JP5632533B2 - アルカリエッチング液、特にテクスチャエッチング液のための添加剤、及びその製造方法 - Google Patents
アルカリエッチング液、特にテクスチャエッチング液のための添加剤、及びその製造方法 Download PDFInfo
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- JP5632533B2 JP5632533B2 JP2013506772A JP2013506772A JP5632533B2 JP 5632533 B2 JP5632533 B2 JP 5632533B2 JP 2013506772 A JP2013506772 A JP 2013506772A JP 2013506772 A JP2013506772 A JP 2013506772A JP 5632533 B2 JP5632533 B2 JP 5632533B2
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- Prior art keywords
- phase mixture
- product
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- polyethylene glycol
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000000034 method Methods 0.000 title claims description 30
- 239000000654 additive Substances 0.000 title claims description 8
- 239000000203 mixture Substances 0.000 claims description 101
- 238000005530 etching Methods 0.000 claims description 39
- 229920001223 polyethylene glycol Polymers 0.000 claims description 27
- 229910001854 alkali hydroxide Inorganic materials 0.000 claims description 23
- 238000002156 mixing Methods 0.000 claims description 23
- 230000008859 change Effects 0.000 claims description 22
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 21
- 150000008044 alkali metal hydroxides Chemical class 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 21
- 239000002253 acid Substances 0.000 claims description 20
- 239000002585 base Substances 0.000 claims description 20
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 18
- 230000001590 oxidative effect Effects 0.000 claims description 17
- 239000002202 Polyethylene glycol Substances 0.000 claims description 16
- 230000008569 process Effects 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 claims description 10
- 239000012080 ambient air Substances 0.000 claims description 9
- 230000000996 additive effect Effects 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000001228 spectrum Methods 0.000 claims description 5
- -1 alkali hydroxide compound Chemical class 0.000 claims description 3
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 2
- 239000003570 air Substances 0.000 claims 1
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 39
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 32
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 15
- 230000000694 effects Effects 0.000 description 14
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 150000007513 acids Chemical class 0.000 description 7
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 7
- 239000007864 aqueous solution Substances 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000006872 improvement Effects 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 239000002210 silicon-based material Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000000908 ammonium hydroxide Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/02—Etching, surface-brightening or pickling compositions containing an alkali metal hydroxide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Weting (AREA)
- Photovoltaic Devices (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
12 単相混合物を加熱する
14 単相混合物を、その色が赤褐色の色調に変わるまで静置する
20 テトラエチレングリコールを水酸化ナトリウム水溶液(NaOH溶液)と混合する
22 単相混合物を加熱する
24 単相混合物の色が赤褐色の色調に変わるのを待つ
26 単相混合物中に塩酸を混合する
28 少なくとも一種のアルカリ水酸化物及び水を単相混合物中に混合する
50 容器
52 単相混合物
54 加熱装置
56 色が変わった後の単相混合物
Claims (16)
- − 単相混合物(52)を形成するために、少なくとも一種のポリエチレングリコールを塩基と混合する(10;20)工程、
− 該単相混合物(52)を80℃の温度に加熱する(12;22)工程、
− 該単相混合物(52)を、該単相混合物(52)の色が変わるまで周囲空気中で静置(14)する工程、及び
− 該単相混合物(52)中に、非酸化性酸が混合(26)される工程(26)、
によって得られる、生成物(56)。 - アルカリ水酸化物又は水酸化アンモニウムが塩基として使用される(10;20)ことを特徴とする、請求項1に記載の生成物(56)。
- テトラエチレングリコールが、少なくとも一種のポリエチレングリコールとして使用される(10;20)ことを特徴とする、請求項1又は2に記載の生成物(56)。
- 前記単相混合物(52)が、その色調が光学スペクトルにおけるオレンジ色と赤褐色との間の色調になるまで、周囲空気中に静置(14)されることを特徴とする、請求項1〜3のいずれか一つに記載の生成物(56)。
- 前記単相混合物(52)が、その色調が赤褐色の色調になるまで、周囲空気中に静置(14)されることを特徴とする、請求項4のいずれか一つに記載の生成物(56)。
- 前記単相混合物を形成するために、前記少なくとも一種のポリエチレングリコールが、前記塩基及び水と混合(20)されることを特徴とする、請求項1〜5のいずれか一つに記載の生成物(56)。
- 前記単相混合物(52)中に、非酸化性酸として、塩酸又は酢酸が混合(26)されることを特徴とする、請求項1〜6のいずれか一つに記載の生成物。
- 前記単相混合物(56)の色が変わった後、水及び少なくとも一種のアルカリ水酸化物がそれに混合されることを特徴とする、請求項1〜7のいずれか一つに記載の生成物。
- 半導体材料のためのアルカリエッチング液における添加剤としての、請求項1〜8のいずれか一つに記載の生成物(56)の使用。
- 半導体材料のためのテクスチャエッチング液としての、請求項8に記載の生成物の使用。
- シリコンのためのテクスチャエッチング液としての、請求項8に記載の生成物の使用。
- 請求項1〜8のいずれか一つに記載の生成物(56)を製造する方法であって、
− 少なくとも一種のポリエチレングリコールを塩基と混合(10;20)することによって、単相混合物を形成させ、
− 該単相混合物の色の変化を待ち(14;24)、そして
− 前記単相混合物(56)中に、非酸化性酸が混合(26)される、上記の方法。 - アルカリ水酸化物が塩基として使用(10;20)されることを特徴とする、請求項12に記載の方法。
- テトラエチレングリコールが少なくとも一種のポリエチレングリコールとして使用(10;20)されることを特徴とする、請求項12又は13に記載の方法。
- 前記単相混合物(52)の色の変化が、光学スペクトルにおけるオレンジ色と赤褐色との間の色調になるのを待つ(14;24)ことを特徴とする、請求項12〜14のいずれか一つに記載の方法。
- 前記単相混合物(56)中に、非酸化性酸として、塩酸又は酢酸が混合(26)されることを特徴とする、請求項12〜15のいずれか一つに記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102010019079.9 | 2010-04-30 | ||
DE102010019079A DE102010019079A1 (de) | 2010-04-30 | 2010-04-30 | Additiv für alkalische Ätzlösungen, insbesondere für Texturätzlösungen, sowie Verfahren zu dessen Herstellung |
PCT/IB2011/000900 WO2011135435A1 (en) | 2010-04-30 | 2011-04-27 | Additive for alkaline etching solutions, in particular for texture etching solutions, and process for producing it |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013526050A JP2013526050A (ja) | 2013-06-20 |
JP5632533B2 true JP5632533B2 (ja) | 2014-11-26 |
Family
ID=44358213
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013506772A Expired - Fee Related JP5632533B2 (ja) | 2010-04-30 | 2011-04-27 | アルカリエッチング液、特にテクスチャエッチング液のための添加剤、及びその製造方法 |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP2470619A1 (ja) |
JP (1) | JP5632533B2 (ja) |
KR (1) | KR101478892B1 (ja) |
CN (1) | CN102695778B (ja) |
DE (1) | DE102010019079A1 (ja) |
TW (1) | TWI467054B (ja) |
WO (1) | WO2011135435A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102877135B (zh) * | 2012-09-07 | 2015-11-25 | 湖州三峰能源科技有限公司 | 单晶硅片碱性环保型无醇制绒液的添加剂及其使用方法 |
TWI506122B (zh) * | 2012-09-20 | 2015-11-01 | 財團法人工業技術研究院 | 一種半導體晶片之蝕刻組成物及蝕刻方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3998659A (en) | 1974-01-28 | 1976-12-21 | Texas Instruments Incorporated | Solar cell with semiconductor particles and method of fabrication |
US3909325A (en) * | 1974-06-28 | 1975-09-30 | Motorola Inc | Polycrystalline etch |
US5035809A (en) * | 1990-10-05 | 1991-07-30 | Eastman Kodak Company | Dichloromethane abatement |
US5536439A (en) * | 1995-03-13 | 1996-07-16 | Gage Products Company | Non-abrasive line cleaning composition |
DE19811878C2 (de) * | 1998-03-18 | 2002-09-19 | Siemens Solar Gmbh | Verfahren und Ätzlösung zum naßchemischen pyramidalen Texturätzen von Siliziumoberflächen |
JP2002322578A (ja) * | 2001-04-24 | 2002-11-08 | Noritake Co Ltd | アルミニウム薄膜のエッチング液およびアルミニウム薄膜パターン形成方法 |
DE102006051952A1 (de) * | 2006-11-01 | 2008-05-08 | Merck Patent Gmbh | Partikelhaltige Ätzpasten für Siliziumoberflächen und -schichten |
JP2010524208A (ja) * | 2007-03-31 | 2010-07-15 | アドバンスド テクノロジー マテリアルズ,インコーポレイテッド | ウエハ再生のために材料を剥離する方法 |
TW200842970A (en) * | 2007-04-26 | 2008-11-01 | Mallinckrodt Baker Inc | Polysilicon planarization solution for planarizing low temperature poly-silicon thin filim panels |
US20090139568A1 (en) * | 2007-11-19 | 2009-06-04 | Applied Materials, Inc. | Crystalline Solar Cell Metallization Methods |
TW201001508A (en) * | 2008-03-25 | 2010-01-01 | Applied Materials Inc | Surface cleaning and texturing process for crystalline solar cells |
DE102008056086A1 (de) | 2008-11-06 | 2010-05-12 | Gp Solar Gmbh | Additiv für alkalische Ätzlösungen, insbesondere für Texturätzlösungen sowie Verfahren zu dessen Herstellung |
-
2010
- 2010-04-30 DE DE102010019079A patent/DE102010019079A1/de not_active Ceased
-
2011
- 2011-04-25 TW TW100114245A patent/TWI467054B/zh not_active IP Right Cessation
- 2011-04-27 CN CN201180004300.1A patent/CN102695778B/zh not_active Expired - Fee Related
- 2011-04-27 KR KR1020127028184A patent/KR101478892B1/ko active IP Right Grant
- 2011-04-27 EP EP11727757A patent/EP2470619A1/en not_active Withdrawn
- 2011-04-27 JP JP2013506772A patent/JP5632533B2/ja not_active Expired - Fee Related
- 2011-04-27 WO PCT/IB2011/000900 patent/WO2011135435A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2011135435A1 (en) | 2011-11-03 |
JP2013526050A (ja) | 2013-06-20 |
EP2470619A1 (en) | 2012-07-04 |
KR101478892B1 (ko) | 2015-01-05 |
DE102010019079A1 (de) | 2011-11-03 |
CN102695778A (zh) | 2012-09-26 |
KR20130028730A (ko) | 2013-03-19 |
TW201211313A (en) | 2012-03-16 |
CN102695778B (zh) | 2015-10-21 |
TWI467054B (zh) | 2015-01-01 |
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