JP5508607B2 - 高分子フィルムと高分子フィルムとを接合する方法、高分子フィルムと無機材料基板とを接合する方法、高分子フィルム積層体及び高分子フィルムと無機材料基板との積層体 - Google Patents
高分子フィルムと高分子フィルムとを接合する方法、高分子フィルムと無機材料基板とを接合する方法、高分子フィルム積層体及び高分子フィルムと無機材料基板との積層体 Download PDFInfo
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- JP5508607B2 JP5508607B2 JP2013555691A JP2013555691A JP5508607B2 JP 5508607 B2 JP5508607 B2 JP 5508607B2 JP 2013555691 A JP2013555691 A JP 2013555691A JP 2013555691 A JP2013555691 A JP 2013555691A JP 5508607 B2 JP5508607 B2 JP 5508607B2
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- polymer film
- inorganic material
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- polymer
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- 229920006254 polymer film Polymers 0.000 title claims description 250
- 229910010272 inorganic material Inorganic materials 0.000 title claims description 217
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- MFJDFPRQTMQVHI-UHFFFAOYSA-N 3,5-dioxabicyclo[5.2.2]undeca-1(9),7,10-triene-2,6-dione Chemical compound O=C1OCOC(=O)C2=CC=C1C=C2 MFJDFPRQTMQVHI-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
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- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
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- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
- B29C65/14—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
- B29C65/1429—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation characterised by the way of heating the interface
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- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
- B29C65/14—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
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- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
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- B29C66/01—General aspects dealing with the joint area or with the area to be joined
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- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
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- B29C66/7232—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the structure of the material of the parts to be joined being multi-layered comprising a non-plastics layer
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- B29C66/737—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the state of the material of the parts to be joined
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- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/80—General aspects of machine operations or constructions and parts thereof
- B29C66/82—Pressure application arrangements, e.g. transmission or actuating mechanisms for joining tools or clamps
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- B29C66/8221—Scissor or lever mechanisms, i.e. involving a pivot point
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/80—General aspects of machine operations or constructions and parts thereof
- B29C66/83—General aspects of machine operations or constructions and parts thereof characterised by the movement of the joining or pressing tools
- B29C66/832—Reciprocating joining or pressing tools
- B29C66/8324—Joining or pressing tools pivoting around one axis
- B29C66/83241—Joining or pressing tools pivoting around one axis cooperating pivoting tools
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- B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B2457/00—Electrical equipment
- B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
- B32B2457/206—Organic displays, e.g. OLED
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/0076—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised in that the layers are not bonded on the totality of their surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/02—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by a sequence of laminating steps, e.g. by adding new layers at consecutive laminating stations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/16—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating
- B32B37/18—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating involving the assembly of discrete sheets or panels only
- B32B37/182—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating involving the assembly of discrete sheets or panels only one or more of the layers being plastic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/16—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating
- B32B37/20—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating involving the assembly of continuous webs only
- B32B37/203—One or more of the layers being plastic
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
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- Y10T428/31681—Next to polyester, polyamide or polyimide [e.g., alkyd, glue, or nylon, etc.]
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Description
図1は、本願発明の第一の実施形態に係る2枚の高分子フィルムを接合する方法を示すフローチャートである。
工程S1及び工程S3での高分子フィルム上への無機材料層の形成は、様々な手法により行うことができるが、所定の無機材料をスパッタリングにより高分子フィルム上に堆積させることで行うことが好ましい。
工程S2及び工程S4での無機材料層の表面活性化処理は、様々な手法により行うことができるが、粒子ビーム源4から所定の運動エネルギーを有した粒子(粒子ビーム5)を放射して、無機材料層の表面に当該粒子を衝突させることが好ましい。
上記のように、スパッタリングに用いる粒子ビーム源と表面活性化処理に用いる粒子ビーム源とを同じ粒子ビーム源で構成することで、装置構成を簡略化できる。また、粒子ビーム源を回転させるだけで、無機材料層の形成処理から表面活性化処理に切り替えることができるので、工程間の所要時間を短縮することができる。(図2(a)及び図2(b))
粒子ビーム源を用いて無機材料層の表面活性化処理を行う場合には、無機材料層の表面活性化処理S2及びS4から、表面活性化処理された無機材料層I1及びI2の表面A1及びA2を互いに当接させるまでの工程を、真空を破らずに行うことが好ましい。特に、プロセス開始前の真空度は、1×10−5Pa(パスカル)以下の圧力に到達していることが好ましい。この真空度は、粒子ビーム源の駆動に必要であるとともに、残存雰囲気に存在する酸素、水又は汚染粒子などの付着を低減して、表面活性化処理された無機材料層を当接させるのみで、十分な接合強度を有する接合界面を形成することを可能にする。
第一の実施形態の一実施例として、高分子フィルムにPETを採用し、無機材料層にアルミニウム(Al)、銅(Cu)又はケイ素(Si)を採用した場合の接合について、それぞれ説明する。
実施例1では、高分子フィルムにPETを用いたが、高分子フィルムをPENとして同様の接合実験を行った。PETの場合と同様に、いずれの無機材料層の場合でも、治具により加圧された部分のほぼ全部の領域で、接合界面が形成されていることが確認された。図7は、銅を無機材料層として採用した場合の、接合後の高分子フィルムの接合領域を撮影した画像である。
実施例3では、高分子フィルムにPENを採用し、無機材料層をケイ素の層とアルミニウムの層とを積層して形成した。本実施例において、無機材料層の形成の条件及び表面活性化処理の条件は、実施例1と異り、これら以外の条件は同様であった。以下、無機材料層の形成の条件及び表面活性化処理の条件について説明する。
これらの接合された高分子フィルムの接合体を、接合領域の端から引き剥がすテストでは、高分子フィルムが破壊し、接合界面で破壊することはなかった。さらに、高分子フィルムの接合体に対して、高分子フィルムに一対の治具を強固に接着し、これらの治具を接合面に垂直な方向へ引っ張る引張試験を行った。以降、この引張試験において、接合体が破壊したときに加えられていた力を接合面積で除した値を、引張強度と呼ぶ。いずれの試料の場合も、引張試験中に接合界面が破壊することはなく、破壊は、高分子フィルム中で起きた。したがって、接合界面の引張強度は、高分子フィルムの引張強度よりも高いことが分かった。いずれの場合も、約50kgf/cm2を超える値まで、破壊が観察されなかった。以上より、本願発明に係る高分子フィルムの接合方法によれば、十分な機械的強度を有する高分子フィルムの接合体を加熱工程を経ずに形成できることが確認された。
図9は、第一の実施形態に係る高分子フィルム同士の接合をより効率的に行うための、所謂ロールトゥロール方式の装置構成の一例を示す概略正面図である。
第一及び第二の実施形態では、高分子フィルムと高分子フィルムとを接合するが、第三の実施形態では、高分子フィルムを無機材料の一例としてガラスの基板に接合する。本実施形態では、高分子フィルムとガラス基板上に無機材料層を形成し、形成された無機材料層の表面に対して表面活性化処理を行い、表面活性化処理された無機材料層同士を当接させることで、高分子フィルムとガラス基板とを接合する。
2 真空チャンバ
3、31、32 スパッタターゲット
4、41、42、43、44 粒子ビーム源
4A 粒子ビーム源の回転軸
4B 粒子ビーム放射口
5 粒子ビーム
6 支持体
6A 支持体の回転軸
7 無機材料の原子又はクラスター
51 接合領域
52 接合していない領域
F1、F2 高分子フィルム
I1、I2 無機材料層
A1、A2 無機材料層の表面
R1、R2 供給ローラ
R3 接合ローラ
R4 巻取りローラ
Claims (20)
- 高分子フィルムを接合する方法であって、
第一の高分子フィルム上の一部又は全部に第一の無機材料層を形成するステップと、
第二の高分子フィルム上の一部又は全部に第二の無機材料層を形成するステップと、
第一の無機材料層の表面を、所定の運動エネルギーを有する粒子を衝突させることで表面活性化処理するステップと、
第二の無機材料層の表面を、所定の運動エネルギーを有する粒子を衝突させることで表面活性化処理するステップと、
表面活性化処理された第一の無機材料層の表面を表面活性化処理された第二の無機材料層の表面に当接させて、第一の高分子フィルムと第二の高分子フィルムとを接合するステップと、
を有し、
前記第一の高分子フィルム上に形成される前記第一の無機材料層と、前記第二の高分子フィルム上に形成される前記第二の無機材料層とは、それぞれ、スパッタリング法を用いて形成される、
高分子フィルムの接合方法。 - 第一の高分子フィルムと第二の高分子フィルムとは、ポリイミド樹脂、あるいはポリエチレンナフタレート(PEN)、ポリエチレンテレフタレート(PET)、ポリブチレンテレフタレート(PBT)及びポリトリメチレンテレフタレート(PTT)からなる群から選択されるポリエステル樹脂を主成分として形成される、請求項1に記載の高分子フィルムの接合方法。
- 第一の高分子フィルムと第二の高分子フィルムとは、異なる材料により形成される、請求項1又は2に記載の高分子フィルムの接合方法。
- 第一の無機材料層と第二の無機材料層とは、銅(Cu)、アルミニウム(Al)及び鉄(Fe)からなる群から選択される金属又はこれらの合金を主成分として形成される、請求項1から3のいずれか一項に記載の高分子フィルムの接合方法。
- 第一の無機材料層と第二の無機材料層とは、ケイ素(Si)を主成分として形成される、請求項1から3のいずれか一項に記載の高分子フィルムの接合方法。
- 第一の無機材料層と第二の無機材料層とには鉄が含まれる、請求項5に記載の高分子フィルムの接合方法。
- 第一の無機材料層と第二の無機材料層とは、複数の材料の層からなる、請求項1から6のいずれか一項に記載の高分子フィルムの接合方法。
- 前記表面活性化処理は、第一の無機材料層及び第二の無機材料層の表面に、0.1keVから2keVの運動エネルギーを有するアルゴン(Ar)粒子を衝突させることで行うことを特徴とする、請求項1から7のいずれか一項に記載の高分子フィルムの接合方法。
- 前記第一の無機材料層の形成の前に、第一の高分子フィルムを第一の高分子フィルムの融点以下又は熱分解温度以下の温度で加熱するステップと、
前記第二の無機材料層の形成の前に、第二の高分子フィルムを第二の高分子フィルムの融点以下又は熱分解温度以下の温度で加熱するステップと、
を更に有する請求項1から8のいずれか一項に記載の高分子フィルムの接合方法。 - 表面活性化処理された第一の無機材料層の表面を表面活性化処理された第二の無機材料層の表面に当接させる際に、第一の高分子フィルムと第二の高分子フィルムの接合界面に垂直な方向に5MPa以上の圧力を加える、請求項1から9のいずれか一項に記載の高分子フィルムの接合方法。
- 前記第一の無機材料層を形成するステップと、前記第二の無機材料層を形成するステップとは、ライン型の粒子ビーム源を用いて行われる、請求項1から10のいずれか一項に記載の高分子フィルムの接合方法。
- 高分子フィルムを接合する方法であって、
第一の供給ローラから帯状の第一の高分子フィルムを供給するステップと、
第二の供給ローラから帯状の第二の高分子フィルムを供給するステップと、
第一の供給ローラから供給された第一の高分子フィルム上に第一の無機材料層を形成するステップと、
第二の供給ローラから供給された第二の高分子フィルム上に第二の無機材料層を形成するステップと、
第一の無機材料層の表面を、所定の運動エネルギーを有する粒子を衝突させることで表面活性化処理するステップと、
第二の無機材料層の表面を、所定の運動エネルギーを有する粒子を衝突させることで表面活性化処理するステップと、
表面活性化処理された第一の無機材料層の表面を表面活性化処理された第二の無機材料層の表面に接触させて、第一の高分子フィルムと第二の高分子フィルムとを接合するステップと、
第一の高分子フィルムと第二の高分子フィルムとの接合により形成された積層高分子フィルムを、巻取りローラに巻き取るステップと、
を有し、
前記第一の高分子フィルム上に形成される前記第一の無機材料層と、前記第二の高分子フィルム上に形成される前記第二の無機材料層とは、それぞれ、スパッタリング法を用いて形成される、
高分子フィルムの接合方法。 - 高分子フィルムを無機材料基板に接合する方法であって、
高分子フィルム上の一部又は全部に第一の無機材料層を形成するステップと、
無機材料基板上の一部又は全部に第二の無機材料層を形成するステップと、
第一の無機材料層の表面を、所定の運動エネルギーを有する粒子を衝突させることで表面活性化処理するステップと、
第二の無機材料層の表面を、所定の運動エネルギーを有する粒子を衝突させることで表面活性化処理するステップと、
表面活性化処理された第一の無機材料層の表面を表面活性化処理された第二の無機材料層の表面に当接させて、高分子フィルムと無機材料基板とを接合するステップと、
を有し、
前記高分子フィルム上に形成される前記第一の無機材料層と、前記無機材料基板上に形成される前記第二の無機材料層とは、それぞれ、スパッタリング法を用いて形成される、
高分子フィルムを無機材料基板に接合する方法。 - 第一の高分子フィルムと、
第二の高分子フィルムと、
第一の高分子フィルムと第二の高分子フィルムとの間の一部又は全部に配置され、第一の高分子フィルムと第二の高分子フィルムとを接着する無機材料層と、
を有し、
前記無機材料層は、スパッタリング法を用いて形成された、
高分子フィルム積層体。 - 第一の高分子フィルムと第二の高分子フィルムとは、ポリイミド樹脂又はポリエステル樹脂を主成分として形成される、請求項14に記載の高分子フィルム積層体。
- 前記無機材料層は、銅(Cu)、アルミニウム(Al)及び鉄(Fe)からなる群から選択される金属又はこれらの合金を主成分として形成される、請求項14又は15に記載の高分子フィルム積層体。
- 前記無機材料層は、ケイ素(Si)を主成分として形成される、請求項14又は15に記載の高分子フィルム積層体。
- 前記無機材料層には鉄が含まれる、請求項17に記載の高分子フィルム積層体。
- 前記無機材料層は、複数の材料の層からなる、請求項14から18のいずれか一項に記載の高分子フィルム積層体。
- 高分子フィルムと、
無機材料基板と、
高分子フィルムと無機材料基板との間の一部又は全部に配置され、高分子フィルムと無機材料基板とを接着する無機材料の接着層と、
を有し、
前記無機材料の接着層は、スパッタリング法を用いて形成された、
高分子フィルムと無機材料基板との積層体。
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WO2016010106A1 (ja) * | 2014-07-16 | 2016-01-21 | ランテクニカルサービス株式会社 | 薄型基板およびその製造方法、並びに基板の搬送方法 |
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US20150104656A1 (en) | 2015-04-16 |
EP2837490B1 (en) | 2018-09-26 |
CN104245280A (zh) | 2014-12-24 |
KR102092737B1 (ko) | 2020-05-27 |
KR20150003243A (ko) | 2015-01-08 |
EP2837490A1 (en) | 2015-02-18 |
EP2837490B8 (en) | 2018-11-21 |
EP2837490A4 (en) | 2016-02-24 |
JPWO2013154107A1 (ja) | 2015-12-17 |
HK1203897A1 (en) | 2015-11-06 |
US9962908B2 (en) | 2018-05-08 |
WO2013154107A1 (ja) | 2013-10-17 |
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