JP5580866B2 - 紫外光発生用ターゲット、電子線励起紫外光源、及び紫外光発生用ターゲットの製造方法 - Google Patents
紫外光発生用ターゲット、電子線励起紫外光源、及び紫外光発生用ターゲットの製造方法 Download PDFInfo
- Publication number
- JP5580866B2 JP5580866B2 JP2012233976A JP2012233976A JP5580866B2 JP 5580866 B2 JP5580866 B2 JP 5580866B2 JP 2012233976 A JP2012233976 A JP 2012233976A JP 2012233976 A JP2012233976 A JP 2012233976A JP 5580866 B2 JP5580866 B2 JP 5580866B2
- Authority
- JP
- Japan
- Prior art keywords
- ultraviolet light
- crystal
- emitting layer
- light emitting
- luag
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 63
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000013078 crystal Substances 0.000 claims description 250
- 239000000758 substrate Substances 0.000 claims description 83
- 229910052782 aluminium Inorganic materials 0.000 claims description 73
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 73
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 60
- 239000002223 garnet Substances 0.000 claims description 57
- 150000002910 rare earth metals Chemical class 0.000 claims description 57
- 239000012190 activator Substances 0.000 claims description 50
- 238000010438 heat treatment Methods 0.000 claims description 32
- 229910052594 sapphire Inorganic materials 0.000 claims description 24
- 239000010980 sapphire Substances 0.000 claims description 24
- 230000005284 excitation Effects 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 239000010453 quartz Substances 0.000 claims description 13
- 229910052746 lanthanum Inorganic materials 0.000 claims description 11
- 229910052706 scandium Inorganic materials 0.000 claims description 10
- 229910052797 bismuth Inorganic materials 0.000 claims description 7
- 239000002245 particle Substances 0.000 description 60
- 239000011230 binding agent Substances 0.000 description 22
- 238000012545 processing Methods 0.000 description 15
- 239000000463 material Substances 0.000 description 12
- 230000001678 irradiating effect Effects 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 230000007423 decrease Effects 0.000 description 9
- 238000001228 spectrum Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- 230000001133 acceleration Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 238000000605 extraction Methods 0.000 description 5
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 5
- 229910052753 mercury Inorganic materials 0.000 description 5
- 239000000020 Nitrocellulose Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000004570 mortar (masonry) Substances 0.000 description 4
- 229920001220 nitrocellulos Polymers 0.000 description 4
- 238000004659 sterilization and disinfection Methods 0.000 description 4
- 230000000844 anti-bacterial effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 230000001954 sterilising effect Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910052777 Praseodymium Inorganic materials 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000000295 emission spectrum Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- VSQYNPJPULBZKU-UHFFFAOYSA-N mercury xenon Chemical compound [Xe].[Hg] VSQYNPJPULBZKU-UHFFFAOYSA-N 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 230000036962 time dependent Effects 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004111 Potassium silicate Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- ITHZDDVSAWDQPZ-UHFFFAOYSA-L barium acetate Chemical compound [Ba+2].CC([O-])=O.CC([O-])=O ITHZDDVSAWDQPZ-UHFFFAOYSA-L 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- NNHHDJVEYQHLHG-UHFFFAOYSA-N potassium silicate Chemical compound [K+].[K+].[O-][Si]([O-])=O NNHHDJVEYQHLHG-UHFFFAOYSA-N 0.000 description 1
- 229910052913 potassium silicate Inorganic materials 0.000 description 1
- 235000019353 potassium silicate Nutrition 0.000 description 1
- PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 description 1
- 239000011034 rock crystal Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J63/00—Cathode-ray or electron-stream lamps
- H01J63/06—Lamps with luminescent screen excited by the ray or stream
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/06—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain multicolour or other optical effects
- B05D5/061—Special surface effect
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
- C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
- C09K11/77—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing rare earth metals
- C09K11/7766—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing rare earth metals containing two or more rare earth metals
- C09K11/7774—Aluminates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
- H01J9/22—Applying luminescent coatings
- H01J9/221—Applying luminescent coatings in continuous layers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K2211/00—Chemical nature of organic luminescent or tenebrescent compounds
- C09K2211/14—Macromolecular compounds
- C09K2211/1408—Carbocyclic compounds
- C09K2211/1416—Condensed systems
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Luminescent Compositions (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012233976A JP5580866B2 (ja) | 2012-10-23 | 2012-10-23 | 紫外光発生用ターゲット、電子線励起紫外光源、及び紫外光発生用ターゲットの製造方法 |
| CN201380055584.6A CN104755584B (zh) | 2012-10-23 | 2013-09-06 | 紫外光产生用靶、电子束激发紫外光源、以及紫外光产生用靶的制造方法 |
| KR1020157010429A KR20150079629A (ko) | 2012-10-23 | 2013-09-06 | 자외광 발생용 타겟, 전자선 여기 자외광원 및 자외광 발생용 타겟의 제조 방법 |
| US14/437,236 US9728393B2 (en) | 2012-10-23 | 2013-09-06 | Target for ultraviolet light generation, electron beam-excited ultraviolet light source, and production method for target for ultraviolet light generation |
| EP13848529.7A EP2913376B1 (en) | 2012-10-23 | 2013-09-06 | Target for ultraviolet light generation, electron beam-excited ultraviolet light source, and production method for target for ultraviolet light generation |
| PCT/JP2013/074127 WO2014065027A1 (ja) | 2012-10-23 | 2013-09-06 | 紫外光発生用ターゲット、電子線励起紫外光源、及び紫外光発生用ターゲットの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012233976A JP5580866B2 (ja) | 2012-10-23 | 2012-10-23 | 紫外光発生用ターゲット、電子線励起紫外光源、及び紫外光発生用ターゲットの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014084402A JP2014084402A (ja) | 2014-05-12 |
| JP2014084402A5 JP2014084402A5 (enExample) | 2014-06-19 |
| JP5580866B2 true JP5580866B2 (ja) | 2014-08-27 |
Family
ID=50544408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012233976A Expired - Fee Related JP5580866B2 (ja) | 2012-10-23 | 2012-10-23 | 紫外光発生用ターゲット、電子線励起紫外光源、及び紫外光発生用ターゲットの製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9728393B2 (enExample) |
| EP (1) | EP2913376B1 (enExample) |
| JP (1) | JP5580866B2 (enExample) |
| KR (1) | KR20150079629A (enExample) |
| CN (1) | CN104755584B (enExample) |
| WO (1) | WO2014065027A1 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102394051B1 (ko) * | 2015-06-04 | 2022-05-06 | 엘지이노텍 주식회사 | 형광체 플레이트 제조용 조성물, 형광체 플레이트 및 조명장치 |
| WO2017073641A1 (ja) | 2015-10-29 | 2017-05-04 | 独立行政法人国立高等専門学校機構 | プラズマ殺菌装置 |
| JP6141948B2 (ja) * | 2015-11-30 | 2017-06-07 | 大電株式会社 | 紫外線発光蛍光体、発光素子、及び発光装置 |
| JP6955656B2 (ja) * | 2016-02-15 | 2021-10-27 | 国立大学法人神戸大学 | 紫外発光蛍光体と紫外発光デバイス及び紫外発光蛍光体の作製方法 |
| US10355175B2 (en) | 2016-03-10 | 2019-07-16 | Panasonic Intellectual Property Management Co., Ltd. | Light emitting device |
| WO2018079661A1 (ja) * | 2016-10-28 | 2018-05-03 | 大電株式会社 | 紫外線発光蛍光体、発光素子、及び発光装置 |
| JP2019102456A (ja) * | 2017-11-30 | 2019-06-24 | ガタン インコーポレイテッドGatan Inc. | 電子顕微鏡法のための高密度高速発光体 |
| CN108194844B (zh) * | 2017-12-31 | 2022-02-25 | 上海极优威光电科技有限公司 | 一种电子束激发荧光粉的深紫外光源 |
| CN108231532A (zh) * | 2017-12-31 | 2018-06-29 | 上海极优威光电科技有限公司 | 一种电子束激发荧光粉的深紫外光源 |
| JP7236859B2 (ja) * | 2018-12-17 | 2023-03-10 | 浜松ホトニクス株式会社 | 紫外光発生用ターゲット及びその製造方法、並びに電子線励起紫外光源 |
| US11964062B2 (en) * | 2019-09-03 | 2024-04-23 | Luxhygenix Inc. | Antimicrobial device using ultraviolet light |
| WO2021073914A1 (en) * | 2019-10-14 | 2021-04-22 | Evonik Operations Gmbh | Blue to uv up-converter comprising lanthanide ions such as pr3+ activated garnet and its application for surface disinfection purposes |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4809293A (en) * | 1985-09-03 | 1989-02-28 | Spectra-Physics, Inc. | Optical component of a laser |
| US5399499A (en) * | 1994-05-13 | 1995-03-21 | Eastman Kodak Company | Method of using multiwavelength upconversion for sample element interrogation in medical diagnostic equipment |
| JP2002033080A (ja) * | 2000-07-14 | 2002-01-31 | Futaba Corp | 紫外線光源 |
| DE10129630A1 (de) * | 2001-06-20 | 2003-01-02 | Philips Corp Intellectual Pty | Niederdruckgasentladungslampe mit Leuchtstoffbeschichtung |
| JP4235748B2 (ja) * | 2002-03-18 | 2009-03-11 | 株式会社日立プラズマパテントライセンシング | 表示装置 |
| US7038370B2 (en) | 2003-03-17 | 2006-05-02 | Lumileds Lighting, U.S., Llc | Phosphor converted light emitting device |
| JP2006049284A (ja) | 2004-06-29 | 2006-02-16 | Suga Test Instr Co Ltd | 耐候光試験用ランプ |
| EP1816241A4 (en) | 2004-11-08 | 2010-04-28 | Tohoku Techno Arch Co Ltd | PR-CONTAINING CRYSTAL FOR SCINTILLATOR, MANUFACTURING METHOD, RADIATION DETECTOR AND INSPECTION APPARATUS |
| JP4931175B2 (ja) | 2005-09-14 | 2012-05-16 | 株式会社アルバック | 電子線励起発光素子用蛍光体、その作製方法、及び電子線励起発光素子 |
| EP2259286A4 (en) * | 2007-09-03 | 2011-05-11 | Nat Univ Corp Univ Kobe | OPTICAL LOW-LIGHT UPPERVIOLET SEMICONDUCTOR ARRANGEMENT |
| CN101409963B (zh) | 2007-10-09 | 2012-01-25 | 中国科学院物理研究所 | 一种用电子束泵浦晶体材料产生紫外光的装置和方法 |
| JP2009227794A (ja) * | 2008-03-21 | 2009-10-08 | Hitachi Metals Ltd | 蛍光材料及びその製造方法、シンチレータ |
| FR2930673A1 (fr) * | 2008-04-28 | 2009-10-30 | Saint Gobain | Lampe plane a emission par effet de champ et sa fabrication |
| EP2595201A4 (en) | 2010-07-14 | 2015-12-16 | Oceans King Lighting Science | METHOD OF MANUFACTURING FLUORESCENT POWDER LAYER |
| KR101997296B1 (ko) * | 2011-04-25 | 2019-07-05 | 하마마츠 포토닉스 가부시키가이샤 | 자외광 생성용 타겟, 전자선 여기 자외광원 및 자외광 생성용 타겟의 제조 방법 |
| JP6045779B2 (ja) * | 2011-09-06 | 2016-12-14 | 晶元光電股▲ふん▼有限公司 | 波長変換構造及びその製造方法並びに該波長変換構造を含む発光装置 |
| JP5580865B2 (ja) * | 2012-10-23 | 2014-08-27 | 浜松ホトニクス株式会社 | 紫外光発生用ターゲット、電子線励起紫外光源、及び紫外光発生用ターゲットの製造方法 |
-
2012
- 2012-10-23 JP JP2012233976A patent/JP5580866B2/ja not_active Expired - Fee Related
-
2013
- 2013-09-06 KR KR1020157010429A patent/KR20150079629A/ko not_active Ceased
- 2013-09-06 WO PCT/JP2013/074127 patent/WO2014065027A1/ja not_active Ceased
- 2013-09-06 US US14/437,236 patent/US9728393B2/en not_active Expired - Fee Related
- 2013-09-06 CN CN201380055584.6A patent/CN104755584B/zh not_active Expired - Fee Related
- 2013-09-06 EP EP13848529.7A patent/EP2913376B1/en not_active Not-in-force
Also Published As
| Publication number | Publication date |
|---|---|
| US20150287587A1 (en) | 2015-10-08 |
| EP2913376B1 (en) | 2017-10-04 |
| CN104755584B (zh) | 2017-03-08 |
| EP2913376A1 (en) | 2015-09-02 |
| JP2014084402A (ja) | 2014-05-12 |
| EP2913376A4 (en) | 2016-08-03 |
| WO2014065027A1 (ja) | 2014-05-01 |
| KR20150079629A (ko) | 2015-07-08 |
| CN104755584A (zh) | 2015-07-01 |
| US9728393B2 (en) | 2017-08-08 |
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