TWI466605B - 用於硬化在箔片表面上的物質圖案之裝置、方法和系統 - Google Patents
用於硬化在箔片表面上的物質圖案之裝置、方法和系統 Download PDFInfo
- Publication number
- TWI466605B TWI466605B TW098132856A TW98132856A TWI466605B TW I466605 B TWI466605 B TW I466605B TW 098132856 A TW098132856 A TW 098132856A TW 98132856 A TW98132856 A TW 98132856A TW I466605 B TWI466605 B TW I466605B
- Authority
- TW
- Taiwan
- Prior art keywords
- foil
- photon radiation
- object plane
- slit
- concave reflecting
- Prior art date
Links
- 239000011888 foil Substances 0.000 title claims description 67
- 238000000034 method Methods 0.000 title claims description 28
- 239000000126 substance Substances 0.000 title claims description 13
- 230000005855 radiation Effects 0.000 claims description 94
- 239000000758 substrate Substances 0.000 claims description 27
- 238000013022 venting Methods 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 230000035515 penetration Effects 0.000 claims description 2
- 239000000976 ink Substances 0.000 description 48
- 238000002474 experimental method Methods 0.000 description 23
- 239000000523 sample Substances 0.000 description 23
- 229910052709 silver Inorganic materials 0.000 description 17
- 239000004332 silver Substances 0.000 description 17
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 15
- 239000000463 material Substances 0.000 description 13
- 230000006872 improvement Effects 0.000 description 10
- 238000005245 sintering Methods 0.000 description 10
- 229910052724 xenon Inorganic materials 0.000 description 10
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 10
- 238000005286 illumination Methods 0.000 description 9
- 238000007639 printing Methods 0.000 description 9
- 239000000203 mixture Substances 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 6
- 239000002131 composite material Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000002105 nanoparticle Substances 0.000 description 5
- 239000011112 polyethylene naphthalate Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000007641 inkjet printing Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 3
- -1 region Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 238000004901 spalling Methods 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000002146 bilateral effect Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004299 exfoliation Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002905 metal composite material Substances 0.000 description 2
- 239000002082 metal nanoparticle Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920000307 polymer substrate Polymers 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 230000029058 respiratory gaseous exchange Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 150000003378 silver Chemical class 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- PDWBGRKARJFJGI-UHFFFAOYSA-N 2-phenylcyclohexa-2,4-dien-1-one Chemical compound O=C1CC=CC=C1C1=CC=CC=C1 PDWBGRKARJFJGI-UHFFFAOYSA-N 0.000 description 1
- 101100440985 Danio rerio crad gene Proteins 0.000 description 1
- 241000272168 Laridae Species 0.000 description 1
- 101100440987 Mus musculus Cracd gene Proteins 0.000 description 1
- 101100467905 Mus musculus Rdh16 gene Proteins 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 208000034189 Sclerosis Diseases 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 150000004696 coordination complex Chemical class 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002847 impedance measurement Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0015—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
- B41J11/002—Curing or drying the ink on the copy materials, e.g. by heating or irradiating
- B41J11/0021—Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0015—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
- B41J11/002—Curing or drying the ink on the copy materials, e.g. by heating or irradiating
- B41J11/0021—Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation
- B41J11/00214—Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation using UV radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0015—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
- B41J11/002—Curing or drying the ink on the copy materials, e.g. by heating or irradiating
- B41J11/0021—Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation
- B41J11/00216—Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation using infrared [IR] radiation or microwaves
Landscapes
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Coating Apparatus (AREA)
- Manufacturing Of Printed Wiring (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP08165395A EP2168775A1 (en) | 2008-09-29 | 2008-09-29 | A device and a method for curing patterns of a substance at a surface of a foil |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201019809A TW201019809A (en) | 2010-05-16 |
| TWI466605B true TWI466605B (zh) | 2014-12-21 |
Family
ID=40380734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW098132856A TWI466605B (zh) | 2008-09-29 | 2009-09-29 | 用於硬化在箔片表面上的物質圖案之裝置、方法和系統 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8395135B2 (enExample) |
| EP (2) | EP2168775A1 (enExample) |
| JP (1) | JP5531019B2 (enExample) |
| TW (1) | TWI466605B (enExample) |
| WO (1) | WO2010036116A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2346308A1 (en) | 2010-01-14 | 2011-07-20 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Apparatus and method for treating a substance at a substrate |
| EP2461655A1 (en) | 2010-12-06 | 2012-06-06 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Hybrid materials for printing conductive or semiconductive elements |
| EP2736076A1 (en) | 2012-11-23 | 2014-05-28 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Apparatus and method for manufacturing a layered product |
| EP2747129A1 (en) | 2012-12-18 | 2014-06-25 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Curing a heat-curable material in an embedded curing zone |
| US9310685B2 (en) | 2013-05-13 | 2016-04-12 | Nokia Technologies Oy | Method and apparatus for the formation of conductive films on a substrate |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000117960A (ja) * | 1998-10-16 | 2000-04-25 | Canon Inc | インクジェット印刷方法 |
| US20030227527A1 (en) * | 2002-06-10 | 2003-12-11 | Raster Graphics, Inc. | Systems and methods for curing a fluid |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4287226A (en) * | 1976-02-20 | 1981-09-01 | Bell Telephone Laboratories, Incorporated | Process for producing cover coated electronic circuits |
| US4636405A (en) | 1985-12-24 | 1987-01-13 | Corning Glass Works | Curing apparatus for coated fiber |
| CA1337056C (en) | 1987-10-30 | 1995-09-19 | Bob J. Overton | Methods of and apparatus for curing optical fiber coatings |
| FR2629187B1 (fr) | 1988-03-24 | 1991-07-19 | France Etat | Four a rayonnement ultraviolet pour la polymerisation de revetements photopolymerisables |
| JP2571255Y2 (ja) * | 1991-12-16 | 1998-05-18 | ウシオ電機株式会社 | 光ファイバーに塗布されたコーティング剤の硬化装置 |
| JP2892545B2 (ja) | 1992-02-19 | 1999-05-17 | ウシオ電機株式会社 | 光ファイバーに塗布されたコーティング剤の硬化装置 |
| JPH08152546A (ja) * | 1994-11-29 | 1996-06-11 | Yazaki Corp | 光ファイバテープ心線の製造装置と製造方法 |
| US6419743B1 (en) | 2001-01-12 | 2002-07-16 | Fusion Uv Systems, Inc. | Apparatus and method for passing multiple fibers through a small zone of high intensity radiant energy |
| US6858253B2 (en) * | 2001-05-31 | 2005-02-22 | 3M Innovative Properties Company | Method of making dimensionally stable composite article |
| US20040009304A1 (en) * | 2002-07-09 | 2004-01-15 | Osram Opto Semiconductors Gmbh & Co. Ogh | Process and tool with energy source for fabrication of organic electronic devices |
| US6797971B2 (en) * | 2002-07-18 | 2004-09-28 | Fusion Uv Systems, Inc. | Apparatus and method providing substantially two-dimensionally uniform irradiation |
| US7078726B2 (en) * | 2004-09-09 | 2006-07-18 | Osram Opto Semiconductors Gmbh | Sealing of electronic device using absorbing layer for glue line |
| EP1831432B1 (en) | 2004-11-24 | 2015-02-18 | NovaCentrix Corp. | Method for sintering materials |
| US7777198B2 (en) * | 2005-05-09 | 2010-08-17 | Applied Materials, Inc. | Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation |
| JP4507978B2 (ja) | 2005-05-16 | 2010-07-21 | セイコーエプソン株式会社 | 膜パターンの形成方法 |
| JP2006323110A (ja) * | 2005-05-18 | 2006-11-30 | Sharp Corp | 三次元構造物の形成方法、並びに当該形成方法を用いた液晶表示素子用スペーサの形成方法及び三次元構造物付き透明基板、並びに紫外線照射システム |
| AU2005202167B2 (en) | 2005-05-19 | 2010-12-16 | Canon Kabushiki Kaisha | Method of forming structures using drop-on-demand printing |
| WO2007038950A1 (en) | 2005-09-28 | 2007-04-12 | Stichting Dutch Polymer Institute | Method for generation of metal surface structures and apparatus therefor |
| JP2007290233A (ja) * | 2006-04-25 | 2007-11-08 | Ushio Inc | 光照射器およびインクジェットプリンタ |
| JP2008103143A (ja) * | 2006-10-18 | 2008-05-01 | Ushio Inc | 光照射器およびインクジェットプリンタ |
| EP2194764A1 (en) * | 2008-12-04 | 2010-06-09 | Stichting Dutch Polymer Institute | Method for generation of electrically conducting surface structures, apparatus therefor and use |
-
2008
- 2008-09-29 EP EP08165395A patent/EP2168775A1/en not_active Withdrawn
-
2009
- 2009-09-28 US US13/121,200 patent/US8395135B2/en not_active Expired - Fee Related
- 2009-09-28 WO PCT/NL2009/050581 patent/WO2010036116A1/en not_active Ceased
- 2009-09-28 EP EP09788344A patent/EP2349727B1/en not_active Not-in-force
- 2009-09-28 JP JP2011528966A patent/JP5531019B2/ja not_active Expired - Fee Related
- 2009-09-29 TW TW098132856A patent/TWI466605B/zh not_active IP Right Cessation
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000117960A (ja) * | 1998-10-16 | 2000-04-25 | Canon Inc | インクジェット印刷方法 |
| US20030227527A1 (en) * | 2002-06-10 | 2003-12-11 | Raster Graphics, Inc. | Systems and methods for curing a fluid |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2010036116A1 (en) | 2010-04-01 |
| EP2349727A1 (en) | 2011-08-03 |
| JP2012504333A (ja) | 2012-02-16 |
| US20110233425A1 (en) | 2011-09-29 |
| TW201019809A (en) | 2010-05-16 |
| US8395135B2 (en) | 2013-03-12 |
| EP2349727B1 (en) | 2013-03-06 |
| JP5531019B2 (ja) | 2014-06-25 |
| EP2168775A1 (en) | 2010-03-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |