JP2011010300A5 - - Google Patents
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- JP2011010300A5 JP2011010300A5 JP2010142215A JP2010142215A JP2011010300A5 JP 2011010300 A5 JP2011010300 A5 JP 2011010300A5 JP 2010142215 A JP2010142215 A JP 2010142215A JP 2010142215 A JP2010142215 A JP 2010142215A JP 2011010300 A5 JP2011010300 A5 JP 2011010300A5
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- JP
- Japan
- Prior art keywords
- images
- overlapping portion
- image
- predicting
- optical system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000000034 method Methods 0.000 claims 11
- 230000003287 optical effect Effects 0.000 claims 11
- 238000003384 imaging method Methods 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 1
- 230000000007 visual effect Effects 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/493,686 US8331726B2 (en) | 2009-06-29 | 2009-06-29 | Creating emission images of integrated circuits |
| US12/493686 | 2009-06-29 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011010300A JP2011010300A (ja) | 2011-01-13 |
| JP2011010300A5 true JP2011010300A5 (enExample) | 2013-10-03 |
| JP5510928B2 JP5510928B2 (ja) | 2014-06-04 |
Family
ID=43380819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010142215A Expired - Fee Related JP5510928B2 (ja) | 2009-06-29 | 2010-06-23 | 集積回路の発光画像を生成するための方法、システム、およびプログラム |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8331726B2 (enExample) |
| JP (1) | JP5510928B2 (enExample) |
| CN (1) | CN101937055B (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8314837B2 (en) * | 2009-10-15 | 2012-11-20 | General Electric Company | System and method for imaging with enhanced depth of field |
| US20110090327A1 (en) * | 2009-10-15 | 2011-04-21 | General Electric Company | System and method for imaging with enhanced depth of field |
| US9581642B2 (en) * | 2010-05-12 | 2017-02-28 | International Business Machines Corporation | Method and system for quickly identifying circuit components in an emission image |
| US8472736B2 (en) * | 2010-09-30 | 2013-06-25 | The Charles Stark Draper Laboratory, Inc. | Attitude estimation by reducing noise with dragback |
| US8472735B2 (en) | 2010-09-30 | 2013-06-25 | The Charles Stark Draper Laboratory, Inc. | Attitude estimation with compressive sampling of starfield data |
| US8472737B2 (en) | 2010-09-30 | 2013-06-25 | The Charles Stark Draper Laboratory, Inc. | Attitude estimation in compressed domain |
| US8750595B2 (en) * | 2010-10-06 | 2014-06-10 | International Business Machines Corporation | Registering measured images to layout data |
| JP2013025466A (ja) * | 2011-07-19 | 2013-02-04 | Sony Corp | 画像処理装置、画像処理システム及び画像処理プログラム |
| KR101215083B1 (ko) * | 2011-12-27 | 2012-12-24 | 경북대학교 산학협력단 | 기판 검사장치의 높이정보 생성 방법 |
| JP5923824B2 (ja) * | 2012-02-21 | 2016-05-25 | 株式会社ミツトヨ | 画像処理装置 |
| JP5783953B2 (ja) * | 2012-05-30 | 2015-09-24 | 株式会社日立ハイテクノロジーズ | パターン評価装置およびパターン評価方法 |
| US9557369B2 (en) * | 2012-06-22 | 2017-01-31 | International Business Machines Corporation | Integrated time dependent dielectric breakdown reliability testing |
| US20140119635A1 (en) * | 2012-11-01 | 2014-05-01 | Entropic Communications, Inc | Emission Curve Tracer Imaging |
| DE102012223763B3 (de) * | 2012-12-19 | 2013-08-22 | Leica Microsystems (Schweiz) Ag | Verfahren zur Selbstkalibrierung eines Mikroskopgeräts |
| CN107076980A (zh) * | 2014-08-18 | 2017-08-18 | 维斯科技有限公司 | 用于大视场显微扫描中嵌入图像的系统和方法 |
| JP5954757B2 (ja) * | 2015-01-09 | 2016-07-20 | 上野精機株式会社 | 外観検査装置 |
| CN105388414A (zh) * | 2015-10-23 | 2016-03-09 | 国网山西省电力公司大同供电公司 | 一种隔离开关的全方位故障自动识别方法 |
| JP2019011961A (ja) | 2017-06-29 | 2019-01-24 | セイコーエプソン株式会社 | 電子部品搬送装置および電子部品検査装置 |
| JP6903270B2 (ja) | 2017-06-29 | 2021-07-14 | 株式会社Ｎｓテクノロジーズ | 電子部品搬送装置および電子部品検査装置 |
| JP2019027922A (ja) | 2017-07-31 | 2019-02-21 | セイコーエプソン株式会社 | 電子部品搬送装置および電子部品検査装置 |
| DE102018126371A1 (de) * | 2018-10-23 | 2020-04-23 | Hensoldt Optronics Gmbh | Verfahren zur Anzeige eines Panoramabilds auf einer Bildwiedergabeeinrichtung |
| US10839508B2 (en) * | 2019-03-21 | 2020-11-17 | Sri International | Integrated circuit image alignment and stitching |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4755874A (en) * | 1987-08-31 | 1988-07-05 | Kla Instruments Corporation | Emission microscopy system |
| JPH08181903A (ja) * | 1994-12-26 | 1996-07-12 | Olympus Optical Co Ltd | 撮像装置 |
| JPH09281405A (ja) * | 1996-04-17 | 1997-10-31 | Olympus Optical Co Ltd | 顕微鏡システム |
| US6031930A (en) | 1996-08-23 | 2000-02-29 | Bacus Research Laboratories, Inc. | Method and apparatus for testing a progression of neoplasia including cancer chemoprevention testing |
| US6185030B1 (en) * | 1998-03-20 | 2001-02-06 | James W. Overbeck | Wide field of view and high speed scanning microscopy |
| US6313452B1 (en) * | 1998-06-10 | 2001-11-06 | Sarnoff Corporation | Microscopy system utilizing a plurality of images for enhanced image processing capabilities |
| JP2000163560A (ja) * | 1998-11-30 | 2000-06-16 | Sharp Corp | 静止画像処理装置 |
| GB2383487B (en) * | 2001-12-18 | 2006-09-27 | Fairfield Imaging Ltd | Method and apparatus for acquiring digital microscope images |
| WO2004025331A2 (en) | 2002-09-16 | 2004-03-25 | Rensselaer Polytechnic Institute | Microscope with extended field of vision |
| US7245758B2 (en) * | 2003-08-20 | 2007-07-17 | Lsi Corporation | Whole-wafer photoemission analysis |
| GB0403576D0 (en) * | 2004-02-18 | 2004-03-24 | Prior Scient Instr Ltd | Stage apparatus |
| US7653260B2 (en) * | 2004-06-17 | 2010-01-26 | Carl Zeis MicroImaging GmbH | System and method of registering field of view |
| US20060291042A1 (en) * | 2005-05-17 | 2006-12-28 | Alfano Robert R | Optical scanning zoom microscope with high magnification and a large field of view |
| KR101008917B1 (ko) * | 2006-09-14 | 2011-01-17 | 후지쯔 가부시끼가이샤 | 화상 처리 방법 및 장치와 그 프로그램을 기록한 기록 매체 |
| US8072589B2 (en) * | 2007-01-18 | 2011-12-06 | Dcg Systems, Inc. | System and method for photoemission-based defect detection |
| US8098956B2 (en) | 2007-03-23 | 2012-01-17 | Vantana Medical Systems, Inc. | Digital microscope slide scanning system and methods |
| US8131056B2 (en) * | 2008-09-30 | 2012-03-06 | International Business Machines Corporation | Constructing variability maps by correlating off-state leakage emission images to layout information |
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2009
- 2009-06-29 US US12/493,686 patent/US8331726B2/en not_active Expired - Fee Related
-
2010
- 2010-06-22 CN CN2010102132859A patent/CN101937055B/zh not_active Expired - Fee Related
- 2010-06-23 JP JP2010142215A patent/JP5510928B2/ja not_active Expired - Fee Related