JP5668414B2 - 半導体装置の製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims description 29
- 238000004519 manufacturing process Methods 0.000 title claims description 28
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 70
- 239000000758 substrate Substances 0.000 claims description 58
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 47
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 27
- 238000000137 annealing Methods 0.000 claims description 17
- 235000012239 silicon dioxide Nutrition 0.000 claims description 15
- 239000000377 silicon dioxide Substances 0.000 claims description 15
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 9
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 6
- 239000010936 titanium Substances 0.000 description 26
- 239000012535 impurity Substances 0.000 description 24
- 229910052782 aluminium Inorganic materials 0.000 description 12
- 238000009792 diffusion process Methods 0.000 description 12
- 238000002161 passivation Methods 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 238000010292 electrical insulation Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910052719 titanium Inorganic materials 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000005275 alloying Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/048—Making electrodes
- H01L21/0485—Ohmic electrodes
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41741—Source or drain electrodes for field effect devices for vertical or pseudo-vertical devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66015—Multistep manufacturing processes of devices having a semiconductor body comprising semiconducting carbon, e.g. diamond, diamond-like carbon, graphene
- H01L29/66037—Multistep manufacturing processes of devices having a semiconductor body comprising semiconducting carbon, e.g. diamond, diamond-like carbon, graphene the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66045—Field-effect transistors
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
- H01L29/66068—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
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- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
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Description
基板面を有する炭化珪素基板が準備される。基板面の一部を覆うようにゲート絶縁膜が形成される。ゲート絶縁膜に接触して隣り合うように基板面上に、Al原子を有するコンタクト電極が形成される。コンタクト電極をレーザ光でアニールすることによって、Al原子を有する合金が形成される。ゲート絶縁膜の一部を覆うゲート電極が形成される。
はじめに本実施の形態の半導体装置としてのMOSFET(Metal Oxide Semiconductor Field Effect Transistor:酸化膜電界効果トランジスタ)の構成を概略的に説明する。
MOSFET1は、炭化珪素(SiC)からなり、導電型がn型(第1導電型)のウェハであるn+SiCウェハ11と、SiCからなり、導電型がn型(第1導電型)の半導体層としてのn−SiC層12と、導電型がp型(第2導電型)の第2導電型領域としての一対のpボディ13と、導電型がn型(第1導電型)の高濃度第1導電型領域としてのn+ソース領域14と、導電型がp型(第2導電型)の高濃度第2導電型領域としてのp+領域18とを備えている。pボディ13、n+ソース領域14およびp+領域18が形成されたn−SiC層12と、n+SiCウェハ11とは、炭化珪素からなる炭化珪素基板SBを構成する。n+SiCウェハ11は、高濃度のn型不純物(導電型がn型である不純物)、たとえばN(窒素)を含んでいる。
図2を参照して、まず工程(S10)として基板準備工程が実施される。この工程(S10)では、第1導電型のSiCウェハが準備される。具体的には、図4を参照して、たとえば六方晶SiCからなり、n型不純物を含むことにより導電型がn型であるn+SiCウェハ11が準備される。
Claims (6)
- 半導体装置の製造方法であって、
基板面を有する炭化珪素基板を準備する工程と、
前記基板面の一部を覆うようにゲート絶縁膜を形成する工程とを備え、
前記ゲート絶縁膜を形成する工程は、
前記ゲート絶縁膜となる部分を有する絶縁膜を形成する工程と、
前記絶縁膜上に、開口を有するレジスト膜を形成する工程と、
前記レジスト膜をマスクとして用いて、前記ゲート絶縁膜が形成されるように前記絶縁膜を部分的に除去する工程とを含み、前記半導体装置の製造方法はさらに
前記ゲート絶縁膜に接触して隣り合うように前記基板面上に、Al原子を有するコンタクト電極を形成する工程を備え、
前記コンタクト電極を形成する工程は、
前記ゲート絶縁膜が設けられた前記炭化珪素基板上にTi膜を形成する工程と、
前記Ti膜上にAl膜を形成する工程と、
前記Al膜上にSi膜を形成する工程とを含み、前記半導体装置の製造方法はさらに
前記コンタクト電極をレーザ光でアニールすることによって、Al原子を有する合金を形成する工程と、
前記ゲート絶縁膜の一部を覆うゲート電極を形成する工程とを備え、
前記レーザ光で前記コンタクト電極をアニールすることで、前記Al原子が、前記コンタクト電極から、前記ゲート絶縁膜において前記基板面と前記ゲート電極とによって挟まれる部分にまで拡散するのを抑制しながら前記Al原子を含有する前記コンタクト電極を合金化するようにした、半導体装置の製造方法。 - 前記ゲート絶縁膜は珪素酸化物を含有する、請求項1に記載の半導体装置の製造方法。
- 前記珪素酸化物は二酸化珪素を含む、請求項2に記載の半導体装置の製造方法。
- 前記レーザ光の波長は386nm以下である、請求項1〜請求項3のいずれか1項に記載の半導体装置の製造方法。
- 前記レーザ光のパルス幅は10μs以下である、請求項1〜請求項4のいずれか1項に記載の半導体装置の製造方法。
- 前記レーザ光の1パルスあたりのエネルギー密度は0.3J/cm 2 以上1.5J/cm 2 以下である、請求項1〜請求項5のいずれか1項に記載の半導体装置の製造方法。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
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JP2010245150A JP5668414B2 (ja) | 2010-11-01 | 2010-11-01 | 半導体装置の製造方法 |
PCT/JP2011/073996 WO2012060223A1 (ja) | 2010-11-01 | 2011-10-19 | 半導体装置およびその製造方法 |
EP11837874.4A EP2637213A4 (en) | 2010-11-01 | 2011-10-19 | SEMICONDUCTOR COMPONENT AND MANUFACTURING METHOD THEREFOR |
US13/581,980 US8691679B2 (en) | 2010-11-01 | 2011-10-19 | Semiconductor device and method of manufacturing the same |
CN201180018726.2A CN102844871B (zh) | 2010-11-01 | 2011-10-19 | 半导体装置及其制造方法 |
CA2791183A CA2791183A1 (en) | 2010-11-01 | 2011-10-19 | Semiconductor device and method of manufacturing the same |
KR1020127026283A KR20130122514A (ko) | 2010-11-01 | 2011-10-19 | 반도체 장치 및 그 제조 방법 |
TW100138735A TW201222820A (en) | 2010-11-01 | 2011-10-25 | Semiconductor device and manufacturing method therefor |
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JP2014003253A (ja) * | 2012-06-21 | 2014-01-09 | Sumitomo Electric Ind Ltd | 炭化珪素半導体装置 |
DE112012006675T5 (de) * | 2012-07-09 | 2015-04-30 | Hitachi, Ltd. | MOS-Feldeffekttransistor |
JP2014063948A (ja) * | 2012-09-24 | 2014-04-10 | Sumitomo Electric Ind Ltd | 炭化珪素半導体装置の製造方法 |
JP2014078659A (ja) * | 2012-10-12 | 2014-05-01 | Sumitomo Electric Ind Ltd | 半導体装置の製造方法 |
CN104718604B (zh) * | 2012-10-23 | 2017-06-30 | 富士电机株式会社 | 半导体装置的制造方法 |
EP2763159A1 (en) * | 2013-01-30 | 2014-08-06 | University College Cork | Improved low resistance contacts for semiconductor devices |
CN105518830B (zh) | 2014-04-18 | 2018-01-26 | 富士电机株式会社 | 半导体装置的制造方法 |
DE112014003658T5 (de) | 2014-04-18 | 2016-05-12 | Fuji Electric Co., Ltd. | Verfahren zum Herstellen einer Halbleitervorrichtung |
CN105518829B (zh) * | 2014-04-18 | 2018-01-26 | 富士电机株式会社 | 半导体装置的制造方法 |
JP2016046311A (ja) * | 2014-08-20 | 2016-04-04 | 住友電気工業株式会社 | 炭化珪素半導体装置 |
JP6387791B2 (ja) | 2014-10-29 | 2018-09-12 | 富士電機株式会社 | 半導体装置の製造方法 |
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JP3184115B2 (ja) * | 1997-04-11 | 2001-07-09 | 松下電器産業株式会社 | オーミック電極形成方法 |
CN1131548C (zh) | 1997-04-04 | 2003-12-17 | 松下电器产业株式会社 | 半导体装置 |
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JP2004158702A (ja) * | 2002-11-07 | 2004-06-03 | C Tekku:Kk | 半導体装置製造方法 |
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US8866150B2 (en) * | 2007-05-31 | 2014-10-21 | Cree, Inc. | Silicon carbide power devices including P-type epitaxial layers and direct ohmic contacts |
CA2721668A1 (en) | 2008-04-15 | 2009-10-22 | Sumitomo Electric Industries, Ltd. | Semiconductor device and method of manufacturing the same |
JP2010087397A (ja) | 2008-10-02 | 2010-04-15 | Sumitomo Electric Ind Ltd | 炭化珪素半導体装置 |
JP5588671B2 (ja) * | 2008-12-25 | 2014-09-10 | ローム株式会社 | 半導体装置の製造方法 |
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2010
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CN102844871A (zh) | 2012-12-26 |
TW201222820A (en) | 2012-06-01 |
KR20130122514A (ko) | 2013-11-07 |
US20120326167A1 (en) | 2012-12-27 |
US8691679B2 (en) | 2014-04-08 |
WO2012060223A1 (ja) | 2012-05-10 |
CN102844871B (zh) | 2015-05-13 |
JP2012099599A (ja) | 2012-05-24 |
CA2791183A1 (en) | 2012-05-10 |
EP2637213A4 (en) | 2014-06-25 |
EP2637213A1 (en) | 2013-09-11 |
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