JP5622632B2 - 透過型電子顕微鏡グリッドの製造方法 - Google Patents
透過型電子顕微鏡グリッドの製造方法 Download PDFInfo
- Publication number
- JP5622632B2 JP5622632B2 JP2011067648A JP2011067648A JP5622632B2 JP 5622632 B2 JP5622632 B2 JP 5622632B2 JP 2011067648 A JP2011067648 A JP 2011067648A JP 2011067648 A JP2011067648 A JP 2011067648A JP 5622632 B2 JP5622632 B2 JP 5622632B2
- Authority
- JP
- Japan
- Prior art keywords
- carbon nanotube
- carrier
- fixed body
- hole
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000005540 biological transmission Effects 0.000 title claims description 97
- 238000000034 method Methods 0.000 title claims description 47
- 238000004519 manufacturing process Methods 0.000 title claims description 36
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 346
- 239000002041 carbon nanotube Substances 0.000 claims description 255
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 255
- 239000002238 carbon nanotube film Substances 0.000 claims description 79
- 239000000969 carrier Substances 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 19
- 238000010030 laminating Methods 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000005520 cutting process Methods 0.000 claims description 2
- 239000003960 organic solvent Substances 0.000 description 25
- 239000000463 material Substances 0.000 description 17
- 238000003466 welding Methods 0.000 description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical group OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910003481 amorphous carbon Inorganic materials 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 238000009987 spinning Methods 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- SCYULBFZEHDVBN-UHFFFAOYSA-N 1,1-Dichloroethane Chemical compound CC(Cl)Cl SCYULBFZEHDVBN-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000009940 knitting Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000005491 wire drawing Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 102000029749 Microtubule Human genes 0.000 description 1
- 108091022875 Microtubule Proteins 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 238000001241 arc-discharge method Methods 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 210000004688 microtubule Anatomy 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B5/00—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts
- B32B5/02—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by structural features of a fibrous or filamentary layer
- B32B5/12—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by structural features of a fibrous or filamentary layer characterised by the relative arrangement of fibres or filaments of different layers, e.g. the fibres or filaments being parallel or perpendicular to each other
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
- B32B3/26—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
- B32B3/266—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by an apertured layer, the apertures going through the whole thickness of the layer, e.g. expanded metal, perforated layer, slit layer regular cells B32B3/12
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B5/00—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts
- B32B5/22—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by the presence of two or more layers which are next to each other and are fibrous, filamentary, formed of particles or foamed
- B32B5/24—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by the presence of two or more layers which are next to each other and are fibrous, filamentary, formed of particles or foamed one layer being a fibrous or filamentary layer
- B32B5/26—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by the presence of two or more layers which are next to each other and are fibrous, filamentary, formed of particles or foamed one layer being a fibrous or filamentary layer another layer next to it also being fibrous or filamentary
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/005—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising one layer of ceramic material, e.g. porcelain, ceramic tile
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/005—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising one layer of ceramic material, e.g. porcelain, ceramic tile
- B32B9/007—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising one layer of ceramic material, e.g. porcelain, ceramic tile comprising carbon, e.g. graphite, composite carbon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B9/041—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material of metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/50—Properties of the layers or laminate having particular mechanical properties
- B32B2307/514—Oriented
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/50—Properties of the layers or laminate having particular mechanical properties
- B32B2307/54—Yield strength; Tensile strength
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/50—Properties of the layers or laminate having particular mechanical properties
- B32B2307/558—Impact strength, toughness
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/70—Other properties
- B32B2307/732—Dimensional properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2551/00—Optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2007—Holding mechanisms
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1002—Methods of surface bonding and/or assembly therefor with permanent bending or reshaping or surface deformation of self sustaining lamina
- Y10T156/1043—Subsequent to assembly
- Y10T156/1049—Folding only
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49826—Assembling or joining
- Y10T29/49885—Assembling or joining with coating before or during assembling
Landscapes
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
Description
図1及び図2を参照すると、本実施形態は、透過型電子顕微鏡グリッド10を提供する。該透過型電子顕微鏡グリッド10は、キャリヤー110と、カーボンナノチューブ支持体120と、固定体130と、を含む。前記カーボンナノチューブ支持体120は、前記キャリヤー110と前記固定体130との間に設置される。好ましくは、前記透過型電子顕微鏡グリッド10は、外径が3ミリメートルであり、厚さが3マイクロメートル〜20マイクロメートルである円形のシートである。
図3及び図4を参照すると、本実施形態は、透過型電子顕微鏡グリッド20を提供する。該透過型電子顕微鏡グリッド20は、キャリヤー210と、カーボンナノチューブ支持体220と、固定体230と、を含む。前記カーボンナノチューブ支持体220は、前記キャリヤー210と前記固定体230との間に設置される。好ましくは、前記透過型電子顕微鏡グリッド20は、外径が3ミリメートルであり、厚さが3マイクロメートル〜20マイクロメートルである円形のシートである。
図5及び図6を参照すると、本実施形態は、透過型電子顕微鏡グリッド30を提供する。該透過型電子顕微鏡グリッド30は、キャリヤー310と、カーボンナノチューブ支持体320と、固定体330と、を含む。前記カーボンナノチューブ支持体320は、前記キャリヤー310と前記固定体330との間に設置される。好ましくは、前記透過型電子顕微鏡グリッド30の外径は、3ミリメートルであり、厚さが3マイクロメートル〜20マイクロメートルである円形のシートである。
図7と図8を参照すると、本実施形態は、透過型電子顕微鏡グリッド40を提供する。該透過型電子顕微鏡グリッド40は、キャリヤー410と、カーボンナノチューブ支持体420と、固定体430と、を含む。前記カーボンナノチューブ支持体420は、前記キャリヤー410と前記固定体430との間に設置される。好ましくは、前記透過型電子顕微鏡グリッド40の外径が3ミリメートルであり、厚さが3マイクロメートル〜20マイクロメートルである円形のシートである。
図9と図10を参照すると、本実施形態は、透過型電子顕微鏡グリッド50を提供する。該透過型電子顕微鏡グリッド50は、キャリヤー510と、カーボンナノチューブ支持体520と、固定体530と、を含む。前記カーボンナノチューブ支持体520は、前記キャリヤー510と前記固定体530との間に設置される。好ましくは、前記透過型電子顕微鏡グリッド50の外径が3ミリメートルであり、厚さが3マイクロメートル〜20マイクロメートルである円形のシートである。
図12及び図13を参照すると、本実施形態は、透過型電子顕微鏡グリッド60を提供する。該透過型電子顕微鏡グリッド60は、キャリヤー610と、カーボンナノチューブ支持体620と、固定体630と、を含む。前記カーボンナノチューブ支持体620は、前記キャリヤー610と前記固定体630との間に設置される。好ましくは、前記透過型電子顕微鏡グリッド60の外径が3ミリメートルであり、厚さが3マイクロメートル〜20マイクロメートルである円形のシートである。
110、210、310、410、510、610 キャリヤー
111、211、511、611 第一円形のシート本体
112、212、312、412、512、612 第一リング
114、314、514、614 第一網状構造
116、216、316、416、516、616 第一スルーホール
118、218、318、418、518 スリット
120、220、320、420、520、620 カーボンナノチューブ支持体
130、230、330、430、530、630 固定体
131、231、531、631 第二円形のシート本体
132、232、332、432、532、632 第二リング
134、534、634 第二網状構造
136、236、336、436、536、636 第二スルーホール
138、238、338、438、538 凸部
150、250 第三スルーホール
214 第一帯状構造
234 第二帯状構造
522、622 カーボンナノチューブ構造体
550 折り畳み部
560、660 容器
562、662 有機溶剤
618 第一表面
638 第二表面
640 溶接部品
Claims (3)
- 少なくとも一つの第一スルーホールと二つのスリットとを有するキャリヤー、及び少なくとも一つの第二スルーホールと二つの凸部とを有する固定体を提供する第一ステップと、
カーボンナノチューブ支持体を提供し、該カーボンナノチューブ支持体を前記第一スルーホールに被覆する第二ステップと、
前記固定体及び前記キャリヤーを積層して、前記カーボンナノチューブ支持体を前記キャリヤーと前記固定体との間で前記キャリヤーと前記固定体とによって固定させる第三ステップと、
を含み、
前記第三ステップにおいて、前記キャリヤーと前記固定体とは、前記二つの凸部をそれぞれ前記二つのスリットに挿入することによって、固定し、
前記カーボンナノチューブ支持体は、少なくとも一枚のカーボンナノチューブフィルム、または少なくとも一つのカーボンナノチューブワイヤからなるカーボンナノチューブ網状構造体であることを特徴とする透過型電子顕微鏡グリッドの製造方法。 - 前記キャリヤーと前記固定体とを積層して設置する場合、前記キャリヤーの第一スルーホールと前記固定体の第二スルーホールとの少なくとも一部を重ね合わせることを特徴とする請求項1に記載の透過型電子顕微鏡グリッドの製造方法。
- それぞれ少なくとも一つの第一スルーホールと二つのスリットとを有する複数のキャリヤーを提供し、該複数のキャリヤーを、間隔を置いて基板の表面に設置する第一ステップと、
カーボンナノチューブ構造体を提供し、該カーボンナノチューブ構造体を複数の前記キャリヤーの第一スルーホールに被覆する第二ステップと、
それぞれが少なくとも一つの第二スルーホールと二つの凸部とを有する複数の固定体を提供し、各々の固定体をそれぞれ前記キャリヤーに設置し、前記カーボンナノチューブ構造体を複数の前記キャリヤーと複数の前記固定体との間で前記キャリヤーと前記固定体とによって固定させる第三ステップと、
隣接した前記キャリヤーの間の隙間の前記カーボンナノチューブ構造体を切断し、複数の透過型電子顕微鏡グリッドを形成する第四ステップと、
を含み、
前記第三ステップにおいて、それぞれ対応する前記キャリヤーと前記固定体とは、前記二つの凸部をそれぞれ前記二つのスリットに挿入することによって、固定し、
前記カーボンナノチューブ支持体は、少なくとも一枚のカーボンナノチューブフィルム、または少なくとも一つのカーボンナノチューブワイヤからなるカーボンナノチューブ網状構造体であることを特徴とする複数の透過型電子顕微鏡グリッドの製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010101468364A CN101887829B (zh) | 2010-04-14 | 2010-04-14 | 透射电镜微栅的制备方法 |
CN201010146836.4 | 2010-04-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011228285A JP2011228285A (ja) | 2011-11-10 |
JP5622632B2 true JP5622632B2 (ja) | 2014-11-12 |
Family
ID=43073685
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011067648A Active JP5622632B2 (ja) | 2010-04-14 | 2011-03-25 | 透過型電子顕微鏡グリッドの製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8387227B2 (ja) |
JP (1) | JP5622632B2 (ja) |
CN (1) | CN101887829B (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101276724B (zh) * | 2007-03-30 | 2011-06-22 | 北京富纳特创新科技有限公司 | 透射电镜微栅及其制备方法 |
CN102148123B (zh) * | 2010-02-08 | 2012-12-19 | 北京富纳特创新科技有限公司 | 透射电镜微栅及其制备方法 |
CN101866805B (zh) * | 2010-04-14 | 2012-03-14 | 北京富纳特创新科技有限公司 | 透射电镜微栅的制备方法 |
CN102452647B (zh) * | 2010-10-27 | 2013-06-19 | 北京富纳特创新科技有限公司 | 碳纳米管膜承载结构及其使用方法 |
CN102737935B (zh) * | 2011-04-14 | 2015-08-26 | 清华大学 | 透射电镜微栅 |
JP2014002123A (ja) * | 2012-06-21 | 2014-01-09 | Nitto Denko Corp | 液滴の切削方法および液滴断面の分析方法 |
US9449785B2 (en) | 2013-11-11 | 2016-09-20 | Howard Hughes Medical Institute | Workpiece transport and positioning apparatus |
CN105185674B (zh) * | 2014-06-17 | 2017-05-17 | 清华大学 | 透射电镜微栅的制备方法 |
CN109971373B (zh) * | 2017-12-28 | 2021-01-26 | 清华大学 | 一种粘结方法 |
CN113327229B (zh) * | 2021-05-27 | 2023-09-22 | 扬州大学 | 一种快速定位像点网格的方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1064468A (ja) * | 1996-08-21 | 1998-03-06 | Jeol Ltd | 試料ホルダおよび試料回り止め部材 |
JP2005529341A (ja) * | 2002-06-05 | 2005-09-29 | クアントミックス・リミテッド | サンプルを含む流体のsem検査のための方法 |
JP2004045359A (ja) * | 2002-07-08 | 2004-02-12 | Sony Corp | 透過型電子顕微鏡用グリッドおよびグリッドホルダー |
JP2006244742A (ja) * | 2005-03-01 | 2006-09-14 | Seiko Epson Corp | 電子顕微鏡試料支持用マイクログリッド及び電子顕微鏡試料の作製方法 |
JP2007317566A (ja) * | 2006-05-26 | 2007-12-06 | Fuji Electric Holdings Co Ltd | 透過電子顕微鏡用メッシュ |
JP2008241647A (ja) * | 2007-03-29 | 2008-10-09 | Seiko Epson Corp | マイクログリッドの製造方法 |
CN101276724B (zh) * | 2007-03-30 | 2011-06-22 | 北京富纳特创新科技有限公司 | 透射电镜微栅及其制备方法 |
CN101609771B (zh) | 2008-06-20 | 2010-12-08 | 清华大学 | 透射电镜微栅的制备方法 |
CN102194623B (zh) * | 2010-03-17 | 2013-11-20 | 清华大学 | 透射电镜微栅的制备方法 |
-
2010
- 2010-04-14 CN CN2010101468364A patent/CN101887829B/zh active Active
- 2010-11-11 US US12/944,176 patent/US8387227B2/en active Active
-
2011
- 2011-03-25 JP JP2011067648A patent/JP5622632B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
CN101887829B (zh) | 2013-03-13 |
CN101887829A (zh) | 2010-11-17 |
JP2011228285A (ja) | 2011-11-10 |
US8387227B2 (en) | 2013-03-05 |
US20110253669A1 (en) | 2011-10-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5622631B2 (ja) | 透過型電子顕微鏡グリッド | |
JP5622632B2 (ja) | 透過型電子顕微鏡グリッドの製造方法 | |
JP5426598B2 (ja) | 透過型電子顕微鏡グリッドの製造方法 | |
US7745302B2 (en) | Method for making transmission electron microscope grid | |
US9184023B2 (en) | Transmission electron microscope micro-grid | |
JP5559748B2 (ja) | 透過型電子顕微鏡グリッド及びその製造方法 | |
US8455842B2 (en) | Carbon nanotube film composite structure, transmission electron microscope grid using the same, and method for making the same | |
US8404070B2 (en) | Carbon nanotube film composite structure, transmission electron microscope grid using the same, and method for making the same | |
JP5180266B2 (ja) | カーボンナノチューブ線状構造体の製造方法 | |
JP2010281025A (ja) | カーボンナノチューブ線状構造体の製造方法 | |
US8650739B2 (en) | Method for manufacturing transmission electron microscope micro-grid | |
US8148685B2 (en) | Transmission electron microscope micro-grid | |
JP2011037703A (ja) | カーボンナノチューブフィルムの製造方法 | |
TWI410997B (zh) | 透射電鏡微柵 | |
TWI406808B (zh) | 奈米碳管結構之製備方法 | |
TWI410999B (zh) | 透射電鏡微柵 | |
US8551392B2 (en) | Method for manufacturing transmission electron microscope micro-grid | |
TWI410998B (zh) | 透射電鏡微柵的製備方法 | |
TWI428955B (zh) | 透射電鏡微柵的製備方法 | |
TWI407479B (zh) | 透射電鏡微柵 | |
TWI416587B (zh) | 透射電鏡微柵的製備方法 | |
TW201135798A (en) | Method for making transmission electron microscope grid | |
Stuke et al. | Direct-writing of three-dimensional structures using laser-based processes |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130118 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130122 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130419 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130827 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131126 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20140217 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140617 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20140624 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140825 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140922 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5622632 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |