JP5580207B2 - ウェハ・スケール・パッケージおよびその製作方法、ならびに光学デバイスおよびその製作方法 - Google Patents

ウェハ・スケール・パッケージおよびその製作方法、ならびに光学デバイスおよびその製作方法 Download PDF

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Publication number
JP5580207B2
JP5580207B2 JP2010535188A JP2010535188A JP5580207B2 JP 5580207 B2 JP5580207 B2 JP 5580207B2 JP 2010535188 A JP2010535188 A JP 2010535188A JP 2010535188 A JP2010535188 A JP 2010535188A JP 5580207 B2 JP5580207 B2 JP 5580207B2
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Japan
Prior art keywords
substrates
substrate
optical
optical elements
cavity
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JP2010535188A
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English (en)
Japanese (ja)
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JP2011507219A5 (enExample
JP2011507219A (ja
Inventor
ロッシ，マルクス
ルドマン，ハートムート
ケトゥネン，ビレ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ams Sensors Singapore Pte Ltd
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Heptagon Micro Optics Pte Ltd
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Publication of JP2011507219A5 publication Critical patent/JP2011507219A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H10F39/8063—Microlenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00278—Lenticular sheets
    • B29D11/00307—Producing lens wafers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0062—Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/57—Mechanical or electrical details of cameras or camera modules specially adapted for being embedded in other devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/024—Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Lens Barrels (AREA)
  • Semiconductor Lasers (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Studio Devices (AREA)
  • Packaging Frangible Articles (AREA)
JP2010535188A 2007-11-27 2008-11-18 ウェハ・スケール・パッケージおよびその製作方法、ならびに光学デバイスおよびその製作方法 Active JP5580207B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US99045107P 2007-11-27 2007-11-27
US60/990,451 2007-11-27
PCT/CH2008/000487 WO2009067832A1 (en) 2007-11-27 2008-11-18 Encapsulated lens stack

Publications (3)

Publication Number Publication Date
JP2011507219A JP2011507219A (ja) 2011-03-03
JP2011507219A5 JP2011507219A5 (enExample) 2012-01-12
JP5580207B2 true JP5580207B2 (ja) 2014-08-27

Family

ID=40350035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010535188A Active JP5580207B2 (ja) 2007-11-27 2008-11-18 ウェハ・スケール・パッケージおよびその製作方法、ならびに光学デバイスおよびその製作方法

Country Status (7)

Country Link
US (1) US20110031510A1 (enExample)
EP (1) EP2220684A1 (enExample)
JP (1) JP5580207B2 (enExample)
KR (1) KR101575915B1 (enExample)
CN (1) CN101990711B (enExample)
TW (1) TWI502693B (enExample)
WO (1) WO2009067832A1 (enExample)

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US8828174B2 (en) 2008-08-20 2014-09-09 Heptagon Micro Optics Pte. Ltd. Method of manufacturing a plurality of optical devices
JP5352392B2 (ja) * 2009-09-14 2013-11-27 富士フイルム株式会社 ウェハレベルレンズアレイの製造方法、ウェハレベルレンズアレイ、レンズモジュール及び撮像ユニット
TWI425825B (zh) * 2009-12-31 2014-02-01 勝開科技股份有限公司 免調焦距影像感測器封裝結構
US8982269B2 (en) 2010-09-27 2015-03-17 Omnivision Technologies, Inc. Mechanical assembly for fine focus of a wafer-level camera module, and associated methods
JP2014521992A (ja) * 2011-07-19 2014-08-28 ヘプタゴン・マイクロ・オプティクス・プライベート・リミテッド 受動光学構成要素の製造方法および受動光学構成要素を備えるデバイス
CN103858230B (zh) 2011-08-10 2018-03-27 新加坡恒立私人有限公司 光电子模块和用于制造该光电子模块的方法
JP6223975B2 (ja) * 2011-08-25 2017-11-01 ヘプタゴン・マイクロ・オプティクス・プライベート・リミテッドＨｅｐｔａｇｏｎ Ｍｉｃｒｏ Ｏｐｔｉｃｓ Ｐｔｅ． Ｌｔｄ． 光学装置の、特にコンピュテーショナルカメラ用モジュールのウェハレベルの製作
CN103959125A (zh) 2011-10-05 2014-07-30 新加坡恒立私人有限公司 微光学系统及其制造方法
CN104106135B (zh) * 2011-12-22 2018-02-23 新加坡恒立私人有限公司 光电模块、尤其是闪光灯模块及其制造方法
US8791489B2 (en) * 2012-04-05 2014-07-29 Heptagon Micro Optics Pte. Ltd. Opto-electronic module
EP3396716B1 (en) * 2012-08-20 2020-10-14 Heptagon Micro Optics Pte. Ltd. Fabrication of optics wafer
US8606057B1 (en) 2012-11-02 2013-12-10 Heptagon Micro Optics Pte. Ltd. Opto-electronic modules including electrically conductive connections for integration with an electronic device
CN104937445B (zh) * 2012-12-27 2017-10-24 赫普塔冈微光有限公司 光学元件制造以及并入有所述光学元件的模块
CN103050502A (zh) * 2012-12-28 2013-04-17 格科微电子（上海）有限公司 晶圆级镜头模组阵列、阵列组合及两者的制作方法
WO2015030673A1 (en) 2013-09-02 2015-03-05 Heptagon Micro Optics Pte. Ltd. Opto-electronic module including a non-transparent separation member between a light emitting element and a light detecting element
US9921393B2 (en) * 2014-09-04 2018-03-20 Omnivision Technologies, Inc. Wafer-level methods for making apertured lenses involving sequential layering of biplanar transparent film, opaque layer, spacer wafer, and lens wafer
US11808959B2 (en) * 2020-08-11 2023-11-07 Himax Technologies Limited Optical element and wafer level optical module
WO2022189593A1 (en) * 2021-03-10 2022-09-15 Luxexcel Holding B.V. Three-dimensional optical structure, method for manufacturing a three-dimensional optical structure

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JPS6242558A (ja) * 1985-08-20 1987-02-24 Matsushita Electronics Corp 固体撮像装置
US6096155A (en) * 1996-09-27 2000-08-01 Digital Optics Corporation Method of dicing wafer level integrated multiple optical elements
US6235141B1 (en) * 1996-09-27 2001-05-22 Digital Optics Corporation Method of mass producing and packaging integrated optical subsystems
US6381072B1 (en) * 1998-01-23 2002-04-30 Proxemics Lenslet array systems and methods
US6426829B1 (en) * 1998-03-26 2002-07-30 Digital Optics Corp. Integrated micro-optical systems
JPH11330442A (ja) * 1998-05-20 1999-11-30 Sony Corp 光学装置
JP2000314876A (ja) * 1999-04-28 2000-11-14 Hitachi Ltd 液晶表示素子および液晶表示装置
US6285064B1 (en) * 2000-03-28 2001-09-04 Omnivision Technologies, Inc. Chip scale packaging technique for optical image sensing integrated circuits
JP2002252338A (ja) * 2000-12-18 2002-09-06 Canon Inc 撮像装置及び撮像システム
US6635941B2 (en) * 2001-03-21 2003-10-21 Canon Kabushiki Kaisha Structure of semiconductor device with improved reliability
JP2002368235A (ja) 2001-03-21 2002-12-20 Canon Inc 半導体装置及びその製造方法
JP2002290842A (ja) * 2001-03-23 2002-10-04 Sanyo Electric Co Ltd 固体撮像素子の製造方法
JP4190204B2 (ja) * 2002-05-16 2008-12-03 オリンパス株式会社 接合レンズアレイ
KR100774775B1 (ko) 2002-09-17 2007-11-07 앤터온 비.브이. 카메라 디바이스, 카메라 디바이스 제조 방법, 웨이퍼스케일 패키지 및 광학 어셈블리
JP2004233483A (ja) * 2003-01-29 2004-08-19 Sanyo Electric Co Ltd カメラモジュール
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JP4421962B2 (ja) * 2004-07-13 2010-02-24 カンタツ株式会社 携帯電話搭載用小型撮像モジュール
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US7692256B2 (en) * 2007-03-23 2010-04-06 Heptagon Oy Method of producing a wafer scale package

Also Published As

Publication number Publication date
TWI502693B (zh) 2015-10-01
US20110031510A1 (en) 2011-02-10
EP2220684A1 (en) 2010-08-25
KR101575915B1 (ko) 2015-12-08
WO2009067832A1 (en) 2009-06-04
KR20100087755A (ko) 2010-08-05
JP2011507219A (ja) 2011-03-03
TW200929456A (en) 2009-07-01
CN101990711B (zh) 2017-05-17
CN101990711A (zh) 2011-03-23

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