JP5564303B2 - X線透過検査装置 - Google Patents
X線透過検査装置 Download PDFInfo
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- JP5564303B2 JP5564303B2 JP2010068760A JP2010068760A JP5564303B2 JP 5564303 B2 JP5564303 B2 JP 5564303B2 JP 2010068760 A JP2010068760 A JP 2010068760A JP 2010068760 A JP2010068760 A JP 2010068760A JP 5564303 B2 JP5564303 B2 JP 5564303B2
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- 230000005540 biological transmission Effects 0.000 title claims description 54
- 238000007689 inspection Methods 0.000 title claims description 39
- 238000010521 absorption reaction Methods 0.000 claims description 51
- 238000005259 measurement Methods 0.000 claims description 48
- 238000001514 detection method Methods 0.000 claims description 34
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 claims description 12
- 239000007772 electrode material Substances 0.000 claims description 12
- 229910001416 lithium ion Inorganic materials 0.000 claims description 12
- 239000011888 foil Substances 0.000 claims description 11
- 229910000625 lithium cobalt oxide Inorganic materials 0.000 claims description 10
- BFZPBUKRYWOWDV-UHFFFAOYSA-N lithium;oxido(oxo)cobalt Chemical compound [Li+].[O-][Co]=O BFZPBUKRYWOWDV-UHFFFAOYSA-N 0.000 claims description 10
- QHGJSLXSVXVKHZ-UHFFFAOYSA-N dilithium;dioxido(dioxo)manganese Chemical compound [Li+].[Li+].[O-][Mn]([O-])(=O)=O QHGJSLXSVXVKHZ-UHFFFAOYSA-N 0.000 claims description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 42
- 238000000034 method Methods 0.000 description 17
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 15
- 239000000126 substance Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 239000011572 manganese Substances 0.000 description 7
- 239000000470 constituent Substances 0.000 description 6
- 229910052742 iron Inorganic materials 0.000 description 6
- 238000002834 transmittance Methods 0.000 description 6
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 5
- 229910052744 lithium Inorganic materials 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 239000003575 carbonaceous material Substances 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000002648 laminated material Substances 0.000 description 1
- 229910002102 lithium manganese oxide Inorganic materials 0.000 description 1
- VLXXBCXTUVRROQ-UHFFFAOYSA-N lithium;oxido-oxo-(oxomanganiooxy)manganese Chemical compound [Li+].[O-][Mn](=O)O[Mn]=O VLXXBCXTUVRROQ-UHFFFAOYSA-N 0.000 description 1
- CVMIVKAWUQZOBP-UHFFFAOYSA-L manganic acid Chemical compound O[Mn](O)(=O)=O CVMIVKAWUQZOBP-UHFFFAOYSA-L 0.000 description 1
- 229910052987 metal hydride Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- -1 nickel metal hydride Chemical class 0.000 description 1
- 239000011255 nonaqueous electrolyte Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011895 specific detection Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
- G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
- G01N2223/1016—X-ray
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- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Description
Claims (4)
- 測定試料としてのリチウムイオン二次電池用の電極材料に含まれる一つの元素のX線吸収端より低いエネルギー、かつ、検出元素のX線吸収端より高いエネルギーの特性X線を前記電極材料に照射するX線管球と、
前記特性X線が前記電極材料を透過した際の透過X線を受けてその強度を検出するX線検出器と、
検出された前記透過X線の強度の分布を示す透過像とからコントラスト像を得る演算部と、
前記電極材料と前記X線管球との間に、前記特性X線のKα線とKβ線の間のエネルギーのX線吸収端である元素を含んでなるフィルタと、を備え、
前記電極材料がコバルト酸リチウムを含むものであり、
前記X線管球がNiターゲット管球であり、
前記検出元素がFeであることを特徴とするX線透過検査装置。 - 前記フィルタがCo箔である請求項1に記載のX線透過検査装置。
- 測定試料としてのリチウムイオン二次電池用の電極材料に含まれる一つの元素のX線吸収端より低いエネルギー、かつ、検出元素のX線吸収端より高いエネルギーの特性X線を前記電極材料に照射するX線管球と、
前記特性X線が前記電極材料を透過した際の透過X線を受けてその強度を検出するX線検出器と、
検出された前記透過X線の強度の分布を示す透過像とからコントラスト像を得る演算部と、
前記電極材料と前記X線管球との間に、前記特性X線のKα線とKβ線の間のエネルギーのX線吸収端である元素を含んでなるフィルタと、を備え、
前記電極材料がマンガン酸リチウムを含むものであり、
前記X線管球がFeターゲット管球であり、
前記検出元素がCrであることを特徴とするX線透過検査装置。 - 前記フィルタがMn箔である請求項3に記載のX線透過検査装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010068760A JP5564303B2 (ja) | 2009-06-12 | 2010-03-24 | X線透過検査装置 |
US12/802,401 US8422630B2 (en) | 2009-06-12 | 2010-06-07 | X-ray inspection device and X-ray inspection method |
KR1020100054279A KR101562680B1 (ko) | 2009-06-12 | 2010-06-09 | X선 투과 검사 장치 및 x선 투과 검사 방법 |
CN2010102084889A CN101923061B (zh) | 2009-06-12 | 2010-06-11 | X射线透射检查装置及x射线透射检查方法 |
DE102010023487A DE102010023487A1 (de) | 2009-06-12 | 2010-06-11 | Röntgenuntersuchungsgerät und -verfahren |
Applications Claiming Priority (3)
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---|---|---|---|
JP2009141491 | 2009-06-12 | ||
JP2009141491 | 2009-06-12 | ||
JP2010068760A JP5564303B2 (ja) | 2009-06-12 | 2010-03-24 | X線透過検査装置 |
Publications (2)
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JP2011017690A JP2011017690A (ja) | 2011-01-27 |
JP5564303B2 true JP5564303B2 (ja) | 2014-07-30 |
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JP2010068760A Active JP5564303B2 (ja) | 2009-06-12 | 2010-03-24 | X線透過検査装置 |
Country Status (5)
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---|---|
US (1) | US8422630B2 (ja) |
JP (1) | JP5564303B2 (ja) |
KR (1) | KR101562680B1 (ja) |
CN (1) | CN101923061B (ja) |
DE (1) | DE102010023487A1 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8610019B2 (en) | 2009-02-27 | 2013-12-17 | Mineral Separation Technologies Inc. | Methods for sorting materials |
JP5792472B2 (ja) | 2011-01-25 | 2015-10-14 | 浜松ホトニクス株式会社 | 放射線画像取得装置 |
JP5827064B2 (ja) * | 2011-08-05 | 2015-12-02 | 株式会社日立ハイテクサイエンス | 透過x線分析装置及び方法 |
US9114433B2 (en) | 2012-01-17 | 2015-08-25 | Mineral Separation Technologies, Inc. | Multi-fractional coal sorter and method of use thereof |
JP5944254B2 (ja) | 2012-07-20 | 2016-07-05 | 浜松ホトニクス株式会社 | 放射線画像取得装置 |
KR102171020B1 (ko) * | 2013-10-16 | 2020-10-29 | 삼성전자주식회사 | 엑스레이 흡수 필터를 갖는 엑스레이 시스템, 반도체 패키지, 및 트레이 |
KR102529855B1 (ko) * | 2015-09-30 | 2023-05-09 | 하마마츠 포토닉스 가부시키가이샤 | 방사선 화상 취득 시스템 및 방사선 화상 취득 방법 |
KR20180051175A (ko) * | 2016-11-08 | 2018-05-16 | 주식회사 쎄크 | 저에너지 엑스레이 저감을 위한 필터, 이를 포함하는 엑스레이 튜브 및 엑스레이 시스템 |
JP7219148B2 (ja) * | 2018-04-25 | 2023-02-07 | 住友化学株式会社 | 検査システム及び検査システムの駆動方法 |
EP3877782A4 (en) * | 2018-11-06 | 2022-05-18 | Shenzhen Xpectvision Technology Co., Ltd. | IMAGING METHODS USING X-RAY FLUORESCENCE |
JP7299260B2 (ja) * | 2021-03-15 | 2023-06-27 | トヨタ自動車株式会社 | 膜電極接合体の検査方法および検査装置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5812851U (ja) * | 1981-07-17 | 1983-01-27 | 理学電機株式会社 | X線分析装置 |
JPS6426133A (en) * | 1987-07-22 | 1989-01-27 | Furukawa Electric Co Ltd | Nondestructive measuring method for body to be measured by x-rays |
FR2705786B1 (fr) * | 1993-05-28 | 1995-08-25 | Schlumberger Ind Sa | Procédé et dispositif pour la reconnaissance de matériaux déterminés dans la composition d'un objet. |
JP3606289B2 (ja) * | 1995-04-26 | 2005-01-05 | 日本電池株式会社 | リチウム電池用正極活物質およびその製造法 |
JP4031113B2 (ja) * | 1998-07-27 | 2008-01-09 | 独立行政法人科学技術振興機構 | X線検査方法およびx線検査装置 |
US6418193B1 (en) * | 1999-11-01 | 2002-07-09 | General Electric Company | Imaging system including radiation filter for x-ray imaging |
AUPQ831200A0 (en) * | 2000-06-22 | 2000-07-13 | X-Ray Technologies Pty Ltd | X-ray micro-target source |
JP2002228603A (ja) * | 2001-02-02 | 2002-08-14 | Matsushita Electric Ind Co Ltd | シート状体の分析方法およびそれを用いたシート状体の製造方法、ならびにシート状体の製造装置 |
US6597758B1 (en) * | 2002-05-06 | 2003-07-22 | Agilent Technologies, Inc. | Elementally specific x-ray imaging apparatus and method |
JP2004239776A (ja) * | 2003-02-06 | 2004-08-26 | Mitsubishi Chemicals Corp | 炭素質材料の異物検出方法 |
WO2008126892A1 (ja) * | 2007-04-11 | 2008-10-23 | Mitsubishi Electric Corporation | 樹脂中Br検出方法、樹脂分別装置、および再生樹脂製品の製造方法 |
JP5273955B2 (ja) | 2007-06-26 | 2013-08-28 | 株式会社日立製作所 | X線撮像装置及びx線撮像方法 |
JP2010122103A (ja) | 2008-11-20 | 2010-06-03 | Shimadzu Corp | X線検査方法およびx線検査装置 |
JP2010286405A (ja) * | 2009-06-12 | 2010-12-24 | Sii Nanotechnology Inc | X線透過検査装置及びx線透過検査方法 |
JP2010286406A (ja) * | 2009-06-12 | 2010-12-24 | Sii Nanotechnology Inc | X線透過検査装置及びx線透過検査方法 |
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2010
- 2010-03-24 JP JP2010068760A patent/JP5564303B2/ja active Active
- 2010-06-07 US US12/802,401 patent/US8422630B2/en active Active
- 2010-06-09 KR KR1020100054279A patent/KR101562680B1/ko active IP Right Grant
- 2010-06-11 CN CN2010102084889A patent/CN101923061B/zh active Active
- 2010-06-11 DE DE102010023487A patent/DE102010023487A1/de active Pending
Also Published As
Publication number | Publication date |
---|---|
CN101923061B (zh) | 2013-09-18 |
JP2011017690A (ja) | 2011-01-27 |
DE102010023487A1 (de) | 2011-01-05 |
KR101562680B1 (ko) | 2015-10-22 |
US20100316187A1 (en) | 2010-12-16 |
KR20100133897A (ko) | 2010-12-22 |
CN101923061A (zh) | 2010-12-22 |
US8422630B2 (en) | 2013-04-16 |
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