JP5495782B2 - 回転レートセンサ - Google Patents
回転レートセンサ Download PDFInfo
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- JP5495782B2 JP5495782B2 JP2009522190A JP2009522190A JP5495782B2 JP 5495782 B2 JP5495782 B2 JP 5495782B2 JP 2009522190 A JP2009522190 A JP 2009522190A JP 2009522190 A JP2009522190 A JP 2009522190A JP 5495782 B2 JP5495782 B2 JP 5495782B2
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- 238000001514 detection method Methods 0.000 claims description 97
- 239000000758 substrate Substances 0.000 claims description 36
- 230000008878 coupling Effects 0.000 claims description 11
- 238000010168 coupling process Methods 0.000 claims description 11
- 238000005859 coupling reaction Methods 0.000 claims description 11
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 230000009471 action Effects 0.000 claims description 3
- 230000005484 gravity Effects 0.000 claims description 3
- 230000001133 acceleration Effects 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 230000000414 obstructive effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/5755—Structural details or topology the devices having a single sensing mass
- G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
- G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Pressure Sensors (AREA)
Description
本発明の基礎とする課題は、基板に対して垂直方向に配向されるコリオリ力を検出でき、かつ、基板表面に沿って延在する軸線周りの相応の回転も検出できる、回転レートセンサを提供することである。
Claims (3)
- 駆動系質量体要素(13)と、
検出系質量体要素(14)と、
検出装置とを有し、
前記駆動系質量体要素(13)は基板の表面に配設され、駆動装置(18)によって前記表面に沿って延在する第1の軸線(y)に沿って振動させるべく駆動可能であり、
前記検出系質量体要素(14)は第2の軸線(z)に沿ってコリオリ力の作用のもとで変位可能であり、
前記検出装置は、第2の軸線(z)に沿った検出系質量体要素(14)の変位が検出可能である、回転レートセンサにおいて、
前記第2の軸線(z)が基板表面に対して垂直方向に延在し、
さらなる駆動系質量体要素(21)と、
前記検出系質量体要素(14)を囲繞するさらなる検出系質量体要素(27)と、
さらなる検出装置とが設けられており、
前記さらなる駆動系質量体要素(21)は、基板表面に配設され、さらなる駆動装置(24)によって前記第1の軸線(y)に沿って駆動可能であり、
前記さらなる検出系質量体要素(27)は、基板表面に対して垂直方向に延在する第2の軸線に沿ってコリオリ力の作用のもとで変位可能であり、当該さらなる検出系質量体要素(27)の、第2の軸線(z)に沿った変位は前記さらなる検出装置によって検出可能であり、
前記駆動系質量体要素(13)は、少なくとも1つの駆動系質量体バネ(16)によって基板に接続されており、前記駆動系質量体バネ(16)は当該駆動系質量体要素(13)の第1の軸線に対するあらゆる垂直方向での振動が抑圧されるように配向されており、さらに別のさらなる駆動系質量体要素(13)が少なくとも1つのさらなる駆動系質量体バネ(23)によって基板に接続され、該さらなる駆動系質量体バネ(23)は前記さらなる駆動系質量体要素(13)の第1の軸線に対するあらゆる垂直方向での振動が抑圧されるように配向されており、
前記駆動系質量体要素(13)は、少なくとも1つの検出系質量体バネ(19,20)によって検出系質量体要素(14)に接続されており、
前記検出系質量体バネ(19,20)は当該検出系質量体要素の、第2の軸線(z)に対するあらゆる垂直方向での前記駆動系質量体要素(13)に対する振動が抑圧されるように配向されており、さらにさらなる駆動系質量体要素(21)が少なくとも1つのさらなる検出系質量体バネ(25,26)によってさらなる検出系質量体要素(27)に接続され、該さらなる検出系質量体バネ(25,26)はさらなる検出系質量体要素(27)の、第2の軸線(z)に対するあらゆる垂直方向でのさらなる駆動系質量体要素に対する振動が抑圧されるように配向されており、さらに、
前記検出系質量体要素(14)とさらなる検出系質量体要素(27)が少なくとも1つの結合バネ(28)によって相互に結合されていることを特徴とする回転レートセンサ。 - 前記駆動系質量体要素(13)とさらなる駆動系質量体要素(21)は少なくとも1つの結合バネによって相互に結合されている、請求項1記載の回転レートセンサ。
- 前記駆動系質量体要素(13,21)と検出系質量体要素(14,27)の重心は静止位置において一致している、請求項1または2記載の回転レートセンサ。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102006035281 | 2006-07-31 | ||
DE102006035281.5 | 2006-07-31 | ||
DE102006047135.0 | 2006-10-05 | ||
DE102006047135A DE102006047135A1 (de) | 2006-07-31 | 2006-10-05 | Drehratensensor |
PCT/EP2007/055597 WO2008015044A1 (de) | 2006-07-31 | 2007-06-06 | Drehratensensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010501829A JP2010501829A (ja) | 2010-01-21 |
JP5495782B2 true JP5495782B2 (ja) | 2014-05-21 |
Family
ID=38461193
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009522190A Active JP5495782B2 (ja) | 2006-07-31 | 2007-06-06 | 回転レートセンサ |
Country Status (5)
Country | Link |
---|---|
US (1) | US9261363B2 (ja) |
EP (1) | EP2049871B1 (ja) |
JP (1) | JP5495782B2 (ja) |
DE (1) | DE102006047135A1 (ja) |
WO (1) | WO2008015044A1 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009085978A1 (en) * | 2007-12-20 | 2009-07-09 | Enanta Pharceuticals, Inc. | Bridged carbocyclic oxime hepatitis c virus serine protease inhibitors |
JP4609558B2 (ja) * | 2008-09-02 | 2011-01-12 | 株式会社デンソー | 角速度センサ |
EP2184583B1 (de) * | 2008-11-11 | 2011-01-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanischer Coriolis-Drehratensensor |
DE102009000606A1 (de) | 2009-02-04 | 2010-08-05 | Robert Bosch Gmbh | Mikromechanische Strukturen |
DE102009027897B4 (de) | 2009-07-21 | 2023-07-20 | Robert Bosch Gmbh | Mikromechanischer Drehratensensor |
DE102010040516A1 (de) | 2009-09-09 | 2011-03-10 | Continental Teves Ag & Co. Ohg | Doppelaxialer, schockrobuster Drehratensensor mit ineinanderliegenden, linear schwingenden seismischen Elementen |
JP5418355B2 (ja) * | 2010-03-25 | 2014-02-19 | 株式会社豊田中央研究所 | 角速度センサ |
DE102010029634B4 (de) * | 2010-06-02 | 2024-04-11 | Robert Bosch Gmbh | Drehratensensor |
WO2012021704A1 (en) | 2010-08-12 | 2012-02-16 | Enanta Pharmaceuticals, Inc. | Hepatitis c virus inhibitors |
US8875576B2 (en) * | 2012-03-21 | 2014-11-04 | The United States Of America As Represented By The Secretary Of The Navy | Apparatus and method for providing an in-plane inertial device with integrated clock |
JP6195051B2 (ja) * | 2013-03-04 | 2017-09-13 | セイコーエプソン株式会社 | ジャイロセンサー、電子機器、及び移動体 |
KR101531093B1 (ko) * | 2013-07-31 | 2015-06-23 | 삼성전기주식회사 | 가속도 센서 및 각속도 센서 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4032559C2 (de) | 1990-10-13 | 2000-11-23 | Bosch Gmbh Robert | Drehratensensor und Verfahren zur Herstellung |
DE19641284C1 (de) | 1996-10-07 | 1998-05-20 | Inst Mikro Und Informationstec | Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen |
JP3882973B2 (ja) * | 1998-06-22 | 2007-02-21 | アイシン精機株式会社 | 角速度センサ |
JP4362877B2 (ja) | 1998-09-18 | 2009-11-11 | 株式会社デンソー | 角速度センサ |
JP2001021360A (ja) * | 1999-07-08 | 2001-01-26 | Mitsubishi Electric Corp | 角速度センサ |
KR100374812B1 (ko) | 1999-11-04 | 2003-03-03 | 삼성전자주식회사 | 두개의 공진판을 가진 마이크로 자이로스코프 |
US6430998B2 (en) | 1999-12-03 | 2002-08-13 | Murata Manufacturing Co., Ltd. | Resonant element |
JP3666335B2 (ja) | 2000-01-14 | 2005-06-29 | 株式会社村田製作所 | 角速度センサ |
JP3589182B2 (ja) | 2000-07-07 | 2004-11-17 | 株式会社村田製作所 | 外力計測装置 |
DE10108198A1 (de) | 2001-02-21 | 2002-09-12 | Bosch Gmbh Robert | Drehratensensor |
DE10108197A1 (de) * | 2001-02-21 | 2002-09-12 | Bosch Gmbh Robert | Drehratensensor |
DE10203515A1 (de) | 2002-01-30 | 2003-08-07 | Bosch Gmbh Robert | Mikromechanischer Drehratensensor |
DE60221103T2 (de) | 2002-05-21 | 2008-04-03 | Stmicroelectronics S.R.L., Agrate Brianza | Aus Halbleitermaterial hergestellter integrierter Kreisel mit wenigstens einer empfindlichen Achse in der Sensorebene |
US6928873B2 (en) * | 2003-11-01 | 2005-08-16 | Chung-Shan Institute Of Science And Technology | Silicon dual inertial sensors |
-
2006
- 2006-10-05 DE DE102006047135A patent/DE102006047135A1/de not_active Ceased
-
2007
- 2007-06-06 WO PCT/EP2007/055597 patent/WO2008015044A1/de active Application Filing
- 2007-06-06 US US12/303,443 patent/US9261363B2/en active Active
- 2007-06-06 JP JP2009522190A patent/JP5495782B2/ja active Active
- 2007-06-06 EP EP07729969.1A patent/EP2049871B1/de active Active
Also Published As
Publication number | Publication date |
---|---|
EP2049871A1 (de) | 2009-04-22 |
US20100000321A1 (en) | 2010-01-07 |
EP2049871B1 (de) | 2013-08-14 |
WO2008015044A1 (de) | 2008-02-07 |
US9261363B2 (en) | 2016-02-16 |
DE102006047135A1 (de) | 2008-02-07 |
JP2010501829A (ja) | 2010-01-21 |
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