JP5537058B2 - 試料作製装置、及び試料作製装置における制御方法 - Google Patents

試料作製装置、及び試料作製装置における制御方法 Download PDF

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Publication number
JP5537058B2
JP5537058B2 JP2009080851A JP2009080851A JP5537058B2 JP 5537058 B2 JP5537058 B2 JP 5537058B2 JP 2009080851 A JP2009080851 A JP 2009080851A JP 2009080851 A JP2009080851 A JP 2009080851A JP 5537058 B2 JP5537058 B2 JP 5537058B2
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sample
ion beam
probe
transfer means
extracted
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JP2009080851A
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Japanese (ja)
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JP2010230612A5 (enExample
JP2010230612A (ja
Inventor
祐一 間所
毅 大西
恵 會澤
幸男 吉沢
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Hitachi High Tech Corp
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Hitachi High Technologies Corp
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Priority to JP2009080851A priority Critical patent/JP5537058B2/ja
Priority to PCT/JP2009/005580 priority patent/WO2010116428A1/ja
Priority to US13/203,807 priority patent/US8710464B2/en
Publication of JP2010230612A publication Critical patent/JP2010230612A/ja
Publication of JP2010230612A5 publication Critical patent/JP2010230612A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/286—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q involving mechanical work, e.g. chopping, disintegrating, compacting, homogenising

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
JP2009080851A 2009-03-30 2009-03-30 試料作製装置、及び試料作製装置における制御方法 Expired - Fee Related JP5537058B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009080851A JP5537058B2 (ja) 2009-03-30 2009-03-30 試料作製装置、及び試料作製装置における制御方法
PCT/JP2009/005580 WO2010116428A1 (ja) 2009-03-30 2009-10-23 試料作製装置、及び試料作製装置における制御方法
US13/203,807 US8710464B2 (en) 2009-03-30 2009-10-23 Specimen preparation device, and control method in specimen preparation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009080851A JP5537058B2 (ja) 2009-03-30 2009-03-30 試料作製装置、及び試料作製装置における制御方法

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JP2010230612A JP2010230612A (ja) 2010-10-14
JP2010230612A5 JP2010230612A5 (enExample) 2011-04-28
JP5537058B2 true JP5537058B2 (ja) 2014-07-02

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JP2009080851A Expired - Fee Related JP5537058B2 (ja) 2009-03-30 2009-03-30 試料作製装置、及び試料作製装置における制御方法

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US (1) US8710464B2 (enExample)
JP (1) JP5537058B2 (enExample)
WO (1) WO2010116428A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8759765B2 (en) * 2011-08-08 2014-06-24 Omniprobe, Inc. Method for processing samples held by a nanomanipulator
KR102383571B1 (ko) 2014-06-30 2022-04-06 가부시키가이샤 히다치 하이테크 사이언스 자동 시료 제작 장치
JP6552383B2 (ja) 2014-11-07 2019-07-31 エフ・イ−・アイ・カンパニー 自動化されたｔｅｍ試料調製
CN105203364B (zh) * 2015-10-27 2017-12-29 山东省科学院海洋仪器仪表研究所 海水中有机污染物富集装置及富集方法
JP6931214B2 (ja) * 2017-01-19 2021-09-01 株式会社日立ハイテクサイエンス 荷電粒子ビーム装置
JP6885576B2 (ja) * 2017-01-19 2021-06-16 株式会社日立ハイテクサイエンス 荷電粒子ビーム装置
JP7109051B2 (ja) * 2018-03-30 2022-07-29 株式会社日立ハイテクサイエンス 荷電粒子ビーム装置
JP7308710B2 (ja) * 2019-09-25 2023-07-14 株式会社日立ハイテクサイエンス 集束イオンビーム装置
CN111812124B (zh) * 2020-06-24 2023-06-13 上海华力集成电路制造有限公司 一种失效分析去层方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2774884B2 (ja) 1991-08-22 1998-07-09 株式会社日立製作所 試料の分離方法及びこの分離方法で得た分離試料の分析方法
JPH09306402A (ja) * 1996-05-14 1997-11-28 Hitachi Ltd イオンビーム制限絞り板、マスク、集束イオンビーム装置及び投射型イオンビーム装置
WO1999005506A1 (fr) 1997-07-22 1999-02-04 Hitachi, Ltd. Procede et dispositif de preparation d'echantillons
US6828566B2 (en) * 1997-07-22 2004-12-07 Hitachi Ltd Method and apparatus for specimen fabrication
JP3695181B2 (ja) 1998-11-20 2005-09-14 株式会社日立製作所 基板抽出方法及びそれを用いた電子部品製造方法
JP3843637B2 (ja) * 1999-02-23 2006-11-08 株式会社日立製作所 試料作製方法および試料作製システム
JP3851464B2 (ja) * 1999-03-04 2006-11-29 株式会社日立製作所 マニピュレータおよびそれを用いたプローブ装置、試料作製装置
JP4408538B2 (ja) * 2000-07-24 2010-02-03 株式会社日立製作所 プローブ装置
EP1209737B2 (en) * 2000-11-06 2014-04-30 Hitachi, Ltd. Method for specimen fabrication
JP2002150983A (ja) * 2000-11-09 2002-05-24 Jeol Ltd マニピュレータ
JP4135143B2 (ja) * 2003-04-22 2008-08-20 株式会社島津製作所 基板検査装置
JP2005345347A (ja) * 2004-06-04 2005-12-15 Hitachi High-Technologies Corp 微小試料作製装置、微小試料設置具及び微小試料加工方法
TWI255339B (en) * 2004-12-23 2006-05-21 Powerchip Semiconductor Corp Method of applying micro-protection in defect analysis
US7312448B2 (en) * 2005-04-06 2007-12-25 Carl Zeiss Nts Gmbh Method and apparatus for quantitative three-dimensional reconstruction in scanning electron microscopy
JP2007018935A (ja) * 2005-07-08 2007-01-25 Hitachi High-Technologies Corp プローブ付き顕微鏡及びプローブ接触方法
JP4520926B2 (ja) * 2005-10-14 2010-08-11 株式会社日立ハイテクノロジーズ 試料解析方法
JP2007194096A (ja) * 2006-01-20 2007-08-02 Hitachi High-Technologies Corp 荷電粒子ビーム装置、及び荷電粒子ビーム装置を用いた試料のピックアップ方法
US7423263B2 (en) 2006-06-23 2008-09-09 Fei Company Planar view sample preparation
JP5959139B2 (ja) * 2006-10-20 2016-08-02 エフ・イ−・アイ・カンパニー Ｓ／ｔｅｍのサンプルを分析する方法
JP4784888B2 (ja) * 2006-11-09 2011-10-05 エスアイアイ・ナノテクノロジー株式会社 Ｆｉｂによるアトムプローブ分析用試料の作製方法とそれを実施する装置

Also Published As

Publication number Publication date
US8710464B2 (en) 2014-04-29
JP2010230612A (ja) 2010-10-14
US20110309245A1 (en) 2011-12-22
WO2010116428A1 (ja) 2010-10-14

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