JP5490349B2 - 圧力センサ - Google Patents

圧力センサ Download PDF

Info

Publication number
JP5490349B2
JP5490349B2 JP2006144184A JP2006144184A JP5490349B2 JP 5490349 B2 JP5490349 B2 JP 5490349B2 JP 2006144184 A JP2006144184 A JP 2006144184A JP 2006144184 A JP2006144184 A JP 2006144184A JP 5490349 B2 JP5490349 B2 JP 5490349B2
Authority
JP
Japan
Prior art keywords
pressure
circuit board
pressure sensor
sensor
storage chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006144184A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007315858A (ja
Inventor
真吾 和波
智 竹原
浩司 内田
太器 勝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Priority to JP2006144184A priority Critical patent/JP5490349B2/ja
Priority to DE102007023572A priority patent/DE102007023572B4/de
Priority to CNB2007101037319A priority patent/CN100529698C/zh
Priority to US11/805,568 priority patent/US7526963B2/en
Publication of JP2007315858A publication Critical patent/JP2007315858A/ja
Application granted granted Critical
Publication of JP5490349B2 publication Critical patent/JP5490349B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP2006144184A 2006-05-24 2006-05-24 圧力センサ Expired - Fee Related JP5490349B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006144184A JP5490349B2 (ja) 2006-05-24 2006-05-24 圧力センサ
DE102007023572A DE102007023572B4 (de) 2006-05-24 2007-05-21 Drucksensor
CNB2007101037319A CN100529698C (zh) 2006-05-24 2007-05-22 压力传感器
US11/805,568 US7526963B2 (en) 2006-05-24 2007-05-23 Pressure sensor having a pressure detecting element and a circuit board on opposite sides of a housing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006144184A JP5490349B2 (ja) 2006-05-24 2006-05-24 圧力センサ

Publications (2)

Publication Number Publication Date
JP2007315858A JP2007315858A (ja) 2007-12-06
JP5490349B2 true JP5490349B2 (ja) 2014-05-14

Family

ID=38622471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006144184A Expired - Fee Related JP5490349B2 (ja) 2006-05-24 2006-05-24 圧力センサ

Country Status (4)

Country Link
US (1) US7526963B2 (zh)
JP (1) JP5490349B2 (zh)
CN (1) CN100529698C (zh)
DE (1) DE102007023572B4 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014211334A (ja) * 2013-04-17 2014-11-13 株式会社デンソー センサ装置

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7644628B2 (en) * 2005-12-16 2010-01-12 Loadstar Sensors, Inc. Resistive force sensing device and method with an advanced communication interface
JP4375460B2 (ja) * 2007-08-08 2009-12-02 株式会社デンソー 圧力センサ
US8297125B2 (en) * 2008-05-23 2012-10-30 Honeywell International Inc. Media isolated differential pressure sensor with cap
US8230745B2 (en) * 2008-11-19 2012-07-31 Honeywell International Inc. Wet/wet differential pressure sensor based on microelectronic packaging process
CN108128352A (zh) * 2010-05-14 2018-06-08 Trw汽车美国有限责任公司 扭矩传感器组件及其制造方法
JP2014006139A (ja) * 2012-06-25 2014-01-16 Hitachi Automotive Systems Ltd 圧力センサ装置
JP5764529B2 (ja) * 2012-06-25 2015-08-19 日立オートモティブシステムズ株式会社 圧力センサ装置
JP2014006138A (ja) * 2012-06-25 2014-01-16 Hitachi Automotive Systems Ltd 圧力センサ装置
JP6267422B2 (ja) * 2012-12-18 2018-01-24 セイコーインスツル株式会社 電子機器
JP5973357B2 (ja) * 2013-02-05 2016-08-23 株式会社鷺宮製作所 圧力検知ユニット及び圧力検知ユニットの製造方法
JP5867542B2 (ja) * 2013-05-20 2016-02-24 株式会社デンソー センサ装置
JP5888313B2 (ja) * 2013-12-13 2016-03-22 株式会社デンソー 車両用側突検知装置
US9260071B2 (en) * 2014-03-11 2016-02-16 Trw Automotive U.S. Llc Apparatus for snap mounting a crash sensor
JP2015184100A (ja) * 2014-03-24 2015-10-22 セイコーエプソン株式会社 物理量センサー、物理量センサーの製造方法、圧力センサー、高度計、電子機器および移動体
US9470595B2 (en) 2014-08-29 2016-10-18 Trw Automotive U.S. Llc Apparatus for dry side mounting a crash pressure sensor
DE102015012740A1 (de) * 2015-10-01 2017-04-06 Wabco Gmbh Fahrzeugsteuergerät
US10295427B2 (en) * 2017-04-04 2019-05-21 Sensata Technologies, Inc. Multi-chamber pressure sensing apparatus
JP6527193B2 (ja) * 2017-04-07 2019-06-05 株式会社鷺宮製作所 圧力センサ
CN109580074A (zh) * 2018-11-19 2019-04-05 安徽科达自动化集团股份有限公司 一种高灵敏压力传感器
CN111879455B (zh) * 2020-07-24 2022-02-11 重庆火后草科技有限公司 用于床的压力传感器

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6327724A (ja) 1986-07-21 1988-02-05 Hitachi Ltd 半導体式圧力センサ
US4850227A (en) * 1987-12-22 1989-07-25 Delco Electronics Corporation Pressure sensor and method of fabrication thereof
JP2987153B2 (ja) 1989-03-24 1999-12-06 マツダ株式会社 車体側部のエネルギ吸収構造
US5060108A (en) * 1990-01-25 1991-10-22 Texas Instruments Incorporated Packaging and sealing for pressure transducer
US5014557A (en) * 1990-06-06 1991-05-14 Acustar, Inc. Composite base for a pressure transducer
WO1994011223A1 (de) * 1992-11-11 1994-05-26 Siemens Aktiengesellschaft Steuereinheit mit einem luftdruckdetektor für ein insassenschutzsystem eines fahrzeuges
JPH08324379A (ja) * 1995-05-30 1996-12-10 Toyota Motor Corp 車両用側面衝突検出装置
JPH10104101A (ja) * 1996-10-02 1998-04-24 Mitsubishi Electric Corp 半導体圧力センサ
JPH10300614A (ja) * 1997-04-28 1998-11-13 Fuji Koki Corp 圧力センサ
JP3414203B2 (ja) * 1997-06-19 2003-06-09 日産自動車株式会社 半導体圧力検出装置
JPH11295174A (ja) * 1998-04-09 1999-10-29 Fujikoki Corp 圧力センサ
US6209398B1 (en) * 1998-09-18 2001-04-03 Texas Instruments Incorporated Fluid pressure transducer apparatus and method for assembling
JP4320963B2 (ja) * 2000-11-27 2009-08-26 株式会社デンソー 圧力センサ
JP2003014568A (ja) * 2001-07-03 2003-01-15 Hokuriku Electric Ind Co Ltd 半導体圧力センサ装置
JP2003130749A (ja) * 2001-10-29 2003-05-08 Matsushita Electric Works Ltd 圧力センサ
JP3870917B2 (ja) * 2003-03-19 2007-01-24 株式会社デンソー 温度センサ一体型圧力センサ装置及びその温度センサ固定方法
US6935184B2 (en) * 2003-04-02 2005-08-30 Kulite Semiconductor Products, Inc. Pressure transducer capable of detecting internal leakage of external media
DE10333964A1 (de) 2003-07-25 2005-02-24 Robert Bosch Gmbh Deckel für das Gehäuse einer Sensorbaugruppe mit einem Drucksensor
DE102004012593A1 (de) * 2004-03-12 2005-09-29 Robert Bosch Gmbh Sensormodul
JP2006300774A (ja) * 2005-04-21 2006-11-02 Denso Corp ダイヤフラム型圧力検出装置
US7162927B1 (en) * 2005-12-16 2007-01-16 Honeywell International Inc. Design of a wet/wet amplified differential pressure sensor based on silicon piezoresistive technology

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014211334A (ja) * 2013-04-17 2014-11-13 株式会社デンソー センサ装置

Also Published As

Publication number Publication date
CN100529698C (zh) 2009-08-19
DE102007023572A1 (de) 2007-11-29
US20070272029A1 (en) 2007-11-29
US7526963B2 (en) 2009-05-05
CN101078658A (zh) 2007-11-28
DE102007023572B4 (de) 2011-03-10
JP2007315858A (ja) 2007-12-06

Similar Documents

Publication Publication Date Title
JP5490349B2 (ja) 圧力センサ
US7331238B2 (en) Pressure detection device
JP2007064837A (ja) 圧力センサ
US7406875B2 (en) Pressure sensor for a vehicle
JP3870917B2 (ja) 温度センサ一体型圧力センサ装置及びその温度センサ固定方法
US7708102B2 (en) Collision detecting system
US7637545B2 (en) Collision detection apparatus
WO2005019790A1 (ja) センサ装置
US6536259B2 (en) Device for sensing a side impact in a motor vehicle
JP2017528711A (ja) 衝突圧力センサの乾燥側取付けのための装置
US8544333B2 (en) Air pressure sensor for impact recognition
US20070045027A1 (en) Collision detecting system
JP2006250763A (ja) 温度センサ
US8353214B2 (en) Pressure sensor for side-impact sensing and method for forming a surface of a protective material for a pressure sensor
US7665365B2 (en) Pressure sensor and attachment structure of pressure sensor
CN217347375U (zh) 胎压传感器以及胎压检测系统
JP5888313B2 (ja) 車両用側突検知装置
JP4856711B2 (ja) 歩行者保護システムのためのセンサを固定するための装置
JP5494741B2 (ja) 圧力センサ
JP2009244066A (ja) 圧力センサ
US7516981B2 (en) Door mounted vehicle sensor
JP5251498B2 (ja) 圧力センサ
US11874406B1 (en) Ultrasonic sensor and method of manufacturing the same
JP5648595B2 (ja) 圧力センサ
KR102520931B1 (ko) 차량용 압력 측정장치

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080708

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110512

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110706

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111129

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20120626

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120921

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20120928

A912 Re-examination (zenchi) completed and case transferred to appeal board

Free format text: JAPANESE INTERMEDIATE CODE: A912

Effective date: 20121122

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140123

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140226

LAPS Cancellation because of no payment of annual fees