JP5550384B2 - 光波干渉計測装置 - Google Patents

光波干渉計測装置 Download PDF

Info

Publication number
JP5550384B2
JP5550384B2 JP2010043690A JP2010043690A JP5550384B2 JP 5550384 B2 JP5550384 B2 JP 5550384B2 JP 2010043690 A JP2010043690 A JP 2010043690A JP 2010043690 A JP2010043690 A JP 2010043690A JP 5550384 B2 JP5550384 B2 JP 5550384B2
Authority
JP
Japan
Prior art keywords
wavelength
interference
lambda
phase
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010043690A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011179934A (ja
JP2011179934A5 (enExample
Inventor
悠介 小田
福之 蔵本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2010043690A priority Critical patent/JP5550384B2/ja
Priority to US13/037,849 priority patent/US8502986B2/en
Publication of JP2011179934A publication Critical patent/JP2011179934A/ja
Publication of JP2011179934A5 publication Critical patent/JP2011179934A5/ja
Application granted granted Critical
Publication of JP5550384B2 publication Critical patent/JP5550384B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2010043690A 2010-03-01 2010-03-01 光波干渉計測装置 Expired - Fee Related JP5550384B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2010043690A JP5550384B2 (ja) 2010-03-01 2010-03-01 光波干渉計測装置
US13/037,849 US8502986B2 (en) 2010-03-01 2011-03-01 Lightwave interference measurement apparatus that calculates absolute distance using lightwave interference

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010043690A JP5550384B2 (ja) 2010-03-01 2010-03-01 光波干渉計測装置

Publications (3)

Publication Number Publication Date
JP2011179934A JP2011179934A (ja) 2011-09-15
JP2011179934A5 JP2011179934A5 (enExample) 2013-08-08
JP5550384B2 true JP5550384B2 (ja) 2014-07-16

Family

ID=44505116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010043690A Expired - Fee Related JP5550384B2 (ja) 2010-03-01 2010-03-01 光波干渉計測装置

Country Status (2)

Country Link
US (1) US8502986B2 (enExample)
JP (1) JP5550384B2 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5572067B2 (ja) * 2010-11-09 2014-08-13 キヤノン株式会社 計測装置
JP2013064682A (ja) * 2011-09-20 2013-04-11 Canon Inc 計測装置
JP2013083581A (ja) * 2011-10-11 2013-05-09 Canon Inc 計測装置
JP2013181780A (ja) 2012-02-29 2013-09-12 Canon Inc 計測装置及び物品の製造方法
US10267709B2 (en) * 2012-05-07 2019-04-23 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Optical sensor interrogation system a method of manufacturing the optical sensor interrogation system
EP2662661A1 (de) 2012-05-07 2013-11-13 Leica Geosystems AG Messgerät mit einem Interferometer und einem ein dichtes Linienspektrum definierenden Absorptionsmedium
JP6537972B2 (ja) * 2012-12-20 2019-07-03 ファズ テクノロジー リミテッド 光システムにおいて周波数歪および偏光誘因効果を補償するシステムおよび方法
US9506739B2 (en) * 2012-12-21 2016-11-29 Magiq Technologies, Inc. Distance measurement by beating a varying test signal with reference signal having absolute frequency value predetermined with a specified accuracy
EP2806246B1 (en) * 2013-05-24 2019-11-20 Attocube Systems AG Dual laser interferometer
US10161768B2 (en) * 2014-07-30 2018-12-25 Luna Innovations Incorporated Methods and apparatus for interferometric interrogation of an optical sensor
CN104132676B (zh) * 2014-08-19 2016-06-08 中国工程物理研究院流体物理研究所 一种基于双fp腔的同轴分幅高速成像和干涉测量方法
WO2016154780A1 (zh) * 2015-03-27 2016-10-06 浙江理工大学 激光干涉波长杠杆式绝对距离测量装置与方法
CN105737733A (zh) * 2016-02-04 2016-07-06 浙江理工大学 一种大范围绝对距离测量中空气折射率的修正方法
WO2019149515A1 (en) 2018-01-31 2019-08-08 Asml Netherlands B.V. Wavelength tracking system, method to calibrate a wavelength tracking system, lithographic apparatus, method to determine an absolute position of a movable object, and interferometer system
CN110174058B (zh) * 2019-06-06 2020-06-23 浙江理工大学 动态偏频锁定式正弦频率扫描干涉绝对测距装置和方法
CN111609798B (zh) * 2020-05-12 2021-04-16 浙江理工大学 锁至动态边带的可变合成波长绝对距离测量装置与方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2808136B2 (ja) * 1989-06-07 1998-10-08 キヤノン株式会社 測長方法及び装置
JP2725434B2 (ja) 1990-03-30 1998-03-11 横河電機株式会社 Ｆｍヘテロダイン法を用いたアブソリュート測長方法およびアブソリュート測長器
JPH06117810A (ja) * 1991-05-28 1994-04-28 Yokogawa Electric Corp 外乱補正機能付きアブソリュ−ト測長器
DE4314486C2 (de) * 1993-05-03 1998-08-27 Heidenhain Gmbh Dr Johannes Absolutinterferometrisches Meßverfahren sowie dafür geeignete Laserinterferometeranordnung
JP3400503B2 (ja) * 1993-10-26 2003-04-28 松下電工株式会社 干渉測長器
DE19522262C2 (de) * 1995-06-20 1997-05-22 Zeiss Carl Jena Gmbh Heterodyn-Interferometer-Anordnung
JPH11183116A (ja) * 1997-12-18 1999-07-09 Nikon Corp 光波干渉測定方法および装置
JP3510569B2 (ja) * 2000-06-22 2004-03-29 三菱重工業株式会社 光周波数変調方式距離計
JP4198929B2 (ja) * 2002-03-27 2008-12-17 パイオニア株式会社 レーザ測長器及びレーザ測長方法
EP1906137A1 (en) * 2006-09-29 2008-04-02 Leica Geosystems AG Method and device for generating a synthetic wavelength
KR100951618B1 (ko) * 2008-02-19 2010-04-09 한국과학기술원 광주파수 발생기를 이용한 절대거리 측정방법 및 시스템
JP2010112768A (ja) * 2008-11-04 2010-05-20 Canon Inc 計測装置

Also Published As

Publication number Publication date
US8502986B2 (en) 2013-08-06
JP2011179934A (ja) 2011-09-15
US20110211198A1 (en) 2011-09-01

Similar Documents

Publication Publication Date Title
JP5550384B2 (ja) 光波干渉計測装置
US8363226B2 (en) Optical interference measuring apparatus
US20130222785A1 (en) Measurement apparatus and method of manufacturing article
US8559015B2 (en) Measuring apparatus
US9506739B2 (en) Distance measurement by beating a varying test signal with reference signal having absolute frequency value predetermined with a specified accuracy
JP5265918B2 (ja) モード選択同調器からの光フィードバック
JP2010112768A (ja) 計測装置
US8797542B2 (en) Measurement apparatus
JP2010261890A (ja) 光波干渉計測装置
JP3459070B2 (ja) 回折格子の回転角検出装置
US20130088722A1 (en) Measurement apparatus
JP5602538B2 (ja) 光波干渉計測装置
US8576404B2 (en) Optical interferometer
JPWO1996026414A1 (ja) 回析格子の回転角検出装置
JP2010261776A (ja) 光波干渉計測装置
US20130066595A1 (en) Measurement apparatus and measurement method
JP2554363B2 (ja) 光干渉測定装置
JPH06117810A (ja) 外乱補正機能付きアブソリュ−ト測長器
US8830480B2 (en) Measurement apparatus
JP4600755B2 (ja) 波長モニタ
JP7329241B2 (ja) ファブリペロー・エタロン、これを用いた波長変化量検出器、及び波長計
Yu et al. Extended-range high-accuracy wavelength calibration beyond gas absorption lines using Mach–Zehnder interferometer and Fabry–Pérot cavity
JP2024115237A (ja) 光路長差計測装置および振動計測装置
JP2006343287A (ja) 光学特性測定装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130221

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130625

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20130912

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130924

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140422

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140520

R151 Written notification of patent or utility model registration

Ref document number: 5550384

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

LAPS Cancellation because of no payment of annual fees