JP5505709B2 - 固体撮像素子およびその製造方法、並びに電子機器 - Google Patents

固体撮像素子およびその製造方法、並びに電子機器 Download PDF

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Publication number
JP5505709B2
JP5505709B2 JP2010080526A JP2010080526A JP5505709B2 JP 5505709 B2 JP5505709 B2 JP 5505709B2 JP 2010080526 A JP2010080526 A JP 2010080526A JP 2010080526 A JP2010080526 A JP 2010080526A JP 5505709 B2 JP5505709 B2 JP 5505709B2
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charge
gate electrode
photoelectric conversion
holding region
conversion element
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Japanese (ja)
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JP2011216530A (ja
JP2011216530A5 (enExample
Inventor
真弥 山川
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Sony Corp
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Sony Corp
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Priority to JP2010080526A priority Critical patent/JP5505709B2/ja
Priority to CN2011100759085A priority patent/CN102208422A/zh
Priority to US13/070,624 priority patent/US20110241080A1/en
Publication of JP2011216530A publication Critical patent/JP2011216530A/ja
Publication of JP2011216530A5 publication Critical patent/JP2011216530A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/803—Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • H10F39/80377—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor characterised by the channel of the transistor, e.g. channel having a doping gradient
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/014—Manufacture or treatment of image sensors covered by group H10F39/12 of CMOS image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/803—Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • H10F39/80373—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor characterised by the gate of the transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors

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  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP2010080526A 2010-03-31 2010-03-31 固体撮像素子およびその製造方法、並びに電子機器 Expired - Fee Related JP5505709B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010080526A JP5505709B2 (ja) 2010-03-31 2010-03-31 固体撮像素子およびその製造方法、並びに電子機器
CN2011100759085A CN102208422A (zh) 2010-03-31 2011-03-24 固体摄像器件、固体摄像器件制造方法以及电子装置
US13/070,624 US20110241080A1 (en) 2010-03-31 2011-03-24 Solid-state imaging device, method for manufacturing the same, and electronic apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010080526A JP5505709B2 (ja) 2010-03-31 2010-03-31 固体撮像素子およびその製造方法、並びに電子機器

Publications (3)

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JP2011216530A JP2011216530A (ja) 2011-10-27
JP2011216530A5 JP2011216530A5 (enExample) 2013-05-02
JP5505709B2 true JP5505709B2 (ja) 2014-05-28

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JP2010080526A Expired - Fee Related JP5505709B2 (ja) 2010-03-31 2010-03-31 固体撮像素子およびその製造方法、並びに電子機器

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Country Link
US (1) US20110241080A1 (enExample)
JP (1) JP5505709B2 (enExample)
CN (1) CN102208422A (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5505709B2 (ja) * 2010-03-31 2014-05-28 ソニー株式会社 固体撮像素子およびその製造方法、並びに電子機器
JP6231741B2 (ja) * 2012-12-10 2017-11-15 キヤノン株式会社 固体撮像装置およびその製造方法
TWI623232B (zh) * 2013-07-05 2018-05-01 Sony Corp 固體攝像裝置及其驅動方法以及包含固體攝像裝置之電子機器
CN104218073A (zh) * 2014-09-22 2014-12-17 北京思比科微电子技术股份有限公司 高信号摆幅的图像传感器像素及其操作方法
KR102472247B1 (ko) * 2014-12-18 2022-12-01 소니그룹주식회사 고체 촬상 소자, 및 전자 장치
JP2018049855A (ja) * 2016-09-20 2018-03-29 セイコーエプソン株式会社 固体撮像装置及び電子機器
CN115831992B (zh) * 2017-06-02 2024-07-16 索尼半导体解决方案公司 摄像装置
JP6506814B2 (ja) * 2017-10-18 2019-04-24 キヤノン株式会社 固体撮像装置およびカメラ
US10559614B2 (en) * 2018-03-09 2020-02-11 Semiconductor Components Industries, Llc Dual conversion gain circuitry with buried channels
CN112189261B (zh) * 2018-06-21 2025-01-28 株式会社半导体能源研究所 摄像装置及其工作方法以及电子设备
JP7455525B2 (ja) * 2018-07-17 2024-03-26 ブリルニクス シンガポール プライベート リミテッド 固体撮像装置、固体撮像装置の製造方法、および電子機器
JP7613864B2 (ja) * 2019-12-18 2025-01-15 ソニーセミコンダクタソリューションズ株式会社 受光装置
CN114830632B (zh) * 2019-12-26 2025-10-17 浜松光子学株式会社 光检测装置和光传感器的驱动方法
JP7630488B2 (ja) * 2020-02-10 2025-02-17 ソニーセミコンダクタソリューションズ株式会社 センサ装置、測距装置
CN112259565A (zh) * 2020-08-26 2021-01-22 天津大学 一种基于大尺寸像素的电荷快速转移方法
CN116936583A (zh) * 2022-03-31 2023-10-24 思特威(上海)电子科技股份有限公司 像素结构及制备方法、图像传感器、电子设备
WO2025169620A1 (ja) * 2024-02-09 2025-08-14 ソニーセミコンダクタソリューションズ株式会社 光検出装置および電子機器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5324680A (en) * 1991-05-22 1994-06-28 Samsung Electronics, Co. Ltd. Semiconductor memory device and the fabrication method thereof
JPH07273314A (ja) * 1993-01-14 1995-10-20 Samsung Electron Co Ltd 電荷伝送装置及びスイッチング素子
US7335958B2 (en) * 2003-06-25 2008-02-26 Micron Technology, Inc. Tailoring gate work-function in image sensors
KR100725367B1 (ko) * 2005-10-04 2007-06-07 삼성전자주식회사 이미지 센서 및 그 제조방법
JP2008166607A (ja) * 2006-12-28 2008-07-17 Sony Corp 固体撮像装置とその製造方法、並びに半導体装置とその製造方法
JP5568880B2 (ja) * 2008-04-03 2014-08-13 ソニー株式会社 固体撮像装置、固体撮像装置の駆動方法および電子機器
JP2011159756A (ja) * 2010-01-29 2011-08-18 Sony Corp 固体撮像装置とその製造方法、及び電子機器
JP5505709B2 (ja) * 2010-03-31 2014-05-28 ソニー株式会社 固体撮像素子およびその製造方法、並びに電子機器

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JP2011216530A (ja) 2011-10-27
US20110241080A1 (en) 2011-10-06
CN102208422A (zh) 2011-10-05

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