JP5486823B2 - 圧電基板の製造及び関連の方法 - Google Patents

圧電基板の製造及び関連の方法 Download PDF

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Publication number
JP5486823B2
JP5486823B2 JP2009046639A JP2009046639A JP5486823B2 JP 5486823 B2 JP5486823 B2 JP 5486823B2 JP 2009046639 A JP2009046639 A JP 2009046639A JP 2009046639 A JP2009046639 A JP 2009046639A JP 5486823 B2 JP5486823 B2 JP 5486823B2
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tube
piezoelectric
substrate
patterned
protrusions
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Japanese (ja)
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JP2009212519A (ja
JP2009212519A5 (https=
Inventor
チャールズ・ディ・メルヴィル
リチャード・エス・ジョンソン
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University of Washington
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University of Washington
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2027—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having cylindrical or annular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
    • G02B6/3504—Rotating, tilting or pivoting the waveguides, or with the waveguides describing a curved path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3578—Piezoelectric force
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Endoscopes (AREA)
  • Micromachines (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP2009046639A 2008-02-29 2009-02-27 圧電基板の製造及び関連の方法 Active JP5486823B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/040,249 2008-02-29
US12/040,249 US8957484B2 (en) 2008-02-29 2008-02-29 Piezoelectric substrate, fabrication and related methods

Publications (3)

Publication Number Publication Date
JP2009212519A JP2009212519A (ja) 2009-09-17
JP2009212519A5 JP2009212519A5 (https=) 2012-04-12
JP5486823B2 true JP5486823B2 (ja) 2014-05-07

Family

ID=40756329

Family Applications (1)

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JP2009046639A Active JP5486823B2 (ja) 2008-02-29 2009-02-27 圧電基板の製造及び関連の方法

Country Status (3)

Country Link
US (1) US8957484B2 (https=)
EP (1) EP2096688B1 (https=)
JP (1) JP5486823B2 (https=)

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US8757812B2 (en) 2008-05-19 2014-06-24 University of Washington UW TechTransfer—Invention Licensing Scanning laser projection display devices and methods for projecting one or more images onto a surface with a light-scanning optical fiber
US8209857B2 (en) * 2009-06-19 2012-07-03 The Regents Of The University Of Michigan Method of making a thin film device
DE102010019666A1 (de) * 2010-04-28 2011-11-03 Technische Universität Dresden Aktorisches, sensorisches und/oder generatorisches Faserverbundbauteil und Verfahren zu seiner Herstellung
JP5914355B2 (ja) * 2010-11-30 2016-05-11 オリンパス株式会社 圧電アクチュエータ
JP5780910B2 (ja) 2011-10-03 2015-09-16 オリンパス株式会社 円筒型圧電素子の製造方法
WO2013069382A1 (ja) 2011-11-09 2013-05-16 オリンパス株式会社 内視鏡及び内視鏡装置
EP3798717B1 (en) 2012-02-16 2023-07-05 University Of Washington Through Its Center For Commercialization Extended depth of focus for high-resolution image scanning
JPWO2014087798A1 (ja) * 2012-12-04 2017-01-05 オリンパスメディカルシステムズ株式会社 走査型内視鏡システム
KR102141992B1 (ko) 2013-01-15 2020-08-06 매직 립, 인코포레이티드 초고해상도 스캐닝 섬유 디스플레이
JP5765756B2 (ja) 2013-07-12 2015-08-19 オリンパス株式会社 走査型内視鏡
JP2015088623A (ja) * 2013-10-30 2015-05-07 Hoya株式会社 圧電素子およびその製造方法
JP2015088615A (ja) * 2013-10-30 2015-05-07 Hoya株式会社 圧電素子
JP6033501B1 (ja) * 2014-12-25 2016-11-30 オリンパス株式会社 走査型内視鏡
WO2018102666A1 (en) 2016-12-01 2018-06-07 Avery Dennison Retail Information Services, Llc Functional substrates for printed electronic devices
AU2017382889B2 (en) 2016-12-22 2022-03-31 Magic Leap, Inc. Methods and systems for multi-element linkage for fiber scanning display
JP6990819B2 (ja) * 2018-03-07 2022-01-12 富士フイルムヘルスケア株式会社 超音波撮像装置及び方法
WO2019246380A1 (en) 2018-06-20 2019-12-26 Magic Leap, Inc. Methods and systems for fiber scanners with continuous bond lines
US11047671B1 (en) 2020-01-30 2021-06-29 Veravanti Inc. Forward looking RGB/optical coherence tomography duplex imager
US12385733B2 (en) 2020-01-30 2025-08-12 Soham Inc. Synchronizing an optical coherence tomography system
JP7643675B2 (ja) * 2021-04-20 2025-03-11 国立研究開発法人産業技術総合研究所 筒型圧電素子

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JPH10144974A (ja) * 1996-11-08 1998-05-29 Denso Corp 圧電アクチュエータおよびその製造方法
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JP5245107B2 (ja) 2006-05-09 2013-07-24 キヤノン株式会社 圧電素子、圧電アクチュエータ、インクジェット式記録ヘッド

Also Published As

Publication number Publication date
JP2009212519A (ja) 2009-09-17
EP2096688A3 (en) 2013-01-09
US8957484B2 (en) 2015-02-17
EP2096688B1 (en) 2014-03-26
EP2096688A2 (en) 2009-09-02
US20090218641A1 (en) 2009-09-03

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