JP2012030333A5 - - Google Patents

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Publication number
JP2012030333A5
JP2012030333A5 JP2010173491A JP2010173491A JP2012030333A5 JP 2012030333 A5 JP2012030333 A5 JP 2012030333A5 JP 2010173491 A JP2010173491 A JP 2010173491A JP 2010173491 A JP2010173491 A JP 2010173491A JP 2012030333 A5 JP2012030333 A5 JP 2012030333A5
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JP
Japan
Prior art keywords
support
holder
adhesive
unit
elastic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010173491A
Other languages
English (en)
Japanese (ja)
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JP2012030333A (ja
JP5618681B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010173491A priority Critical patent/JP5618681B2/ja
Priority claimed from JP2010173491A external-priority patent/JP5618681B2/ja
Priority to US13/193,395 priority patent/US20120024453A1/en
Publication of JP2012030333A publication Critical patent/JP2012030333A/ja
Publication of JP2012030333A5 publication Critical patent/JP2012030333A5/ja
Application granted granted Critical
Publication of JP5618681B2 publication Critical patent/JP5618681B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2010173491A 2010-08-02 2010-08-02 ホルダ部とデバイス部を有する構造体及びその固定方法 Expired - Fee Related JP5618681B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2010173491A JP5618681B2 (ja) 2010-08-02 2010-08-02 ホルダ部とデバイス部を有する構造体及びその固定方法
US13/193,395 US20120024453A1 (en) 2010-08-02 2011-07-28 Structure including holder unit and device unit and fixing method for the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010173491A JP5618681B2 (ja) 2010-08-02 2010-08-02 ホルダ部とデバイス部を有する構造体及びその固定方法

Publications (3)

Publication Number Publication Date
JP2012030333A JP2012030333A (ja) 2012-02-16
JP2012030333A5 true JP2012030333A5 (enExample) 2013-09-12
JP5618681B2 JP5618681B2 (ja) 2014-11-05

Family

ID=45525503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010173491A Expired - Fee Related JP5618681B2 (ja) 2010-08-02 2010-08-02 ホルダ部とデバイス部を有する構造体及びその固定方法

Country Status (2)

Country Link
US (1) US20120024453A1 (enExample)
JP (1) JP5618681B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6945838B2 (ja) * 2016-10-27 2021-10-06 国立研究開発法人産業技術総合研究所 中空構造体の製造方法
KR102088261B1 (ko) * 2019-12-20 2020-03-12 고려오트론(주) 수직 쉬프트 방식의 정전 구동기 및 그를 갖는 광 스캐너
US20210144483A1 (en) * 2019-11-07 2021-05-13 Innovative Interface Laboratory Corp. Single-axis actuator, acoustic wave generator and its array

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6487907B1 (en) * 1999-07-08 2002-12-03 California Institute Of Technology Microgyroscope with integrated vibratory element
US6809529B2 (en) * 2001-08-10 2004-10-26 Wacoh Corporation Force detector
JP2003315698A (ja) * 2002-04-23 2003-11-06 Matsushita Electric Works Ltd 光スイッチ
JP2005004077A (ja) * 2003-06-13 2005-01-06 Ricoh Co Ltd 光変調装置およびその駆動方法
FR2864526B1 (fr) * 2003-12-26 2006-10-13 Commissariat Energie Atomique Dispositif d'actionnement electrostatique
US7372348B2 (en) * 2004-08-20 2008-05-13 Palo Alto Research Center Incorporated Stressed material and shape memory material MEMS devices and methods for manufacturing
DE102006040343A1 (de) * 2006-08-29 2008-03-06 Robert Bosch Gmbh Verfahren zur Herstellung von Bauteilen zur Steuerung eines Fluidflusses sowie Bauteile, hergestellt nach diesem Verfahren
US7851876B2 (en) * 2006-10-20 2010-12-14 Hewlett-Packard Development Company, L.P. Micro electro mechanical system
JP2010067587A (ja) * 2008-08-13 2010-03-25 Murata Mfg Co Ltd Ｍｅｍｓスイッチ素子およびその製造方法
JP2010156574A (ja) * 2008-12-26 2010-07-15 Yamaha Corp Ｍｅｍｓおよびｍｅｍｓの製造方法

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