JP5627258B2 - 振動型アクチュエータおよびその製造方法 - Google Patents

振動型アクチュエータおよびその製造方法 Download PDF

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Publication number
JP5627258B2
JP5627258B2 JP2010065587A JP2010065587A JP5627258B2 JP 5627258 B2 JP5627258 B2 JP 5627258B2 JP 2010065587 A JP2010065587 A JP 2010065587A JP 2010065587 A JP2010065587 A JP 2010065587A JP 5627258 B2 JP5627258 B2 JP 5627258B2
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Japan
Prior art keywords
vibration
spring
conversion element
vibration type
contact portion
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JP2010065587A
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Japanese (ja)
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JP2011200051A5 (enExample
JP2011200051A (ja
Inventor
悠貴 小田
悠貴 小田
山本　新治
新治 山本
熱田　暁生
暁生 熱田
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2010065587A priority Critical patent/JP5627258B2/ja
Priority to US13/052,989 priority patent/US8633632B2/en
Publication of JP2011200051A publication Critical patent/JP2011200051A/ja
Publication of JP2011200051A5 publication Critical patent/JP2011200051A5/ja
Priority to US14/132,668 priority patent/US10580963B2/en
Application granted granted Critical
Publication of JP5627258B2 publication Critical patent/JP5627258B2/ja
Priority to US15/842,709 priority patent/US11063205B2/en
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/0015—Driving devices, e.g. vibrators using only bending modes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H02N2/006—Elastic elements, e.g. springs
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0065—Friction interface
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12—Constructional details
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/071—Mounting of piezoelectric or electrostrictive parts together with semiconductor elements, or other circuit elements, on a common substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2010065587A 2010-03-23 2010-03-23 振動型アクチュエータおよびその製造方法 Active JP5627258B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010065587A JP5627258B2 (ja) 2010-03-23 2010-03-23 振動型アクチュエータおよびその製造方法
US13/052,989 US8633632B2 (en) 2010-03-23 2011-03-21 Vibration actuator and method for manufacturing the same
US14/132,668 US10580963B2 (en) 2010-03-23 2013-12-18 Method for manufacturing a vibration actuator
US15/842,709 US11063205B2 (en) 2010-03-23 2017-12-14 Vibration actuator and method for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010065587A JP5627258B2 (ja) 2010-03-23 2010-03-23 振動型アクチュエータおよびその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014204249A Division JP5847906B2 (ja) 2014-10-02 2014-10-02 振動体

Publications (3)

Publication Number Publication Date
JP2011200051A JP2011200051A (ja) 2011-10-06
JP2011200051A5 JP2011200051A5 (enExample) 2013-05-09
JP5627258B2 true JP5627258B2 (ja) 2014-11-19

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JP2010065587A Active JP5627258B2 (ja) 2010-03-23 2010-03-23 振動型アクチュエータおよびその製造方法

Country Status (2)

Country Link
US (3) US8633632B2 (enExample)
JP (1) JP5627258B2 (enExample)

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JP2010190706A (ja) * 2009-02-18 2010-09-02 Panasonic Corp 慣性力センサ
JP5627258B2 (ja) 2010-03-23 2014-11-19 キヤノン株式会社 振動型アクチュエータおよびその製造方法
JP5930595B2 (ja) * 2010-04-06 2016-06-08 キヤノン株式会社 振動型アクチュエータ、振動子及び振動子の製造方法
USD705830S1 (en) * 2013-02-15 2014-05-27 Namiki Seimitsu Houseki Kabushiki Kaisha Vibration actuator
JP6214232B2 (ja) * 2013-06-20 2017-10-18 キヤノン株式会社 振動型アクチュエータ、交換用レンズ、撮像装置、及び自動ステージ
JP6261279B2 (ja) 2013-10-16 2018-01-17 キヤノン株式会社 振動型駆動装置の振動子、振動型駆動装置、交換レンズ、撮像装置、自動ステージ
FR3042660B1 (fr) * 2015-10-16 2018-04-06 Airbus Helicopters Actionneur electromecanique pour commandes de vol electriques d'un aeronef
WO2018187596A1 (en) * 2017-04-06 2018-10-11 Walmart Apollo, Llc Authentication system using nfc tags
JP7321688B2 (ja) * 2017-09-29 2023-08-07 キヤノン株式会社 振動波アクチュエータ及びそれを用いた撮像装置、ステージ装置
CN108110133B (zh) * 2017-11-22 2021-03-16 浙江农林大学 一种层状二维纳米片/碳化纤维复合材料及制备方法和应用
JP7527828B2 (ja) * 2020-04-13 2024-08-05 キヤノン株式会社 振動波モータ及びそれを備える電子機器
US20250343489A1 (en) 2024-05-01 2025-11-06 Canon Kabushiki Kaisha Vibration-type actuator, manufacturing method of vibration-type actuator, electronic device, and optical device

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JP5627258B2 (ja) 2010-03-23 2014-11-19 キヤノン株式会社 振動型アクチュエータおよびその製造方法
JP5930595B2 (ja) * 2010-04-06 2016-06-08 キヤノン株式会社 振動型アクチュエータ、振動子及び振動子の製造方法
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JP5929138B2 (ja) * 2011-12-06 2016-06-01 セイコーエプソン株式会社 圧電モーターおよびロボット

Also Published As

Publication number Publication date
US10580963B2 (en) 2020-03-03
US20110234042A1 (en) 2011-09-29
US8633632B2 (en) 2014-01-21
US20180108830A1 (en) 2018-04-19
US20140101905A1 (en) 2014-04-17
US11063205B2 (en) 2021-07-13
JP2011200051A (ja) 2011-10-06

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