JP5646398B2 - 成膜装置 - Google Patents
成膜装置 Download PDFInfo
- Publication number
- JP5646398B2 JP5646398B2 JP2011135374A JP2011135374A JP5646398B2 JP 5646398 B2 JP5646398 B2 JP 5646398B2 JP 2011135374 A JP2011135374 A JP 2011135374A JP 2011135374 A JP2011135374 A JP 2011135374A JP 5646398 B2 JP5646398 B2 JP 5646398B2
- Authority
- JP
- Japan
- Prior art keywords
- power supply
- filament
- igbt
- film forming
- supply unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Description
Claims (3)
- 一対のターゲットをスパッタリングし対象物に成膜する成膜装置であって、
内部にプラズマが形成され、前記一対のターゲットがスパッタされるチャンバと、
前記チャンバ内に配置され、前記プラズマが形成される領域に熱電子を供給するフィラメントと、
前記フィラメントを加熱して前記熱電子を発生させるための加熱用電源部と、
前記一対のターゲットへ電圧を交互に供給する交流電源ユニットと、を備え、
前記交流電源ユニットは、
交流電力を出力する交流電源を有し、
前記交流電源が出力する交流電源の電圧周期に同期させて、前記フィラメントを負の電圧が供給された一方の前記ターゲットへ電気的に接続することを特徴とする成膜装置。 - 前記交流電源ユニットは、負の電圧が供給された一方の前記ターゲットの電位を基準電位として、前記フィラメントの電位を調整することを特徴とする請求項1に記載の成膜装置。
- 前記交流電源ユニットは、前記一対のターゲットにそれぞれ電気的に接続されたサイリスタまたはIGBTを有し、
前記サイリスタまたは前記IGBTは、接続された前記ターゲットに負の電圧が供給されたときに、前記フィラメントを当該ターゲットへ電気的に接続して、当該ターゲットの電位を前記フィラメントの基準電位とすることを特徴とする請求項1又は2に記載の成膜装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011135374A JP5646398B2 (ja) | 2011-06-17 | 2011-06-17 | 成膜装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2011135374A JP5646398B2 (ja) | 2011-06-17 | 2011-06-17 | 成膜装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013001970A JP2013001970A (ja) | 2013-01-07 |
JP5646398B2 true JP5646398B2 (ja) | 2014-12-24 |
Family
ID=47670856
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2011135374A Expired - Fee Related JP5646398B2 (ja) | 2011-06-17 | 2011-06-17 | 成膜装置 |
Country Status (1)
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JP (1) | JP5646398B2 (ja) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61238958A (ja) * | 1985-04-15 | 1986-10-24 | Hitachi Ltd | 複合薄膜形成法及び装置 |
JPH03271368A (ja) * | 1990-03-22 | 1991-12-03 | Ricoh Co Ltd | 薄膜形成装置 |
JPH07116589B2 (ja) * | 1990-08-01 | 1995-12-13 | 新日本製鐵株式会社 | 組成変調薄膜の作製方法 |
JP2000256847A (ja) * | 1999-03-04 | 2000-09-19 | Sanyo Shinku Kogyo Kk | 薄膜の成膜方法とその装置 |
JP2004027277A (ja) * | 2002-06-25 | 2004-01-29 | Sanyo Shinku Kogyo Kk | スパッタリング装置 |
DE10306347A1 (de) * | 2003-02-15 | 2004-08-26 | Hüttinger Elektronik GmbH & Co. KG | Leistungszufuhrregeleinheit |
-
2011
- 2011-06-17 JP JP2011135374A patent/JP5646398B2/ja not_active Expired - Fee Related
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Publication number | Publication date |
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JP2013001970A (ja) | 2013-01-07 |
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