JP5596804B2 - 高流量真空バブラー容器のためのスプラッシュガード - Google Patents

高流量真空バブラー容器のためのスプラッシュガード Download PDF

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Publication number
JP5596804B2
JP5596804B2 JP2013005439A JP2013005439A JP5596804B2 JP 5596804 B2 JP5596804 B2 JP 5596804B2 JP 2013005439 A JP2013005439 A JP 2013005439A JP 2013005439 A JP2013005439 A JP 2013005439A JP 5596804 B2 JP5596804 B2 JP 5596804B2
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Japan
Prior art keywords
container
baffle disk
outlet
liquid
deflection
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JP2013005439A
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English (en)
Japanese (ja)
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JP2013144846A (ja
Inventor
マイケル バーチャー チャールズ
アンドリュー ステイドル トーマス
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Air Products and Chemicals Inc
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Air Products and Chemicals Inc
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Priority claimed from US13/350,989 external-priority patent/US8944420B2/en
Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc
Publication of JP2013144846A publication Critical patent/JP2013144846A/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/02—Feed or outlet devices; Feed or outlet control devices for feeding measured, i.e. prescribed quantities of reagents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/008—Feed or outlet control devices

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP2013005439A 2012-01-16 2013-01-16 高流量真空バブラー容器のためのスプラッシュガード Active JP5596804B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/350,989 2012-01-16
US13/350,989 US8944420B2 (en) 2009-03-19 2012-01-16 Splashguard for high flow vacuum bubbler vessel

Publications (2)

Publication Number Publication Date
JP2013144846A JP2013144846A (ja) 2013-07-25
JP5596804B2 true JP5596804B2 (ja) 2014-09-24

Family

ID=48753134

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JP2013005439A Active JP5596804B2 (ja) 2012-01-16 2013-01-16 高流量真空バブラー容器のためのスプラッシュガード

Country Status (4)

Country Link
JP (1) JP5596804B2 (ko)
KR (1) KR20130084265A (ko)
CN (1) CN103205732A (ko)
TW (1) TWI480418B (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101585054B1 (ko) * 2014-05-09 2016-01-14 한국생산기술연구원 액상 전구체 공급장치
US10443128B2 (en) * 2015-04-18 2019-10-15 Versum Materials Us, Llc Vessel and method for delivery of precursor materials
US11926894B2 (en) * 2016-09-30 2024-03-12 Asm Ip Holding B.V. Reactant vaporizer and related systems and methods

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2742886A (en) * 1954-11-01 1956-04-24 Solomon P Scholl Fuel generator for internal combustion engines
JPS60170965U (ja) * 1984-04-20 1985-11-13 日本電池株式会社 蓄電池液栓
JPH0644027Y2 (ja) * 1989-06-02 1994-11-14 古河電池株式会社 蓄電池用液口栓
US5199963A (en) * 1992-07-30 1993-04-06 Scarp Arcoline J Dual filtering vacuum system
JPH06196419A (ja) * 1992-12-24 1994-07-15 Canon Inc 化学気相堆積装置及びそれによる半導体装置の製造方法
JPH09234320A (ja) * 1996-03-01 1997-09-09 Bio Giken Kogyo:Kk 排ガスの処理方法及びその装置
JPH1064751A (ja) * 1996-08-14 1998-03-06 Nissin Electric Co Ltd ガス絶縁直流用コンデンサ
JP3615895B2 (ja) * 1997-02-13 2005-02-02 松下電器産業株式会社 鉛蓄電池用液口栓
US7186385B2 (en) * 2002-07-17 2007-03-06 Applied Materials, Inc. Apparatus for providing gas to a processing chamber
JP2005197148A (ja) * 2004-01-09 2005-07-21 Yuasa Corp 鉛蓄電池用液口栓および鉛蓄電池
US8708320B2 (en) * 2006-12-15 2014-04-29 Air Products And Chemicals, Inc. Splashguard and inlet diffuser for high vacuum, high flow bubbler vessel
US8162296B2 (en) * 2009-03-19 2012-04-24 Air Products And Chemicals, Inc. Splashguard for high flow vacuum bubbler vessel

Also Published As

Publication number Publication date
JP2013144846A (ja) 2013-07-25
TWI480418B (zh) 2015-04-11
CN103205732A (zh) 2013-07-17
KR20130084265A (ko) 2013-07-24
TW201331410A (zh) 2013-08-01

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