JP2010253945A5 - - Google Patents
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- Publication number
- JP2010253945A5 JP2010253945A5 JP2010081461A JP2010081461A JP2010253945A5 JP 2010253945 A5 JP2010253945 A5 JP 2010253945A5 JP 2010081461 A JP2010081461 A JP 2010081461A JP 2010081461 A JP2010081461 A JP 2010081461A JP 2010253945 A5 JP2010253945 A5 JP 2010253945A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- mold
- manufacturing
- structure according
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims 19
- 238000004519 manufacturing process Methods 0.000 claims 11
- 238000005530 etching Methods 0.000 claims 4
- 239000007788 liquid Substances 0.000 claims 4
- 238000000034 method Methods 0.000 claims 4
- 239000011347 resin Substances 0.000 claims 3
- 229920005989 resin Polymers 0.000 claims 3
- 239000000243 solution Substances 0.000 claims 3
- 239000011247 coating layer Substances 0.000 claims 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000004642 Polyimide Substances 0.000 claims 1
- 239000012670 alkaline solution Substances 0.000 claims 1
- 125000003118 aryl group Chemical group 0.000 claims 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims 1
- 125000000962 organic group Chemical group 0.000 claims 1
- 239000003960 organic solvent Substances 0.000 claims 1
- 229920001721 polyimide Polymers 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010081461A JP5599034B2 (ja) | 2009-04-01 | 2010-03-31 | 構造体の製造方法及び液体吐出ヘッドの製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009088966 | 2009-04-01 | ||
| JP2009088966 | 2009-04-01 | ||
| JP2010081461A JP5599034B2 (ja) | 2009-04-01 | 2010-03-31 | 構造体の製造方法及び液体吐出ヘッドの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010253945A JP2010253945A (ja) | 2010-11-11 |
| JP2010253945A5 true JP2010253945A5 (https=) | 2013-05-09 |
| JP5599034B2 JP5599034B2 (ja) | 2014-10-01 |
Family
ID=42825324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010081461A Expired - Fee Related JP5599034B2 (ja) | 2009-04-01 | 2010-03-31 | 構造体の製造方法及び液体吐出ヘッドの製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US8409454B2 (https=) |
| JP (1) | JP5599034B2 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9919526B2 (en) | 2013-11-29 | 2018-03-20 | Canon Kabushiki Kaisha | Method for manufacturing liquid discharge head |
| JP6632225B2 (ja) * | 2015-06-05 | 2020-01-22 | キヤノン株式会社 | 吐出口面の撥水処理方法 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04312856A (ja) * | 1991-04-10 | 1992-11-04 | Canon Inc | 液体噴射記録ヘッド、その製造方法、及び同ヘッドを備えた記録装置 |
| JPH05124208A (ja) * | 1991-11-07 | 1993-05-21 | Canon Inc | 液体噴射記録ヘツドの製造方法および液体噴射記録ヘツド |
| EP0612621B1 (en) | 1992-09-08 | 1997-12-17 | Canon Kabushiki Kaisha | Improved liquid jet printing head, and liquid jet printing apparatus provided with liquid jet printing head |
| JP3143307B2 (ja) | 1993-02-03 | 2001-03-07 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
| EP0715957B1 (en) | 1994-12-05 | 1999-05-26 | Canon Kabushiki Kaisha | Process for the production of an ink jet head |
| US6123863A (en) | 1995-12-22 | 2000-09-26 | Canon Kabushiki Kaisha | Process for producing liquid-jet recording head, liquid-jet recording head produced thereby, and recording apparatus equipped with recording head |
| US7758158B2 (en) | 2003-07-22 | 2010-07-20 | Canon Kabushiki Kaisha | Ink jet head and its manufacture method |
| AU2003304346A1 (en) | 2003-07-22 | 2005-02-04 | Canon Kabushiki Kaisha | Ink jet head and its manufacture method |
| JP4447974B2 (ja) | 2004-06-28 | 2010-04-07 | キヤノン株式会社 | インクジェットヘッドの製造方法 |
| CN1968815B (zh) | 2004-06-28 | 2013-05-01 | 佳能株式会社 | 排液头制造方法，和使用该方法得到的排液头 |
| US7629111B2 (en) | 2004-06-28 | 2009-12-08 | Canon Kabushiki Kaisha | Liquid discharge head manufacturing method, and liquid discharge head obtained using this method |
| US7117597B2 (en) * | 2004-08-06 | 2006-10-10 | Canon Kabushiki Kaisha | Method of manufacturing liquid discharge head |
| JP2006137065A (ja) * | 2004-11-11 | 2006-06-01 | Sony Corp | 液体吐出ヘッドの製造方法 |
| JP4459037B2 (ja) * | 2004-12-01 | 2010-04-28 | キヤノン株式会社 | 液体吐出ヘッド |
| ATE485538T1 (de) | 2005-01-21 | 2010-11-15 | Canon Kk | Tintenstrahlaufzeichnungskopf, herstellungsverfahren dafür und zusammensetzung für tintenstrahlaufzeichnungskopf |
| JP4693496B2 (ja) | 2005-05-24 | 2011-06-01 | キヤノン株式会社 | 液体吐出ヘッドおよびその製造方法 |
| JP2007076188A (ja) * | 2005-09-14 | 2007-03-29 | Fuji Xerox Co Ltd | 液滴吐出ヘッドの製造方法及び液滴吐出ヘッド |
| US7998874B2 (en) * | 2006-03-06 | 2011-08-16 | Samsung Electronics Co., Ltd. | Method for forming hard mask patterns having a fine pitch and method for forming a semiconductor device using the same |
| US20080292993A1 (en) * | 2006-12-22 | 2008-11-27 | Canon Kabushiki Kaisha | Photo-cationic polymerizable epoxy resin composition, liquid discharge head, and manufacturing method thereof |
| JP5043548B2 (ja) | 2007-07-27 | 2012-10-10 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
| US20090162797A1 (en) | 2007-12-19 | 2009-06-25 | Canon Kabushiki Kaisha | Method of manufacturing liquid ejection head |
-
2010
- 2010-03-25 US US12/731,563 patent/US8409454B2/en not_active Expired - Fee Related
- 2010-03-31 JP JP2010081461A patent/JP5599034B2/ja not_active Expired - Fee Related
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