | DE102009037416B4 (ja) |
WO (1) | WO2011018273A1 (ja) |
Families Citing this family (5)
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TWI649895B (zh) | 2010-04-30 | 2019-02-01 | 美國波士頓大學信託會 | 具能帶結構位變動之高效率紫外光發光二極體 |
US8723189B1 (en) | 2012-01-06 | 2014-05-13 | Trustees Of Boston University | Ultraviolet light emitting diode structures and methods of manufacturing the same |
DE102013200507A1 (de) * | 2013-01-15 | 2014-07-17 | Osram Opto Semiconductors Gmbh | Optoelektronisches Halbleiterbauelement |
JP6010088B2 (ja) * | 2014-11-07 | 2016-10-19 | 株式会社東芝 | 半導体発光素子 |
JP2022172792A (ja) * | 2021-05-07 | 2022-11-17 | 日機装株式会社 | 窒化物半導体発光素子 |
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US5023685A (en) * | 1988-06-06 | 1991-06-11 | Bethea Clyde G | Quantum-well radiation-interactive device, and methods of radiation detection and modulation |
JP3304782B2 (ja) * | 1996-09-08 | 2002-07-22 | 豊田合成株式会社 | 半導体発光素子 |
JP3705047B2 (ja) * | 1998-12-15 | 2005-10-12 | 日亜化学工業株式会社 | 窒化物半導体発光素子 |
DE19955747A1 (de) | 1999-11-19 | 2001-05-23 | Osram Opto Semiconductors Gmbh | Optische Halbleitervorrichtung mit Mehrfach-Quantentopf-Struktur |
JP4032636B2 (ja) * | 1999-12-13 | 2008-01-16 | 日亜化学工業株式会社 | 発光素子 |
US6586762B2 (en) * | 2000-07-07 | 2003-07-01 | Nichia Corporation | Nitride semiconductor device with improved lifetime and high output power |
US6906352B2 (en) | 2001-01-16 | 2005-06-14 | Cree, Inc. | Group III nitride LED with undoped cladding layer and multiple quantum well |
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JP2004289112A (ja) * | 2003-03-06 | 2004-10-14 | Ricoh Co Ltd | 半導体発光素子およびその製造方法および光送信モジュールおよび光送受信モジュールおよび光通信システム |
EP1667292B1 (en) | 2003-08-26 | 2010-11-03 | Sony Corporation | GaN III-V COMPOUND SEMICONDUCTOR LIGHT-EMITTING DEVICE AND METHOD FOR MANUFACTURING SAME |
JP2006108585A (ja) | 2004-10-08 | 2006-04-20 | Toyoda Gosei Co Ltd | Iii族窒化物系化合物半導体発光素子 |
JP2006210692A (ja) * | 2005-01-28 | 2006-08-10 | Toyoda Gosei Co Ltd | 3族窒化物系化合物半導体発光素子 |
JP2006332258A (ja) * | 2005-05-25 | 2006-12-07 | Matsushita Electric Ind Co Ltd | 窒化物半導体装置及びその製造方法 |
EP1764840A1 (en) * | 2005-09-15 | 2007-03-21 | SuperNova Optoelectronics Corporation | Gallium nitride semiconductor light emitting device |
EP1883141B1 (de) | 2006-07-27 | 2017-05-24 | OSRAM Opto Semiconductors GmbH | LD oder LED mit Übergitter-Mantelschicht |
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KR101330898B1 (ko) | 2007-04-05 | 2013-11-18 | 엘지전자 주식회사 | 반도체 레이저 다이오드 |
US20090183774A1 (en) * | 2007-07-13 | 2009-07-23 | Translucent, Inc. | Thin Film Semiconductor-on-Sapphire Solar Cell Devices |
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- 2009-08-13 DE DE102009037416.7A patent/DE102009037416B4/de active Active
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- 2010-06-30 KR KR1020127006584A patent/KR101682345B1/ko active Application Filing
- 2010-06-30 EP EP10726134.9A patent/EP2465148B1/de active Active
- 2010-06-30 US US13/383,495 patent/US8581236B2/en active Active
- 2010-06-30 WO PCT/EP2010/059291 patent/WO2011018273A1/de active Application Filing
- 2010-06-30 JP JP2012524169A patent/JP5705222B2/ja active Active
- 2010-06-30 CN CN201080035921.1A patent/CN102576785B/zh active Active
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Publication number | Publication date |
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KR20160142890A (ko) | 2016-12-13 |
US20120161103A1 (en) | 2012-06-28 |
WO2011018273A1 (de) | 2011-02-17 |
KR20120045049A (ko) | 2012-05-08 |
EP2465148A1 (de) | 2012-06-20 |
US8581236B2 (en) | 2013-11-12 |
KR101682345B1 (ko) | 2016-12-05 |
CN102576785B (zh) | 2015-05-20 |
KR101733149B1 (ko) | 2017-05-08 |
JP2013502058A (ja) | 2013-01-17 |
EP2465148B1 (de) | 2017-08-09 |
DE102009037416A1 (de) | 2011-02-17 |
DE102009037416B4 (de) | 2021-10-14 |
CN102576785A (zh) | 2012-07-11 |
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