JP2012529226A5 - - Google Patents
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- Publication number
- JP2012529226A5 JP2012529226A5 JP2012513950A JP2012513950A JP2012529226A5 JP 2012529226 A5 JP2012529226 A5 JP 2012529226A5 JP 2012513950 A JP2012513950 A JP 2012513950A JP 2012513950 A JP2012513950 A JP 2012513950A JP 2012529226 A5 JP2012529226 A5 JP 2012529226A5
- Authority
- JP
- Japan
- Prior art keywords
- line
- ground line
- signal line
- lower ground
- chip transmission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims 24
- 230000005540 biological transmission Effects 0.000 claims 21
- 230000000295 complement effect Effects 0.000 claims 2
- 239000003989 dielectric material Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 1
- 230000005684 electric field Effects 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/478,385 | 2009-06-04 | ||
| US12/478,385 US8212634B2 (en) | 2009-06-04 | 2009-06-04 | Vertical coplanar waveguide with tunable characteristic impedance design structure and method of fabricating the same |
| PCT/US2010/032645 WO2010141167A2 (en) | 2009-06-04 | 2010-04-28 | Vertical coplanar waveguide with tunable characteristic impedance, design structure and method of fabricating the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012529226A JP2012529226A (ja) | 2012-11-15 |
| JP2012529226A5 true JP2012529226A5 (https=) | 2013-10-03 |
| JP5576480B2 JP5576480B2 (ja) | 2014-08-20 |
Family
ID=43298387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012513950A Expired - Fee Related JP5576480B2 (ja) | 2009-06-04 | 2010-04-28 | 整調可能な特性インピーダンスを有する垂直型共平面導波路、その設計構造、およびその作製方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8212634B2 (https=) |
| EP (1) | EP2438644A4 (https=) |
| JP (1) | JP5576480B2 (https=) |
| CN (1) | CN102428603B (https=) |
| CA (1) | CA2757501A1 (https=) |
| TW (1) | TWI513093B (https=) |
| WO (1) | WO2010141167A2 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8994456B2 (en) | 2012-01-30 | 2015-03-31 | International Business Machines Corporation | Multi-stage amplifier using tunable transmission lines and frequency response calibration of same |
| US9362606B2 (en) * | 2013-08-23 | 2016-06-07 | International Business Machines Corporation | On-chip vertical three dimensional microstrip line with characteristic impedance tuning technique and design structures |
| US9588298B2 (en) * | 2015-06-04 | 2017-03-07 | Elenion Technologies, Llc | Edge coupler |
| US9851506B2 (en) | 2015-06-04 | 2017-12-26 | Elenion Technologies, Llc | Back end of line process integrated optical device fabrication |
| TWI690043B (zh) * | 2016-02-17 | 2020-04-01 | 瑞昱半導體股份有限公司 | 積體電路裝置 |
| DE102019126433A1 (de) * | 2019-03-14 | 2020-09-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Übertragungsleitungsstrukturen für Millimeterwellensignale |
| US11515609B2 (en) * | 2019-03-14 | 2022-11-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Transmission line structures for millimeter wave signals |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2812501A (en) * | 1954-03-04 | 1957-11-05 | Sanders Associates Inc | Transmission line |
| JP3362535B2 (ja) | 1994-12-14 | 2003-01-07 | 株式会社村田製作所 | 高周波電磁界結合型薄膜積層電極、高周波伝送線路、高周波共振器、高周波フィルタ、高周波デバイス及び高周波電磁界結合型薄膜積層電極の膜厚設定方法 |
| US5561405A (en) * | 1995-06-05 | 1996-10-01 | Hughes Aircraft Company | Vertical grounded coplanar waveguide H-bend interconnection apparatus |
| JP3307212B2 (ja) * | 1996-02-13 | 2002-07-24 | 株式会社村田製作所 | 伝送線路 |
| KR100371877B1 (ko) * | 1997-04-16 | 2003-02-11 | 가부시끼가이샤 도시바 | 배선기판과 배선기판의 제조방법 및 반도체 패키지 |
| KR100287646B1 (ko) | 1998-07-27 | 2001-04-16 | 김병규 | 스트립 라인 구조를 갖는 마이크로웨이브 소자 및 그의제조방법 |
| EP0977263A3 (en) * | 1998-07-31 | 2002-07-10 | STMicroelectronics, Inc. | Apparatus and method for reducing propagation delay in a conductor |
| JP3255118B2 (ja) * | 1998-08-04 | 2002-02-12 | 株式会社村田製作所 | 伝送線路および伝送線路共振器 |
| SE514406C2 (sv) * | 1999-06-17 | 2001-02-19 | Ericsson Telefon Ab L M | Elektrisk transmissionsanordning med korsande striplineledningar |
| JP2001006941A (ja) | 1999-06-18 | 2001-01-12 | Fujitsu General Ltd | 高周波トランスおよびインピーダンス変換器 |
| US7554829B2 (en) * | 1999-07-30 | 2009-06-30 | Micron Technology, Inc. | Transmission lines for CMOS integrated circuits |
| US6975189B1 (en) * | 2000-11-02 | 2005-12-13 | Telasic Communications, Inc. | On-chip multilayer metal shielded transmission line |
| JP2003234606A (ja) * | 2002-02-07 | 2003-08-22 | Nippon Telegr & Teleph Corp <Ntt> | マイクロ波伝送線路 |
| US6759923B1 (en) * | 2002-02-19 | 2004-07-06 | Raytheon Company | Device for directing energy, and a method of making same |
| TW200409153A (en) * | 2002-09-04 | 2004-06-01 | Nec Corp | Strip line element, printed circuit board carrying member, circuit board, semiconductor package and method for forming same |
| US6832029B2 (en) * | 2002-12-17 | 2004-12-14 | Mcnc | Impedance control devices for use in the transition regions of electromagnetic and optical circuitry and methods for using the same |
| US6847273B2 (en) * | 2003-04-25 | 2005-01-25 | Cyntec Co., Ltd. | Miniaturized multi-layer coplanar wave guide low pass filter |
| US7504587B2 (en) * | 2003-08-29 | 2009-03-17 | Semiconductor Technology Academic Research Center | Parallel wiring and integrated circuit |
| US20050062137A1 (en) * | 2003-09-18 | 2005-03-24 | International Business Machines Corporation | Vertically-stacked co-planar transmission line structure for IC design |
| JP3982511B2 (ja) * | 2004-03-09 | 2007-09-26 | ソニー株式会社 | フラット型ケーブル製造方法 |
| US7103488B2 (en) * | 2004-07-16 | 2006-09-05 | International Business Machines Corporation | Method for determining fringing capacitances on passive devices within an integrated circuit |
| US7292449B2 (en) * | 2004-12-13 | 2007-11-06 | Lexmark International, Inc. | Virtual ground return for reduction of radiated emissions |
| JP4336319B2 (ja) | 2005-02-24 | 2009-09-30 | 京セラ株式会社 | 積層ストリップラインフィルタ |
| DE102005033306B3 (de) * | 2005-07-16 | 2006-08-03 | Atmel Germany Gmbh | Monolithisch integrierte Schaltung mit integrierter Entstörvorrichtung |
| US7415058B2 (en) * | 2005-10-05 | 2008-08-19 | Massachusetts Institute Of Technology | Ultra-high-Q surface-tension-induced monolithically integrated on-chip resonator and associated devices |
| US7612638B2 (en) * | 2006-07-14 | 2009-11-03 | Taiwan Semiconductor Manufacturing Co., Ltd. | Waveguides in integrated circuits |
-
2009
- 2009-06-04 US US12/478,385 patent/US8212634B2/en not_active Expired - Fee Related
-
2010
- 2010-04-28 WO PCT/US2010/032645 patent/WO2010141167A2/en not_active Ceased
- 2010-04-28 CN CN201080021236.3A patent/CN102428603B/zh active Active
- 2010-04-28 JP JP2012513950A patent/JP5576480B2/ja not_active Expired - Fee Related
- 2010-04-28 EP EP10783756A patent/EP2438644A4/en not_active Withdrawn
- 2010-04-28 CA CA2757501A patent/CA2757501A1/en active Pending
- 2010-06-01 TW TW099117559A patent/TWI513093B/zh active
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