JP5576480B2 - 整調可能な特性インピーダンスを有する垂直型共平面導波路、その設計構造、およびその作製方法 - Google Patents

整調可能な特性インピーダンスを有する垂直型共平面導波路、その設計構造、およびその作製方法 Download PDF

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Publication number
JP5576480B2
JP5576480B2 JP2012513950A JP2012513950A JP5576480B2 JP 5576480 B2 JP5576480 B2 JP 5576480B2 JP 2012513950 A JP2012513950 A JP 2012513950A JP 2012513950 A JP2012513950 A JP 2012513950A JP 5576480 B2 JP5576480 B2 JP 5576480B2
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upper ground
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Japanese (ja)
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JP2012529226A5 (https=
JP2012529226A (ja
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ミーナ、エッサム
ワン、グオアン
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International Business Machines Corp
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International Business Machines Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P3/00—Waveguides; Transmission lines of the waveguide type
    • H01P3/003—Coplanar lines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P3/00—Waveguides; Transmission lines of the waveguide type
    • H01P3/02—Waveguides; Transmission lines of the waveguide type with two longitudinal conductors
    • H01P3/08—Microstrips; Strip lines
    • H01P3/085—Triplate lines

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  • Semiconductor Integrated Circuits (AREA)
  • Waveguides (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP2012513950A 2009-06-04 2010-04-28 整調可能な特性インピーダンスを有する垂直型共平面導波路、その設計構造、およびその作製方法 Expired - Fee Related JP5576480B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/478,385 2009-06-04
US12/478,385 US8212634B2 (en) 2009-06-04 2009-06-04 Vertical coplanar waveguide with tunable characteristic impedance design structure and method of fabricating the same
PCT/US2010/032645 WO2010141167A2 (en) 2009-06-04 2010-04-28 Vertical coplanar waveguide with tunable characteristic impedance, design structure and method of fabricating the same

Publications (3)

Publication Number Publication Date
JP2012529226A JP2012529226A (ja) 2012-11-15
JP2012529226A5 JP2012529226A5 (https=) 2013-10-03
JP5576480B2 true JP5576480B2 (ja) 2014-08-20

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ID=43298387

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JP2012513950A Expired - Fee Related JP5576480B2 (ja) 2009-06-04 2010-04-28 整調可能な特性インピーダンスを有する垂直型共平面導波路、その設計構造、およびその作製方法

Country Status (7)

Country Link
US (1) US8212634B2 (https=)
EP (1) EP2438644A4 (https=)
JP (1) JP5576480B2 (https=)
CN (1) CN102428603B (https=)
CA (1) CA2757501A1 (https=)
TW (1) TWI513093B (https=)
WO (1) WO2010141167A2 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8994456B2 (en) 2012-01-30 2015-03-31 International Business Machines Corporation Multi-stage amplifier using tunable transmission lines and frequency response calibration of same
US9362606B2 (en) * 2013-08-23 2016-06-07 International Business Machines Corporation On-chip vertical three dimensional microstrip line with characteristic impedance tuning technique and design structures
US9588298B2 (en) * 2015-06-04 2017-03-07 Elenion Technologies, Llc Edge coupler
US9851506B2 (en) 2015-06-04 2017-12-26 Elenion Technologies, Llc Back end of line process integrated optical device fabrication
TWI690043B (zh) * 2016-02-17 2020-04-01 瑞昱半導體股份有限公司 積體電路裝置
DE102019126433A1 (de) * 2019-03-14 2020-09-17 Taiwan Semiconductor Manufacturing Company, Ltd. Übertragungsleitungsstrukturen für Millimeterwellensignale
US11515609B2 (en) * 2019-03-14 2022-11-29 Taiwan Semiconductor Manufacturing Company, Ltd. Transmission line structures for millimeter wave signals

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US2812501A (en) * 1954-03-04 1957-11-05 Sanders Associates Inc Transmission line
JP3362535B2 (ja) 1994-12-14 2003-01-07 株式会社村田製作所 高周波電磁界結合型薄膜積層電極、高周波伝送線路、高周波共振器、高周波フィルタ、高周波デバイス及び高周波電磁界結合型薄膜積層電極の膜厚設定方法
US5561405A (en) * 1995-06-05 1996-10-01 Hughes Aircraft Company Vertical grounded coplanar waveguide H-bend interconnection apparatus
JP3307212B2 (ja) * 1996-02-13 2002-07-24 株式会社村田製作所 伝送線路
KR100371877B1 (ko) * 1997-04-16 2003-02-11 가부시끼가이샤 도시바 배선기판과 배선기판의 제조방법 및 반도체 패키지
KR100287646B1 (ko) 1998-07-27 2001-04-16 김병규 스트립 라인 구조를 갖는 마이크로웨이브 소자 및 그의제조방법
EP0977263A3 (en) * 1998-07-31 2002-07-10 STMicroelectronics, Inc. Apparatus and method for reducing propagation delay in a conductor
JP3255118B2 (ja) * 1998-08-04 2002-02-12 株式会社村田製作所 伝送線路および伝送線路共振器
SE514406C2 (sv) * 1999-06-17 2001-02-19 Ericsson Telefon Ab L M Elektrisk transmissionsanordning med korsande striplineledningar
JP2001006941A (ja) 1999-06-18 2001-01-12 Fujitsu General Ltd 高周波トランスおよびインピーダンス変換器
US7554829B2 (en) * 1999-07-30 2009-06-30 Micron Technology, Inc. Transmission lines for CMOS integrated circuits
US6975189B1 (en) * 2000-11-02 2005-12-13 Telasic Communications, Inc. On-chip multilayer metal shielded transmission line
JP2003234606A (ja) * 2002-02-07 2003-08-22 Nippon Telegr & Teleph Corp <Ntt> マイクロ波伝送線路
US6759923B1 (en) * 2002-02-19 2004-07-06 Raytheon Company Device for directing energy, and a method of making same
TW200409153A (en) * 2002-09-04 2004-06-01 Nec Corp Strip line element, printed circuit board carrying member, circuit board, semiconductor package and method for forming same
US6832029B2 (en) * 2002-12-17 2004-12-14 Mcnc Impedance control devices for use in the transition regions of electromagnetic and optical circuitry and methods for using the same
US6847273B2 (en) * 2003-04-25 2005-01-25 Cyntec Co., Ltd. Miniaturized multi-layer coplanar wave guide low pass filter
US7504587B2 (en) * 2003-08-29 2009-03-17 Semiconductor Technology Academic Research Center Parallel wiring and integrated circuit
US20050062137A1 (en) * 2003-09-18 2005-03-24 International Business Machines Corporation Vertically-stacked co-planar transmission line structure for IC design
JP3982511B2 (ja) * 2004-03-09 2007-09-26 ソニー株式会社 フラット型ケーブル製造方法
US7103488B2 (en) * 2004-07-16 2006-09-05 International Business Machines Corporation Method for determining fringing capacitances on passive devices within an integrated circuit
US7292449B2 (en) * 2004-12-13 2007-11-06 Lexmark International, Inc. Virtual ground return for reduction of radiated emissions
JP4336319B2 (ja) 2005-02-24 2009-09-30 京セラ株式会社 積層ストリップラインフィルタ
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US7415058B2 (en) * 2005-10-05 2008-08-19 Massachusetts Institute Of Technology Ultra-high-Q surface-tension-induced monolithically integrated on-chip resonator and associated devices
US7612638B2 (en) * 2006-07-14 2009-11-03 Taiwan Semiconductor Manufacturing Co., Ltd. Waveguides in integrated circuits

Also Published As

Publication number Publication date
EP2438644A2 (en) 2012-04-11
EP2438644A4 (en) 2013-01-23
WO2010141167A3 (en) 2011-01-27
CA2757501A1 (en) 2010-12-09
CN102428603B (zh) 2014-01-22
WO2010141167A2 (en) 2010-12-09
CN102428603A (zh) 2012-04-25
US8212634B2 (en) 2012-07-03
JP2012529226A (ja) 2012-11-15
US20100315181A1 (en) 2010-12-16
TWI513093B (zh) 2015-12-11
TW201123605A (en) 2011-07-01

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