JP5510928B2 - 集積回路の発光画像を生成するための方法、システム、およびプログラム - Google Patents

集積回路の発光画像を生成するための方法、システム、およびプログラム Download PDF

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Publication number
JP5510928B2
JP5510928B2 JP2010142215A JP2010142215A JP5510928B2 JP 5510928 B2 JP5510928 B2 JP 5510928B2 JP 2010142215 A JP2010142215 A JP 2010142215A JP 2010142215 A JP2010142215 A JP 2010142215A JP 5510928 B2 JP5510928 B2 JP 5510928B2
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Japan
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images
image
overlapping portion
overlapping
optical system
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JP2010142215A
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Japanese (ja)
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JP2011010300A5 (enExample
JP2011010300A (ja
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フランコ・ステラリ
ペリン・ソン
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International Business Machines Corp
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International Business Machines Corp
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/30—Determination of transform parameters for the alignment of images, i.e. image registration
    • G06T7/32—Determination of transform parameters for the alignment of images, i.e. image registration using correlation-based methods
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/58—Means for changing the camera field of view without moving the camera body, e.g. nutating or panning of optics or image sensors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/222—Studio circuitry; Studio devices; Studio equipment
    • H04N5/262—Studio circuits, e.g. for mixing, switching-over, change of character of image, other special effects ; Cameras specially adapted for the electronic generation of special effects
    • H04N5/2621—Cameras specially adapted for the electronic generation of special effects during image pickup, e.g. digital cameras, camcorders, video cameras having integrated special effects capability
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/222—Studio circuitry; Studio devices; Studio equipment
    • H04N5/262—Studio circuits, e.g. for mixing, switching-over, change of character of image, other special effects ; Cameras specially adapted for the electronic generation of special effects
    • H04N5/2625—Studio circuits, e.g. for mixing, switching-over, change of character of image, other special effects ; Cameras specially adapted for the electronic generation of special effects for obtaining an image which is composed of images from a temporal image sequence, e.g. for a stroboscopic effect
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/222—Studio circuitry; Studio devices; Studio equipment
    • H04N5/262—Studio circuits, e.g. for mixing, switching-over, change of character of image, other special effects ; Cameras specially adapted for the electronic generation of special effects
    • H04N5/2628—Alteration of picture size, shape, position or orientation, e.g. zooming, rotation, rolling, perspective, translation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/303—Contactless testing of integrated circuits
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2200/00—Indexing scheme for image data processing or generation, in general
    • G06T2200/32—Indexing scheme for image data processing or generation, in general involving image mosaicing
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10056—Microscopic image
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

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  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Image Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Studio Devices (AREA)
JP2010142215A 2009-06-29 2010-06-23 集積回路の発光画像を生成するための方法、システム、およびプログラム Expired - Fee Related JP5510928B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/493686 2009-06-29
US12/493,686 US8331726B2 (en) 2009-06-29 2009-06-29 Creating emission images of integrated circuits

Publications (3)

Publication Number Publication Date
JP2011010300A JP2011010300A (ja) 2011-01-13
JP2011010300A5 JP2011010300A5 (enExample) 2013-10-03
JP5510928B2 true JP5510928B2 (ja) 2014-06-04

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JP2010142215A Expired - Fee Related JP5510928B2 (ja) 2009-06-29 2010-06-23 集積回路の発光画像を生成するための方法、システム、およびプログラム

Country Status (3)

Country Link
US (1) US8331726B2 (enExample)
JP (1) JP5510928B2 (enExample)
CN (1) CN101937055B (enExample)

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US20110090327A1 (en) * 2009-10-15 2011-04-21 General Electric Company System and method for imaging with enhanced depth of field
US8314837B2 (en) * 2009-10-15 2012-11-20 General Electric Company System and method for imaging with enhanced depth of field
US9581642B2 (en) * 2010-05-12 2017-02-28 International Business Machines Corporation Method and system for quickly identifying circuit components in an emission image
US8472735B2 (en) 2010-09-30 2013-06-25 The Charles Stark Draper Laboratory, Inc. Attitude estimation with compressive sampling of starfield data
US8472736B2 (en) * 2010-09-30 2013-06-25 The Charles Stark Draper Laboratory, Inc. Attitude estimation by reducing noise with dragback
US8472737B2 (en) 2010-09-30 2013-06-25 The Charles Stark Draper Laboratory, Inc. Attitude estimation in compressed domain
US8750595B2 (en) * 2010-10-06 2014-06-10 International Business Machines Corporation Registering measured images to layout data
JP2013025466A (ja) * 2011-07-19 2013-02-04 Sony Corp 画像処理装置、画像処理システム及び画像処理プログラム
KR101215083B1 (ko) 2011-12-27 2012-12-24 경북대학교 산학협력단 기판 검사장치의 높이정보 생성 방법
JP5923824B2 (ja) * 2012-02-21 2016-05-25 株式会社ミツトヨ 画像処理装置
JP5783953B2 (ja) * 2012-05-30 2015-09-24 株式会社日立ハイテクノロジーズ パターン評価装置およびパターン評価方法
US9557369B2 (en) * 2012-06-22 2017-01-31 International Business Machines Corporation Integrated time dependent dielectric breakdown reliability testing
US20140119635A1 (en) * 2012-11-01 2014-05-01 Entropic Communications, Inc Emission Curve Tracer Imaging
DE102012223763B3 (de) * 2012-12-19 2013-08-22 Leica Microsystems (Schweiz) Ag Verfahren zur Selbstkalibrierung eines Mikroskopgeräts
CN107076980A (zh) * 2014-08-18 2017-08-18 维斯科技有限公司 用于大视场显微扫描中嵌入图像的系统和方法
JP5954757B2 (ja) * 2015-01-09 2016-07-20 上野精機株式会社 外観検査装置
CN105388414A (zh) * 2015-10-23 2016-03-09 国网山西省电力公司大同供电公司 一种隔离开关的全方位故障自动识别方法
JP2019011961A (ja) 2017-06-29 2019-01-24 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
JP6903270B2 (ja) * 2017-06-29 2021-07-14 株式会社Ｎｓテクノロジーズ 電子部品搬送装置および電子部品検査装置
JP2019027922A (ja) 2017-07-31 2019-02-21 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
DE102018126371A1 (de) * 2018-10-23 2020-04-23 Hensoldt Optronics Gmbh Verfahren zur Anzeige eines Panoramabilds auf einer Bildwiedergabeeinrichtung
US10839508B2 (en) * 2019-03-21 2020-11-17 Sri International Integrated circuit image alignment and stitching

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JPH08181903A (ja) * 1994-12-26 1996-07-12 Olympus Optical Co Ltd 撮像装置
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Also Published As

Publication number Publication date
US20100329586A1 (en) 2010-12-30
CN101937055B (zh) 2013-09-04
US8331726B2 (en) 2012-12-11
CN101937055A (zh) 2011-01-05
JP2011010300A (ja) 2011-01-13

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