JP5627476B2 - 反射屈折光学系及びそれを有する撮像装置 - Google Patents

反射屈折光学系及びそれを有する撮像装置 Download PDF

Info

Publication number
JP5627476B2
JP5627476B2 JP2011008370A JP2011008370A JP5627476B2 JP 5627476 B2 JP5627476 B2 JP 5627476B2 JP 2011008370 A JP2011008370 A JP 2011008370A JP 2011008370 A JP2011008370 A JP 2011008370A JP 5627476 B2 JP5627476 B2 JP 5627476B2
Authority
JP
Japan
Prior art keywords
optical system
image
imaging
negative lens
optical element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011008370A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012150245A5 (enExample
JP2012150245A (ja
Inventor
中野　正嗣
正嗣 中野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011008370A priority Critical patent/JP5627476B2/ja
Priority to US13/353,385 priority patent/US9097883B2/en
Publication of JP2012150245A publication Critical patent/JP2012150245A/ja
Publication of JP2012150245A5 publication Critical patent/JP2012150245A5/ja
Application granted granted Critical
Publication of JP5627476B2 publication Critical patent/JP5627476B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/18—Optical objectives specially designed for the purposes specified below with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0808—Catadioptric systems using two curved mirrors on-axis systems with at least one of the mirrors having a central aperture
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G02B21/04—Objectives involving mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/005—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration for correction of secondary colour or higher-order chromatic aberrations

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Lenses (AREA)
  • Microscoopes, Condenser (AREA)
JP2011008370A 2011-01-19 2011-01-19 反射屈折光学系及びそれを有する撮像装置 Expired - Fee Related JP5627476B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011008370A JP5627476B2 (ja) 2011-01-19 2011-01-19 反射屈折光学系及びそれを有する撮像装置
US13/353,385 US9097883B2 (en) 2011-01-19 2012-01-19 Catadioptric optical system and image-pickup apparatus having the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011008370A JP5627476B2 (ja) 2011-01-19 2011-01-19 反射屈折光学系及びそれを有する撮像装置

Publications (3)

Publication Number Publication Date
JP2012150245A JP2012150245A (ja) 2012-08-09
JP2012150245A5 JP2012150245A5 (enExample) 2014-03-06
JP5627476B2 true JP5627476B2 (ja) 2014-11-19

Family

ID=46490497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011008370A Expired - Fee Related JP5627476B2 (ja) 2011-01-19 2011-01-19 反射屈折光学系及びそれを有する撮像装置

Country Status (2)

Country Link
US (1) US9097883B2 (enExample)
JP (1) JP5627476B2 (enExample)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6034737B2 (ja) 1977-03-14 1985-08-10 オリンパス光学工業株式会社 顕微鏡対物レンズ
JPS6034737U (ja) 1983-08-11 1985-03-09 カシオ計算機株式会社 メモリバツクアツプ用の電源回路
US5212593A (en) * 1992-02-06 1993-05-18 Svg Lithography Systems, Inc. Broad band optical reduction system using matched multiple refractive element materials
KR20010041257A (ko) 1998-12-25 2001-05-15 오노 시게오 반사굴절 결상 광학계 및 그 광학계를 구비한 투영 노광장치
US6842298B1 (en) * 2000-09-12 2005-01-11 Kla-Tencor Technologies Corporation Broad band DUV, VUV long-working distance catadioptric imaging system
US7672043B2 (en) * 2003-02-21 2010-03-02 Kla-Tencor Technologies Corporation Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth
US7646533B2 (en) * 2003-02-21 2010-01-12 Kla-Tencor Technologies Corporation Small ultra-high NA catadioptric objective
US8675276B2 (en) * 2003-02-21 2014-03-18 Kla-Tencor Corporation Catadioptric imaging system for broad band microscopy
US7224539B2 (en) * 2005-05-13 2007-05-29 Schaack David F Providing optical systems having improved properties to users of catalog (stock) lenses
JP5634989B2 (ja) * 2008-06-17 2014-12-03 ケーエルエー−テンカー・コーポレーションＫｌａ−Ｔｅｎｃｏｒ Ｃｏｒｐｏｒａｔｉｏｎ 対物光学系および試料検査装置

Also Published As

Publication number Publication date
US20120182414A1 (en) 2012-07-19
US9097883B2 (en) 2015-08-04
JP2012150245A (ja) 2012-08-09

Similar Documents

Publication Publication Date Title
JP5675892B2 (ja) 高い開口数を有する反射屈折光学系
JP5479206B2 (ja) 反射屈折光学系及びそれを有する撮像装置
JP5836686B2 (ja) 反射屈折光学系及びそれを有する撮像装置
JP5705014B2 (ja) 結像レンズ、撮像光学系、及び、顕微鏡
JP5479224B2 (ja) 反射屈折光学系及びそれを有する撮像装置
JP5868063B2 (ja) 撮像装置
US11048071B2 (en) Microscope objective
JP5656682B2 (ja) 反射屈折光学系及びそれを有する撮像装置
JP4426234B2 (ja) 集光光学系、共焦点光学システムおよび走査型共焦点内視鏡
JP2013061530A (ja) 反射屈折光学系及びそれを有する撮像装置
JP4648670B2 (ja) 内視鏡対物光学系および内視鏡
JP4160270B2 (ja) 撮影光学系および鏡筒
JP5627476B2 (ja) 反射屈折光学系及びそれを有する撮像装置
JP2013015718A (ja) 反射屈折光学系及びそれを有する撮像装置
JP2015036706A (ja) 撮像装置
JPH08286112A (ja) 顕微鏡対物レンズ
JP2015036706A5 (enExample)
JP2015184544A (ja) 反射屈折光学系及びそれを有する撮像装置
JP2015176134A (ja) 撮像装置
JP2013015717A (ja) 反射屈折光学系及びそれを有する撮像装置
JP2014081511A (ja) 反射屈折光学系及びそれを有する撮像装置
JP2012163747A (ja) 反射屈折光学系及びそれを有する撮像装置
JP2014056172A (ja) 対物光学装置および撮像装置
JP2000249926A (ja) 顕微鏡対物レンズ及び顕微鏡
JP2006317761A (ja) 対物レンズ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140115

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20140115

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140617

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140618

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140808

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140902

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140930

R151 Written notification of patent or utility model registration

Ref document number: 5627476

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: R3D03

LAPS Cancellation because of no payment of annual fees