JP5507249B2 - 空間分解能制御を備えた分光器 - Google Patents
空間分解能制御を備えた分光器 Download PDFInfo
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- JP5507249B2 JP5507249B2 JP2009526878A JP2009526878A JP5507249B2 JP 5507249 B2 JP5507249 B2 JP 5507249B2 JP 2009526878 A JP2009526878 A JP 2009526878A JP 2009526878 A JP2009526878 A JP 2009526878A JP 5507249 B2 JP5507249 B2 JP 5507249B2
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- 230000003287 optical effect Effects 0.000 claims description 58
- 238000003491 array Methods 0.000 claims description 9
- 230000000153 supplemental effect Effects 0.000 claims description 2
- 238000001429 visible spectrum Methods 0.000 claims description 2
- 238000002329 infrared spectrum Methods 0.000 claims 1
- 238000005286 illumination Methods 0.000 description 21
- 238000005259 measurement Methods 0.000 description 17
- 238000001228 spectrum Methods 0.000 description 16
- 230000000694 effects Effects 0.000 description 8
- 239000000523 sample Substances 0.000 description 7
- 238000003384 imaging method Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 230000003595 spectral effect Effects 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000004611 spectroscopical analysis Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 1
- 238000012935 Averaging Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000701 chemical imaging Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000013074 reference sample Substances 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0237—Adjustable, e.g. focussing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/024—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using means for illuminating a slit efficiently (e.g. entrance slit of a spectrometer or entrance face of fiber)
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0262—Constructional arrangements for removing stray light
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
- Spectrometry And Color Measurement (AREA)
Description
100 分光器
200 照明要素
202 光源
204 光源出力開口
206,208,210 集束反射鏡
212,214,216 反射鏡
218 対物光源光学要素
218c 凹面反射鏡
218x 凸面反射鏡
220 焦点
300 集光要素
302 対物集光光学要素
302c 凹面反射鏡
302x 凸面反射鏡
304,306 反射鏡
308 集束反射鏡
310,316,318 開口アレイ
310a 開口
312 カメラ光学要素
312c 凹面反射鏡
312x 凸面反射鏡
314 検出器
400 顕微鏡光源
402 観察光学要素
Claims (12)
- 分光器であって、
a.標本ステージと、
b.前記標本ステージから光を受ける対物集光要素と、
c.複数の開口を有する開口アレイであって、前記開口のそれぞれが前記対物集光要素からの光の一部を受けるような、前記開口アレイと、を備え、
前記開口アレイは複数の開口を備え、それぞれの開口は同じサイズと構成を有し、前記開口アレイは、前記開口アレイの開口とは異なるサイズに形成された複数の開口を備えた補足アレイをさらに具備し、前記開口アレイと前記補足アレイとは、同一平面に沿って交換可能に位置決め可能に取り付けられており、
d.前記開口アレイから光を受けるカメラ要素と、
e.前記カメラ要素から光を受ける多要素検出器であって、この検出器の要素のそれぞれが、前記開口アレイのそれぞれの開口から前記標本ステージの一部の画像を受けるような、前記多要素検出器と、
f.前記対物集光要素から光を受ける観察光学要素をさらに具備し、この観察光学要素によって受けられる光は、少なくとも実質的に、可視スペクトルの範囲内にある、ことを特徴とする分光器。 - 前記標本ステージは、前記開口アレイ上に臨界的に映し出されることを特徴とする請求項1に記載の分光器。
- a.前記対物集光要素は、対物集光限界開口を有し、
b.前記カメラ要素は、カメラ限界開口を有し、
c.前記カメラ要素において、前記開口アレイから受けた光は、前記カメラ限界開口と少なくとも実質的に合致した直径を有している、
ことを特徴とする請求項1に記載の分光器。 - a.前記対物集光要素及び前記開口アレイから光を受け、
b.その光を前記カメラ要素に供給する、
ように構成された中間光学要素をさらに具備する、
ことを特徴とする請求項1に記載の分光器。 - 前記カメラ要素は、前記中間光学要素から平行光を受けることを特徴とする請求項4に記載の分光器。
- 前記開口アレイは、
a.前記対物集光要素の焦点、かつ、
b.前記中間光学要素の焦点、
に配置されていることを特徴とする請求項4に記載の分光器。 - 1又は複数の補足アレイをさらに具備し、
a.前記開口アレイ及び前記補足アレイは、前記対物集光要素かつ前記中間光学要素の焦点に交換可能に配置されるように取り付けられ、
b.それぞれの前記アレイは、他方のアレイの開口とは異なるサイズの開口を備えている、
ことを特徴とする請求項6に記載の分光器。 - 前記中間光学要素の焦点距離は、前記対物集光要素の焦点距離と等しいことを特徴とする請求項4に記載の分光器。
- 前記中間光学要素と前記カメラ要素との間を光が通過する経路は、前記対物集光要素と前記中間光学要素との間を光が通過する経路と等しい長さを有していることを特徴とする請求項4に記載の分光器。
- 前記開口アレイは、前記対物集光要素及び前記中間光学要素の焦点に配置されていることを特徴とする請求項9に記載の分光器。
- 前記中間光学要素の焦点距離は、前記対物集光要素の焦点距離と等しいことを特徴とする請求項10に記載の分光器。
- 前記カメラ要素によって受けられる光は、少なくとも実質的に、赤外線スペクトルの範囲内にあることを特徴とする請求項1に記載の分光器。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US84090106P | 2006-08-28 | 2006-08-28 | |
US84075906P | 2006-08-28 | 2006-08-28 | |
US60/840,901 | 2006-08-28 | ||
US60/840,759 | 2006-08-28 | ||
PCT/US2007/077044 WO2008027930A2 (en) | 2006-08-28 | 2007-08-28 | Spectroscope with spatial resolution control |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010502958A JP2010502958A (ja) | 2010-01-28 |
JP5507249B2 true JP5507249B2 (ja) | 2014-05-28 |
Family
ID=39136818
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009526877A Active JP5507248B2 (ja) | 2006-08-28 | 2007-08-28 | 口径食が減少された分光器 |
JP2009526878A Active JP5507249B2 (ja) | 2006-08-28 | 2007-08-28 | 空間分解能制御を備えた分光器 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
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JP2009526877A Active JP5507248B2 (ja) | 2006-08-28 | 2007-08-28 | 口径食が減少された分光器 |
Country Status (4)
Country | Link |
---|---|
US (2) | US7456950B2 (ja) |
EP (2) | EP2062017A4 (ja) |
JP (2) | JP5507248B2 (ja) |
WO (2) | WO2008027929A2 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
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BR112012025738A2 (pt) * | 2010-04-09 | 2016-06-28 | Univ Northeastern | sistema de formação de imagem infravermelho baseado em laser sintonizável e seu método de utilização |
DE102012200851B3 (de) | 2012-01-20 | 2013-07-25 | Bruker Optik Gmbh | Infrarot(=IR)-Mikroskop mit Bildfeldkrümmungs-Kompensation und zusätzlicher Ausleuchtungsoptimierung im Beobachtunqsstrahlenqang des sichtbaren Lichts |
WO2015063300A1 (en) * | 2013-11-04 | 2015-05-07 | Tomra Sorting Nv | Inspection apparatus |
US10033996B2 (en) | 2014-02-06 | 2018-07-24 | Bar Ilan University | System and method for imaging with pinhole arrays |
JP6687826B2 (ja) * | 2015-04-06 | 2020-04-28 | 株式会社サタケ | 穀粒品位判別装置及び該装置における穀粒からの光の受光方法 |
JP7089719B2 (ja) * | 2017-02-07 | 2022-06-23 | ナノフォトン株式会社 | 分光顕微鏡、及び分光観察方法 |
JP6863578B2 (ja) * | 2017-04-19 | 2021-04-21 | 日本分光株式会社 | 赤外顕微鏡 |
EP3652510A1 (en) * | 2017-07-14 | 2020-05-20 | Thermo Electron Scientific Instruments LLC | Device for providing variable sized aperture for a sample in a spectrometer |
US11199448B2 (en) | 2018-05-11 | 2021-12-14 | Sony Corporation | Spectroscopic measurement device and spectroscopic measurement method |
DE102019203560A1 (de) * | 2019-03-15 | 2020-09-17 | Bruker Optik Gmbh | IR-Mikroskop |
EP4098985A1 (en) | 2021-06-02 | 2022-12-07 | Thermo Electron Scientific Instruments LLC | System and method for synchronized stage movement |
US20230168485A1 (en) * | 2021-11-30 | 2023-06-01 | Thermo Electron Scientific Instruments Llc | Microscope With Pre-Aligned Conditioning Optics |
US20230168122A1 (en) * | 2021-11-30 | 2023-06-01 | Thermo Electron Scientific Instruments Llc | Hybrid Reflective Microscope Objective |
Family Cites Families (14)
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US4810093A (en) * | 1986-08-11 | 1989-03-07 | Laser Precision Corporation | Versatile and efficient radiation transmission apparatus and method for spectrometers |
US5587832A (en) * | 1993-10-20 | 1996-12-24 | Biophysica Technologies, Inc. | Spatially light modulated confocal microscope and method |
EP0674160A1 (en) * | 1994-03-21 | 1995-09-27 | Hewlett-Packard GmbH | Fluorescence spectrometer |
US5581085A (en) * | 1995-03-06 | 1996-12-03 | Spectra-Tech, Inc. | Infrared microspectrometer accessory |
US5864139A (en) * | 1997-02-13 | 1999-01-26 | Spectra-Tech Inc. | Confocal microspectrometer system |
JP3585018B2 (ja) * | 1997-05-15 | 2004-11-04 | 横河電機株式会社 | 共焦点装置 |
US5926283A (en) * | 1997-07-12 | 1999-07-20 | Optical Insights, Llc | Multi-spectral two dimensional imaging spectrometer |
EP1184703B1 (en) | 2000-08-29 | 2010-06-23 | PerkinElmer Singapore Pte. Ltd. | Infrared imaging microscope |
US7560697B2 (en) | 2000-08-29 | 2009-07-14 | Perkinelmer Singapore Pte. Ltd. | Detector array and cross-talk linearity connection |
EP1184702B1 (en) | 2000-08-29 | 2011-12-21 | PerkinElmer Singapore Pte. Ltd. | Infrared imaging microscope |
JP2002162317A (ja) * | 2000-11-28 | 2002-06-07 | Mitsubishi Electric Corp | 波面計測装置 |
AU2002246811A1 (en) | 2000-12-29 | 2002-08-06 | Chromagen, Inc. | Scanning spectrophotometer for high throughput fluorescence detection |
US7078696B2 (en) * | 2004-02-13 | 2006-07-18 | Thermo Electron Scientific Instruments Corporation | Microspectrometer system with selectable aperturing |
US7221449B2 (en) * | 2004-06-28 | 2007-05-22 | Applera Corporation | Apparatus for assaying fluorophores in a biological sample |
-
2007
- 2007-08-28 WO PCT/US2007/077043 patent/WO2008027929A2/en active Application Filing
- 2007-08-28 JP JP2009526877A patent/JP5507248B2/ja active Active
- 2007-08-28 EP EP07814512.5A patent/EP2062017A4/en not_active Withdrawn
- 2007-08-28 JP JP2009526878A patent/JP5507249B2/ja active Active
- 2007-08-28 EP EP07814513.3A patent/EP2062016B1/en active Active
- 2007-08-28 US US11/846,508 patent/US7456950B2/en active Active
- 2007-08-28 WO PCT/US2007/077044 patent/WO2008027930A2/en active Application Filing
- 2007-08-28 US US11/846,513 patent/US7440095B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US7440095B2 (en) | 2008-10-21 |
EP2062016B1 (en) | 2020-07-01 |
WO2008027929A2 (en) | 2008-03-06 |
WO2008027929A3 (en) | 2008-05-08 |
JP2010502957A (ja) | 2010-01-28 |
EP2062016A4 (en) | 2013-05-22 |
EP2062017A2 (en) | 2009-05-27 |
EP2062016A2 (en) | 2009-05-27 |
JP2010502958A (ja) | 2010-01-28 |
US20080049304A1 (en) | 2008-02-28 |
EP2062017A4 (en) | 2013-05-22 |
WO2008027930A3 (en) | 2008-10-30 |
WO2008027930A2 (en) | 2008-03-06 |
JP5507248B2 (ja) | 2014-05-28 |
US7456950B2 (en) | 2008-11-25 |
US20080049293A1 (en) | 2008-02-28 |
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