JP5676471B2 - 流動層反応炉においてフルオロシリケートから四フッ化ケイ素を生成するプロセス及びシステム - Google Patents
流動層反応炉においてフルオロシリケートから四フッ化ケイ素を生成するプロセス及びシステム Download PDFInfo
- Publication number
- JP5676471B2 JP5676471B2 JP2011542347A JP2011542347A JP5676471B2 JP 5676471 B2 JP5676471 B2 JP 5676471B2 JP 2011542347 A JP2011542347 A JP 2011542347A JP 2011542347 A JP2011542347 A JP 2011542347A JP 5676471 B2 JP5676471 B2 JP 5676471B2
- Authority
- JP
- Japan
- Prior art keywords
- fluorosilicate
- reaction chamber
- silicon tetrafluoride
- fluidized bed
- alkaline earth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229940104869 fluorosilicate Drugs 0.000 title claims description 108
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 title claims description 65
- 238000000034 method Methods 0.000 title claims description 25
- 230000008569 process Effects 0.000 title claims description 22
- 238000006243 chemical reaction Methods 0.000 claims description 73
- 150000001340 alkali metals Chemical class 0.000 claims description 55
- 229910052783 alkali metal Inorganic materials 0.000 claims description 28
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims description 27
- 229910001618 alkaline earth metal fluoride Inorganic materials 0.000 claims description 27
- 150000001342 alkaline earth metals Chemical class 0.000 claims description 27
- 238000001035 drying Methods 0.000 claims description 27
- 229910001515 alkali metal fluoride Inorganic materials 0.000 claims description 26
- 239000002245 particle Substances 0.000 claims description 26
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 26
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 15
- 239000007787 solid Substances 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000002253 acid Substances 0.000 claims description 9
- 239000000428 dust Substances 0.000 claims description 7
- 239000012530 fluid Substances 0.000 claims description 6
- 239000000843 powder Substances 0.000 claims description 4
- 230000005587 bubbling Effects 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims 2
- 239000007789 gas Substances 0.000 description 92
- 239000000463 material Substances 0.000 description 20
- 230000032258 transport Effects 0.000 description 15
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical group F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 13
- 239000010419 fine particle Substances 0.000 description 13
- 239000006227 byproduct Substances 0.000 description 11
- 239000000047 product Substances 0.000 description 11
- -1 barium hexafluorosilicate Chemical compound 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 238000000354 decomposition reaction Methods 0.000 description 8
- 239000012535 impurity Substances 0.000 description 8
- 239000007788 liquid Substances 0.000 description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 6
- 238000000197 pyrolysis Methods 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 230000005496 eutectics Effects 0.000 description 4
- 238000005243 fluidization Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 239000000839 emulsion Substances 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000004220 aggregation Methods 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 229910000963 austenitic stainless steel Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000000374 eutectic mixture Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000002686 phosphate fertilizer Substances 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910000792 Monel Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 1
- 229910001860 alkaline earth metal hydroxide Inorganic materials 0.000 description 1
- 229910052586 apatite Inorganic materials 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004581 coalescence Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000007857 degradation product Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 150000004673 fluoride salts Chemical class 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000010436 fluorite Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229910000856 hastalloy Inorganic materials 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000010951 particle size reduction Methods 0.000 description 1
- VSIIXMUUUJUKCM-UHFFFAOYSA-D pentacalcium;fluoride;triphosphate Chemical compound [F-].[Ca+2].[Ca+2].[Ca+2].[Ca+2].[Ca+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O VSIIXMUUUJUKCM-UHFFFAOYSA-D 0.000 description 1
- 235000020030 perry Nutrition 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011027 product recovery Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000006228 supernatant Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 230000026676 system process Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
- B01J8/24—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles according to "fluidised-bed" technique
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/005—Separating solid material from the gas/liquid stream
- B01J8/0055—Separating solid material from the gas/liquid stream using cyclones
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/18—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles
- B01J8/20—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with fluidised particles with liquid as a fluidising medium
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/10705—Tetrafluoride
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B9/00—General methods of preparing halides
- C01B9/08—Fluorides
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Silicon Compounds (AREA)
- Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13815808P | 2008-12-17 | 2008-12-17 | |
| US13816008P | 2008-12-17 | 2008-12-17 | |
| US61/138,160 | 2008-12-17 | ||
| US61/138,158 | 2008-12-17 | ||
| PCT/US2009/068103 WO2010077880A1 (en) | 2008-12-17 | 2009-12-15 | Processes and systems for producing silicon tetrafluoride from fluorosilicates in a fluidized bed reactor |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012512132A JP2012512132A (ja) | 2012-05-31 |
| JP2012512132A5 JP2012512132A5 (enExample) | 2012-12-27 |
| JP5676471B2 true JP5676471B2 (ja) | 2015-02-25 |
Family
ID=41682271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011542347A Expired - Fee Related JP5676471B2 (ja) | 2008-12-17 | 2009-12-15 | 流動層反応炉においてフルオロシリケートから四フッ化ケイ素を生成するプロセス及びシステム |
Country Status (9)
| Country | Link |
|---|---|
| US (2) | US20100150789A1 (enExample) |
| EP (1) | EP2373577B1 (enExample) |
| JP (1) | JP5676471B2 (enExample) |
| KR (1) | KR20110110196A (enExample) |
| CN (1) | CN102317201B (enExample) |
| MY (1) | MY158672A (enExample) |
| SG (1) | SG172067A1 (enExample) |
| TW (1) | TWI511927B (enExample) |
| WO (1) | WO2010077880A1 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20130135235A (ko) * | 2010-07-23 | 2013-12-10 | 메이어 인텔렉츄얼 프로퍼티즈 리미티드 | 하소 챔버 및 그 방법 |
| US8840860B2 (en) | 2010-07-23 | 2014-09-23 | Meyer Intellectual Properties Limited | Contamination free compression of corrosive gas |
| TWI490164B (zh) * | 2011-08-02 | 2015-07-01 | Circulon Hungary Ltd | 鍛燒室與方法 |
| CN102390835A (zh) * | 2011-08-18 | 2012-03-28 | 化学工业第二设计院宁波工程有限公司 | 一种用氟硅酸钙制备四氟化硅的方法 |
| CN103091271B (zh) * | 2012-11-28 | 2016-05-18 | 贵州瓮福蓝天氟化工股份有限公司 | 测定四氟化硅气体中杂质碘含量的方法 |
| DE102013104398A1 (de) * | 2013-04-30 | 2014-10-30 | Spawnt Private S.À.R.L. | Verfahren zur Herstellung von Siliziumtetrafluorid |
| US9346718B2 (en) | 2014-10-17 | 2016-05-24 | Vale S.A. | Method for recycling a byproduct of the phosphate fertilizer industry, soil conditioner, and soil conditioner manufacturing process |
| CN110683548B (zh) * | 2018-07-04 | 2021-08-17 | 中国科学院过程工程研究所 | 一种利用氟硅酸钠高效生产四氟化硅和氟化钠的方法 |
| CN110683561B (zh) * | 2018-07-04 | 2020-12-11 | 中国科学院过程工程研究所 | 一种综合利用氟硅酸钠高效生产氟化钠、氟化铝和四氯化硅的方法 |
| CN111039293B (zh) * | 2018-10-15 | 2021-06-29 | 多氟多化工股份有限公司 | 一种四氟化硅的生产方法 |
| CN109721079A (zh) * | 2019-03-08 | 2019-05-07 | 青海盐湖工业股份有限公司 | 一种氯化钾生产系统及生产方法 |
| US10844483B1 (en) | 2019-12-16 | 2020-11-24 | Quantum Elements Development, Inc. | Quantum printing methods |
| US11484941B2 (en) | 2020-12-15 | 2022-11-01 | Quantum Elements Development Inc. | Metal macrostructures |
| US11623871B2 (en) | 2020-12-15 | 2023-04-11 | Quantum Elements Development Inc. | Rare earth metal instantiation |
| CN113955721A (zh) * | 2021-09-29 | 2022-01-21 | 湖北省宏源药业科技股份有限公司 | 一种以氟硅酸盐为原料制备氟化盐联产氟硅酸的方法 |
| CN115990439B (zh) * | 2022-11-28 | 2024-07-23 | 兰州理工大学 | 一种基于膨胀流化床的无水氟化氢生产设备及工艺 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2785953A (en) * | 1954-08-04 | 1957-03-19 | Grace W R & Co | Process for preparing a dry mixture of ammonium fluosilicate and silica |
| US3551098A (en) * | 1968-01-12 | 1970-12-29 | Flemmert Goesta Lennart | Process for decomposing sodium fluosilicate and/or sodium bifluoride into sodium fluoride,hydrogen fluoride and silicon tetrafluoride |
| US4138509A (en) * | 1977-12-23 | 1979-02-06 | Motorola, Inc. | Silicon purification process |
| US4446120A (en) * | 1982-01-29 | 1984-05-01 | The United States Of America As Represented By The United States Department Of Energy | Method of preparing silicon from sodium fluosilicate |
| US4402932A (en) * | 1982-05-07 | 1983-09-06 | The United States Of America As Represented By The Secretary Of The Interior | Thermal decomposition of aluminum chloride hexahydrate |
| US4416913A (en) * | 1982-09-28 | 1983-11-22 | Motorola, Inc. | Ascending differential silicon harvesting means and method |
| US4632816A (en) * | 1982-12-13 | 1986-12-30 | Ethyl Corporation | Process for production of silane |
| US4584181A (en) * | 1982-12-27 | 1986-04-22 | Sri International | Process and apparatus for obtaining silicon from fluosilicic acid |
| US4748014A (en) * | 1982-12-27 | 1988-05-31 | Sri International | Process and apparatus for obtaining silicon from fluosilicic acid |
| US4590043A (en) * | 1982-12-27 | 1986-05-20 | Sri International | Apparatus for obtaining silicon from fluosilicic acid |
| US4699632A (en) * | 1983-08-02 | 1987-10-13 | Institute Of Gas Technology | Process for gasification of cellulosic materials |
| DE3432678C2 (de) * | 1984-09-05 | 1986-11-20 | D. Swarovski & Co., Wattens, Tirol | Verfahren zur Herstellung von Siliciumtetrafluorid |
| DE3688007D1 (de) * | 1985-06-12 | 1993-04-22 | Metallgesellschaft Ag | Verbrennungsvorrichtung mit zirkulierender wirbelschicht. |
| US4839969A (en) * | 1988-02-26 | 1989-06-20 | Permian Research Corporation | Drying method and apparatus |
| FR2690512B1 (fr) * | 1992-04-27 | 1994-09-09 | Stein Industrie | Réacteur à lit fluidisé circulant comportant des échangeurs extérieurs alimentés par la recirculation interne. |
| US5242670A (en) * | 1992-07-02 | 1993-09-07 | Gehringer Ronald C | Method for hydrofluoric acid digestion of silica/alumina matrix material for the production of silicon tetrafluoride, aluminum fluoride and other residual metal fluorides and oxides |
| FI97424C (fi) * | 1993-06-23 | 1996-12-10 | Foster Wheeler Energia Oy | Menetelmä ja laite kuuman kaasun käsittelemiseksi tai hyödyntämiseksi |
| US5972835A (en) * | 1995-09-13 | 1999-10-26 | Research Triangle Institute | Fluidizable particulate materials and methods of making same |
| JPH10231114A (ja) | 1997-02-18 | 1998-09-02 | Mitsui Chem Inc | SiF4の製造方法 |
| DE19735378A1 (de) * | 1997-08-14 | 1999-02-18 | Wacker Chemie Gmbh | Verfahren zur Herstellung von hochreinem Siliciumgranulat |
| AUPP624198A0 (en) * | 1998-09-30 | 1998-10-22 | Comalco Aluminium Limited | Feed processing for improved alumina process performance |
| US6143915A (en) * | 1998-11-23 | 2000-11-07 | Uop Llc | Reaction process in hybrid reactor for propylene ammoxidation |
| JP3909385B2 (ja) * | 2001-07-12 | 2007-04-25 | 昭和電工株式会社 | テトラフルオロシランの製造方法およびその用途 |
| CN101481113A (zh) * | 2009-02-27 | 2009-07-15 | 多氟多化工股份有限公司 | 一种四氟化硅的制备方法 |
-
2009
- 2009-12-15 WO PCT/US2009/068103 patent/WO2010077880A1/en not_active Ceased
- 2009-12-15 MY MYPI2011002828A patent/MY158672A/en unknown
- 2009-12-15 SG SG2011042306A patent/SG172067A1/en unknown
- 2009-12-15 CN CN200980156839.1A patent/CN102317201B/zh not_active Expired - Fee Related
- 2009-12-15 KR KR1020117016705A patent/KR20110110196A/ko not_active Ceased
- 2009-12-15 JP JP2011542347A patent/JP5676471B2/ja not_active Expired - Fee Related
- 2009-12-15 EP EP09775480.8A patent/EP2373577B1/en not_active Not-in-force
- 2009-12-17 US US12/640,346 patent/US20100150789A1/en not_active Abandoned
- 2009-12-17 US US12/640,337 patent/US20100150808A1/en not_active Abandoned
- 2009-12-17 TW TW098143408A patent/TWI511927B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| SG172067A1 (en) | 2011-07-28 |
| CN102317201B (zh) | 2014-08-13 |
| CN102317201A (zh) | 2012-01-11 |
| JP2012512132A (ja) | 2012-05-31 |
| TW201031596A (en) | 2010-09-01 |
| US20100150789A1 (en) | 2010-06-17 |
| EP2373577A1 (en) | 2011-10-12 |
| TWI511927B (zh) | 2015-12-11 |
| WO2010077880A1 (en) | 2010-07-08 |
| US20100150808A1 (en) | 2010-06-17 |
| EP2373577B1 (en) | 2014-09-10 |
| MY158672A (en) | 2016-10-31 |
| KR20110110196A (ko) | 2011-10-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5676471B2 (ja) | 流動層反応炉においてフルオロシリケートから四フッ化ケイ素を生成するプロセス及びシステム | |
| TW201130734A (en) | Process for production of polysilicon and tetrachloride | |
| US9527752B2 (en) | Methods for producing aluminum trifluoride | |
| JPS63374B2 (enExample) | ||
| JPH0339002B2 (enExample) | ||
| JP5291098B2 (ja) | フルオロケイ酸溶液からの多結晶シリコン製造の技術ならびにその製造のための設備 | |
| JPS5830249B2 (ja) | 電解アルミニウム還元設備で発生する消耗および廃物質から弗素、アルミニウムおよびナトリウム分を回収するための熱加水分解法 | |
| JP2011526239A (ja) | シリコン微粒子のリサイクルにより多結晶シリコン反応炉の生産性を向上させる方法 | |
| CN104271504A (zh) | 用于生产硅和器件的方法及系统 | |
| JPS6234684B2 (enExample) | ||
| EP3530620B1 (en) | Residue disposal method, and method for producing trichlorosilane | |
| EP1947057A1 (en) | Process for production of silicon tetrafluoride, and apparatus for the process | |
| WO2013089014A1 (ja) | 高純度クロロポリシランの製造方法 | |
| US8529860B2 (en) | Methods for producing silicon tetrafluoride | |
| EP0574113B1 (en) | Process and apparatus for treating copper chloride etching waste liquor | |
| CN116947598B (zh) | 一种以三氟甲烷为原料生产四氟甲烷的方法 | |
| JP6729126B2 (ja) | 酸化ニッケルの製造方法、流動焙焼炉 | |
| JP5423594B2 (ja) | フッ素含有化合物ガスの除去方法 | |
| JP5399051B2 (ja) | フロン破壊ガス、または、ドライエッチング排ガス中の塩素およびフッ素の選択的固定化と回収物のリサイクル | |
| CN1179143A (zh) | 四氟乙烯的制备 | |
| JPS59182222A (ja) | ポリクロロシランの製造方法 | |
| JP3958789B2 (ja) | テトラフルオロエチレンの製造法 | |
| JP6942942B2 (ja) | 酸化ニッケルの製造方法、流動焙焼炉 | |
| KR830001540B1 (ko) | 불화 수소의 제법 | |
| JP6908845B2 (ja) | フッ素含有化合物ガスの検知用ガス生成剤の製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121108 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20121108 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140527 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20141202 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20141225 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5676471 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |