JP7299260B2 - 膜電極接合体の検査方法および検査装置 - Google Patents
膜電極接合体の検査方法および検査装置 Download PDFInfo
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Description
このような形態であれば、X線の回折によるX線透過像の輝度への影響を補正することにより、膜電極接合体中の異物の大きさとして、異物の厚みを精度よく求めることができる。
(2)上記形態は、更に、前記第4工程で求めた前記厚みと、前記輝度低下領域の前記平面サイズとに基づき、前記異物の立体サイズを求める第5工程、を備えてもよい。このような形態であれば、膜電極接合体中の異物の大きさとして、異物の立体サイズを精度よく求めることができる。
図1は、膜電極接合体の検査に用いる検査システム100の説明図である。本実施形態において、検査システム100は、X線源10と、検出カメラ20と、ステージ30と、検査装置40とを備える。ステージ30には、膜電極接合体50が載置される。図1には、それぞれ直交するX,Y,Z方向が示されている。Z方向は、膜電極接合体50の厚み方向である。Y方向は、ステージ30の搬送方向である。X方向は、Y方向およびZ方向に直交する方向である。X方向およびY方向は、膜電極接合体50の面方向であり、本実施形態では水平方向である。
(B-1)上記実施形態では、異物の立体サイズに基づき、膜電極接合体50の良否判定を行っている。これに対して、異物の厚みに基づいて、膜電極接合体50の良否判定を行ってもよい。この場合、図2に示した検査方法のステップS50を省略し、ステップS60では、異物の厚みと所定の良否判定閾値とを比較することで膜電極接合体50の良否判定を行う。
Claims (3)
- 膜電極接合体の検査方法であって、
前記膜電極接合体のX線透過像を取得する第1工程と、
前記第1工程で取得した前記X線透過像において、周囲の領域よりも輝度が低い輝度低下領域を特定する第2工程と、
前記膜電極接合体中の異物の平面サイズとX線の回折による輝度変化との相関関係に基づき、前記輝度低下領域の平面サイズに応じて前記第2工程で特定した前記輝度低下領域の輝度を補正する第3工程と、
前記第3工程で補正した前記輝度に基づき前記膜電極接合体中の異物の厚みを求める第4工程と、
を備える膜電極接合体の検査方法。 - 請求項1に記載の膜電極接合体の検査方法であって、
前記第4工程で求めた前記厚みと、前記輝度低下領域の前記平面サイズとに基づき、前記異物の立体サイズを求める第5工程、を備える膜電極接合体の検査方法。 - 膜電極接合体の検査装置であって、
前記膜電極接合体のX線透過像を取得する取得部と、
前記X線透過像において、周囲の領域よりも輝度が低い輝度低下領域を特定し、
前記膜電極接合体中の異物の平面サイズとX線の回折による輝度変化との相関関係に基づき、前記輝度低下領域の平面サイズに応じて前記輝度低下領域の輝度を補正し、
補正した前記輝度に基づき前記膜電極接合体中の異物の厚みを求める
処理部と、
を備える検査装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2021041216A JP7299260B2 (ja) | 2021-03-15 | 2021-03-15 | 膜電極接合体の検査方法および検査装置 |
DE102022102660.4A DE102022102660B4 (de) | 2021-03-15 | 2022-02-04 | Prüfverfahren und Prüfvorrichtung für Membranelektrodenanordnung |
US17/670,910 US11781998B2 (en) | 2021-03-15 | 2022-02-14 | Inspection method and inspection device for membrane electrode assembly |
CN202210138063.8A CN115078425A (zh) | 2021-03-15 | 2022-02-15 | 用于膜电极组件的检测方法和检查装置 |
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JP2021041216A JP7299260B2 (ja) | 2021-03-15 | 2021-03-15 | 膜電極接合体の検査方法および検査装置 |
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JP7299260B2 true JP7299260B2 (ja) | 2023-06-27 |
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Citations (6)
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JP2006125875A (ja) | 2004-10-26 | 2006-05-18 | Shimadzu Corp | X線透視装置 |
JP2009168740A (ja) | 2008-01-18 | 2009-07-30 | Anritsu Sanki System Co Ltd | X線異物検出装置 |
JP2010286405A (ja) | 2009-06-12 | 2010-12-24 | Sii Nanotechnology Inc | X線透過検査装置及びx線透過検査方法 |
JP2011085518A (ja) | 2009-10-16 | 2011-04-28 | Ishida Co Ltd | X線検査装置 |
WO2017183493A1 (ja) | 2016-04-19 | 2017-10-26 | 東レ株式会社 | 膜電極接合体の連続非破壊検査方法および連続非破壊検査装置 |
JP2021135125A (ja) | 2020-02-26 | 2021-09-13 | トヨタ自動車株式会社 | 膜電極接合体の検査方法および検査装置 |
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JP2004239776A (ja) | 2003-02-06 | 2004-08-26 | Mitsubishi Chemicals Corp | 炭素質材料の異物検出方法 |
JP2006179424A (ja) | 2004-12-24 | 2006-07-06 | Toyota Motor Corp | 電池の製造方法 |
JP5564303B2 (ja) * | 2009-06-12 | 2014-07-30 | 株式会社日立ハイテクサイエンス | X線透過検査装置 |
JP5813923B2 (ja) | 2010-03-15 | 2015-11-17 | 株式会社日立ハイテクサイエンス | X線透過検査装置及びx線透過検査方法 |
JP6868962B2 (ja) | 2016-03-11 | 2021-05-12 | 株式会社Screenホールディングス | 膜・電極層接合体の製造装置および製造方法 |
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- 2022-02-04 DE DE102022102660.4A patent/DE102022102660B4/de active Active
- 2022-02-14 US US17/670,910 patent/US11781998B2/en active Active
- 2022-02-15 CN CN202210138063.8A patent/CN115078425A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006125875A (ja) | 2004-10-26 | 2006-05-18 | Shimadzu Corp | X線透視装置 |
JP2009168740A (ja) | 2008-01-18 | 2009-07-30 | Anritsu Sanki System Co Ltd | X線異物検出装置 |
JP2010286405A (ja) | 2009-06-12 | 2010-12-24 | Sii Nanotechnology Inc | X線透過検査装置及びx線透過検査方法 |
JP2011085518A (ja) | 2009-10-16 | 2011-04-28 | Ishida Co Ltd | X線検査装置 |
WO2017183493A1 (ja) | 2016-04-19 | 2017-10-26 | 東レ株式会社 | 膜電極接合体の連続非破壊検査方法および連続非破壊検査装置 |
JP2021135125A (ja) | 2020-02-26 | 2021-09-13 | トヨタ自動車株式会社 | 膜電極接合体の検査方法および検査装置 |
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US20220291152A1 (en) | 2022-09-15 |
DE102022102660B4 (de) | 2024-06-13 |
JP2022141078A (ja) | 2022-09-29 |
US11781998B2 (en) | 2023-10-10 |
DE102022102660A1 (de) | 2022-09-15 |
CN115078425A (zh) | 2022-09-20 |
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