JP5618681B2 - ホルダ部とデバイス部を有する構造体及びその固定方法 - Google Patents

ホルダ部とデバイス部を有する構造体及びその固定方法 Download PDF

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Publication number
JP5618681B2
JP5618681B2 JP2010173491A JP2010173491A JP5618681B2 JP 5618681 B2 JP5618681 B2 JP 5618681B2 JP 2010173491 A JP2010173491 A JP 2010173491A JP 2010173491 A JP2010173491 A JP 2010173491A JP 5618681 B2 JP5618681 B2 JP 5618681B2
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JP
Japan
Prior art keywords
holder
portions
adhesive
fixing
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010173491A
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English (en)
Japanese (ja)
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JP2012030333A (ja
JP2012030333A5 (enExample
Inventor
加藤　貴久
貴久 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2010173491A priority Critical patent/JP5618681B2/ja
Priority to US13/193,395 priority patent/US20120024453A1/en
Publication of JP2012030333A publication Critical patent/JP2012030333A/ja
Publication of JP2012030333A5 publication Critical patent/JP2012030333A5/ja
Application granted granted Critical
Publication of JP5618681B2 publication Critical patent/JP5618681B2/ja
Expired - Fee Related legal-status Critical Current
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C3/00—Assembling of devices or systems from individually processed components
    • B81C3/002—Aligning microparts
    • B81C3/005—Passive alignment, i.e. without a detection of the position of the elements or using only structural arrangements or thermodynamic forces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/40—Applying molten plastics, e.g. hot melt
    • B29C65/42—Applying molten plastics, e.g. hot melt between pre-assembled parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/05—Aligning components to be assembled
    • B81C2203/052—Passive alignment, i.e. using only structural arrangements or thermodynamic forces without an internal or external apparatus
    • B81C2203/054—Passive alignment, i.e. using only structural arrangements or thermodynamic forces without an internal or external apparatus using structural alignment aids, e.g. spacers, interposers, male/female parts, rods or balls
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/17—Surface bonding means and/or assemblymeans with work feeding or handling means

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
JP2010173491A 2010-08-02 2010-08-02 ホルダ部とデバイス部を有する構造体及びその固定方法 Expired - Fee Related JP5618681B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2010173491A JP5618681B2 (ja) 2010-08-02 2010-08-02 ホルダ部とデバイス部を有する構造体及びその固定方法
US13/193,395 US20120024453A1 (en) 2010-08-02 2011-07-28 Structure including holder unit and device unit and fixing method for the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010173491A JP5618681B2 (ja) 2010-08-02 2010-08-02 ホルダ部とデバイス部を有する構造体及びその固定方法

Publications (3)

Publication Number Publication Date
JP2012030333A JP2012030333A (ja) 2012-02-16
JP2012030333A5 JP2012030333A5 (enExample) 2013-09-12
JP5618681B2 true JP5618681B2 (ja) 2014-11-05

Family

ID=45525503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010173491A Expired - Fee Related JP5618681B2 (ja) 2010-08-02 2010-08-02 ホルダ部とデバイス部を有する構造体及びその固定方法

Country Status (2)

Country Link
US (1) US20120024453A1 (enExample)
JP (1) JP5618681B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6945838B2 (ja) * 2016-10-27 2021-10-06 国立研究開発法人産業技術総合研究所 中空構造体の製造方法
KR102088261B1 (ko) 2019-12-20 2020-03-12 고려오트론(주) 수직 쉬프트 방식의 정전 구동기 및 그를 갖는 광 스캐너
US20210144483A1 (en) * 2019-11-07 2021-05-13 Innovative Interface Laboratory Corp. Single-axis actuator, acoustic wave generator and its array

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6487907B1 (en) * 1999-07-08 2002-12-03 California Institute Of Technology Microgyroscope with integrated vibratory element
US6809529B2 (en) * 2001-08-10 2004-10-26 Wacoh Corporation Force detector
JP2003315698A (ja) * 2002-04-23 2003-11-06 Matsushita Electric Works Ltd 光スイッチ
JP2005004077A (ja) * 2003-06-13 2005-01-06 Ricoh Co Ltd 光変調装置およびその駆動方法
FR2864526B1 (fr) * 2003-12-26 2006-10-13 Commissariat Energie Atomique Dispositif d'actionnement electrostatique
US7372348B2 (en) * 2004-08-20 2008-05-13 Palo Alto Research Center Incorporated Stressed material and shape memory material MEMS devices and methods for manufacturing
DE102006040343A1 (de) * 2006-08-29 2008-03-06 Robert Bosch Gmbh Verfahren zur Herstellung von Bauteilen zur Steuerung eines Fluidflusses sowie Bauteile, hergestellt nach diesem Verfahren
US7851876B2 (en) * 2006-10-20 2010-12-14 Hewlett-Packard Development Company, L.P. Micro electro mechanical system
JP2010067587A (ja) * 2008-08-13 2010-03-25 Murata Mfg Co Ltd Ｍｅｍｓスイッチ素子およびその製造方法
JP2010156574A (ja) * 2008-12-26 2010-07-15 Yamaha Corp Ｍｅｍｓおよびｍｅｍｓの製造方法

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Publication number Publication date
JP2012030333A (ja) 2012-02-16
US20120024453A1 (en) 2012-02-02

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