JP5573849B2 - 物体処理装置、露光装置及び露光方法、並びにデバイス製造方法 - Google Patents

物体処理装置、露光装置及び露光方法、並びにデバイス製造方法 Download PDF

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Publication number
JP5573849B2
JP5573849B2 JP2011549367A JP2011549367A JP5573849B2 JP 5573849 B2 JP5573849 B2 JP 5573849B2 JP 2011549367 A JP2011549367 A JP 2011549367A JP 2011549367 A JP2011549367 A JP 2011549367A JP 5573849 B2 JP5573849 B2 JP 5573849B2
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Prior art keywords
substrate
holding member
exposure
holding
dimensional plane
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JP2011549367A
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Japanese (ja)
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JP2013502600A (ja
JP2013502600A5 (enExample
Inventor
保夫 青木
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Nikon Corp
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Nikon Corp
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Publication of JP2013502600A5 publication Critical patent/JP2013502600A5/ja
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2011549367A 2009-08-20 2010-08-19 物体処理装置、露光装置及び露光方法、並びにデバイス製造方法 Active JP5573849B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011549367A JP5573849B2 (ja) 2009-08-20 2010-08-19 物体処理装置、露光装置及び露光方法、並びにデバイス製造方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2009190654 2009-08-20
JP2009190654 2009-08-20
JP2011549367A JP5573849B2 (ja) 2009-08-20 2010-08-19 物体処理装置、露光装置及び露光方法、並びにデバイス製造方法
PCT/JP2010/064430 WO2011021723A1 (en) 2009-08-20 2010-08-19 Object processing apparatus, exposure apparatus and exposure method, and device manufacturing method

Publications (3)

Publication Number Publication Date
JP2013502600A JP2013502600A (ja) 2013-01-24
JP2013502600A5 JP2013502600A5 (enExample) 2013-09-05
JP5573849B2 true JP5573849B2 (ja) 2014-08-20

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Country Status (6)

Country Link
US (1) US20110053092A1 (enExample)
JP (1) JP5573849B2 (enExample)
KR (2) KR101862234B1 (enExample)
CN (1) CN102483580B (enExample)
TW (2) TWI704640B (enExample)
WO (1) WO2011021723A1 (enExample)

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Also Published As

Publication number Publication date
HK1166140A1 (en) 2012-10-19
TW201729331A (zh) 2017-08-16
KR102022841B1 (ko) 2019-09-19
TWI587436B (zh) 2017-06-11
CN102483580B (zh) 2015-04-01
KR101862234B1 (ko) 2018-05-29
JP2013502600A (ja) 2013-01-24
KR20120062711A (ko) 2012-06-14
CN102483580A (zh) 2012-05-30
WO2011021723A1 (en) 2011-02-24
KR20180059948A (ko) 2018-06-05
TW201138008A (en) 2011-11-01
TWI704640B (zh) 2020-09-11
US20110053092A1 (en) 2011-03-03

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