JP5531019B2 - 薄膜表面上の物質パターンを硬化せしめる装置及び方法 - Google Patents
薄膜表面上の物質パターンを硬化せしめる装置及び方法 Download PDFInfo
- Publication number
- JP5531019B2 JP5531019B2 JP2011528966A JP2011528966A JP5531019B2 JP 5531019 B2 JP5531019 B2 JP 5531019B2 JP 2011528966 A JP2011528966 A JP 2011528966A JP 2011528966 A JP2011528966 A JP 2011528966A JP 5531019 B2 JP5531019 B2 JP 5531019B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- target plane
- concave
- photon
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 title claims description 62
- 239000000463 material Substances 0.000 title claims description 26
- 238000000034 method Methods 0.000 title claims description 26
- 230000005855 radiation Effects 0.000 claims description 48
- 239000000758 substrate Substances 0.000 claims description 28
- 238000013507 mapping Methods 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 6
- 238000009423 ventilation Methods 0.000 claims description 4
- 239000000976 ink Substances 0.000 description 49
- 238000002474 experimental method Methods 0.000 description 23
- 239000000523 sample Substances 0.000 description 23
- 238000001723 curing Methods 0.000 description 14
- 229910052709 silver Inorganic materials 0.000 description 14
- 239000004332 silver Substances 0.000 description 14
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 12
- 238000005245 sintering Methods 0.000 description 11
- 229910052724 xenon Inorganic materials 0.000 description 10
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 10
- 230000006872 improvement Effects 0.000 description 9
- 238000007639 printing Methods 0.000 description 9
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 description 7
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000011112 polyethylene naphthalate Substances 0.000 description 6
- 238000013022 venting Methods 0.000 description 6
- 239000010949 copper Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 5
- 238000007650 screen-printing Methods 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 4
- 238000007641 inkjet printing Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 150000003378 silver Chemical class 0.000 description 3
- -1 silver amide Chemical class 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 150000004696 coordination complex Chemical class 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002082 metal nanoparticle Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 101100440985 Danio rerio crad gene Proteins 0.000 description 1
- 240000001973 Ficus microcarpa Species 0.000 description 1
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 101100440987 Mus musculus Cracd gene Proteins 0.000 description 1
- 101100467905 Mus musculus Rdh16 gene Proteins 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000003125 aqueous solvent Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000307 polymer substrate Polymers 0.000 description 1
- 238000010583 slow cooling Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000013076 target substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0015—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
- B41J11/002—Curing or drying the ink on the copy materials, e.g. by heating or irradiating
- B41J11/0021—Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0015—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
- B41J11/002—Curing or drying the ink on the copy materials, e.g. by heating or irradiating
- B41J11/0021—Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation
- B41J11/00214—Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation using UV radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0015—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
- B41J11/002—Curing or drying the ink on the copy materials, e.g. by heating or irradiating
- B41J11/0021—Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation
- B41J11/00216—Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation using infrared [IR] radiation or microwaves
Landscapes
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Coating Apparatus (AREA)
- Manufacturing Of Printed Wiring (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP08165395.8 | 2008-09-29 | ||
| EP08165395A EP2168775A1 (en) | 2008-09-29 | 2008-09-29 | A device and a method for curing patterns of a substance at a surface of a foil |
| PCT/NL2009/050581 WO2010036116A1 (en) | 2008-09-29 | 2009-09-28 | A device and a method for curing patterns of a substance at a surface of a foil |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012504333A JP2012504333A (ja) | 2012-02-16 |
| JP2012504333A5 JP2012504333A5 (enExample) | 2012-11-08 |
| JP5531019B2 true JP5531019B2 (ja) | 2014-06-25 |
Family
ID=40380734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011528966A Expired - Fee Related JP5531019B2 (ja) | 2008-09-29 | 2009-09-28 | 薄膜表面上の物質パターンを硬化せしめる装置及び方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8395135B2 (enExample) |
| EP (2) | EP2168775A1 (enExample) |
| JP (1) | JP5531019B2 (enExample) |
| TW (1) | TWI466605B (enExample) |
| WO (1) | WO2010036116A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2346308A1 (en) | 2010-01-14 | 2011-07-20 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Apparatus and method for treating a substance at a substrate |
| EP2461655A1 (en) | 2010-12-06 | 2012-06-06 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Hybrid materials for printing conductive or semiconductive elements |
| EP2736076A1 (en) | 2012-11-23 | 2014-05-28 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Apparatus and method for manufacturing a layered product |
| EP2747129A1 (en) | 2012-12-18 | 2014-06-25 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Curing a heat-curable material in an embedded curing zone |
| US9310685B2 (en) | 2013-05-13 | 2016-04-12 | Nokia Technologies Oy | Method and apparatus for the formation of conductive films on a substrate |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4287226A (en) * | 1976-02-20 | 1981-09-01 | Bell Telephone Laboratories, Incorporated | Process for producing cover coated electronic circuits |
| US4636405A (en) | 1985-12-24 | 1987-01-13 | Corning Glass Works | Curing apparatus for coated fiber |
| CA1337056C (en) | 1987-10-30 | 1995-09-19 | Bob J. Overton | Methods of and apparatus for curing optical fiber coatings |
| FR2629187B1 (fr) | 1988-03-24 | 1991-07-19 | France Etat | Four a rayonnement ultraviolet pour la polymerisation de revetements photopolymerisables |
| JP2571255Y2 (ja) * | 1991-12-16 | 1998-05-18 | ウシオ電機株式会社 | 光ファイバーに塗布されたコーティング剤の硬化装置 |
| JP2892545B2 (ja) | 1992-02-19 | 1999-05-17 | ウシオ電機株式会社 | 光ファイバーに塗布されたコーティング剤の硬化装置 |
| JPH08152546A (ja) * | 1994-11-29 | 1996-06-11 | Yazaki Corp | 光ファイバテープ心線の製造装置と製造方法 |
| JP2000117960A (ja) * | 1998-10-16 | 2000-04-25 | Canon Inc | インクジェット印刷方法 |
| US6419743B1 (en) | 2001-01-12 | 2002-07-16 | Fusion Uv Systems, Inc. | Apparatus and method for passing multiple fibers through a small zone of high intensity radiant energy |
| US6858253B2 (en) * | 2001-05-31 | 2005-02-22 | 3M Innovative Properties Company | Method of making dimensionally stable composite article |
| US6739716B2 (en) * | 2002-06-10 | 2004-05-25 | Océ Display Graphics Systems, Inc. | Systems and methods for curing a fluid |
| US20040009304A1 (en) * | 2002-07-09 | 2004-01-15 | Osram Opto Semiconductors Gmbh & Co. Ogh | Process and tool with energy source for fabrication of organic electronic devices |
| US6797971B2 (en) * | 2002-07-18 | 2004-09-28 | Fusion Uv Systems, Inc. | Apparatus and method providing substantially two-dimensionally uniform irradiation |
| US7078726B2 (en) * | 2004-09-09 | 2006-07-18 | Osram Opto Semiconductors Gmbh | Sealing of electronic device using absorbing layer for glue line |
| EP1831432B1 (en) | 2004-11-24 | 2015-02-18 | NovaCentrix Corp. | Method for sintering materials |
| US7777198B2 (en) * | 2005-05-09 | 2010-08-17 | Applied Materials, Inc. | Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation |
| JP4507978B2 (ja) | 2005-05-16 | 2010-07-21 | セイコーエプソン株式会社 | 膜パターンの形成方法 |
| JP2006323110A (ja) * | 2005-05-18 | 2006-11-30 | Sharp Corp | 三次元構造物の形成方法、並びに当該形成方法を用いた液晶表示素子用スペーサの形成方法及び三次元構造物付き透明基板、並びに紫外線照射システム |
| AU2005202167B2 (en) | 2005-05-19 | 2010-12-16 | Canon Kabushiki Kaisha | Method of forming structures using drop-on-demand printing |
| WO2007038950A1 (en) | 2005-09-28 | 2007-04-12 | Stichting Dutch Polymer Institute | Method for generation of metal surface structures and apparatus therefor |
| JP2007290233A (ja) * | 2006-04-25 | 2007-11-08 | Ushio Inc | 光照射器およびインクジェットプリンタ |
| JP2008103143A (ja) * | 2006-10-18 | 2008-05-01 | Ushio Inc | 光照射器およびインクジェットプリンタ |
| EP2194764A1 (en) * | 2008-12-04 | 2010-06-09 | Stichting Dutch Polymer Institute | Method for generation of electrically conducting surface structures, apparatus therefor and use |
-
2008
- 2008-09-29 EP EP08165395A patent/EP2168775A1/en not_active Withdrawn
-
2009
- 2009-09-28 US US13/121,200 patent/US8395135B2/en not_active Expired - Fee Related
- 2009-09-28 WO PCT/NL2009/050581 patent/WO2010036116A1/en not_active Ceased
- 2009-09-28 EP EP09788344A patent/EP2349727B1/en not_active Not-in-force
- 2009-09-28 JP JP2011528966A patent/JP5531019B2/ja not_active Expired - Fee Related
- 2009-09-29 TW TW098132856A patent/TWI466605B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| WO2010036116A1 (en) | 2010-04-01 |
| EP2349727A1 (en) | 2011-08-03 |
| JP2012504333A (ja) | 2012-02-16 |
| TWI466605B (zh) | 2014-12-21 |
| US20110233425A1 (en) | 2011-09-29 |
| TW201019809A (en) | 2010-05-16 |
| US8395135B2 (en) | 2013-03-12 |
| EP2349727B1 (en) | 2013-03-06 |
| EP2168775A1 (en) | 2010-03-31 |
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