JP5477853B2 - X-ray inspection equipment using line sensor camera - Google Patents

Description

  The present invention relates to an X-ray inspection apparatus using a line sensor camera, and in particular, an X-ray measurement apparatus capable of measuring the dimensions of an internal part of an object to be conveyed with high accuracy, and its dimension measurement function. The present invention relates to an X-ray inspection apparatus having at least

  In recent years, various types of batteries, substrates, special sheet materials, semiconductor parts, MEMS (Micro-Electro-Mechanical Systems), etc. have been refined, miniaturized, and highly integrated. On the other hand, the need for nondestructive internal inspection using X-rays is increasing as a response to social demands for safety and quality assurance. Such inspection requires high resolution, but the X-ray itself is a noisy electromagnetic wave and passes through the inspection object to receive X-rays containing information on the transmission object. The result is an image with poor sensitivity.

  In order to avoid such problems, when taking an image with an X-ray camera unit (image intensifier + CCD camera), several to several tens of images are acquired in a completely stopped state (hereinafter referred to as “completely stopped”). Currently called “multiple exposure”), noise is reduced by performing an averaging process or the like as a superimposed image process, and an image with high sensitivity and sharpness is used for inspection. However, the positioning mechanism is expensive.

  When imaging using an X-ray line sensor camera instead of the X-ray camera unit as described above, there is no need to stop the inspection object (see, for example, Patent Document 1). It is necessary to repeat the imaging process as many times as necessary. When imaging multiple times with a set of X-ray generator + X-ray line sensor camera, the inspection time increases significantly, and multiple X-ray generator + X-ray line sensor camera. If this is the case, the equipment size and cost will increase significantly. For this reason, in a system using an X-ray line sensor camera, multiple exposure cannot be performed. Therefore, there is a concern that the acquired image generally becomes a low-brightness image due to insufficient sensitivity, which is not suitable for precise inspection.

  As a solution to the problems of these X-ray camera units and X-ray line sensor cameras, a camera that enables direct multiple exposure with the inspection object flowing (hereinafter referred to as “TDI (Time Delay Integration) for X-rays) Called "camera").

  As an example of an X-ray TDI camera, CCD elements capable of sensing X-rays are arranged in a width where transmission information is desired to be imaged, and an arbitrary column of elements is arranged in the traveling direction, so that the object to be inspected moves at a constant speed. Similar to the multiple exposure performed by the X-ray camera unit that superimposes the images acquired by repeatedly exposing the moving inspection object by shifting one row at a time by capturing the direction and speed together with the charge transfer direction and speed of the CCD. As a result, there is a camera of a system that can reduce noise and use an image with high sensitivity and sharpness for inspection (see, for example, Non-Patent Document 1).

JP 2000-292371 A Hamamatsu Photonics Co., Ltd., “X-ray related products”, [online], [Search January 8, 2010], X-ray TDI camera, Internet <URL: http://jp.hamamatsu.com/products/x- ray / 5101 / c10650 / index_en.html>

  As described above, by using an X-ray TDI camera as a non-destructive internal inspection camera, the above-mentioned problems when using an X-ray camera unit or a general X-ray line sensor camera are solved. it can.

  However, it is necessary for the TDI camera for X-rays to take an image in accordance with the moving direction / velocity of the inspection object and the charge transfer direction / speed of the CCD. However, since the conveyor transport using a flat belt transmits power by friction between the drive roll and the flat belt, the motor itself can be inspected even if it uses a high constant speed motor. The constant speed of moving objects is low and the tension is always applied to the flat belt to obtain friction between the drive roll and the flat belt. Therefore, there is a problem that straightness is also unreliable.

  If a mechanical guide is used, it may be possible to ensure straightness, but there is a concern about the generation of scratches on the product, and it cannot be applied to an inspection object with a small thickness. In the first place, the problem of conveyor transport using a flat belt is improved by the inspection object transport system using a linear guide such as an LM (Linear Motion) guide and power transmission such as a ball screw, but it is expensive and not an endless structure. When repetitive inspection is performed multiple times due to reciprocation on one axis, the inspection time increases, and the machine configuration is greatly limited.

  As a belt used for conveyor conveyance, there is a toothed belt in which a metal or a reinforced fiber core wire that is strong against elongation causing meandering is embedded. Furthermore, the power transmission method of the toothed belt is obtained by meshing with a pulley having a shape that matches the tooth shape of the belt connected to the drive shaft, and the constant speed performance of the motor is improved compared to the power transmission by friction of the flat belt. There is no loss. However, since the core wire and the tooth shape do not transmit X-rays or hardly transmit X-rays, they cannot be used for conveying an inspection object in an X-ray inspection machine.

  The present invention has been made in the circumstances as described above, and the main object of the present invention is to use an expensive positioning mechanism and a plurality of inspection devices (X-ray generator + X-ray line sensor camera), Provided is an X-ray inspection apparatus capable of acquiring an image with high sensitivity and sharpness without stopping the inspection object and measuring the dimensions of the internal part of the object to be conveyed with high accuracy. There is to do. A further object of the present invention is to provide an X-ray inspection that is highly reliable in terms of the constant speed and straightness of movement of the inspected object and that can maintain the inspection accuracy even after operation or long-term operation. To provide an apparatus.

The present invention relates to an X-ray inspection apparatus for inspecting the inside of the inspection object using an X-ray with respect to the inspection object to be conveyed .
Two rows in the traveling direction as well as 1-line sequence and the X-ray generating means for generating X-rays to the front Symbol inspection object, a CCD element capable of sensing the X-rays in a direction perpendicular to the traveling direction of the object to be inspected An X-ray transmission image of the object to be inspected is superimposed by shifting the images obtained by repeatedly exposing the object to be inspected by the CCD elements arranged in the traveling direction and shifting the image one by one. An image pickup means having a line sensor camera for outputting, and a charge transfer when the image pickup means conveys and reads out the charges of the CCD elements in each column in the unit of one line while transporting the inspection object in the traveling direction. Measures the dimensions of a predetermined inspection object part including the inside of the inspection object based on the X-ray transmission image output from the imaging means and the conveyance means that conveys the inspection object at a conveyance speed that matches the speed Do With a law measuring means, and further, the conveying means is a conveyor device for a belt conveyor type, the conveying device, the meandering preventive means preventing variation means and the inspection of the transport speed of the object to be inspected The speed fluctuation / meandering preventing means also serving is achieved by being provided at a position that does not affect the imaging of the X-ray transmission image .

Furthermore, the above object of the present invention is to
Quality determining means for determining the quality of the object to be inspected based on a comparison between a dimension measurement value of the inspection target part measured by the dimension measuring means and a threshold value set corresponding to the inspection target part. about,
The dimension measuring means measures the dimension of the inspection target part by measuring each part inside the component part of the inspection object including each part of the parts overlapped in a plane and a gap between the parts. Measuring,
The dimension measuring means uses a thickness of a parallel plate portion of the inspection object including a thickness of a thin plate material and a thickness of a coating layer of the sheet material as a measurement object, and a difference in X-ray permeability of materials constituting the inspection object Having a function of measuring thickness unevenness of the parallel plane part from a luminance change of the captured image of the X-ray transmission image by
Synchronization control means for synchronizing the charge transfer speed on the imaging means side and the transport speed on the transport means side;
The imaging means is an imaging camera having the charge transfer rate parameter that can be referred from an external computer, and the synchronization control means obtains the charge transfer rate based on the parameter obtained from the imaging camera, and Controlling the transport speed of the transport means so that the transport speed matches the charge transfer speed;
The imaging means is an imaging camera having the charge transfer speed parameter that can be set and changed by a command from an external computer, and the synchronization control means is configured so that the charge transfer speed matches the transport speed. Commanding the imaging camera to control the charge transfer rate;
Conveying speed detecting means for detecting the conveying speed of the inspection object in real time is provided, and the synchronization control means is configured to be able to execute synchronous control between the conveying speed and the charge transfer speed while the conveying means is in operation. to have it,
Before SL speed variation / meandering preventive means has a conveyor belt toothed belt portion is provided integrally with the conveyor belt body to free positions affect the imaging of the X-ray transmission image, the teeth of the toothed belt portion A toothed pulley having meshed teeth formed on the outer periphery,
The speed fluctuation / meandering preventing means includes a conveyance belt in which a steel belt portion having a meshing hole or a feed hole pin is provided integrally with a conveyance belt body at a position where the imaging of the X-ray transmission image is not affected, and the steel A pulley having a feed hole pin or a mesh hole that engages with the mesh hole or the feed hole pin of the belt portion,
The conveyor belt main body of the conveyor device of the belt conveyor type is formed of a synthetic rubber or a synthetic resin having good X-ray permeability and uniform performance ,
It is achieved more effectively to thus respectively.

  According to the present invention, it is possible to provide an X-ray inspection apparatus that can reduce noise without stopping / positioning an object to be inspected and can acquire an image with high sensitivity and sharpness with less mechanical restrictions and at low cost. . Moreover, it becomes possible to measure the dimension of the internal part of the to-be-inspected object with high accuracy. Furthermore, by adopting a configuration equipped with speed fluctuation / meandering prevention means, the reliability of the constant speed and straightness of the movement of the inspected object is high, and the inspection accuracy is maintained even if the operation or long-term operation is performed. It becomes possible.

It is a schematic block diagram which shows an example of the whole structure of the X-ray inspection apparatus which concerns on this invention. It is a schematic diagram for demonstrating the operation principle of the TDI camera for X-rays concerning this invention. It is a schematic diagram which shows an example of a structure of the conveying apparatus which concerns on this invention. It is a drawing substitute photograph which shows the actual example of the conveyance belt which concerns on this invention. It is a 1st schematic diagram which shows the other structural example of the toothed belt part which concerns on this invention. It is a 2nd schematic diagram which shows the other structural example of the toothed belt part which concerns on this invention. It is a 3rd schematic diagram which shows the other structural example of the toothed belt part which concerns on this invention. It is a schematic diagram which shows the other structural example of the conveying apparatus which concerns on this invention.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. The description will be given in the following order.
(1. Overall configuration of X-ray inspection apparatus)
(2. Configuration of each part of X-ray inspection apparatus)
(3. Specific example of the configuration of the transport device)
(4. Specific examples of toothed conveyor belts)
(5. Other configuration examples of the toothed belt portion)
(6. Other configuration examples of the transport device)
(7. Other examples of synchronization control means)
The X-ray inspection apparatus according to the present invention is an apparatus for inspecting an inspection object by seeing through the inspection object using X-rays, and particularly for electronic / electrical / mechanical parts products to be conveyed, The present invention is suitably applied as an X-ray measuring apparatus that measures the dimensions of a predetermined part including the inside of these component products with high accuracy. First, the overall configuration of the X-ray inspection apparatus according to the present invention will be described.

(1. Overall configuration of X-ray inspection apparatus)
FIG. 1 is a schematic configuration diagram showing an example of the overall configuration of an X-ray inspection apparatus according to the present invention. Before explaining the overall configuration, an outline of the inspection method and inspection object will be given.

  In the present embodiment, the X-ray generator 2 is arranged on one side and the TDI camera 3 for X-rays is arranged on the other side across the conveyance surface of the conveyance device 4 that is operating continuously, and the detection sensor 1 ( After obtaining the imaging timing of the inspection object W by the trigger signal from 1a, 1b), a transmission image by X-ray is acquired by the TDI camera 3 for X-ray, and the inspection object W is inspected by the image processing unit 5. It is in form. The image processing unit monitors the change in luminance of the captured image while constantly capturing the image with the camera, and records only the necessary part from the detection sensor 1 (1a, 1b) of the inspection object W. It is possible to substitute for an imaging method using the trigger signal.

  The inspection object W is an electronic / electrical / mechanical component product such as various batteries, substrates, special sheet materials, semiconductor parts, MEMS, etc. In the X-ray inspection apparatus, a predetermined inspection is performed according to the type of the inspection object W. Run. The predetermined inspection referred to here is an inspection including the above-described internal state of the component product, in particular, measurement of the dimensions of a predetermined portion inside. Specific inspection will be described later.

  Next, the overall configuration of the X-ray inspection apparatus shown in FIG. 1 will be described.

  In FIG. 1, an X-ray inspection apparatus includes an inspection object detection sensor 1 that detects an inspection object W that is conveyed toward an inspection area, and X-ray generation that irradiates the inspection object W with X-rays L. An X-ray generator 2 as a means, an X-ray TDI camera 3 as an imaging means for picking up a transmission image of the inspection object W by X-rays transmitted through the inspection object W, and a conveyance surface of the conveyance belt 4a A transport device 4 serving as transport means for transporting the placed inspection object W in the X direction in FIG. 1 at a constant speed, and an inspection for performing a predetermined inspection by processing an X-ray transmission image of the inspection object W Image processing unit 5 as means (inspection means including dimension measurement means and quality determination means described later), operation control of each device including synchronous control of charge transfer speed and transport speed described later, recording and display of inspection results Control unit 6 as control means for performing control, display means and operation A display and operation unit 7 as stages, a, a conveyance drive section 8 for driving the conveying device 4.

  In the example of FIG. 1, the X-ray TDI camera 3 is disposed above and the X-ray generator 2 is disposed below the transport surface of the transport device 4. A configuration may be adopted in which the X-ray TDI camera 3 is arranged below and above. In the example of FIG. 1, the arrangement of the X-ray generator 2 and the X-ray TDI camera 3 is a line connecting the generation unit of the X-ray generator 2 and the imaging unit of the X-ray TDI camera 3 (in FIG. 1). In this example, the virtual line L) indicating the X-ray is arranged so as to be perpendicular to the transport surface of the transport device 4, but the transport surface of the transport device 4 and the virtual line L in FIG. The angle formed is not limited to 90 degrees, and the X-ray generator 2 and the X-ray TDI camera 3 are arranged so that the imaginary line L is inclined at the upstream side or the downstream side of the transport path, A configuration may be adopted in which X-rays are generated at an angle inclined with respect to the inspection object W and an X-ray transmission image is captured. 1 shows an example in which the X-ray generator 2 is arranged in the inner space of the annular conveying belt 4a, the X-ray generator 2 (or the X-ray TDI camera 3 in FIG. 1) is shown. ) May be arranged outside the annular conveyor belt 4a, and X-rays may be generated through the two conveyor belts 4a to capture the X-ray transmission image.

(2. Configuration of each part of X-ray inspection apparatus)
Next, the configuration of each part of the X-ray inspection apparatus and an example of its operation will be described individually. Note that the functions and the like already described will be omitted or simplified.

<Inspection object detection sensor 1>
The inspection object detection sensor 1 is composed of, for example, light projecting / receiving sensors 1a and 1b arranged opposite to each other with the conveyance surface of the conveyance belt 4a on the upstream side of the conveyance path, and a detection signal when the inspection object W is detected. Is output.

<X-ray generator 2>
The X-ray generator 2 is composed of an electron gun, an objective lens, an X-ray generation target, and the like. From the X-ray generation unit disposed opposite to the X-ray TDI camera 3 with the transport surface of the transport device 4 interposed therebetween. The object W is irradiated with X-rays.

<X-ray TDI camera 3>
The TDI camera 3 for X-rays is a line sensor camera having the multiple exposure function described in the background art, and is the same part of the inspection object W that is transported at a constant speed in the X direction in FIG. This is a camera that achieves both high speed and high sensitivity by repeatedly exposing the imaging part of the line to be performed) n times by sensors in n rows (n ≧ 2) arranged in the transport direction.

  In the present embodiment, as the X-ray TDI camera 3, CCD elements capable of detecting X-rays are arranged in one line in a direction orthogonal to the traveling direction X of the object W and two or more rows in the traveling direction X ( A configuration in which X-ray transmission images of the inspection object W are output by superimposing images obtained by repeatedly exposing the inspection object W conveyed by the CCD elements in each column and shifting the images one by one. The line sensor camera is equipped.

  Here, the operation principle of the X-ray TDI camera 3 will be described with reference to the schematic diagram of FIG.

  As shown in FIG. 2, the TDI sensor (3a) mounted on the X-ray TDI camera 3 has CCD elements arranged in a direction orthogonal to the traveling direction of the inspection object (the arrow direction in the figure). The line CCD element group 3a (1) is configured to be arranged in n rows (5 rows for convenience of explanation in the example of FIG. 2) in the traveling direction of the inspection object. The TDI sensor (3a) performs transfer in units of one line when reading the charge of the CCD. If the charge transfer timing is matched with the timing at which the image incident on the CCD surface moves, exposure can be performed for the number n of CCDs arranged in the direction of conveyance of the inspection object. This method is called TDI (Time Delay Integration), and the same part is exposed n times at timings t1 to tn in FIG. 2, whereby the luminance increases as shown in FIG. X-ray transmission image G can be captured with high sensitivity.

  The X-ray inspection apparatus according to the present invention conveys an inspection object in a direction (arrow direction in FIG. 2) orthogonal to the one-line CCD element group 3a (1) of the TDI sensor (3a) and for X-ray use. The TDI camera 3 transports the inspection object W at a transport speed that matches the charge transfer speed when transferring and reading out the charges of the CCD elements in each column in units of one line, so that the TDI sensor (3a) The charge transfer timing coincides with the timing at which the image incident on the CCD surface of the TDI sensor (3a) moves.

<Transport device 4>
In the example of FIG. 1, the transport device 4 is a belt conveyor type transport device that transports the inspection object W in the direction of arrow X in FIG. 1. Since the X-ray TDI camera 3 operates as described above, high movement speed and straightness are required for the movement of the inspection object W during imaging by the X-ray TDI camera 3. In the present embodiment, the transport device 4 serves as a means for preventing fluctuations in the transport speed of the inspection object W and a meandering prevention means for the inspection object W, for example, on the transport surface on which the inspection object W is placed. Conveying belt 4a in which a toothed belt portion is provided integrally with the conveying belt main body at a position on the back side and not affecting the X-ray transmission image, and teeth meshing with the teeth of the toothed belt portion of the conveying belt 4a Has a toothed pulley 4b formed on the outer periphery.

<Image processing unit 5>
The image processing unit 5 includes a computer such as a PC on which an image processing board, image processing software, an input / output board, and the like are mounted.

  The inspection means that is a component of the image processing unit 5 is based on image data of an X-ray transmission image output from the X-ray TDI camera 3 (in this example, image data having a high resolution of 4608 pixels per line). Dimension measuring means for measuring dimensions of a predetermined inspection target part including the inside of the inspection object W, a dimension measurement value of the inspection target part measured by the dimension measuring means, and a threshold value set corresponding to the inspection target part Quality judging means for judging the quality of the inspected object W based on the comparison.

  For example, if the inspected object W is a secondary battery, the inspection means measures the gap between the positive electrode plate and the negative electrode plate and the gap between the tab and the tube by the dimension measuring means for the purpose of preventing internal short circuit. On the other hand, OK (good product) and NG (defective product) are judged by the quality judgment means. The inspection result (information indicating the dimension measurement result and the quality result) is stored in the storage unit together with the X-ray transmission image of the inspection object W, for example, and sent to the external computer via the control unit 6. . Then, for example, it is rejected as a defective product by a branch path control means (or a robot that operates as a defective product elimination means) provided in the downstream transport path coupled to the transport device.

  In addition, for example, if the inspected object W is a substrate, the inspecting means can measure dimensions of parts in a planarly overlapped part or component. In addition, if the luminance change in the captured image due to the difference in the X-ray transmission of the material constituting the object to be inspected W is used, the thickness unevenness of the thin plate material or the coating unevenness on the sheet material can be measured and determined. Is possible. For example, when the thickness of a parallel flat portion (a thin plate material, a coating layer of a sheet material, etc.) of the inspection object W is set as a measurement target, the inspection means determines the inspection target portion (from the luminance change of the captured image ( The thickness unevenness of the parallel plane part) is measured by the dimension measuring means, and OK (non-defective product) or NG (defective product) is determined by the quality determining means with respect to the threshold value. In addition, it is possible to inspect the shape of a predetermined part based on dimension measurement, inspection of disconnection or short circuit of the integrated circuit, scratches, adhesion of foreign matters, and the like.

<Control unit 6>
The control unit 6 is configured by a computer such as a PC. The control unit 6 and the image processing unit 5 may be configured by a single computer.

  The X-ray inspection apparatus according to the present invention uses the charge transfer speed of the CCD of the TDI camera 3 for X-rays as the transport speed, and moves the inspection object W at a constant speed in the charge transfer direction of the CCD (= X direction in FIG. 1). It is set as the structure conveyed by. In the present embodiment, the control unit 6 is a control unit that synchronizes the operation on the X-ray TDI camera 3 side and the operation of the transfer device 4, more specifically, the X-ray TDI camera 3 is arranged in each line in units of one line. Synchronous control means for controlling the transport speed of the transport device 4 by drive control of the transport drive unit 8 so that the charge transfer speed when transferring and reading the charge of the CCD element coincides with the transport speed on the transport device 4 side. It has.

  Here, a specific example of the synchronization control means of the control unit 6 will be described.

  The X-ray TDI camera 3 according to the present invention includes a charge transfer speed control parameter (hereinafter referred to as “speed parameter”) of the CCD. The speed parameter is a parameter that can be referred from an external computer, and includes, for example, a set value of a constant frequency (line rate) for sending the charge of the CCD to the next pixel or a set value of the charge transfer speed of the CCD. Yes.

  The synchronization control means of the control unit 6 obtains the charge transfer speed of the CCD based on the speed parameter obtained from the X-ray TDI camera 3, and carries the conveyance so that the conveyance speed of the conveyance device 4 matches the charge transfer speed. The conveyance speed of the conveyance device 4 is controlled by the drive control of the unit 8.

  Specifically, the synchronization control means of the control unit 6 acquires and acquires the speed parameter from the storage unit on the X-ray TDI camera 3 side, for example, by sending a speed parameter read command to the X-ray TDI camera 3. Based on the speed parameter, the charge transfer speed on the X-ray TDI camera 3 side is obtained. Then, by sending a transport speed control command to the transport driving unit 8 so that the obtained charge transfer speed and the transport speed of the transport device 4 coincide with each other, the charge transfer speed on the X-ray TDI camera 3 side and the transport speed are transferred. The conveyance speed of the inspection object W by the apparatus 4 is synchronized. This synchronous control may be executed only once as an initial setting process at the start of operation of the transport device 4, for example, or may be executed at an appropriate time during continuous operation.

  The transport speed (or the speed parameter) of the transport device 4 needs to be corrected so as to coincide with the charge transfer direction of the CCD when the transport direction of the inspection object is changed. Since the conveyance device 4 having both the means for preventing the fluctuation of the conveyance speed of the inspection object W and the means for preventing the meandering of the inspection object W is provided, the straightness of the conveyance surface is ensured. No change control of the conveyance speed (or the change control of the speed parameter) accompanying the change in the moving direction is required.

<Display / Operation Unit 7>
The display / operation unit 7 is a monitor and a predetermined operation device (indicator / hard switch etc. or an operation means such as a keyboard or mouse connected to a PC) or a device having both functions of an operation unit and a display unit ( The display / operation device or the like having a touch panel) can display, change, and operate the state and value of each device by the operation from the display / operation unit 7. In addition, inspection results such as an X-ray transmission image are displayed on the display unit.

<Conveyance drive unit 8>
The conveyance drive unit 8 is a device that drives the conveyance device 4 in accordance with a command from the control unit 6, and includes, for example, a power transmission unit such as a drive motor and a belt wound around the motor rotation shaft, and the power transmission unit The toothed pulley 4b (drive pulley) of the transport device 4 is rotated via

(3. Specific example of the configuration of the transport device)
Next, the configuration of the transport device 4 will be described with a specific example.

  3A and 3B are schematic views showing an example of the configuration of the transport device 4 according to the present invention. FIG. 3A is a plan view, FIG. 3B is a side view, and FIG. 3C is FIG. It is the front view which looked at from the arrow X direction.

  The conveying device 4 serves as a speed fluctuation / meandering preventing means at a position where the toothed belt portion 4a1 of the conveying belt 4a does not affect the imaging of the X-ray transmission image (outside the imaging area A in FIG. 3A). It includes a conveyance belt 4a provided integrally with the conveyance belt main body, and a toothed pulley 4b formed on the outer periphery with teeth meshing with the teeth of the toothed belt portion 4a1.

  In the present embodiment, the toothed belt portion 4a1 is formed on the back side of the transport surface of the endless track formed by the transport belt 4a as shown in FIG. 3B, and the width of the transport belt 4a. It is formed on both ends of the direction (direction orthogonal to the transport direction). On the other hand, a pair of toothed pulleys 4b meshing with the inner teeth of the conveyor belt 4a are disposed at both ends in the width direction of the conveyor belt 4a (a direction orthogonal to the conveyor direction) and in the longitudinal direction of the conveyor belt 4a (the conveyor direction). A pair is arranged at both ends.

  By adopting such a configuration, the straightness of the transport surface is ensured, and the occurrence of meandering phenomenon due to the elongation of the transport belt 4a due to the medium / long-term operation is prevented. In the case of a system that continuously inspects inspected objects flowing from the production line in real time, the transport device 4 is, for example, a joint conveyor between the upstream conveyor and the downstream conveyor of the production line. Arranged as.

(4. Specific examples of toothed conveyor belts)
Here, a specific example is demonstrated and demonstrated about the toothed conveyance belt 4a.

  FIG. 4 is a drawing-substituting photograph showing an actual example of the conveying belt 4a according to the present invention. The main body of the conveyor belt 4a shown in FIG. 4 is a belt (endrel product or joint product) made of a member having good X-ray permeability and uniform performance, and the toothed belt portion 4a1 is used for X-ray imaging. It is formed integrally with the main body of the conveyor belt 4a by lining, bonding or mechanical fastening to a position where there is no influence.

  The material of the conveyor belt 4a main body (imaging part) is preferably a synthetic rubber such as polyurethane or silicone, or a synthetic resin such as polyester or vinyl chloride. The material of the toothed belt part (drive transmission part) 4a1 is A rubber material (synthetic rubber such as polyurethane) is used, and the core wire of the toothed belt portion is preferably one of wire materials such as aramid fiber, steel, stainless steel, and glass fiber.

  In the present embodiment, the toothed belt portion 4a1 is layered on both sides of the transport surface, but may be formed on at least one side in the width direction of the transport belt body. Moreover, although both the driving pulley and the driven pulley are configured as toothed pulleys 4b, only the driving pulley side may be configured as a toothed pulley 4b.

(5. Other configuration examples of the toothed belt portion)
In the example of FIG. 4, the toothed belt portion is an example in which straight teeth are provided in parallel in the width direction of the conveyance path (direction orthogonal to the conveyance direction), but the configuration of the meshing portion is It is not restricted to the example of FIG.

  For example, as shown in the side view, front view, and plan view of FIGS. 5A to 5C, an “oblique type” toothed belt that is inclined with respect to the width direction of the conveyance path and provided with teeth of an angle. As shown in FIGS. 6A to 6C, a “multi-row type” toothed belt portion 4a1 in which a plurality of teeth are provided in the width direction of the conveyance path may be used. Furthermore, the shape of the teeth is not limited to a rectangular shape as viewed from above, but as shown in FIGS. 7A to 7C, “atypical tie type” toothed belt portions 4 a 1 having different shapes. It is sufficient if the belt portion and the pulley mesh with each other.

(6. Other configuration examples of the transport device)
FIG. 8 is a schematic diagram illustrating another configuration example of the transfer device 4 illustrated in FIG. 3. FIG. 8A is a plan view, FIG. 8B is a side view, and FIG. It is the front view which looked at (A) from the arrow X direction. As a drive transmission of the conveying device 4 ′, as shown in FIG. 8, an engagement hole (or a feed hole pin) is provided as an alternative to the toothed belt portion 4a1 and the toothed pulley 4b of the conveying device 4 illustrated in FIG. A conveying belt 4a ′ provided integrally with the conveying belt main body at a position where the steel belt portion 4a1 ′ does not affect the imaging of the X-ray transmission image (outside the range of the imaging region A in FIG. 8A); It is also possible to use a pulley 4b ′ having a feed hole pin (or a mesh hole) that engages with a mesh hole (or a feed hole pin) of the belt portion 4a1 ′. The shape and arrangement of the meshing holes and the feed hole pins are not limited to the example shown in FIG. 8, and may be an oblique type, a multi-row type, or a different type as with the transport device 4.

  Further, in the above-described embodiment, the case where the belt conveyor type conveying device is used as the conveying means has been described as an example, but instead of the belt conveyor type conveying device, the grasping means for grasping the inspection object, It may be configured to include a “conveying robot” having a moving unit that conveys the object to be inspected by moving the gripping unit or the main body.

(7. Other examples of synchronization control means)
In the above-described embodiment, the synchronous control of the charge transfer speed of the X-ray TDI camera and the transport speed of the inspection object obtains the charge transfer speed on the X-ray TDI camera side and matches the charge transfer speed. As described above, the case where the speed on the transport apparatus side is controlled has been described as an example. However, in the case of an X-ray TDI camera having a speed parameter that can be changed by a command from an external computer, it matches the speed on the transport apparatus side. In addition, the charge transfer speed on the X-ray TDI camera side may be controlled.

  In the case of that form, the synchronization control means of the control unit generates a setting command for the speed parameter of the charge transfer speed corresponding to the transport speed of the transport apparatus so that the transport speed of the transport apparatus matches the charge transfer speed, By sending the setting command to the X-ray TDI camera, the charge transfer speed of the X-ray TDI camera is synchronized with the conveyance speed of the inspection object.

  At that time, the conveyance speed of the conveyance device may be set in advance in the storage means of the control unit, but the conveyance speed detection means (for example, a drive pulley) that detects the conveyance speed of the object to be inspected by the conveyance belt in real time. Alternatively, a rotary encoder that outputs a detection pulse corresponding to the rotation of the drive motor may be provided, and the conveyance speed may be obtained based on the detection signal of the conveyance speed detection means. In the latter case, the synchronous control of the conveyance speed and the charge transfer speed is periodically executed during continuous operation, or is executed based on the trigger signal from the detection sensor of the inspection object (inspection object). Can be executed at the time when a change in the conveyance speed is detected based on the history information of the conveyance speed. This mode (a mode in which the transport speed detection unit is provided and the synchronization control is performed during the operation of the transport unit) is also applicable to a mode in which the speed on the transport device side is controlled.

1 (1a, 1b) Inspection object detection sensor (light emitting / receiving sensor)
2 X-ray generator 3 X-ray TDI camera 4 Conveying device 4a, 4a 'Conveying belt 4a1, 4a1' Toothed belt 4b, 4b 'Toothed pulley 5 Image processing unit 6 Control unit 7 Display / operating unit 8 Conveyance drive Part W Inspection object (electronic / electrical / mechanical parts product)
L X-ray X Transport direction G X-ray transmission image A Imaging region

Claims (11)

An X-ray inspection apparatus that inspects the inside of the inspection object using an X-ray for the inspection object to be conveyed,
X-ray generation means for generating X-rays on the inspection object;
One line of CCD elements capable of detecting X-rays is arranged in a direction perpendicular to the traveling direction of the object to be inspected, and two or more rows are arranged in the traveling direction, and the CCD elements in each row arranged in the traveling direction convey the CCD elements. Imaging means having a line sensor camera that outputs an X-ray transmission image of the inspection object by superimposing the images acquired by repeatedly exposing the inspection object to be shifted one row at a time;
The object to be inspected is transported in the traveling direction, and the object to be inspected is transported at a transport speed in accordance with a charge transfer speed when the imaging unit transfers and reads out the charges of the CCD elements in each column in units of one line. Conveying means for conveying
Dimension measuring means for measuring a dimension of a predetermined inspection target part including the inside of the inspection object based on the X-ray transmission image output from the imaging means;
In addition,
The transport means is a belt conveyor type transport device, and the transport device is a speed fluctuation / meander prevention means that also serves as a transport speed fluctuation preventing means for the inspection object and a meander prevention means for the inspection object. An X-ray inspection apparatus using a line sensor camera, wherein the X-ray inspection apparatus is provided at a position that does not affect the acquisition of an X-ray transmission image .   Quality judging means for judging the quality of the object to be inspected based on a comparison between a dimension measurement value of the inspection target part measured by the dimension measuring means and a threshold value set corresponding to the inspection target part. An X-ray inspection apparatus using the line sensor camera according to claim 1.   The dimension measuring means measures the dimension of the inspection target part by measuring each part inside the component part of the inspection object including each part of the parts overlapped in a plane and a gap between the parts. An X-ray inspection apparatus using the line sensor camera according to claim 1, wherein the X-ray inspection apparatus uses the line sensor camera.   The dimension measuring means uses a thickness of a parallel plate portion of the inspection object including a thickness of a thin plate material and a thickness of a coating layer of the sheet material as a measurement object, and a difference in X-ray permeability of materials constituting the inspection object 4. The X sensor using the line sensor camera according to claim 1, which has a function of measuring thickness unevenness of the parallel plane part from a change in luminance of the captured image of the X-ray transmission image due to X. Line inspection device.   5. The line sensor camera according to claim 1, further comprising synchronization control means for synchronizing the charge transfer speed on the imaging means side and the transport speed on the transport means side. X-ray inspection equipment.   The imaging means is an imaging camera having the charge transfer rate parameter that can be referred from an external computer, and the synchronization control means obtains the charge transfer rate based on the parameter obtained from the imaging camera, and 6. The X-ray inspection apparatus using a line sensor camera according to claim 5, wherein the transport speed of the transport means is controlled so that the transport speed matches the charge transfer speed.   The imaging means is an imaging camera having the charge transfer speed parameter that can be set and changed by a command from an external computer, and the synchronization control means is configured so that the charge transfer speed matches the transport speed. The X-ray inspection apparatus using a line sensor camera according to claim 5, wherein the charge transfer speed is controlled by instructing the imaging camera side.   Conveying speed detecting means for detecting the conveying speed of the inspection object in real time is provided, and the synchronization control means is configured to be able to execute synchronous control between the conveying speed and the charge transfer speed while the conveying means is in operation. An X-ray inspection apparatus using the line sensor camera according to any one of claims 5 to 7. The speed fluctuation / meandering preventing means meshes with the conveyor belt integrally provided with the conveyor belt main body at a position where the toothed belt portion does not affect the imaging of the X-ray transmission image, and the teeth of the toothed belt portion. An X-ray inspection apparatus using a line sensor camera according to any one of claims 1 to 8, wherein the toothed pulley includes a toothed pulley formed on an outer periphery. The speed fluctuation / meandering preventing means includes a conveyance belt in which a steel belt portion having a meshing hole or a feed hole pin is provided integrally with a conveyance belt body at a position where the imaging of the X-ray transmission image is not affected, and the steel The line sensor camera according to any one of claims 1 to 8, further comprising a pulley having a feed hole pin or a mesh hole that engages with the mesh hole or the feed hole pin of the belt portion. X-ray inspection device used. Conveying the belt body of the belt conveyor type transport apparatus in any one of claims 1 to 10, characterized in that the X-ray permeability good and its performance are formed in a uniform synthetic rubber or synthetic resin X-ray inspection apparatus using the described line sensor camera.