TWI480418B - 用於高流量真空氣泡器容器的防濺器 - Google Patents

用於高流量真空氣泡器容器的防濺器 Download PDF

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Publication number
TWI480418B
TWI480418B TW102101206A TW102101206A TWI480418B TW I480418 B TWI480418 B TW I480418B TW 102101206 A TW102101206 A TW 102101206A TW 102101206 A TW102101206 A TW 102101206A TW I480418 B TWI480418 B TW I480418B
Authority
TW
Taiwan
Prior art keywords
reservoir
outlet
liquid
edge
deflecting projection
Prior art date
Application number
TW102101206A
Other languages
English (en)
Chinese (zh)
Other versions
TW201331410A (zh
Inventor
Charles Michael Birtcher
Thomas Andrew Steidl
Original Assignee
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US13/350,989 external-priority patent/US8944420B2/en
Application filed by Air Prod & Chem filed Critical Air Prod & Chem
Publication of TW201331410A publication Critical patent/TW201331410A/zh
Application granted granted Critical
Publication of TWI480418B publication Critical patent/TWI480418B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/02—Feed or outlet devices; Feed or outlet control devices for feeding measured, i.e. prescribed quantities of reagents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/008—Feed or outlet control devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
TW102101206A 2012-01-16 2013-01-11 用於高流量真空氣泡器容器的防濺器 TWI480418B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/350,989 US8944420B2 (en) 2009-03-19 2012-01-16 Splashguard for high flow vacuum bubbler vessel

Publications (2)

Publication Number Publication Date
TW201331410A TW201331410A (zh) 2013-08-01
TWI480418B true TWI480418B (zh) 2015-04-11

Family

ID=48753134

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102101206A TWI480418B (zh) 2012-01-16 2013-01-11 用於高流量真空氣泡器容器的防濺器

Country Status (4)

Country Link
JP (1) JP5596804B2 (ko)
KR (1) KR20130084265A (ko)
CN (1) CN103205732A (ko)
TW (1) TWI480418B (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101585054B1 (ko) * 2014-05-09 2016-01-14 한국생산기술연구원 액상 전구체 공급장치
US10443128B2 (en) * 2015-04-18 2019-10-15 Versum Materials Us, Llc Vessel and method for delivery of precursor materials
US11926894B2 (en) * 2016-09-30 2024-03-12 Asm Ip Holding B.V. Reactant vaporizer and related systems and methods

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2742886A (en) * 1954-11-01 1956-04-24 Solomon P Scholl Fuel generator for internal combustion engines
US5199963A (en) * 1992-07-30 1993-04-06 Scarp Arcoline J Dual filtering vacuum system

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60170965U (ja) * 1984-04-20 1985-11-13 日本電池株式会社 蓄電池液栓
JPH0644027Y2 (ja) * 1989-06-02 1994-11-14 古河電池株式会社 蓄電池用液口栓
JPH06196419A (ja) * 1992-12-24 1994-07-15 Canon Inc 化学気相堆積装置及びそれによる半導体装置の製造方法
JPH09234320A (ja) * 1996-03-01 1997-09-09 Bio Giken Kogyo:Kk 排ガスの処理方法及びその装置
JPH1064751A (ja) * 1996-08-14 1998-03-06 Nissin Electric Co Ltd ガス絶縁直流用コンデンサ
JP3615895B2 (ja) * 1997-02-13 2005-02-02 松下電器産業株式会社 鉛蓄電池用液口栓
US7186385B2 (en) * 2002-07-17 2007-03-06 Applied Materials, Inc. Apparatus for providing gas to a processing chamber
JP2005197148A (ja) * 2004-01-09 2005-07-21 Yuasa Corp 鉛蓄電池用液口栓および鉛蓄電池
US8708320B2 (en) * 2006-12-15 2014-04-29 Air Products And Chemicals, Inc. Splashguard and inlet diffuser for high vacuum, high flow bubbler vessel
US8162296B2 (en) * 2009-03-19 2012-04-24 Air Products And Chemicals, Inc. Splashguard for high flow vacuum bubbler vessel

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2742886A (en) * 1954-11-01 1956-04-24 Solomon P Scholl Fuel generator for internal combustion engines
US5199963A (en) * 1992-07-30 1993-04-06 Scarp Arcoline J Dual filtering vacuum system

Also Published As

Publication number Publication date
JP2013144846A (ja) 2013-07-25
CN103205732A (zh) 2013-07-17
KR20130084265A (ko) 2013-07-24
JP5596804B2 (ja) 2014-09-24
TW201331410A (zh) 2013-08-01

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