JP5514663B2 - 圧電振動デバイスおよび圧電振動デバイスの製造方法 - Google Patents
圧電振動デバイスおよび圧電振動デバイスの製造方法 Download PDFInfo
- Publication number
- JP5514663B2 JP5514663B2 JP2010174098A JP2010174098A JP5514663B2 JP 5514663 B2 JP5514663 B2 JP 5514663B2 JP 2010174098 A JP2010174098 A JP 2010174098A JP 2010174098 A JP2010174098 A JP 2010174098A JP 5514663 B2 JP5514663 B2 JP 5514663B2
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- Prior art keywords
- metal ring
- piezoelectric
- metal
- wafer
- vibration device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004519 manufacturing process Methods 0.000 title claims description 32
- 238000000034 method Methods 0.000 title claims description 30
- 229910052751 metal Inorganic materials 0.000 claims description 279
- 239000002184 metal Substances 0.000 claims description 279
- 239000003566 sealing material Substances 0.000 claims description 71
- 230000005284 excitation Effects 0.000 claims description 32
- 239000010410 layer Substances 0.000 claims description 31
- 230000005496 eutectics Effects 0.000 claims description 30
- 238000003860 storage Methods 0.000 claims description 24
- 238000005520 cutting process Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 8
- 235000014676 Phragmites communis Nutrition 0.000 claims description 6
- 239000002344 surface layer Substances 0.000 claims description 6
- 238000013459 approach Methods 0.000 claims description 5
- 244000089486 Phragmites australis subsp australis Species 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 88
- 239000000758 substrate Substances 0.000 description 19
- 230000002093 peripheral effect Effects 0.000 description 13
- 239000011651 chromium Substances 0.000 description 10
- 239000010931 gold Substances 0.000 description 9
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 description 9
- 239000013078 crystal Substances 0.000 description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 229910052804 chromium Inorganic materials 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 239000010453 quartz Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- 229910015363 Au—Sn Inorganic materials 0.000 description 3
- 244000273256 Phragmites communis Species 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910015365 Au—Si Inorganic materials 0.000 description 1
- BYDQGSVXQDOSJJ-UHFFFAOYSA-N [Ge].[Au] Chemical compound [Ge].[Au] BYDQGSVXQDOSJJ-UHFFFAOYSA-N 0.000 description 1
- OFLYIWITHZJFLS-UHFFFAOYSA-N [Si].[Au] Chemical compound [Si].[Au] OFLYIWITHZJFLS-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 235000011837 pasties Nutrition 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010174098A JP5514663B2 (ja) | 2010-08-03 | 2010-08-03 | 圧電振動デバイスおよび圧電振動デバイスの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010174098A JP5514663B2 (ja) | 2010-08-03 | 2010-08-03 | 圧電振動デバイスおよび圧電振動デバイスの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012034302A JP2012034302A (ja) | 2012-02-16 |
| JP2012034302A5 JP2012034302A5 (enrdf_load_stackoverflow) | 2013-08-15 |
| JP5514663B2 true JP5514663B2 (ja) | 2014-06-04 |
Family
ID=45847145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010174098A Active JP5514663B2 (ja) | 2010-08-03 | 2010-08-03 | 圧電振動デバイスおよび圧電振動デバイスの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5514663B2 (enrdf_load_stackoverflow) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6570379B2 (ja) * | 2015-09-07 | 2019-09-04 | 株式会社東芝 | 電子部品 |
| JP2017212612A (ja) * | 2016-05-26 | 2017-11-30 | 京セラ株式会社 | 圧電デバイス及びその製造方法 |
| CN109155620B (zh) * | 2016-06-29 | 2022-05-03 | 株式会社大真空 | 压电振动器件及压电振动器件的制造方法 |
| JP6358293B2 (ja) * | 2016-07-27 | 2018-07-18 | 株式会社大真空 | 圧電振動デバイスの製造方法 |
| JP2018019417A (ja) * | 2017-09-25 | 2018-02-01 | 株式会社大真空 | 圧電振動デバイス |
| JP7406341B2 (ja) * | 2019-10-21 | 2023-12-27 | 太陽誘電株式会社 | 電子部品、フィルタおよびマルチプレクサ |
| JP7591434B2 (ja) | 2021-03-09 | 2024-11-28 | 太陽誘電株式会社 | 電子部品、フィルタおよびマルチプレクサ |
-
2010
- 2010-08-03 JP JP2010174098A patent/JP5514663B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012034302A (ja) | 2012-02-16 |
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