JP5655437B2 - 分光特性取得装置 - Google Patents

分光特性取得装置 Download PDF

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Publication number
JP5655437B2
JP5655437B2 JP2010193355A JP2010193355A JP5655437B2 JP 5655437 B2 JP5655437 B2 JP 5655437B2 JP 2010193355 A JP2010193355 A JP 2010193355A JP 2010193355 A JP2010193355 A JP 2010193355A JP 5655437 B2 JP5655437 B2 JP 5655437B2
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JP
Japan
Prior art keywords
light receiving
light
diffraction
image
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010193355A
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English (en)
Japanese (ja)
Other versions
JP2011080980A (ja
JP2011080980A5 (enExample
Inventor
新保 晃平
晃平 新保
学 瀬尾
学 瀬尾
上条 直裕
直裕 上条
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
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Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP2010193355A priority Critical patent/JP5655437B2/ja
Publication of JP2011080980A publication Critical patent/JP2011080980A/ja
Publication of JP2011080980A5 publication Critical patent/JP2011080980A5/ja
Application granted granted Critical
Publication of JP5655437B2 publication Critical patent/JP5655437B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/06Scanning arrangements arrangements for order-selection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00Optical objectives specially designed for the purposes specified below
    • G02B13/22Telecentric objectives or lens systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0087Simple or compound lenses with index gradient

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
JP2010193355A 2009-09-14 2010-08-31 分光特性取得装置 Expired - Fee Related JP5655437B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010193355A JP5655437B2 (ja) 2009-09-14 2010-08-31 分光特性取得装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009211436 2009-09-14
JP2009211436 2009-09-14
JP2010193355A JP5655437B2 (ja) 2009-09-14 2010-08-31 分光特性取得装置

Publications (3)

Publication Number Publication Date
JP2011080980A JP2011080980A (ja) 2011-04-21
JP2011080980A5 JP2011080980A5 (enExample) 2013-08-22
JP5655437B2 true JP5655437B2 (ja) 2015-01-21

Family

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Family Applications (1)

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JP2010193355A Expired - Fee Related JP5655437B2 (ja) 2009-09-14 2010-08-31 分光特性取得装置

Country Status (3)

Country Link
US (1) US8497988B2 (enExample)
EP (1) EP2295942B1 (enExample)
JP (1) JP5655437B2 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5884347B2 (ja) * 2011-09-12 2016-03-15 株式会社リコー 分光特性取得装置及び分光特性取得方法、画像評価装置、並びに画像形成装置
JP2013142595A (ja) * 2012-01-10 2013-07-22 Ricoh Co Ltd 分光特性取得装置、画像評価装置及び画像形成装置
JP5880053B2 (ja) 2012-01-12 2016-03-08 株式会社リコー 分光特性取得装置及び画像形成装置
JP5834938B2 (ja) 2012-01-17 2015-12-24 株式会社リコー 分光特性取得装置、画像評価装置、画像形成装置及び分光特性取得方法
JP6051543B2 (ja) 2012-03-09 2016-12-27 株式会社リコー 分光計測装置、画像評価装置及び画像形成装置
JP5910989B2 (ja) 2012-03-09 2016-04-27 株式会社リコー 分光計測装置、画像評価装置及び画像形成装置
JP2014048271A (ja) * 2012-09-04 2014-03-17 Ricoh Co Ltd 演算装置及び演算方法、分光反射率取得装置、画像評価装置、並びに画像形成装置
WO2014173770A1 (en) * 2013-04-22 2014-10-30 Sanofi-Aventis Deutschland Gmbh Supplemental device for use with an injection device
JP6311267B2 (ja) 2013-05-10 2018-04-18 株式会社リコー 分光特性取得装置、画像評価装置、画像形成装置
JP6232831B2 (ja) * 2013-08-15 2017-11-22 株式会社リコー 分光特性取得装置、画像評価装置及び画像形成装置
JP6550743B2 (ja) 2014-02-20 2019-07-31 株式会社リコー 分光特性取得装置、画像評価装置及び画像形成装置
JP6667535B2 (ja) * 2015-01-20 2020-03-18 3アイ‐インプレサ インジェニェリア イタリア エス.アール.エル3I − Impresa Ingegneria Italia S.R.L. 一次シリンドリカルレンズを有するテレセントリック光学対物系を備えた撮像装置
JP6623685B2 (ja) * 2015-10-29 2019-12-25 セイコーエプソン株式会社 測定装置及び印刷装置
JP6988512B2 (ja) 2018-01-24 2022-01-05 株式会社リコー 分光特性取得装置、画像形成装置、画像形成システム
JP7095304B2 (ja) 2018-02-15 2022-07-05 株式会社リコー 分光特性取得装置、画像形成装置、画像形成システム、画像形成装置の管理システム、及び画像形成装置の管理方法
JP7087735B2 (ja) 2018-06-29 2022-06-21 株式会社リコー 分光特性取得装置、画像形成装置、及び画像形成装置の管理システム
JP2020153814A (ja) 2019-03-20 2020-09-24 株式会社リコー 分光特性取得装置
US11933735B2 (en) * 2019-03-29 2024-03-19 Osaka University Optical detection device, optical detection method, method for designing optical detection device, sample classification method, and defect detection method
CN111856745B (zh) * 2019-04-30 2023-03-17 上海微电子装备(集团)股份有限公司 一种光照射装置
CN112213272B (zh) * 2019-07-10 2024-01-12 中微半导体设备(上海)股份有限公司 一种光谱检测设备、终点检测系统和方法
JP7622655B2 (ja) * 2020-02-03 2025-01-28 ソニーグループ株式会社 変調器及び撮像装置
CN113237546B (zh) * 2021-04-12 2022-03-18 淮阴工学院 一种基于介质微球的微米聚焦虹的产生方法及光谱仪

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JPH0421257A (ja) * 1990-05-16 1992-01-24 Konica Corp 画像読み取り装置
DE4039070A1 (de) * 1990-12-07 1992-06-11 Philips Patentverwaltung Vielkanalspektrometer
US5374988A (en) * 1991-06-14 1994-12-20 Ball Corporation System for non-contact identification and inspection of color patterns
DE19523140A1 (de) 1995-06-28 1997-01-02 Spectro Analytical Instr Mehrkanal-Spektrometer mit Zeilensensor
JP3689901B2 (ja) * 1999-05-28 2005-08-31 横河電機株式会社 バイオチップ読取装置
US7057723B2 (en) * 2000-12-21 2006-06-06 De La Rue International Limited Optical sensor device and method for spectral analysis
JP4368163B2 (ja) * 2003-08-19 2009-11-18 富士フイルム株式会社 分光素子アレイ及びこれを備えた分光画像測定装置並びに分光画像測定方法
US6975949B2 (en) 2004-04-27 2005-12-13 Xerox Corporation Full width array scanning spectrophotometer
US7671992B2 (en) * 2004-10-28 2010-03-02 X-Rite Europe Gmbh Measurement system and scanning device for the photoelectric measurement of a measurement object pixel by pixel
JP2008066850A (ja) * 2005-09-08 2008-03-21 Nippon Sheet Glass Co Ltd コンタクトイメージセンサが備える受光素子アレイ基板の位置調整方法、コンタクトイメージセンサの製造方法およびコンタクトイメージセンサ
JP5440110B2 (ja) * 2009-03-30 2014-03-12 株式会社リコー 分光特性取得装置、分光特性取得方法、画像評価装置、及び画像形成装置
JP2010261861A (ja) * 2009-05-08 2010-11-18 Ricoh Co Ltd 分光特性取得装置、画像評価装置、及び画像形成装置

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Publication number Publication date
EP2295942A1 (en) 2011-03-16
US20110063615A1 (en) 2011-03-17
JP2011080980A (ja) 2011-04-21
US8497988B2 (en) 2013-07-30
EP2295942B1 (en) 2016-08-10

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