JP5599034B2 - 構造体の製造方法及び液体吐出ヘッドの製造方法 - Google Patents

構造体の製造方法及び液体吐出ヘッドの製造方法 Download PDF

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Publication number
JP5599034B2
JP5599034B2 JP2010081461A JP2010081461A JP5599034B2 JP 5599034 B2 JP5599034 B2 JP 5599034B2 JP 2010081461 A JP2010081461 A JP 2010081461A JP 2010081461 A JP2010081461 A JP 2010081461A JP 5599034 B2 JP5599034 B2 JP 5599034B2
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JP
Japan
Prior art keywords
layer
mold
manufacturing
flow path
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010081461A
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English (en)
Japanese (ja)
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JP2010253945A5 (https=
JP2010253945A (ja
Inventor
悦子 檜野
昭二 芝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2010081461A priority Critical patent/JP5599034B2/ja
Publication of JP2010253945A publication Critical patent/JP2010253945A/ja
Publication of JP2010253945A5 publication Critical patent/JP2010253945A5/ja
Application granted granted Critical
Publication of JP5599034B2 publication Critical patent/JP5599034B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2010081461A 2009-04-01 2010-03-31 構造体の製造方法及び液体吐出ヘッドの製造方法 Expired - Fee Related JP5599034B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010081461A JP5599034B2 (ja) 2009-04-01 2010-03-31 構造体の製造方法及び液体吐出ヘッドの製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009088966 2009-04-01
JP2009088966 2009-04-01
JP2010081461A JP5599034B2 (ja) 2009-04-01 2010-03-31 構造体の製造方法及び液体吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2010253945A JP2010253945A (ja) 2010-11-11
JP2010253945A5 JP2010253945A5 (https=) 2013-05-09
JP5599034B2 true JP5599034B2 (ja) 2014-10-01

Family

ID=42825324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010081461A Expired - Fee Related JP5599034B2 (ja) 2009-04-01 2010-03-31 構造体の製造方法及び液体吐出ヘッドの製造方法

Country Status (2)

Country Link
US (1) US8409454B2 (https=)
JP (1) JP5599034B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9919526B2 (en) 2013-11-29 2018-03-20 Canon Kabushiki Kaisha Method for manufacturing liquid discharge head
JP6632225B2 (ja) * 2015-06-05 2020-01-22 キヤノン株式会社 吐出口面の撥水処理方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04312856A (ja) * 1991-04-10 1992-11-04 Canon Inc 液体噴射記録ヘッド、その製造方法、及び同ヘッドを備えた記録装置
JPH05124208A (ja) * 1991-11-07 1993-05-21 Canon Inc 液体噴射記録ヘツドの製造方法および液体噴射記録ヘツド
EP0612621B1 (en) 1992-09-08 1997-12-17 Canon Kabushiki Kaisha Improved liquid jet printing head, and liquid jet printing apparatus provided with liquid jet printing head
JP3143307B2 (ja) 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
EP0715957B1 (en) 1994-12-05 1999-05-26 Canon Kabushiki Kaisha Process for the production of an ink jet head
US6123863A (en) 1995-12-22 2000-09-26 Canon Kabushiki Kaisha Process for producing liquid-jet recording head, liquid-jet recording head produced thereby, and recording apparatus equipped with recording head
US7758158B2 (en) 2003-07-22 2010-07-20 Canon Kabushiki Kaisha Ink jet head and its manufacture method
AU2003304346A1 (en) 2003-07-22 2005-02-04 Canon Kabushiki Kaisha Ink jet head and its manufacture method
JP4447974B2 (ja) 2004-06-28 2010-04-07 キヤノン株式会社 インクジェットヘッドの製造方法
CN1968815B (zh) 2004-06-28 2013-05-01 佳能株式会社 排液头制造方法，和使用该方法得到的排液头
US7629111B2 (en) 2004-06-28 2009-12-08 Canon Kabushiki Kaisha Liquid discharge head manufacturing method, and liquid discharge head obtained using this method
US7117597B2 (en) * 2004-08-06 2006-10-10 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head
JP2006137065A (ja) * 2004-11-11 2006-06-01 Sony Corp 液体吐出ヘッドの製造方法
JP4459037B2 (ja) * 2004-12-01 2010-04-28 キヤノン株式会社 液体吐出ヘッド
ATE485538T1 (de) 2005-01-21 2010-11-15 Canon Kk Tintenstrahlaufzeichnungskopf, herstellungsverfahren dafür und zusammensetzung für tintenstrahlaufzeichnungskopf
JP4693496B2 (ja) 2005-05-24 2011-06-01 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
JP2007076188A (ja) * 2005-09-14 2007-03-29 Fuji Xerox Co Ltd 液滴吐出ヘッドの製造方法及び液滴吐出ヘッド
US7998874B2 (en) * 2006-03-06 2011-08-16 Samsung Electronics Co., Ltd. Method for forming hard mask patterns having a fine pitch and method for forming a semiconductor device using the same
US20080292993A1 (en) * 2006-12-22 2008-11-27 Canon Kabushiki Kaisha Photo-cationic polymerizable epoxy resin composition, liquid discharge head, and manufacturing method thereof
JP5043548B2 (ja) 2007-07-27 2012-10-10 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US20090162797A1 (en) 2007-12-19 2009-06-25 Canon Kabushiki Kaisha Method of manufacturing liquid ejection head

Also Published As

Publication number Publication date
US8409454B2 (en) 2013-04-02
US20100252529A1 (en) 2010-10-07
JP2010253945A (ja) 2010-11-11

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