JP5527954B2 - Pecvdシステムにおけるソースガス流路の制御によるチャンバ内部での副生成物の膜堆積制御 - Google Patents
Pecvdシステムにおけるソースガス流路の制御によるチャンバ内部での副生成物の膜堆積制御 Download PDFInfo
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- JP5527954B2 JP5527954B2 JP2008228165A JP2008228165A JP5527954B2 JP 5527954 B2 JP5527954 B2 JP 5527954B2 JP 2008228165 A JP2008228165 A JP 2008228165A JP 2008228165 A JP2008228165 A JP 2008228165A JP 5527954 B2 JP5527954 B2 JP 5527954B2
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- 238000000151 deposition Methods 0.000 title description 14
- 230000008021 deposition Effects 0.000 title description 14
- 239000006227 byproduct Substances 0.000 title 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 title 1
- 239000007789 gas Substances 0.000 claims description 171
- 239000000758 substrate Substances 0.000 claims description 30
- 230000000903 blocking effect Effects 0.000 claims description 23
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 description 27
- 239000000463 material Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 230000006698 induction Effects 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000009795 derivation Methods 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45502—Flow conditions in reaction chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
Description
本発明の実施形態は、概して、処理チャンバ内での処理ガスの流れを制御するための装置に関する。
基板を真空内で処理する際は、真空ポンプを用いて処理チャンバを適当な処理圧まで排気する。場合によっては、真空ポンプにより処理チャンバに導入された処理ガスを絶えず排気することで、所望の処理圧を維持する。真空ポンプは、真空ポンプへと続く真空ポンプ口へと処理チャンバ内を処理ガスを引き寄せる。
Claims (11)
- 第1側壁部を貫通するスリットバルブ開口部を有するチャンバ本体部と、
チャンバ本体部の1つ以上の側壁部に連結された1つ以上のガス流誘導部と、
スリットバルブ開口部上方の第1側壁部に連結されそこから延びており、実質的にスリットバルブ開口部と一直線に揃って貫通する開口部を有するガス流誘導部に連結される1つ以上のガス流遮断部と、
スリットバルブ開口部を覆う位置と第2位置との間で移動可能であるドアを備え、隣接する側壁部上のガス流誘導部が離間されている装置。 - ドアが第1側壁部に枢動的に連結されている請求項1記載の装置。
- ドアが垂直面を移動可能である請求項1記載の装置。
- 1つ以上のガス流遮断部がスリットバルブ開口部全体に亘る長さに及ぶ請求項1記載の装置。
- 処理チャンバ壁部から延び、サセプタとガス分配シャワーヘッドとの間の処理領域を取り囲む複数のガス流誘導部であって、複数のガス流誘導部において第1のガス流誘導部はそれを貫通する開口部を有しており、その中を基板が通過可能であり、隣接する側壁部上のガス流誘導部が離間されているガス流誘導部と、
第1のガス流誘導部に連結された、処理領域から離れる方向に延びている1つ以上のガス流遮断部と、
開口部を遮蔽する位置から開口部を開放する位置へと移動可能である1つ以上のドアを備え、第1のガス流誘導部は1つ以上のドアと処理領域との間に配置される装置。 - ドアが第1側壁部に枢動的に連結されている請求項5記載の装置。
- ドアが垂直面を移動可能である請求項5記載の装置。
- 1つ以上のガス流遮断部が開口部全体に亘る長さに及ぶ請求項5記載の装置。
- 第1側壁部を貫通する開口部を備えた複数の側壁部を有するチャンバ本体部と、
複数の側壁部に連結された複数のガス流誘導部であって、第1のガス流誘導部が第1側壁部に連結され、第1側壁部の開口部と実質的に一直線に揃って貫通する開口部を有しており、隣接する側壁部上のガス流誘導部が離間されているガス流誘導部と、
スリットバルブ開口部上を第1側壁部と第1のガス流誘導部との間で連結する、スリットバルブ開口部を超える長さに亘るガス流遮断部と、
その一辺が第1のガス流誘導部の外面と一直線に揃うようにチャンバ本体内に配置されているサセプタと、
チャンバ本体部内に配置され、スリットバルブ開口部を遮蔽する位置とスリットバルブ開口部が開放される位置との間で移動可能であるドアを備えた装置。 - ドアが第1側壁部に枢動的に連結されている請求項9記載の装置。
- ドアが垂直面を移動可能である請求項9記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US97076007P | 2007-09-07 | 2007-09-07 | |
US60/970,760 | 2007-09-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009062617A JP2009062617A (ja) | 2009-03-26 |
JP5527954B2 true JP5527954B2 (ja) | 2014-06-25 |
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JP2008228165A Expired - Fee Related JP5527954B2 (ja) | 2007-09-07 | 2008-09-05 | Pecvdシステムにおけるソースガス流路の制御によるチャンバ内部での副生成物の膜堆積制御 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8430961B2 (ja) |
JP (1) | JP5527954B2 (ja) |
KR (1) | KR101046520B1 (ja) |
CN (1) | CN101381862B (ja) |
TW (1) | TWI358509B (ja) |
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KR101374583B1 (ko) * | 2007-03-01 | 2014-03-17 | 어플라이드 머티어리얼스, 인코포레이티드 | Rf 셔터 |
KR101046520B1 (ko) * | 2007-09-07 | 2011-07-04 | 어플라이드 머티어리얼스, 인코포레이티드 | 내부 챔버 상의 부산물 막 증착을 제어하기 위한 pecvd 시스템에서의 소스 가스 흐름 경로 제어 |
JP5641556B2 (ja) * | 2009-09-30 | 2014-12-17 | 株式会社Screenホールディングス | 基板処理装置 |
JP2011144412A (ja) * | 2010-01-13 | 2011-07-28 | Honda Motor Co Ltd | プラズマ成膜装置 |
CN101880867B (zh) * | 2010-07-02 | 2012-12-26 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 等离子体增强化学气相沉积装置 |
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2008
- 2008-08-22 KR KR1020080082184A patent/KR101046520B1/ko active IP Right Grant
- 2008-09-04 CN CN2008101466906A patent/CN101381862B/zh not_active Expired - Fee Related
- 2008-09-05 TW TW097134242A patent/TWI358509B/zh not_active IP Right Cessation
- 2008-09-05 JP JP2008228165A patent/JP5527954B2/ja not_active Expired - Fee Related
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US20090064934A1 (en) | 2009-03-12 |
TW200925488A (en) | 2009-06-16 |
CN101381862B (zh) | 2011-05-04 |
TWI358509B (en) | 2012-02-21 |
KR20090026046A (ko) | 2009-03-11 |
US8430961B2 (en) | 2013-04-30 |
KR101046520B1 (ko) | 2011-07-04 |
CN101381862A (zh) | 2009-03-11 |
JP2009062617A (ja) | 2009-03-26 |
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